Method of fabricating vertical body-contacted SOI transistor
    12.
    发明申请
    Method of fabricating vertical body-contacted SOI transistor 失效
    垂直体接触SOI晶体管的制造方法

    公开(公告)号:US20080102569A1

    公开(公告)日:2008-05-01

    申请号:US12002828

    申请日:2007-12-19

    IPC分类号: H01L21/336

    摘要: A method of fabricating a vertical field effect transistor (“FET”) is provided which includes a transistor body region and source and drain regions disposed in a single-crystal semiconductor-on-insulator (“SOI”) region of a substrate adjacent a sidewall of a trench. The substrate includes a buried insulator layer underlying the SOI region and a bulk region underlying the buried insulator layer. A buried strap conductively connects the SOI region to a lower node disposed below the SOI region and a body contact extends from the transistor body region to the bulk region of the substrate, the body contact being insulated from the buried strap.

    摘要翻译: 提供一种制造垂直场效应晶体管(“FET”)的方法,其包括晶体管本体区域和设置在邻近侧壁的衬底的单晶半导体绝缘体(“SOI”)区域中的源极和漏极区域 的沟渠 衬底包括在SOI区域下面的掩埋绝缘体层和埋在掩埋绝缘体层下面的主体区域。 掩埋带导电地将SOI区域连接到设置在SOI区域下方的下部节点,并且主体接触从晶体管本体区域延伸到衬底的主体区域,身体接触部与掩埋带绝缘。

    Modified gate processing for optimized definition of array and logic devices on same chip
    13.
    发明授权
    Modified gate processing for optimized definition of array and logic devices on same chip 失效
    改进的门处理,用于在同一芯片上优化阵列和逻辑器件的定义

    公开(公告)号:US06403423B1

    公开(公告)日:2002-06-11

    申请号:US09713272

    申请日:2000-11-15

    IPC分类号: H01L21336

    摘要: Two different gate conductor dielectric caps are used in the array and support device regions so that the bitline contact can be fabricated in the array region, but a thinner hard mask can be used for better linewidth control in the support device region. The thinner dielectric cap is made into dielectric spacers in the array device regions during support mask etching. These dielectric spacers allow for the array gate conductor resist line to be made-smaller than the final gate conductor linewidth. This widens the array gate conductor processing window. The second dielectric cap layer improves linewidth control for the support devices and the array devices. Two separate gate conductor lithography steps and gate conductor dielectric etches are carried out in the present invention to optimize the gate conductor linewidth control in the array and support device regions. The gate conductors in the array and support devices regions are etched simultaneously to reduce production cost. In additional embodiments of the invention, dual workfunction support device transistors with or without salicide can be fabricated with an array including borderless contacts.

    摘要翻译: 在阵列和支撑器件区域中使用两个不同的栅极导体电介质盖,使得可以在阵列区域中制造位线接触,但是可以使用较薄的硬掩模用于支撑装置区域中的更好的线宽控制。 在支撑掩模蚀刻期间,将较薄的介质盖制成阵列器件区域中的电介质间隔物。 这些电介质间隔物允许阵列栅极导体抗蚀剂线被制成 - 小于最终的栅极导体线宽。 这扩大了阵列栅极导体处理窗口。 第二电介质盖层改善了支撑装置和阵列装置的线宽控制。 在本发明中执行两个单独的栅极导体光刻步骤和栅极导体介电蚀刻,以优化阵列和支撑装置区域中的栅极导体线宽控制。 阵列和支撑装置区域中的栅极导体被同时蚀刻以降低生产成本。 在本发明的另外的实施例中,可以用包括无边界触点的阵列来制造具有或不具有自对准硅的双功能功能支撑器件晶体管。

    Methods and circuits for detecting and reporting high-energy particles using mobile phones and other portable computing devices
    15.
    发明授权
    Methods and circuits for detecting and reporting high-energy particles using mobile phones and other portable computing devices 有权
    使用移动电话和其他便携式计算设备检测和报告高能粒子的方法和电路

    公开(公告)号:US08583071B2

    公开(公告)日:2013-11-12

    申请号:US13144683

    申请日:2009-12-18

    摘要: Described are mobile phones that incorporate radiation detectors formed using commonly available semiconductor memories. The radiation detectors require little or no additional hardware over what is available in a conventional phone, and can thus be integrated with little expense or packaging modifications. The low cost supports a broad distribution of detectors. Data collected from constellations of detector-equipped mobile phones can be used to locate mislaid or stolen nuclear materials or other potentially dangerous radiation sources. Phone users can be alerted to radiation dangers in their vicinity, and aggregated phone-specific error data can serve as user-specific dosimeters.

    摘要翻译: 描述的是携带使用常用半导体存储器形成的辐射探测器的移动电话。 辐射探测器对常规电话中可用的几乎没有额外的硬件,因此可以以少量的费用或包装修改来集成。 低成本支持检测器的广泛分布。 从装有探测器的手机的星座收集的数据可用于定位错误或被盗的核材料或其他潜在危险的辐射源。 电话用户可以收到附近的辐射危险警报,并且聚合的手机特定的错误数据可以用作用户特定的剂量计。

    Methods and Circuits for Detecting and Reporting High-Energy Particles Using Mobile Phones and Other Portable Computing Devices
    16.
    发明申请
    Methods and Circuits for Detecting and Reporting High-Energy Particles Using Mobile Phones and Other Portable Computing Devices 有权
    使用手机和其他便携式计算设备检测和报告高能粒子的方法和电路

    公开(公告)号:US20110275356A1

    公开(公告)日:2011-11-10

    申请号:US13144683

    申请日:2009-12-18

    IPC分类号: H04W88/02 H04W64/00 H04W24/00

    摘要: Described are mobile phones that incorporate radiation detectors formed using commonly available semiconductor memories. The radiation detectors require little or no additional hardware over what is available in a conventional phone, and can thus be integrated with little expense or packaging modifications. The low cost supports a broad distribution of detectors. Data collected from constellations of detector-equipped mobile phones can be used to locate mislaid or stolen nuclear materials or other potentially dangerous radiation sources. Phone users can be alerted to radiation dangers in their vicinity, and aggregated phone-specific error data can serve as user-specific dosimeters.

    摘要翻译: 描述的是携带使用常用半导体存储器形成的辐射探测器的移动电话。 辐射探测器对常规电话中可用的几乎没有额外的硬件,因此可以以少量的费用或包装修改来集成。 低成本支持检测器的广泛分布。 从装有探测器的手机的星座收集的数据可用于定位错误或被盗的核材料或其他潜在危险的辐射源。 电话用户可以收到附近的辐射危险警报,并且聚合的手机特定的错误数据可以用作用户特定的剂量计。

    VERTICAL BODY-CONTACTED SOI TRANSISTOR
    17.
    发明申请
    VERTICAL BODY-CONTACTED SOI TRANSISTOR 有权
    垂直接触式SOI晶体管

    公开(公告)号:US20060175660A1

    公开(公告)日:2006-08-10

    申请号:US10906238

    申请日:2005-02-10

    IPC分类号: H01L27/12

    摘要: A vertical field effect transistor (“FET”) is provided which includes a transistor body region and source and drain regions disposed in a single-crystal semiconductor-on-insulator (“SOI”) region of a substrate adjacent a sidewall of a trench. The substrate includes a buried insulator layer underlying the SOI region and a bulk region underlying the buried insulator layer. A buried strap conductively connects the SOI region to a lower node disposed below the SOI region and a body contact extends from the transistor body region to the bulk region of the substrate, the body contact being insulated from the buried strap.

    摘要翻译: 提供了垂直场效应晶体管(“FET”),其包括晶体管本体区域和设置在与沟槽的侧壁相邻的衬底的绝缘体上的单晶半导体(“SOI”)区域中的源极和漏极区域。 衬底包括在SOI区域下面的掩埋绝缘体层和埋在掩埋绝缘体层下面的主体区域。 掩埋带导电地将SOI区域连接到设置在SOI区域下方的下部节点,并且主体接触从晶体管本体区域延伸到衬底的主体区域,身体接触部与掩埋带绝缘。

    OUT OF THE BOX VERTICAL TRANSISTOR FOR eDRAM ON SOI
    18.
    发明申请
    OUT OF THE BOX VERTICAL TRANSISTOR FOR eDRAM ON SOI 有权
    在SOI上用于eDRAM的盒式垂直晶体管

    公开(公告)号:US20050247966A1

    公开(公告)日:2005-11-10

    申请号:US10709450

    申请日:2004-05-06

    摘要: The present invention provides a vertical memory device formed in a silicon-on-insulator substrate, where a bitline contacting the upper surface of the silicon-on-insulator substrate is electrically connected to the vertical memory device through an upper strap diffusion region formed through a buried oxide layer. The upper strap diffusion region is formed by laterally etching a portion of the buried oxide region to produce a divot, in which doped polysilicon is deposited. The upper strap region diffusion region also provides the source for the vertical transistor of the vertical memory device. The vertical memory device may also be integrated with a support region having logic devices formed atop the silicon-on-insulator substrate.

    摘要翻译: 本发明提供了一种形成在绝缘体上硅衬底上的垂直存储器件,其中接触绝缘体上硅衬底的上表面的位线通过上带扩散区域电连接到垂直存储器件 掩埋氧化层。 上带扩散区域通过横向蚀刻掩埋氧化物区域的一部分而形成,其中沉积掺杂多晶硅。 上带区域扩散区域还为垂直存储器件的垂直晶体管提供源极。 垂直存储器件还可以与具有形成在绝缘体上硅衬底上的逻辑器件的支撑区域集成。