Method and structure for graded gate oxides on vertical and non-planar surfaces
    11.
    发明申请
    Method and structure for graded gate oxides on vertical and non-planar surfaces 有权
    垂直和非平面表面上分级栅极氧化物的方法和结构

    公开(公告)号:US20050164516A1

    公开(公告)日:2005-07-28

    申请号:US10986984

    申请日:2004-11-12

    摘要: A method for forming an oxide layer on a vertical, non-planar semiconductor surface provides a low stress oxide layer having a pristine interface characterized by a roughness of less than 3 angstroms. The oxide layer includes a portion that is substantially amorphous and notably dense. The oxide layer is a graded growth oxide layer including a composite of a first oxide portion formed at a relatively low temperature below the viscoelastic temperature of the oxide film and a second oxide portion formed at a relatively high temperature above the viscoelastic temperature of the oxide film. The process for forming the oxide layer includes thermally oxidizing at a first temperature below the viscoelastic temperature of the film, and slowly ramping up the temperature to a second temperature above the viscoelastic temperature of the film and heating at the second temperature. After the second, high temperature oxidation above the viscoelastic temperature, the structure is then slowly cooled under gradual, modulated cooling conditions.

    摘要翻译: 在垂直非平面半导体表面上形成氧化物层的方法提供了具有粗糙度小于3埃的原始界面的低应力氧化物层。 氧化物层包括基本无定形且特别密集的部分。 氧化物层是分级生长氧化物层,其包括在低于氧化膜的粘弹性温度的较低温度下形成的第一氧化物部分和在高于氧化膜的粘弹性温度的较高温度下形成的第二氧化物部分的复合物 。 用于形成氧化物层的方法包括在低于膜的粘弹性温度的第一温度下热氧化,并将温度缓慢升高到高于膜的粘弹性温度的第二温度并在第二温度下加热。 第二次,高于粘弹性温度的高温氧化,然后在逐渐调节的冷却条件下缓慢冷却结构。

    Selective laser annealing of semiconductor material
    13.
    发明申请
    Selective laser annealing of semiconductor material 失效
    半导体材料的选择性激光退火

    公开(公告)号:US20070001243A1

    公开(公告)日:2007-01-04

    申请号:US11438493

    申请日:2006-05-22

    IPC分类号: H01L29/94 H01L21/8238

    摘要: A method of manufacture for semiconductor electronic products and a circuit structure. A semiconductor material has a surface region and dopant is provided to a portion of the surface region. The portion of the surface region provided with the dopant is irradiated with sufficient energy to induce diffusion of the dopant from the portion of the surface region to another region of the semiconductor material. A method for manufacturing an electronic product with a semiconductor material having a surface and two spaced-apart regions along the surface for receiving dopant includes forming a field effect transistor gate structure is along the surface and over a third region of the surface between the two spaced-apart regions. Dopant is provided to the spaced-apart regions which are heated to a temperature at least 50 degrees C. higher than the peak temperature which results in the third region when the spaced-apart regions are heated. A circuit comprises a semiconductor material having a surface region for formation of devices, a field effect transistor gate structure formed on the surface region, the gate structure including a conductive layer and an amorphous insulative layer having a dielectric constant greater than five relative to free space. The insulative layer is formed between the conductive layer and the surface region. A source region is formed along the surface region and a drain region is also formed along the surface region. The gate structure, source region and drain region are configured to form an operable field effect transistor.

    摘要翻译: 一种用于半导体电子产品和电路结构的制造方法。 半导体材料具有表面区域,并且掺杂剂被提供到表面区域的一部分。 用足够的能量照射设置有掺杂剂的表面区域的部分,以引起掺杂剂从表面区域的部分扩散到半导体材料的另一区域。 一种制造具有半导体材料的电子产品的方法,所述半导体材料具有沿表面的两个间隔开的区域,用于接收掺杂剂包括:沿两个间隔开的表面的表面和表面的第三区域上形成场效应晶体管栅极结构 地区。 将掺杂剂提供给间隔开的区域,其被加热到高于在加热间隔开的区域时导致第三区域的峰值温度至少50摄氏度的温度。 电路包括具有用于形成器件的表面区域的半导体材料,形成在表面区域上的场效应晶体管栅极结构,所述栅极结构包括导电层和相对于自由空间具有大于5的介电常数的非晶绝缘层 。 绝缘层形成在导电层和表面区域之间。 沿着表面区域形成源极区域,并且还沿着表面区域形成漏极区域。 栅极结构,源极区和漏极区被配置成形成可操作的场效应晶体管。

    Multi-piece food product and method for making the same
    14.
    发明申请
    Multi-piece food product and method for making the same 有权
    多件食品及其制作方法

    公开(公告)号:US20050064087A1

    公开(公告)日:2005-03-24

    申请号:US10944209

    申请日:2004-09-17

    摘要: A multi-piece food product (10) comprising a plurality of strands (12A-12K) that are extruded and aggregated to form an aesthetically pleasing food product is provided. A formulation used to make each of the strands (12A-12K) includes a mixture comprising at least 20% sweetener, at least 15% starchy material, and at least 1% fruit by weight based a total dry weight of the mixture to yield a starch-based confectionary food product. One process for forming the multi-piece food product (10) includes extruding a food stream from a slurry, dividing the food stream into three separate food streams (24A, 24B), injecting color, flavor, and ascorbic acid into the food streams (24A, 24B), conveying the food streams (24A, 24B) into a former (26) and extruding the strands (12A-12K) therefrom, forming the strands (12A, 12B) into an aggregate food mass (31), cooling the food mass (31), and cutting the food mass (31) into individual portions.

    摘要翻译: 提供了一种多片食品(10),其包括被挤出和聚集以形成美学上令人满意的食品的多根股线(12A-12K)。 用于制备每条链(12A-12K)的制剂包含基于混合物的总干重的包含至少20%甜味剂,至少15%淀粉质材料和至少1重量%果糖的混合物,以产生 淀粉型糖果食品。 用于形成多片食品(10)的一个方法包括从浆料挤出食物流,将食物流分成三个独立的食物流(24A,24B),将颜色,风味剂和抗坏血酸注入食物流中 24A,24B),将食物流(24A,24B)输送到成形器(26)中并从其中挤出股线(12A-12K),将股线(12A,12B)形成为集料食品(31),冷却 食物块(31),并将食物块(31)切割成单独的部分。