公开(公告)号：US07336351B1

公开(公告)日：2008-02-26

申请号：US11348938

申请日：2006-02-07

申请人： William C. Sweatt ,  John D. Williams

发明人： William C. Sweatt ,  John D. Williams

IPC分类号： G01J3/44 ,  G01J3/443 ,  G01N21/64 ,  G01N21/65 ,  G01N21/17 ,  G01N21/39 ,  G01N21/35

CPC分类号： G01N21/658 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/44 ,  G01N21/6402 ,  G01N2021/1793 ,  G01N2021/392

摘要： A laser remote sensing apparatus comprises a laser to provide collimated excitation light at a wavelength; a sensing optic, comprising at least one optical element having a front receiving surface to focus the received excitation light onto a back surface comprising a target sample and wherein the target sample emits a return light signal that is recollimated by the front receiving surface; a telescope for collecting the recollimated return light signal from the sensing optic; and a detector for detecting and spectrally resolving the return light signal. The back surface further can comprise a substrate that absorbs the target sample from an environment. For example the substrate can be a SERS substrate comprising a roughened metal surface. The return light signal can be a surface-enhanced Raman signal or laser-induced fluorescence signal. For fluorescence applications, the return signal can be enhanced by about 105, solely due to recollimation of the fluorescence return signal. For SERS applications, the return signal can be enhanced by 109 or more, due both to recollimation and to structuring of the SERS substrate so that the incident laser and Raman scattered fields are in resonance with the surface plasmons of the SERS substrate.

摘要翻译： 激光遥感装置包括激光器，以提供波长的准直激发光; 感测光学元件，包括至少一个具有前接收表面的光学元件，以将接收到的激发光聚焦到包括目标样品的背面上，并且其中所述目标样品发射由所述前接收表面再记录的返回光信号; 用于收集来自感测光学器件的重新准备的返回光信号的望远镜; 以及用于检测和光谱分辨返回光信号的检测器。 后表面还可以包括从环境吸收目标样品的基底。 例如，基底可以是包含粗糙金属表面的SERS基底。 返回光信号可以是表面增强拉曼信号或激光诱导的荧光信号。 对于荧光应用，返回信号可以仅由于荧光返回信号的再升高而增强约10 5。 对于SERS应用，由于重新准备和SERS衬底的结构，返回信号可以提高10个或更多，使得入射激光和拉曼散射场与表面等离子体激元共振 的SERS底物。

公开(公告)号：US07187815B1

公开(公告)日：2007-03-06

申请号：US10956733

申请日：2004-10-01

申请人： William C. Sweatt ,  G. Allen Vawter

发明人： William C. Sweatt ,  G. Allen Vawter

IPC分类号： G02B6/00

CPC分类号： G02B23/00 ,  G02B3/0012 ,  G02B3/0043 ,  G02B6/10 ,  G02B6/4204 ,  G02B6/4214 ,  G02B6/4298

摘要： A wavefront rely devices samples an incoming optical wavefront at different locations, optically relays the samples while maintaining the relative position of the samples and the relative phase between the samples. The wavefront is reconstructed due to interference of the samples. Devices can be designed for many different wavelengths, including for example the ultraviolet, visible, infrared and even longer wavelengths such as millimeter waves. In one application, the device function as a telescope but with negligible length.

摘要翻译： 波前依赖设备在不同位置采样进入的光波阵面，在保持样品的相对位置和样品之间的相对相位的同时光学中继样品。 由于样品的干扰，波前被重建。 器件可以设计用于许多不同的波长，包括例如紫外线，可见光，红外线和甚至更长的波长，例如毫米波。 在一个应用中，该设备用作望远镜，但长度可忽略不计。

公开(公告)号：US06985308B1

公开(公告)日：2006-01-10

申请号：US10446299

申请日：2003-05-28

申请人： Malcolm C. Smith ,  Michael A. Butler ,  William C. Sweatt

发明人： Malcolm C. Smith ,  Michael A. Butler ,  William C. Sweatt

IPC分类号： G02B17/00 ,  G02B26/00 ,  G02B6/28 ,  H04J14/02

CPC分类号： G02B6/2931 ,  G02B6/29313 ,  G02B6/29395 ,  G02B26/0808 ,  G02B27/42 ,  H04J14/0227

摘要： A demultiplexer for use in a wavelength-division multiplexed optical system including a first positive lens group, a negative lens group, and a second positive lens group in order from a dispersive element and a reflective element. In some embodiments the reflective element is a light modulator, such as an actuatable diffraction grating. In some embodiments the demultiplexer is a part of a dynamic channel equalizer. In embodiments having a light modulator, the modulation may occur during both a first pass and a second pass.

摘要翻译： 用于从分散元件和反射元件开始的包括第一正透镜组，负透镜组和第二正透镜组的波分复用光学系统中的解复用器。 在一些实施例中，反射元件是光调制器，例如可致动的衍射光栅。 在一些实施例中，解复用器是动态信道均衡器的一部分。 在具有光调制器的实施例中，调制可以在第一遍和第二遍期间发生。

公开(公告)号：US06642995B2

公开(公告)日：2003-11-04

申请号：US09986006

申请日：2001-11-07

申请人： William C. Sweatt ,  Daniel A. Tichenor ,  Steven J. Haney

发明人： William C. Sweatt ,  Daniel A. Tichenor ,  Steven J. Haney

IPC分类号： G03B2772

CPC分类号： G03F9/7088 ,  G02B27/143

摘要： A modified beam splitter that has a hole pattern that is symmetric in one axis and anti-symmetric in the other can be employed in a mask-to-wafer alignment device. The device is particularly suited for rough alignment using visible light. The modified beam splitter transmits and reflects light from a source of electromagnetic radiation and it includes a substrate that has a first surface facing the source of electromagnetic radiation and second surface that is reflective of said electromagnetic radiation. The substrate defines a hole pattern about a central line of the substrate. In operation, an input beam from a camera is directed toward the modified beam splitter and the light from the camera that passes through the holes illuminates the reticle on the wafer. The light beam from the camera also projects an image of a corresponding reticle pattern that is formed on the mask surface of the that is positioned downstream from the camera. Alignment can be accomplished by detecting the radiation that is reflected from the second surface of the modified beam splitter since the reflected radiation contains both the image of the pattern from the mask and a corresponding pattern on the wafer.

公开(公告)号：US06504943B1

公开(公告)日：2003-01-07

申请号：US09345604

申请日：1999-06-29

申请人： William C. Sweatt ,  Stephen M. Gentry ,  Clinton A. Boye ,  Carter L. Grotbeck ,  Brian R. Stallard ,  Michael R. Descour

发明人： William C. Sweatt ,  Stephen M. Gentry ,  Clinton A. Boye ,  Carter L. Grotbeck ,  Brian R. Stallard ,  Michael R. Descour

IPC分类号： G06K900

CPC分类号： G06T5/50 ,  G02B27/1086 ,  G02B27/123 ,  G02B27/126 ,  G02B27/145 ,  G02B27/28 ,  G02B27/4205 ,  G02B27/4294 ,  G06K9/0063 ,  G06T7/0008 ,  G06T2207/10152 ,  G06T2207/30108

摘要： A programmable optical filter for use in multispectral and hyperspectral imaging. The filter splits the light collected by an optical telescope into two channels for each of the pixels in a row in a scanned image, one channel to handle the positive elements of a spectral basis filter and one for the negative elements of the spectral basis filter. Each channel for each pixel disperses its light into n spectral bins, with the light in each bin being attenuated in accordance with the value of the associated positive or negative element of the spectral basis vector. The spectral basis vector is constructed so that its positive elements emphasize the presence of a target and its negative elements emphasize the presence of the constituents of the background of the imaged scene. The attenuated light in the channels is re-imaged onto separate detectors for each pixel and then the signals from the detectors are combined to give an indication of the presence or not of the target in each pixel of the scanned scene. This system provides for a very efficient optical determination of the presence of the target, as opposed to the very data intensive data manipulations that are required in conventional hyperspectral imaging systems.

摘要翻译： 一种用于多光谱和高光谱成像的可编程滤光片。 滤光器将由光学望远镜收集的光分成扫描图像中的一行中的每个像素的两个通道，一个通道用于处理光谱基滤波器的正元素，一个用于光谱基滤波器的负元件。 每个像素的每个通道将其光分散到n个光谱箱中，每个存储体中的光根据光谱基础矢量的相关联的正或负元素的值衰减。 构建光谱基矢量，使其正元素强调目标的存在，其负元素强调成像场景的背景的成分的存在。 通道中的衰减光被重新成像到用于每个像素的分离的检测器上，然后来自检测器的信号被组合以给出在扫描场景的每个像素中存在或不存在目标的指示。 与传统的高光谱成像系统中所需的非常数据密集的数据操作相反，该系统提供了对靶的存在的非常有效的光学确定。

公开(公告)号：US06262845B1

公开(公告)日：2001-07-17

申请号：US09300809

申请日：1999-04-27

申请人： William C. Sweatt

发明人： William C. Sweatt

IPC分类号： G02B518

CPC分类号： G03F7/70108 ,  G03F7/70158 ,  G03F7/702

摘要： The present invention introduces a novel scatter plate into the optical path of source light used for illuminating a replicated object. The scatter plate has been designed to interrupt a focused, incoming light beam by introducing between about 8 to 24 diffraction zones blazed onto the surface of the scatter plate which intercept the light and redirect it to a like number of different positions in the condenser entrance pupil each of which is determined by the relative orientation and the spatial frequency of the diffraction grating in each of the several zones. Light falling onto the scatter plate, therefore, generates a plurality of unphased sources of illumination as seen by the back half of the optical system. The system comprises a high brightness source, such as a laser, creating light which is taken up by a beam forming optic which focuses the incoming light into a condenser which in turn, focuses light into a field lens creating Köhler illumination image of the source in a camera entrance pupil. The light passing through the field lens illuminates a mask which interrupts the source light as either a positive or negative image of the object to be replicated. Light passing by the mask is focused into the entrance pupil of the lithographic camera creating an image of the mask onto a receptive media.

摘要翻译： 本发明将新颖的散射板引入到用于照亮复制对象的源光的光路中。 散射板被设计成通过在散射板的表面上引入大约8至24个衍射区域来中断聚焦的入射光束，该衍射区域拦截光并将其重定向到冷凝器入口光瞳中相同数量的不同位置 其中的每一个由几个区域中的每个区域中的衍射光栅的相对取向和空间频率确定。 因此，落在散射板上的光产生多个未相位的照明源，如光学系统的后半部分所示。 该系统包括诸如激光器的高亮度源，产生由束形成光学器件吸收的光，该光束将入射光聚焦到聚光器中，该聚光镜又将光聚焦到场透镜中，从而产生源的Köhler照明图像 相机入口瞳孔。 通过场透镜的光照亮将源光源中断的掩模作为要复制的对象的正或负图像。 通过掩模的光聚焦到光刻照相机的入射光瞳中，从而将掩模的图像产生到接收介质上。

公开(公告)号：US07420730B2

公开(公告)日：2008-09-02

申请号：US11646891

申请日：2006-12-28

申请人： Kanti Jain ,  William C. Sweatt ,  Marc Zemel

发明人： Kanti Jain ,  William C. Sweatt ,  Marc Zemel

IPC分类号： G02B26/00

CPC分类号： G02B26/0808 ,  G03F7/70291

摘要： An enhanced spatial light modulator (ESLM) array, a microelectronics patterning system and a projection display system using such an ESLM for heat-minimization and resolution enhancement during imaging, and the method for fabricating such an ESLM array. The ESLM array includes, in each individual pixel element, a small pixel mirror (reflective region) and a much larger pixel surround. Each pixel surround includes diffraction-grating regions and resolution-enhancement regions. During imaging, a selected pixel mirror reflects a selected-pixel beamlet into the capture angle of a projection lens, while the diffraction grating of the pixel surround redirects heat-producing unused radiation away from the projection lens. The resolution-enhancement regions of selected pixels provide phase shifts that increase effective modulation-transfer function in imaging. All of the non-selected pixel surrounds redirect all radiation energy away from the projection lens. All elements of the ESLM are fabricated by deposition, patterning, etching and other microelectronic process technologies.

公开(公告)号：US06549700B1

公开(公告)日：2003-04-15

申请号：US09875244

申请日：2001-06-05

申请人： William C. Sweatt ,  Todd R. Christenson

发明人： William C. Sweatt ,  Todd R. Christenson

IPC分类号： G02B626

CPC分类号： G02B6/3524 ,  G02B6/3528 ,  G02B6/3556 ,  G02B6/3572 ,  G02B6/3584

摘要： An optical switch using Risley prisms and rotary microactuators to independently rotate the wedge prisms of each Risley prism pair is disclosed. The optical switch comprises an array of input Risley prism pairs that selectively redirect light beams from a plurality of input ports to an array of output Risley prism pairs that similarly direct the light beams to a plurality of output ports. Each wedge prism of each Risley prism pair can be independently rotated by a variable-reluctance stepping rotary microactuator that is fabricated by a multi-layer LIGA process. Each wedge prism can be formed integral to the annular rotor of the rotary microactuator by a DXRL process.

摘要翻译： 公开了一种使用Risley棱镜和旋转微型致动器来独立旋转每个Risley棱镜对的楔形棱镜的光学开关。 光开关包括输入Risley棱镜对的阵列，其选择性地将来自多个输入端口的光束重定向到类似地将光束引导到多个输出端口的输出Risley棱镜对的阵列。 每个Risley棱镜对的每个楔形棱镜可以通过由多层LIGA工艺制造的可变磁阻步进旋转微型致动器独立旋转。 每个楔形棱镜可以通过DXRL工艺与旋转微型致动器的环形转子一体形成。

公开(公告)号：US06396068B1

公开(公告)日：2002-05-28

申请号：US09678419

申请日：2000-10-02

申请人： William C. Sweatt ,  Glenn D. Kubiak

发明人： William C. Sweatt ,  Glenn D. Kubiak

IPC分类号： G01J100

CPC分类号： G21K5/04

摘要： An illumination system includes several discharge sources that are multiplexed together to reduce the amount of debris generated. The system includes: (a) a first electromagnetic radiation source array that includes a plurality of first activatable radiation source elements that are positioned on a first movable carriage; (b) a second electromagnetic radiation source array that includes a plurality of second activatable radiation source elements that are positioned on a second movable carriage; (c) means for directing electromagnetic radiation from the first electromagnetic radiation source array and electromagnetic radiation from the second electromagnetic radiation source array toward a common optical path; (d) means for synchronizing (i) the movements of the first movable carriage and of the second movable carriage and (ii) the activation of the first electromagnetic radiation source array and of the second electromagnetic radiation source array to provide an essentially continuous illumination of electromagnetic radiation along the common optical path.

摘要翻译： 照明系统包括多个放电源，其被多路复用在一起以减少产生的碎屑的量。 该系统包括：（a）第一电磁辐射源阵列，其包括定位在第一可移动滑架上的多个第一可激活的辐射源元件; （b）第二电磁辐射源阵列，其包括定位在第二可移动滑架上的多个第二可激活的辐射源元件; （c）用于将来自第一电磁辐射源阵列的电磁辐射和来自第二电磁辐射源阵列的电磁辐射引向公共光路的装置; （d）用于同步（i）第一可移动滑架和第二可移动滑架的运动的装置，以及（ii）第一电磁辐射源阵列和第二电磁辐射源阵列的激活，以提供基本上连续的照明 沿着公共光路的电磁辐射。

公开(公告)号：US06210865B1

公开(公告)日：2001-04-03

申请号：US09249738

申请日：1999-02-11

申请人： William C. Sweatt ,  Donald W. Sweeney ,  David Shafer ,  James McGuire

发明人： William C. Sweatt ,  Donald W. Sweeney ,  David Shafer ,  James McGuire

IPC分类号： G03C500

CPC分类号： G03F7/70066 ,  G03F7/70158 ,  G03F7/702 ,  G21K1/06 ,  Y10S430/167

摘要： Condenser system for use with a ringfield camera in projection lithography where the condenser includes a series of segments of a parent aspheric mirror having one foci at a quasi-point source of radiation and the other foci at the radius of a ringfield have all but one or all of their beams translated and rotated by sets of mirrors such that all of the beams pass through the real entrance pupil of a ringfield camera about one of the beams and fall onto the ringfield radius as a coincident image as an arc of the ringfield. The condenser has a set of correcting mirrors with one of the correcting mirrors of each set, or a mirror that is common to said sets of mirrors, from which the radiation emanates, is a concave mirror that is positioned to shape a beam segment having a chord angle of about 25 to 85 degrees into a second beam segment having a chord angle of about 0 to 60 degrees.

摘要翻译： 用于投影光刻中的环形相机的冷凝器系统，其中电容器包括具有在准点辐射源处的一个焦点的父非球面反射镜的一系列段，并且在环形场的半径处具有另一个焦点，除了一个或 它们的所有光束通过一组镜子平移和旋转，使得所有的光束通过围绕其中一个光束的环形相机的真实入射光瞳，并且作为环形圆弧的重合图像落入环形半径。 冷凝器具有一组校正镜，每组具有校准镜之一，或者是所述反射镜组共同的反射镜，辐射从该反射镜发射出来，该凹面镜定位成使具有 具有大约25至85度的弦角到具有约0至60度的弦角的第二光束段中。