SELF-ASSEMBLABLE POLYMER AND METHOD FOR USE IN LITHOGRAPHY
    11.
    发明申请
    SELF-ASSEMBLABLE POLYMER AND METHOD FOR USE IN LITHOGRAPHY 有权
    自组装聚合物和方法用于光刻

    公开(公告)号:US20130078574A1

    公开(公告)日:2013-03-28

    申请号:US13700703

    申请日:2011-04-20

    IPC分类号: C08F293/00 B05D5/00 G03F7/004

    摘要: A self-assemblable polymer is disclosed, having first and second molecular configurations with the first molecular configuration has a higher Flory Huggins parameter for the self-assemblable polymer than the second molecular configuration, and the self-assemblable polymer is configurable from the first molecular configuration to the second molecular configuration, from the second molecular configuration to the first molecular configuration, or both, by the application of a stimulus. The polymer is of use in a method for providing an ordered, periodically patterned layer of the polymer on a substrate, by ordering and annealing the polymer in its second molecular configuration and setting the polymer when it is in the first molecular configuration. The second molecular configuration provides better ordering kinetics and permits annealing of defects near its order/disorder transition temperature, while the first molecular configuration, with a higher order/disorder transition temperature, provides low line edge/width roughness for the pattern formed on setting.

    摘要翻译: 公开了具有第一和第二分子构型的自组装聚合物,其具有第一分子构型,其具有比第二分子构型更高的可自组装聚合物的Flory Huggins参数,并且可自组装聚合物可从第一分子构型 到第二分子构型,从第二分子构型到第一分子构型,或两者都通过施加刺激。 聚合物可用于通过在其第二分子构型中排列和退火聚合物并在聚合物处于第一分子构型时设置聚合物,从而在基底上提供聚合物的有序的周期性图案化层的方法。 第二种分子结构提供更好的排序动力学,并允许在其顺序/无序转变温度附近的缺陷退火,而具有较高阶/无序转变温度的第一分子构型为设置上形成的图案提供了低的线边缘/宽度粗糙度。

    Method for providing an ordered layer of self-assemblable polymer for use in lithography
    13.
    发明授权
    Method for providing an ordered layer of self-assemblable polymer for use in lithography 有权
    提供用于光刻的自组装聚合物的有序层的方法

    公开(公告)号:US08822139B2

    公开(公告)日:2014-09-02

    申请号:US13640293

    申请日:2011-01-19

    摘要: A method for providing an ordered polymer layer at a surface of a substrate includes depositing a self-assemblable polymer layer directly onto a primer layer on a substrate to provide an interface between the self-assemblable polymer layer and the primer layer, and treating the self-assemblable polymer layer to provide self-assembly into an ordered polymer layer, such as a block copolymer, having first and second domain types at the interface. The primer layer is adapted to improve its chemical affinity to each domain type at the interface, in response to the presence of the respective domain type in the self-assembled polymer at the interface during the self-assembly of the self-assemblable polymer layer into the ordered polymer layer. This may lead to reduction in defect levels and/or improved persistence length for the ordered polymer layer. The method may be useful for forming resist layers for use in device lithography.

    摘要翻译: 在衬底的表面提供有序聚合物层的方法包括将可自组装的聚合物层直接沉积在基底上的底漆层上,以提供可自组装的聚合物层和底漆层之间的界面,以及处理自身 可以将聚合物层自组装成有序聚合物层,例如在界面处具有第一和第二域类型的嵌段共聚物。 响应于在自组装聚合物层的自组装期间在界面处的自组装聚合物中存在相应的畴型,引物层适于改善其在界面处对每种畴型的化学亲和力 有序聚合物层。 这可能导致有序聚合物层的缺陷水平和/或改善的持续长度的降低。 该方法可用于形成用于器件光刻的抗蚀剂层。

    COAXIALLY ENCAPSULATED CELL SUSPENSIONS AND MICROTISSUES
    15.
    发明申请
    COAXIALLY ENCAPSULATED CELL SUSPENSIONS AND MICROTISSUES 审中-公开
    同时包被的细胞悬浮液和微量元素

    公开(公告)号:US20110293712A1

    公开(公告)日:2011-12-01

    申请号:US13132534

    申请日:2009-11-26

    IPC分类号: A61K9/48 A61K35/12 C12M1/00

    摘要: The present invention provides for the coaxial encapsulation of a plurality of cells in a single elongated compartment. By this encapsulation, the cells are protected by at least one layer of separation material and kept in close contact, which leads to a better vitality of the encapsulated cells and consequently results in higher chances to form microtissue. Methods and devices for the production of such encapsulated cell compartments are disclosed as well as medical uses of such compartments in cell, tissue therapy and tissue engineering.

    摘要翻译: 本发明提供了在单个细长隔室中的多个电池的同轴封装。 通过这种封装,细胞被至少一层分离材料保护并保持紧密接触,这导致包封的细胞更好的活力,从而导致更高的形成微组织的机会。 在细胞,组织治疗和组织工程中公开了用于生产这种包封的细胞室的方法和装置以及这些隔室的医学用途。

    VALVE FOR A MICROFLUIDIC SYSTEM
    17.
    发明申请
    VALVE FOR A MICROFLUIDIC SYSTEM 审中-公开
    微流控系统阀

    公开(公告)号:US20100252124A1

    公开(公告)日:2010-10-07

    申请号:US12743838

    申请日:2008-11-18

    IPC分类号: F16K49/00

    摘要: The invention relates to a valve for opening and closing a channel (3) of a microfluidic system, respectively. According to the invention, the valve comprises an actuation medium (2) that undergoes a volume change with changing temperature; and a heater arrangement (5) for generating a temperature gradient in the actuation medium (2) with respect to the actuation medium's (2) distance relative to the channel (3); wherein due to an expansion or a contraction of the actuation medium (2) the channel (3) is closed or opened, respectively. When the heater arrangement (5) is activated in such a way that a higher temperature is generated in the actuation medium (2) which is nearer to the channel (3) and a lower temperature is generated in the actuation medium (2) which is further away from the channel (3) the valve can be closed and vice versa. Accordingly, such a valve for a microfluidic system is provided which can be reliably actuated during a long time of use.

    摘要翻译: 本发明涉及分别用于打开和关闭微流体系统的通道(3)的阀。 根据本发明,该阀包括在变化温度下经历体积变化的致动介质(2); 以及加热器装置(5),用于相对于所述致动介质(2)相对于所述通道(3)的距离产生所述致动介质(2)中的温度梯度; 其中由于致动介质(2)的膨胀或收缩,通道(3)分别关闭或打开。 当加热器装置(5)以这样一种方式启动时,使得在更靠近通道(3)的致动介质(2)中产生较高的温度,并且在致动介质(2)中产生较低的温度 更远离通道(3),阀可以关闭,反之亦然。 因此,提供了这种用于微流体系统的阀,其可以在长时间使用期间被可靠地致动。

    DICHROIC GUEST-HOST POLARIZER COMPRISING AN ORIENTED POLYMER FILM
    19.
    发明申请
    DICHROIC GUEST-HOST POLARIZER COMPRISING AN ORIENTED POLYMER FILM 有权
    包含面向聚合物膜的双重客户主机极化器

    公开(公告)号:US20100267858A1

    公开(公告)日:2010-10-21

    申请号:US12830140

    申请日:2010-07-02

    摘要: A dichroic guest-host polarizer comprises an oriented polymerized liquid crystal host and aligned therewith a dichroic guest. The dichroic ratio of the polarizer is about 15 or more. The polarizer may have a small thickness, be manufactured using a wet deposition method, optionally in accordance with a desired pattern, and be provided on the inside of a liquid crystal cell. Polymerizable liquid crystals having a highly ordered mesophase which may be suitable used to obtain highly oriented polymer films such as polarizer films are disclosed.

    摘要翻译: 二向色客体偏振器包括定向聚合的液晶主机并与二向色客体对准。 偏振器的分色比约为15或更大。 偏振器可以具有小的厚度,可以根据期望的图案使用湿式沉积方法制造,并且设置在液晶单元的内部。 公开了具有高度有序的中间相的可聚合液晶,其可适用于获得高定向聚合物膜如偏振片。