公开(公告)号：US06245213B1

公开(公告)日：2001-06-12

申请号：US09262740

申请日：1999-03-05

Applicant: Lennart Olsson ,  Babak Heidari

Inventor： Lennart Olsson ,  Babak Heidari

IPC: C25F300

CPC classification number: C23F1/02 ,  C25F3/02 ,  H05K3/07

Abstract: In a method for anisotropic etching of a structure in an electrically conductive substance to be etched, use is made of an etchant which in concentrated solution is usable for isotopic etching of structures in the substance to be etched. The substance to be etched is contacted with the etchant in a solution which is so diluted that the etchant is unusable for isotropic etching. The etchant is subjected, adjacent to the substance to be etched, to an electric field of such a strength that anisotropic etching of the substance to be etched is accomplished. Moreover, an etching fluid is described, comprising an etchant in dilute solution, in which the etchant is present in a concentration of 200 mM at most, and use of such an etching fluid for making structures which are 50 &mgr;m or less is also described.

Abstract translation: 在要蚀刻的导电物质中的结构的各向异性蚀刻的方法中，使用在浓缩溶液中用于蚀刻物质中的结构的同位素蚀刻的蚀刻剂。 要蚀刻的物质在溶液中与蚀刻剂接触，溶液如此稀释，使得蚀刻剂不能用于各向同性蚀刻。 将蚀刻剂与待蚀刻的物质相邻地进行到这样的强度，即要实现蚀刻物质的各向异性腐蚀。 此外，描述了一种蚀刻流体，其包括在稀溶液中的蚀刻剂，其中蚀刻剂最多以200mM的浓度存在，并且还描述了使用这种蚀刻流体来制造50μm或更小的结构。

公开(公告)号：US6125183A

公开(公告)日：2000-09-26

申请号：US68126

申请日：1998-04-30

Applicant: Rizgar Nabi Jiawook ,  Babak Heidari ,  Lennart Olsson

Inventor： Rizgar Nabi Jiawook ,  Babak Heidari ,  Lennart Olsson

IPC: G06F1/00 ,  G06F21/80 ,  G11B20/00 ,  G11B20/18 ,  H04N5/913 ,  H04L9/06 ,  H03M13/27

CPC classification number: G06F21/80 ,  G11B20/00086 ,  G11B20/0021 ,  G11B20/1806 ,  H04N5/913 ,  G06F2211/007 ,  G06F2221/2107 ,  H04N2005/91364

Abstract: A method of encrypting and decrypting digital data such as text, numeric, images, pictures, especially tailored for optical compact discs; said method comprising of ciphering/deciphering and error detection and correction using algebraic method, namely Reed-Solomon code.

Abstract translation: PCT No.PCT / SE96 / 01391 Sec。 371日期：1998年4月30日 102（e）1998年4月30日PCT PCT 1996年10月30日PCT公布。 公开号WO97 / 16896 日期1997年5月9日一种加密和解密诸如文本，数字，图像，图片等数字数据的方法，特别针对光盘制作; 所述方法包括使用代数方法的加密/解密和错误检测和校正，即Reed-Solomon码。

公开(公告)号：US08147235B2

公开(公告)日：2012-04-03

申请号：US10581497

申请日：2004-11-03

Applicant: Babak Heidari ,  Marc Beck ,  Helena Eleonora Benedihta Riddargrip Beck, legal representative

Inventor： Babak Heidari ,  Marc Beck

IPC: A01J21/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/2012 ,  H05K3/0014 ,  H05K3/0023 ,  H05K3/107 ,  H05K2201/0108 ,  H05K2203/0108

Abstract: Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104; 105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114; 116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template.

Abstract translation: 用于将图案从具有结构化表面的模板（10）传送到承载可辐射聚合流体（14）的表面层的基底（12）的装置和方法。 该设备包括具有相对表面（104; 105）的第一主要部分（101）和第二主要部分（102），用于调节所述主要部分之间的间距（115），用于支撑所述模板的支撑装置（106） 在与所述结构化表面相对于所述表面层的所述间隔中相互平行接合的衬底，设计成将辐射发射到所述间隔中的辐射源（110）。 空腔（115）具有第一壁，该第一壁包括被设计为接合所述模板或基底的柔性膜（113），并且提供装置（114; 116），用于将可调节的超压施加到存在于所述空腔中的介质，由此均匀分布 在基板和模板之间的整个接触表面上获得力。

公开(公告)号：US08119197B2

公开(公告)日：2012-02-21

申请号：US12751239

申请日：2010-03-31

Applicant: Matthias Keil ,  Göran Frennesson ,  Marc Beck ,  Babak Heidari

Inventor： Matthias Keil ,  Göran Frennesson ,  Marc Beck ,  Babak Heidari

IPC: C23C16/00 ,  B05D3/00

CPC classification number: B05D1/60 ,  B05D1/185 ,  B29C33/56 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  Y10T428/31678

Abstract: The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected front the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.

Abstract translation: 本发明涉及一种具有抗粘性的新型金属模具，其特征在于包括贱金属模和包含磷原子和烷基链的氟化烷基磷酸衍生物或氟化烷基多磷酸衍生物的防粘层。 抗粘剂层直接粘结在母模金属模的表面上。 贱金属模可以是例如。 镍和所述氟化烷基磷酸衍生物或所述氟代烷基聚磷酸衍生物可以选自由膦酸，次膦酸，膦酸盐和膦酸盐，次膦酸盐和次膦酸盐或它们各自的低聚物组成的组， 磷原子直接与烷基链结合，使得磷原子直接与烷基链结合。

公开(公告)号：US20070018358A1

公开(公告)日：2007-01-25

申请号：US11446965

申请日：2006-06-06

Applicant: Babak Heidari ,  Mattias Habenicht

Inventor： Babak Heidari ,  Mattias Habenicht

IPC: B29C43/50

CPC classification number: B82Y10/00 ,  B08B9/035 ,  B29C37/0014 ,  B29C43/003 ,  B29C43/50 ,  B29C2043/025 ,  B29C2043/5046 ,  B29C2043/5061 ,  B29C2043/5069 ,  B82Y40/00 ,  G03F7/0002 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1944

Abstract: Apparatus and method for separating two objects (27,28) attached to each other in a sandwich structure, such as a stamp and a substrate pressed together in an imprint process. The apparatus comprises a support structure (1), carrying first fastening means (2) having a base surface (3) and first gripping means for supporting and holding a first object (28), second fastening means (6), positioned opposite to the first fastening means, having second gripping means for holding a second object (27), and a pulling force mechanism (25, 26) devised to provide a pulling force at an angle to the normal direction of the base surface (3) for displacing the two fastening means away from each other. Preferably, the second object is gripped at a periphery portion, and the pulling force is angled inwardly from said periphery portion.

Abstract translation: 用于分离在夹层结构中彼此附接的两个物体（27,28）的装置和方法，所述夹层结构例如在压印过程中压在一起的印模和基底。 该装置包括支撑结构（1），承载具有基座表面（3）的第一紧固装置（2）和用于支撑和保持第一物体（28）的第一夹持装置，第二紧固装置（6） 第一紧固装置，具有用于保持第二物体（27）的第二夹持装置和设计成提供与基部表面（3）的法线方向成一定角度的拉力的拉力机构（25,26），用于使 两个紧固装置彼此远离。 优选地，第二物体被夹持在周边部分，并且拉力从所述周边部分向内成角度。

公开(公告)号：US20050077285A1

公开(公告)日：2005-04-14

申请号：US10958588

申请日：2004-10-06

Applicant: Babak Heidari ,  Lars Montelius

Inventor： Babak Heidari ,  Lars Montelius

IPC: H05B3/20 ,  B29C43/02 ,  B29C43/52 ,  B81B7/00 ,  G03F7/16 ,  G03F7/38 ,  H01L21/027 ,  H05B3/00 ,  H01L29/792

CPC classification number: G03F7/0002 ,  B29C43/021 ,  B29C43/52 ,  B29C2043/025 ,  B29K2105/256 ,  B81B7/0096 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/168 ,  G03F7/38

Abstract: A device for homogeneous heating of an object comprises a supporting surface for supporting the object, and a heating layer arranged on the supporting surface. The heating layer absorbs at least partly energy received from a radiation source and emits at least partly the thus-absorbed energy to the object supported on the supporting surface. The layer is made of a material such that the energy absorbed by the layer is in a self-regulating manner distributed uniformly along the surface of the layer. The heating device forms a simple and compact unit which can be used to rapidly heat the object to a homogeneous temperature.

Abstract translation: 用于物体均匀加热的装置包括用于支撑物体的支撑表面和布置在支撑表面上的加热层。 加热层吸收至少部分从辐射源接收的能量，并且至少部分地将如此吸收的能量发射到支撑在支撑表面上的物体。 该层由材料制成，使得被层吸收的能量处于沿层的表面均匀分布的自调节方式。 加热装置形成一个简单紧凑的单元，可用于将物体快速加热到均匀的温度。

公开(公告)号：US06423207B1

公开(公告)日：2002-07-23

申请号：US09653945

申请日：2000-09-01

Applicant: Babak Heidari ,  Lennart Olsson

Inventor： Babak Heidari ,  Lennart Olsson

IPC: C25F300

CPC classification number: C25F3/14 ,  H05K3/07

Abstract: A method of making, by etching, depressions in selected portions of an etching surface of an electrically conductive etching material, the depressions forming an etching pattern, comprises the step of contacting the etching material with an etchant. A passivating layer is formed on the etching material which layer decreases or stops the etching capability of the etchant on the surface and which is dissolved in a chemical reaction when exposed to electromagnetic radiation. An electrode with electrically conductive electrode portions in selected portions of an electrode surface is provided, the electrode portions forming an electrode pattern corresponding to the etching pattern. The electrode is arranged in contact with the etchant and with the electrode portions facing the etching surface of the etching material, an electric voltage is applied between the electrode and the etching material, and the etching material is exposed to electromagnetic radiation essentially perpendicular to the etching surface.

Abstract translation: 通过蚀刻导电蚀刻材料的蚀刻表面的选定部分中的凹陷，形成蚀刻图案的凹陷的方法包括使蚀刻材料与蚀刻剂接触的步骤。 在蚀刻材料上形成钝化层，该层在暴露于电磁辐射时降低或停止表面上蚀刻剂的蚀刻能力并溶解在化学反应中。 提供了在电极表面的选定部分中具有导电电极部分的电极，电极部分形成对应于蚀刻图案的电极图案。 电极与蚀刻剂接触并且电极部分面向蚀刻材料的蚀刻表面，在电极和蚀刻材料之间施加电压，并且蚀刻材料暴露于基本垂直于蚀刻的电磁辐射 表面。

公开(公告)号：US09063408B2

公开(公告)日：2015-06-23

申请号：US12635329

申请日：2009-12-10

Applicant: Jakob Nilsson ,  Matthias Keil ,  Johan Ring ,  Babak Heidari

Inventor： Jakob Nilsson ,  Matthias Keil ,  Johan Ring ,  Babak Heidari

IPC: G03F7/00 ,  G03F7/038 ,  C08F2/50 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/004

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0048 ,  G03F7/038

Abstract: The invention to provide curable materials, comprising photo-reactive compounds, in particular, photoinitiators and polymerizable mono- or multifunctional monomers such as acrylates or epoxides. The material may also contain fluoro-surfactants completely or partly terminated by functional groups with the ability to bind covalently to said chemical composition under curing. The curable compositions are either purely acrylate based or a hybrid of different types of monomers such as acrylates, epoxides or vinyl ethers. The polymerizable monomers may cure with the use of different types of photoinitiator, such as free radical photoinitiators or cationic photoinitiators, ultimately forming a hybrid resist comprising interpenetrating networks of different types of monomers e.g. acrylates and epoxides. The acrylate/epoxide hybrid system has showed improved replication properties in terms of high nano-imprint lithography process fidelity, due to increased conversion of acrylates and low shrinkage.

Abstract translation: 本发明提供可固化材料，其包含光反应性化合物，特别是光引发剂和可聚合的单或多官能单体如丙烯酸酯或环氧化物。 该材料还可以含有完全或部分由官能团封端的氟表面活性剂，其具有在固化下与所述化学组合物共价键合的能力。 可固化组合物是纯丙烯酸酯基或不同类型的单体如丙烯酸酯，环氧化物或乙烯基醚的杂化物。 可聚合单体可以使用不同类型的光引发剂（例如自由基光引发剂或阳离子光引发剂）固化，最终形成包含不同类型单体的互穿网络的混合抗蚀剂。 丙烯酸酯和环氧化物。 由于丙烯酸酯的转化率增加和收缩率低，丙烯酸酯/环氧化物混合体系在高纳米压印光刻工艺保真度方面具有改进的复制性能。

公开(公告)号：US08277717B2

公开(公告)日：2012-10-02

申请号：US12489822

申请日：2009-06-23

Applicant: Babak Heidari

Inventor： Babak Heidari

IPC: B29C59/02

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

Abstract: The present invention relates to a nano imprint method and to a nano imprint apparatus comprising: a first imprint module, a second imprint module, a storage and a feeder module, wherein; the first imprint module is adapted to imprint a pattern into an intermediate polymer stamp from a template; a second imprint module is adapted to imprint a pattern into a substrate from the intermediate polymer stamp; robot feeder modules are adapted to move the template, intermediate polymer stamp and the substrate from and to storages.

Abstract translation: 本发明涉及纳米压印方法和纳米压印装置，其包括：第一压印模块，第二压印模块，存储和馈送模块，其中; 第一印模模块适于将图案从模板印刷到中间聚合物印模中; 第二印记模块适于从中间聚合物印模印模图案到基底中; 机器人进料器模块适于将模板，中间聚合物印模和基材从和存储起来。

公开(公告)号：US07854873B2

公开(公告)日：2010-12-21

申请号：US11450377

申请日：2006-06-12

Applicant: Babak Heidari ,  Marc Beck ,  Matthias Keil

Inventor： Babak Heidari ,  Marc Beck ,  Matthias Keil

IPC: B29C59/02

CPC classification number: G03F7/0002 ,  B82Y10/00 ,  B82Y40/00 ,  G11B7/263 ,  Y10T428/24355 ,  Y10T428/31504

Abstract: A method is provided for transferring a pattern from a template (1) to an object (12) in an imprint process, using a two-step process. The first step includes contacting a pattern of the template surface with a polymer material comprising one or more Cyclic Olefin Copolymers (COCs), to produce a flexible polymer replica having a structured surface with an inverse of the pattern of the template surface. In a second step, after releasing the flexible polymer replica from the template, the inverse pattern of the flexible polymer replica is pressed into a resist layer on a substrate, to imprint a replica of the pattern of the template surface in therein.

Abstract translation: 提供了一种用于使用两步法在压印过程中将图案从模板（1）传送到对象（12）的方法。 第一步包括将模板表面的图案与包含一种或多种环烯烃共聚物（COC）的聚合物材料接触，以产生具有与模板表面图案相反的结构化表面的柔性聚合物复制品。 在第二步骤中，在从模板中释放柔性聚合物复制品之后，将柔性聚合物复制品的反向图案压入基板上的抗蚀剂层中，以在其中印刷模板表面的图案的副本。