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公开(公告)号：US08147235B2
公开(公告)日：2012-04-03
申请号：US10581497
申请日：2004-11-03
Applicant: Babak Heidari , Marc Beck , Helena Eleonora Benedihta Riddargrip Beck, legal representative
Inventor： Babak Heidari , Marc Beck
IPC: A01J21/00
CPC classification number: B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/2012 , H05K3/0014 , H05K3/0023 , H05K3/107 , H05K2201/0108 , H05K2203/0108
Abstract: Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104; 105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114; 116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template.
Abstract translation: 用于将图案从具有结构化表面的模板（10）传送到承载可辐射聚合流体（14）的表面层的基底（12）的装置和方法。 该设备包括具有相对表面（104; 105）的第一主要部分（101）和第二主要部分（102），用于调节所述主要部分之间的间距（115），用于支撑所述模板的支撑装置（106） 在与所述结构化表面相对于所述表面层的所述间隔中相互平行接合的衬底，设计成将辐射发射到所述间隔中的辐射源（110）。 空腔（115）具有第一壁，该第一壁包括被设计为接合所述模板或基底的柔性膜（113），并且提供装置（114; 116），用于将可调节的超压施加到存在于所述空腔中的介质，由此均匀分布 在基板和模板之间的整个接触表面上获得力。
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公开(公告)号：US08119197B2
公开(公告)日：2012-02-21
申请号：US12751239
申请日：2010-03-31
Applicant: Matthias Keil , Göran Frennesson , Marc Beck , Babak Heidari
Inventor： Matthias Keil , Göran Frennesson , Marc Beck , Babak Heidari
CPC classification number: B05D1/60 , B05D1/185 , B29C33/56 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/31678
Abstract: The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected front the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
Abstract translation: 本发明涉及一种具有抗粘性的新型金属模具，其特征在于包括贱金属模和包含磷原子和烷基链的氟化烷基磷酸衍生物或氟化烷基多磷酸衍生物的防粘层。 抗粘剂层直接粘结在母模金属模的表面上。 贱金属模可以是例如。 镍和所述氟化烷基磷酸衍生物或所述氟代烷基聚磷酸衍生物可以选自由膦酸，次膦酸，膦酸盐和膦酸盐，次膦酸盐和次膦酸盐或它们各自的低聚物组成的组， 磷原子直接与烷基链结合，使得磷原子直接与烷基链结合。
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公开(公告)号：US20120032377A1
公开(公告)日：2012-02-09
申请号：US10576499
申请日：2004-10-25
Applicant: Lars Montelius , Marc Beck , Patrick Carlberg , Claes-Göran Wahlström , Anders Persson , Stefan Andersson-Engels
Inventor： Lars Montelius , Marc Beck , Patrick Carlberg , Claes-Göran Wahlström , Anders Persson , Stefan Andersson-Engels
IPC: B28B17/00
CPC classification number: B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F9/00 , G03F9/7042 , G03F9/7061 , G03F9/7088
Abstract: Method, apparatus and stamp for aligning a first surface (11) of a first object (10) with a second surface (22) of a second object (20), facing said first surface, wherein light of a predetermined wavelength is introduced into one (10) of said objects and caused to propagate by internal reflection therein. The first and second surfaces carry correlating structures (13,25) which, when arranged at close distance from each other, couple light from said one object to the other of said objects by near-field tunneling, to a degree dependent on the overlap of said structures. A light detector (26) is devised to detect a signal which is dependent on the amount of light coupled between said objects, for producing an alignment control signal. The invention is suitable for use in nanoimprint lithography.
Abstract translation: 将第一物体（10）的第一表面（11）与面向所述第一表面的第二物体（20）的第二表面（22）对准的方法，装置和印模，其中预定波长的光被引入一个 （10）并且通过其中的内部反射而传播。 第一表面和第二表面携带相关结构（13,25），当相邻结构彼此靠近地布置时，通过近场隧道将光从所述一个物体耦合到另一个物体，其程度取决于 说结构。 设计光检测器（26）以检测取决于耦合在所述物体之间的光量的信号，以产生对准控制信号。 本发明适用于纳米压印光刻。
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公开(公告)号：US07997890B2
公开(公告)日：2011-08-16
申请号：US11905036
申请日：2007-09-27
Applicant: Babak Heidari , Marc Beck
Inventor： Babak Heidari , Marc Beck
CPC classification number: G03F7/0002 , B29C35/0888 , B29C43/003 , B29C43/021 , B29C43/10 , B29C59/022 , B29C2035/0827 , B29C2043/025 , B29C2043/3647 , B29C2059/023 , B82Y10/00 , B82Y40/00
Abstract: Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104;105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114;116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template. The apparatus further includes a heater device having a surface facing said spacing, for heating either fluid layer (14).
Abstract translation: 用于将图案从具有结构化表面的模板（10）传送到承载可辐射聚合流体（14）的表面层的基底（12）的装置和方法。 该设备包括具有相对表面（104; 105）的第一主要部分（101）和第二主要部分（102），用于调节所述主要部分之间的间距（115），用于支撑所述模板的支撑装置（106） 在与所述结构化表面相对于所述表面层的所述间隔中相互平行接合的衬底，设计成将辐射发射到所述间隔中的辐射源（110）。 空腔（115）具有第一壁，该第一壁包括被设计为接合所述模板或基底的柔性膜（113），并且提供装置（114; 116），用于将可调节的超压施加到存在于所述空腔中的介质，由此均匀分布 在基板和模板之间的整个接触表面上获得力。 该装置还包括具有面向所述间隔的表面的加热器装置，用于加热流体层（14）。
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公开(公告)号：US20100227051A1
公开(公告)日：2010-09-09
申请号：US12751239
申请日：2010-03-31
Applicant: Matthias KEIL , Göran FRENNESSON , Marc BECK , Babak HEIDARI
Inventor： Matthias KEIL , Göran FRENNESSON , Marc BECK , Babak HEIDARI
IPC: B22C3/00
CPC classification number: B05D1/60 , B05D1/185 , B29C33/56 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/31678
Abstract: The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative: or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected front the group consisting of phosphonic acids, phosphinic acids, phosphonates and phosphonate salts, phosphinates and phosphinate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
Abstract translation: 本发明涉及一种具有抗粘性的新型金属模具，其包括贱金属模和包含氟化烷基磷酸衍生物的防粘层：或包含磷原子和烷基链的氟化烷基聚磷酸衍生物 。 抗粘剂层直接粘结在母模金属模的表面上。 贱金属模可以是例如。 镍和所述氟化烷基磷酸衍生物或所述氟代烷基聚磷酸衍生物可以选自由膦酸，次膦酸，膦酸盐和膦酸盐，次膦酸盐和次膦酸盐或它们各自的低聚物组成的组， 磷原子直接与烷基链结合，使得磷原子直接与烷基链结合。
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Patent Agency Ranking
公开(公告)号：US20070018362A1
公开(公告)日：2007-01-25
申请号：US10581497
申请日：2004-11-03
Applicant: Babak Heidari , Marc Beck
Inventor： Babak Heidari , Marc Beck
CPC classification number: B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/2012 , H05K3/0014 , H05K3/0023 , H05K3/107 , H05K2201/0108 , H05K2203/0108
Abstract: Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104; 105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114; 116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template.
Abstract translation: 用于将图案从具有结构化表面的模板（10）传送到承载可辐射聚合流体（14）的表面层的基底（12）的装置和方法。 该设备包括具有相对表面（104; 105）的第一主要部分（101）和第二主要部分（102），用于调节所述主要部分之间的间距（115），用于支撑所述模板的支撑装置（106） 在与所述结构化表面相对于所述表面层的所述间隔中相互平行接合的衬底，设计成将辐射发射到所述间隔中的辐射源（110）。 空腔（115）具有第一壁，该第一壁包括被设计为接合所述模板或基底的柔性膜（113），并且提供装置（114; 116），用于将可调节的超压施加到存在于所述空腔中的介质，由此均匀分布 在基板和模板之间的整个接触表面上获得力。
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公开(公告)号：US20060279025A1
公开(公告)日：2006-12-14
申请号：US11268574
申请日：2005-11-08
Applicant: Babak Heidari , Anette Lofstrand , Erik Bolmsjo , Erik Theander , Marc Beck
Inventor： Babak Heidari , Anette Lofstrand , Erik Bolmsjo , Erik Theander , Marc Beck
CPC classification number: B29C33/3857 , B29C35/0888 , B29C59/022 , B29C59/026 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
Abstract: The invention relates to a two-step process for transferring a pattern from a template (1) to a target surface of a substrate, by creating an intermediate flexible polymer stamp (5) from the template in a primary step, and then using the polymer stamp to make an imprint in a radiation-sensitive moldable layer on the target surface in a secondary step. In the secondary step, the process steps of pressing the polymer stamp and the substrate against each other, UV exposure of the moldable layer through the polymer stamp, and postbaking of the radiated moldable layer, are all performed at a control constant temperature, in order to eliminate damages to the pattern created in the moldable layer caused by thermal expansion effects.
Abstract translation: 本发明涉及通过在初级步骤中从模板中生成中间柔性聚合物印模（5），然后使用聚合物（2），将图案从模板（1）转移到基材的目标表面的两步法 在第二步骤中对目标表面上的辐射敏感的可成型层进行印记。 在第二步骤中，将聚合物印模和基板彼此挤压，通过聚合物印模的可模制层的UV曝光和辐射的可模塑层的后烘烤的工艺步骤全部按照控制恒温进行 以消除由热膨胀效应引起的在可模塑层中产生的图案的损坏。
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公开(公告)号：US20050287820A1
公开(公告)日：2005-12-29
申请号：US10518475
申请日：2003-06-16
Applicant: Torbjorn Ling , Lars Montelius , Matthias Keil , Marc Beck
Inventor： Torbjorn Ling , Lars Montelius , Matthias Keil , Marc Beck
IPC: B29C33/42 , B29C33/56 , B41M20060101 , B41M1/06 , B81C1/00 , G03F7/00 , G11B5/855 , H01L21/31 , H01L21/469
CPC classification number: B29C33/56 , B29C33/424 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G11B5/855
Abstract: A metal mold for use in a nano-imprinting process comprises a firmly adhering monomolecular non-sticking layer. The later was obtained by subjecting the mold to a reaction with a fluoroalkyl compound having a mercapto group. As a result of said reaction, the layer comprises an organic sulfide of said metal.
Abstract translation: 用于纳米压印方法的金属模具包括牢固粘附的单分子不粘层。 后者是通过使模具与具有巯基的氟烷基化合物进行反应而获得的。 作为所述反应的结果，该层包含所述金属的有机硫化物。
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公开(公告)号：US20070166557A1
公开(公告)日：2007-07-19
申请号：US11597570
申请日：2005-05-27
Applicant: Matthias Keil , Goran Frennesson , Marc Beck , Babak Heidari
Inventor： Matthias Keil , Goran Frennesson , Marc Beck , Babak Heidari
CPC classification number: B05D1/60 , B05D1/185 , B29C33/56 , B82Y10/00 , B82Y30/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , Y10T428/31678
Abstract: The invention relates to a novel metal mold having anti-adhesive properties comprising a base metal mold and an anti-adhesive layer comprising a fluorinated alkyl phosphoric acid derivative or a fluorinated alkyl poly-phosphoric acid derivative, including a phosphorous atom and an alkyl chain. The anti-adhesive layer is bonded directly onto a surface of the base metal mold. The base metal mold may be e.g. Nickel, and said fluorinated alkyl phosphoric acid derivative or said fluorinated alkyl poly-phosphoric acid derivative may be selected from the group consisting of phosphonic acids, phosphonic acids, phosphonates and phosphonate salts, phosphonates and phosphonate salts, or their respective oligomers, such that the phosphorous atom is coupled directly to the alkyl chain, such that the phosphorous atom is coupled directly to the alkyl chain.
Abstract translation: 本发明涉及一种具有抗粘性的新型金属模具，其特征在于包括贱金属模和包含磷原子和烷基链的氟化烷基磷酸衍生物或氟化烷基聚磷酸衍生物的防粘层。 抗粘剂层直接粘结在母模金属模的表面上。 贱金属模可以是例如。 镍和所述氟化烷基磷酸衍生物或所述氟代烷基聚磷酸衍生物可以选自膦酸，膦酸，膦酸酯和膦酸盐，膦酸盐和膦酸盐或它们各自的低聚物，使得 磷原子直接与烷基链结合，使得磷原子直接与烷基链结合。
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公开(公告)号：US20050274693A1
公开(公告)日：2005-12-15
申请号：US11123087
申请日：2005-05-06
Applicant: Babak Heidari , Marc Beck
Inventor： Babak Heidari , Marc Beck
CPC classification number: G03F7/0002 , B29C35/0888 , B29C43/003 , B29C43/021 , B29C43/10 , B29C59/022 , B29C2035/0827 , B29C2043/025 , B29C2043/3647 , B29C2059/023 , B82Y10/00 , B82Y40/00
Abstract: Apparatus and method for transferring a pattern from a template (10) having a structured surface to a substrate (12) carrying a surface layer of a radiation polymerisable fluid (14). The apparatus comprises a first main part (101) and a second main part (102) having opposing surfaces (104;105), means for adjusting a spacing (115) between said main parts, support means (106) for supporting said template and substrate in mutual parallel engagement in said spacing with said structured surface facing said surface layer, a radiation source (110) devised to emit radiation into said spacing. A cavity (115) has a first wall comprising a flexible membrane (113) devised to engage said template or substrate, and means (114;116) are provided for applying an adjustable overpressure to a medium present in said cavity, whereby an even distribution of force is obtained over the whole of the contact surface between the substrate and the template. The apparatus further includes a heater device having a surface facing said spacing, for heating either fluid layer (14).
Abstract translation: 用于将图案从具有结构化表面的模板（10）传送到承载可辐射聚合流体（14）的表面层的基底（12）的装置和方法。 该设备包括具有相对表面（104; 105）的第一主要部分（101）和第二主要部分（102），用于调节所述主要部分之间的间距（115），用于支撑所述模板的支撑装置（106） 在与所述结构化表面相对于所述表面层的所述间隔中相互平行接合的衬底，设计成将辐射发射到所述间隔中的辐射源（110）。 空腔（115）具有第一壁，该第一壁包括被设计为接合所述模板或基底的柔性膜（113），并且提供装置（114; 116），用于将可调节的超压施加到存在于所述空腔中的介质，由此均匀分布 在基板和模板之间的整个接触表面上获得力。 该装置还包括具有面向所述间隔的表面的加热器装置，用于加热流体层（14）。
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