摘要:
A phase shift mask device includes a transparent substrate; a first rim type part on the transparent substrate, the first rim type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, and a light transparent portion adjacent the second phase shift layer; a first outrigger type mask part on the transparent substrate spaced from the first rim type mask part by a first distance, the first outrigger type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, a shielding layer adjacent the first phase shift layer, and a light transparent portion adjacent the second phase shift layer; a second rim type mask part on the transparent substrate having a diagonal relationship with respect to the first rim type mask, the second rim type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, and a light transparent layer portion adjacent the second phase shift layer; and a second outrigger type mask part on the transparent substrate having a diagonal relationship with respect to the first outrigger type mask part, the second outrigger type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, a shielding layer adjacent the first phase shift layer, and a light transparent portion adjacent the second phase shift layer.
摘要:
A phase-shifting mask which has a supplementary pattern arranged for preventing unwanted constructive interference of light caused when isolated patterns (transparent regions) are arranged adjacently. Also, a method for manufacturing such a phase-shifting mask, including the steps of providing a transparent substrate, a phase-shifting layer having transparent regions formed on the transparent substrate, and a supplementary light shielding patterns formed on the phase-shifting layer between the transparent regions.
摘要:
FIG. 1 is a top and front perspective view of a keypad, showing my new design; FIG. 2 is a front view thereof; FIG. 3 is a rear view thereof; FIG. 4 is a left side view thereof; FIG. 5 is a right side view thereof; FIG. 6 is a top plan view thereof; and, FIG. 7 is a bottom plan view thereof. The broken lines shown in FIG. 7 are for illustrative purpose only and form no part of the claimed design.
摘要:
The present invention provides a valve for an engine and a method for treating the surface thereof. The valve for the engine includes a buffer layer, an intermediate layer, a TiAlN/CrN first nanostructured multilayer, and a TiAlCN/CrCN second nanostructured multilayer. The buffer layer is coated over a surface of a stem part as a lowermost layer and is formed of Ti or Cr. The intermediate layer is coated over the buffer layer and is formed of CrN, TiN, or TiCN. The TiAlN/CrN first nanostructured multilayer is coated over the intermediate layer. The TiAlCN/CrCN second nanostructured multilayer is coated over the TiAlN/CrN first nanostructured multilayer as an uppermost layer.
摘要:
Disclosed is a surface coating film for a forming machine, including: a substrate; a nitride layer on the substrate; a multilayered film layer deposited on the nitride layer by reaction of nitrogen (N) with a TiAl target and a Cr target; and a carbonitride layer deposited on the multilayered film layer by reaction of nitrogen (N) and carbon (C) with a TiAl target and a Cr target.
摘要:
A video processing system is provided. The video processing system includes: a camera that compresses a captured video and provides the compressed video; a video preparation unit including a playback server that decodes a moving picture compression stream transmitted from the camera and a video processor that processes a video decoded by the playback server; and a display device that displays a video prepared and provided by the video preparation unit. Accordingly, a video captured and compressed by a camera is prepared by decoding, and the video is configured with various output conditions so as to be displayed on a display device. This, in comparison with the convention method in which a required video is decoded and displayed whenever a video display condition changes, the required video can be rapidly displayed within a short period of time, and videos captured by a plurality of cameras can be displayed on one image on a real time basis while maintaining a maximum frame rate of the cameras without restriction of the number of cameras. Therefore, there is an advantage in that a specific video can be zoomed in, zoomed out, or panned on a real time basis at the request of a user, thereby improving a usage rate and an operation response of the video processing system.
摘要:
Disclosed is a carrier tape manufactured by using polymer materials comprising polypropylene, polystyrene and a styrene-butadiene copolymer. The carrier tape has excellent impact strength, excellent dimensional stability and low surface energy, and thus allows easy detachment of materials to be transported.
摘要:
Masks for fabricating a semiconductor device and methods of forming mask patterns are provided which are capable of enhancing the breakdown voltage of the fabricated semiconductor device by accurately correcting a line width pattern error of a semiconductor substrate due to a mask error during a process for forming a well ion implantation mask pattern. A disclosed mask used to manufacture a semiconductor device having complementary N-well and P-well includes: a master mask for the complementary N-well and P-well; and a light-blocking pattern on the master mask, wherein a region of the master mask, which is not a portion of the master mask adjacent to the light-blocking pattern, is etched by a predetermined thickness to have a phase shifting function.
摘要:
The present disclosure provides an exposure method for a semiconductor device, in which whether a specific pattern corresponds to a sparse area or a dense area is decided to employ a specific phase-shift mask and by which critical dimension uniformity and resolution of the pattern are enhanced. One example method includes defining a hole area for a plurality of holes into a dense area and a sparse area, coating a photoresist layer on a substrate having a plurality of elements formed thereon, carrying out a first exposure on the photoresist layer using a first photomask having patterns corresponding to the dense and sparse areas, respectively, and carrying out a second exposure on the photoresist layer using a second photomask having at least two halftone layers provided to portions corresponding to the dense and sparse areas, respectively wherein the at least two halftone layers differ from each other in transmitivity, respectively.
摘要:
A mask for fabricating a semiconductor device, which is capable of correcting an optical proximity effect, includes a transparent mask plate, a main pattern formed on the mask plate as a light blocking layer, and a subsidiary pattern a corner of which is offset in a direction of 45.+-.10 degrees or 135.+-.10 degrees from a line longitudinally extended from the main pattern's edge line. The corner of the subsidiary pattern may be contiguous or non-contiguous with a corner of the main pattern.