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公开(公告)号：US20200150536A1
公开(公告)日：2020-05-14
申请号：US16424734
申请日：2019-05-29
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Ming LIU , Yueping ZUO , Qiuhua MENG , Chunyang WANG , Fei FANG
Abstract: A photoresist and a method of manufacturing photoresist patterns are disclosed. The photoresist includes a plurality of photosensitive units, and each photosensitive unit has magnetism.
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公开(公告)号：US20180233376A9
公开(公告)日：2018-08-16
申请号：US15546475
申请日：2016-04-07
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Yinghai MA , Liangjian LI , Yueping ZUO
IPC: H01L21/311 , H01L21/768 , H01J37/32
CPC classification number: H01L21/31116 , G02F1/1368 , G02F2202/104 , H01J37/3244 , H01J37/32871 , H01J2237/334 , H01J2237/3347 , H01L21/76805 , H01L27/1259
Abstract: A dry etching method includes performing at least two etching steps, and further includes injecting protective gas into an etch chamber for processing between any two successive etching steps, wherein the protective gas generates plasma to neutralize electrons accumulated on a side wall of an etching trench. According to the present disclosure, hydrogen plasma is added in an etching process to remove the electrons accumulated on the side wall of the etching trench so as to reduce the microetching effect in multiple etching. In this way, process stability and reliability of a display substrate are improved.
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公开(公告)号：US20170287747A1
公开(公告)日：2017-10-05
申请号：US15511432
申请日：2016-02-15
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Xiaoyong LU , Xiaowei XU , Yueping ZUO , Hongwei TIAN , Yu ZHANG , Chunping LONG
IPC: H01L21/67 , H01L21/66 , H01L21/324
CPC classification number: H01L21/67109 , H01L21/00 , H01L21/324 , H01L21/67103 , H01L21/67248 , H01L21/68742 , H01L22/26
Abstract: A substrate heating device and substrate heating method is disclosed. The device comprises: a heating layer for transferring heat; a transfer pipe for transferring a gas to a diffusion layer; the diffusion layer for enabling the gas to be uniformly distributed between a conducting layer and the heating layer; and the conducting layer for conducting the gas in the diffusion layer to below a substrate to be heated. The device can uniformly and fully heat the substrate to be heated, thus enabling the to-be-heated substrate to have a more uniform surface temperature, and achieving a better effect in an etching, deposition and/or sputtering process of the substrate to be heated.
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14.发明申请THIN-FILM TRANSISTOR, ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF, AND DISPLAY DEVICE 审中-公开薄膜晶体管，阵列基板及其制造方法及显示装置公开(公告)号：US20160365365A1
公开(公告)日：2016-12-15
申请号：US15088385
申请日：2016-04-01
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Hongwei TIAN , Yanan NIU , Yueping ZUO , Wenqing XU , Xiaowei XU
IPC: H01L27/12 , H01L29/49 , H01L29/66 , H01L21/02 , H01L29/786
CPC classification number: H01L27/1222 , H01L21/02164 , H01L21/0217 , H01L21/02211 , H01L21/02274 , H01L21/02323 , H01L21/0234 , H01L21/3105 , H01L27/1248 , H01L27/1259 , H01L29/4908 , H01L29/66757 , H01L29/66765 , H01L29/66969 , H01L29/78606 , H01L29/78675 , H01L29/78678 , H01L29/7869
Abstract: Embodiments of the present disclosure provide a thin-film transistor (TFT), an array substrate and a manufacturing method thereof, and a display device. The method for preparing a TFT according to an embodiment of the present disclosure may comprise: providing a base substrate; and forming an active layer and an insulation layer on the base substrate. The active layer and the insulation layer may be arranged sequentially and in contact with each other, and the insulation layer may include at least one first insulation layer one of which is in contact with the active layer. The step of forming the first insulation layer may comprise: forming a first insulation film; and conducting a repairing process on the first insulation film by using a repairing source which provides filling atoms, so as to form bonds between at least part of dangling bonds in the first insulation film and the filling atoms.
Abstract translation: 本公开的实施例提供一种薄膜晶体管（TFT），阵列基板及其制造方法以及显示装置。 根据本公开的实施例的制备TFT的方法可以包括：提供基底; 以及在所述基底基板上形成有源层和绝缘层。 有源层和绝缘层可以相互依次布置并且彼此接触，并且绝缘层可以包括其中一个与有源层接触的至少一个第一绝缘层。 形成第一绝缘层的步骤可以包括：形成第一绝缘膜; 以及通过使用提供填充原子的修复源对第一绝缘膜进行修复处理，以便在第一绝缘膜中的至少部分悬挂键和填充原子之间形成键。
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15.发明申请公开(公告)号：US20160247823A1
公开(公告)日：2016-08-25
申请号：US14428578
申请日：2014-07-16
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Yueping ZUO , Zheng LIU
IPC: H01L27/12 , H01L29/786
CPC classification number: H01L27/124 , H01L27/1222 , H01L27/1262 , H01L29/41733 , H01L29/458 , H01L29/78603 , H01L29/78675 , H01L29/78678
Abstract: The present disclosure relates to the field of TFT manufacturing process, and provides an LTPS TFT array substrate, its manufacturing method and a display device. The LTPS TFT array substrate includes contact holes through which a source electrode and a drain electrode of the array substrate are connected to an active layer, respectively, wherein a conductive pattern connected to the active layer is provided at a base portion of the contact hole. According to the present disclosure, it is able to form an excellent ohmic contact between the source/drain electrodes and the active layer after the contact holes have been etched, thereby to ensure the display quality of the display device.
Abstract translation: 本公开涉及TFT制造工艺领域，并提供一种LTPS TFT阵列基板，其制造方法和显示装置。 LTPS TFT阵列基板包括接触孔，阵列基板的源电极和漏电极分别连接到有源层，其中连接到有源层的导电图案设置在接触孔的基部。 根据本公开，在蚀刻接触孔之后，能够在源/漏电极和有源层之间形成优异的欧姆接触，从而确保显示装置的显示质量。
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Patent Agency Ranking
公开(公告)号：US20240276814A1
公开(公告)日：2024-08-15
申请号：US18645441
申请日：2024-04-25
Inventor： Benlian WANG , Li WANG , Yipeng CHEN , Yueping ZUO , Zheng LIU
IPC: H10K59/131
CPC classification number: H10K59/131
Abstract: A display panel and a display device are provided. The display panel comprises a substrate, a plurality of sub-pixels, a plurality of data lines, a plurality of wiring structures and a plurality of pads. The substrate comprises a display area and a non-display area comprising a bending area. The sub-pixels and data lines are in the display area and electrically connected with each other. The wiring structures are in the bending area and electrically connected with the data lines. At least one wiring structure comprises a plurality of hollow patterns connected successively, each hollow pattern comprises a first conductive part and a second conductive part connected with each other. The plurality of pads are in the non-display area and located on a side of the plurality of wiring structures away from the display area and electrically connected with the plurality of wiring structures.
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公开(公告)号：US20220319222A1
公开(公告)日：2022-10-06
申请号：US17425482
申请日：2020-09-18
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Hao LIU , Yueping ZUO , Huijuan ZHANG , Ming LIU , Zheng LIU
Abstract: The present disclosure provides a display substrate and a display device, and belongs to the field of display technology. The display substrate of the present disclosure includes: a base substrate having a display region; a plurality of fingerprint identification circuits in the display region of the base substrate, wherein each fingerprint identification circuit includes a control sub-circuit and a detection electrode; wherein in a fingerprint identification phase, the control sub-circuit is configured to read a capacitance between the detection electrode and a valley and a ridge of a fingerprint in response to a fingerprint scanning signal, so as to perform fingerprint identification.
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公开(公告)号：US20210173270A1
公开(公告)日：2021-06-10
申请号：US15779680
申请日：2017-11-08
Inventor： Benlian WANG , Li WANG , Yipeng CHEN , Yueping ZUO , Zheng LIU
IPC: G02F1/1362 , G02F1/1333
Abstract: The application provides a wiring structure, a display substrate, and a display device, which pertain to the field of display technologies. The wiring structure includes a plurality of hollow units connected in series, and each of the hollow units includes a hollow area and a non-hollow area. The non-hollow areas of any two adjacent hollow units at least partially overlap, and the hollow areas thereof do not overlap. Compared with a conventional linear-type wiring structure, the wiring structure can release stress through the hollow area of the hollow unit in the process of bending, stretching, and twisting, so as to avoid breaking of the wiring structure which may result in failure of the device on the substrate that employs the wiring structure.
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公开(公告)号：US20210167158A1
公开(公告)日：2021-06-03
申请号：US15779664
申请日：2017-11-07
Inventor： Benlian WANG , Li WANG , Yipeng CHEN , Yueping ZUO , Zheng LIU
Abstract: A wiring structure, a display substrate and a display device are provided, which belongs to the field of display technology. The wiring structure includes a plurality of hollow patterns connected successively. Each of the hollow patterns includes a first conductive part having a first pattern and a second conductive part having a second pattern. The first conductive part and the second conductive part are connected with each other, and the first pattern and the second pattern have different shapes. Because the wiring structure includes a plurality of hollow patterns connected successively, and the first conductive part and the second conductive part in each hollow pattern have different shapes, even if the conductive part of one shape in the wiring structure is broken in the process of bending, stretching and twisting, the conductive part of the other shape can also ensure good conductivity for the wiring structure.
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公开(公告)号：US20200243574A1
公开(公告)日：2020-07-30
申请号：US15764552
申请日：2017-10-13
Applicant: BOE TECHNOLOGY GROUP CO., LTD.
Inventor： Hongwei TIAN , Yanan NIU , Zheng LIU , Yueping ZUO , Xiaowei XU
IPC: H01L27/12
Abstract: A flexible display panel, a manufacturing method thereof and a display device are provided. The flexible display panel includes: a flexible substrate and an inorganic insulating layer(s) and an organic insulating layer on the flexible substrate. The inorganic insulating layer(s) is provided with a recess in a region to be bent of the flexible display panel. The organic insulating layer at least covers a surface of the recess, and the flexibility of the organic insulating layer is greater than that of the inorganic insulating layer(s).
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