Phase shift mask and method for manufacturing same
    11.
    发明授权
    Phase shift mask and method for manufacturing same 失效
    相移掩模及其制造方法

    公开(公告)号:US5856049A

    公开(公告)日:1999-01-05

    申请号:US788104

    申请日:1997-01-23

    申请人: Jun Seok Lee

    发明人: Jun Seok Lee

    CPC分类号: G03F1/29 G03F1/32

    摘要: A phase shift mask device includes a transparent substrate; a first rim type part on the transparent substrate, the first rim type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, and a light transparent portion adjacent the second phase shift layer; a first outrigger type mask part on the transparent substrate spaced from the first rim type mask part by a first distance, the first outrigger type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, a shielding layer adjacent the first phase shift layer, and a light transparent portion adjacent the second phase shift layer; a second rim type mask part on the transparent substrate having a diagonal relationship with respect to the first rim type mask, the second rim type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, and a light transparent layer portion adjacent the second phase shift layer; and a second outrigger type mask part on the transparent substrate having a diagonal relationship with respect to the first outrigger type mask part, the second outrigger type mask part including a first phase shift layer, a second phase shift layer adjacent the first phase shift layer, a shielding layer adjacent the first phase shift layer, and a light transparent portion adjacent the second phase shift layer.

    摘要翻译: 相移掩模装置包括透明基板; 所述透明基板上的第一边缘型部分,所述第一边缘型掩模部分包括第一相移层,与所述第一相移层相邻的第二相移层和与所述第二相移层相邻的透光部分; 所述透明基板上的第一外伸支架型掩模部分与所述第一边缘型掩模部分间隔开第一距离,所述第一外伸支架型掩模部分包括第一相移层,与所述第一相移层相邻的第二相移层, 邻近第一相移层的光透射部分和与第二相移层相邻的透光部分; 所述透明基板上的第二边缘型掩模部分相对于所述第一边缘型掩模具有对角关系,所述第二边缘型掩模部分包括第一相移层,与所述第一相移层相邻的第二相移层,以及 与第二相移层相邻的透光层部分; 以及在所述透明基板上具有与所述第一外伸支架型掩模部对角关系的第二外伸支架型掩模部,所述第二外伸支架型掩模部包括第一相移层,与所述第一相移层相邻的第二相移层, 与第一相移层相邻的屏蔽层和与第二相移层相邻的透光部分。

    Method of manufacturing phase-shifting mask comprising a light shield
pattern on a phase-shifting attenuatting layer
    12.
    发明授权
    Method of manufacturing phase-shifting mask comprising a light shield pattern on a phase-shifting attenuatting layer 失效
    一种制造相移掩模的方法,包括在相移衰减层上的遮光图案

    公开(公告)号:US5725969A

    公开(公告)日:1998-03-10

    申请号:US576897

    申请日:1995-12-22

    申请人: Jun Seok Lee

    发明人: Jun Seok Lee

    CPC分类号: G03F1/32 G03F1/26 G03F1/36

    摘要: A phase-shifting mask which has a supplementary pattern arranged for preventing unwanted constructive interference of light caused when isolated patterns (transparent regions) are arranged adjacently. Also, a method for manufacturing such a phase-shifting mask, including the steps of providing a transparent substrate, a phase-shifting layer having transparent regions formed on the transparent substrate, and a supplementary light shielding patterns formed on the phase-shifting layer between the transparent regions.

    摘要翻译: 一种移相掩模,其具有布置用于防止在隔离图案(透明区域)相邻布置时引起的光的不希望的建构性干扰的辅助图案。 另外,制造这样的移相掩模的方法包括以下步骤:提供透明基板,形成在透明基板上的透明区域的移相层和形成在移相层之间的辅助遮光图案, 透明区域。

    Keypad
    13.
    外观设计
    Keypad 有权

    公开(公告)号:USD1005989S1

    公开(公告)日:2023-11-28

    申请号:US29757096

    申请日:2020-11-03

    申请人: Jun Seok Lee

    设计人: Jun Seok Lee

    摘要: FIG. 1 is a top and front perspective view of a keypad, showing my new design;
    FIG. 2 is a front view thereof;
    FIG. 3 is a rear view thereof;
    FIG. 4 is a left side view thereof;
    FIG. 5 is a right side view thereof;
    FIG. 6 is a top plan view thereof; and,
    FIG. 7 is a bottom plan view thereof.
    The broken lines shown in FIG. 7 are for illustrative purpose only and form no part of the claimed design.

    Valve for engine and method for treating surface thereof
    14.
    发明授权
    Valve for engine and method for treating surface thereof 有权
    发动机阀门及其表面处理方法

    公开(公告)号:US08826880B2

    公开(公告)日:2014-09-09

    申请号:US13482150

    申请日:2012-05-29

    IPC分类号: F01L3/02

    摘要: The present invention provides a valve for an engine and a method for treating the surface thereof. The valve for the engine includes a buffer layer, an intermediate layer, a TiAlN/CrN first nanostructured multilayer, and a TiAlCN/CrCN second nanostructured multilayer. The buffer layer is coated over a surface of a stem part as a lowermost layer and is formed of Ti or Cr. The intermediate layer is coated over the buffer layer and is formed of CrN, TiN, or TiCN. The TiAlN/CrN first nanostructured multilayer is coated over the intermediate layer. The TiAlCN/CrCN second nanostructured multilayer is coated over the TiAlN/CrN first nanostructured multilayer as an uppermost layer.

    摘要翻译: 本发明提供一种发动机用阀及其表面处理方法。 用于发动机的阀包括缓冲层,中间层,TiAlN / CrN第一纳米结构多层和TiAlCN / CrCN第二纳米结构多层。 缓冲层涂覆在作为最下层的杆部分的表面上,并由Ti或Cr形成。 中间层涂覆在缓冲层上,由CrN,TiN或TiCN形成。 TiAlN / CrN第一纳米结构多层涂覆在中间层上。 TiAlCN / CrCN第二纳米结构多层涂覆在TiAlN / CrN第一纳米结构多层作为最上层。

    VIDEO PROCESSING SYSTEM, VIDEO PROCESSING METHOD, AND VIDEO TRANSFER METHOD
    16.
    发明申请
    VIDEO PROCESSING SYSTEM, VIDEO PROCESSING METHOD, AND VIDEO TRANSFER METHOD 审中-公开
    视频处理系统,视频处理方法和视频传输方法

    公开(公告)号:US20100303436A1

    公开(公告)日:2010-12-02

    申请号:US12812121

    申请日:2009-01-12

    IPC分类号: H04N5/77 H04N5/93

    CPC分类号: H04N5/77 H04N5/765 H04N9/8042

    摘要: A video processing system is provided. The video processing system includes: a camera that compresses a captured video and provides the compressed video; a video preparation unit including a playback server that decodes a moving picture compression stream transmitted from the camera and a video processor that processes a video decoded by the playback server; and a display device that displays a video prepared and provided by the video preparation unit. Accordingly, a video captured and compressed by a camera is prepared by decoding, and the video is configured with various output conditions so as to be displayed on a display device. This, in comparison with the convention method in which a required video is decoded and displayed whenever a video display condition changes, the required video can be rapidly displayed within a short period of time, and videos captured by a plurality of cameras can be displayed on one image on a real time basis while maintaining a maximum frame rate of the cameras without restriction of the number of cameras. Therefore, there is an advantage in that a specific video can be zoomed in, zoomed out, or panned on a real time basis at the request of a user, thereby improving a usage rate and an operation response of the video processing system.

    摘要翻译: 提供视频处理系统。 视频处理系统包括:照相机,压缩捕获的视频并提供压缩视频; 视频准备单元,包括对从相机发送的运动图像压缩流进行解码的重放服务器和处理由播放服务器解码的视频的视频处理器; 以及显示装置,其显示由视频准备单元准备和提供的视频。 因此,通过解码准备由摄像机拍摄和压缩的视频,并且将视频配置为具有各种输出条件以便显示在显示设备上。 这与在视频显示条件改变时解码和显示所需视频的惯例方法相比,可以在短时间内快速显示所需视频,并且可以在多个摄像机上捕获的视频显示在 一个图像在实时基础上,同时保持摄像机的最大帧速率,而不受摄像机数量的限制。 因此,具有可以根据用户的请求实时地基于特定视频进行放大,缩小或平移的优点,从而提高视频处理系统的使用率和操作响应。

    CARRIER TAPE WITH EXCELLENT IMPACT STRENGTH AND RELEASE PROPERTY
    17.
    发明申请
    CARRIER TAPE WITH EXCELLENT IMPACT STRENGTH AND RELEASE PROPERTY 审中-公开
    具有优异的冲击强度和释放性能的承载带

    公开(公告)号:US20090173660A1

    公开(公告)日:2009-07-09

    申请号:US12281261

    申请日:2007-03-09

    IPC分类号: B65D85/00 B29C47/00

    CPC分类号: B65D73/02 H05K13/0084

    摘要: Disclosed is a carrier tape manufactured by using polymer materials comprising polypropylene, polystyrene and a styrene-butadiene copolymer. The carrier tape has excellent impact strength, excellent dimensional stability and low surface energy, and thus allows easy detachment of materials to be transported.

    摘要翻译: 公开了通过使用包含聚丙烯,聚苯乙烯和苯乙烯 - 丁二烯共聚物的聚合物材料制造的载带。 载带具有优异的冲击强度,优异的尺寸稳定性和低的表面能,因此容易分离待运输的材料。

    Masks for fabricating semiconductor devices and methods of forming mask patterns
    18.
    发明授权
    Masks for fabricating semiconductor devices and methods of forming mask patterns 失效
    用于制造半导体器件的掩模和形成掩模图案的方法

    公开(公告)号:US07316958B2

    公开(公告)日:2008-01-08

    申请号:US11022612

    申请日:2004-12-27

    申请人: Jun Seok Lee

    发明人: Jun Seok Lee

    IPC分类号: H01L21/336

    摘要: Masks for fabricating a semiconductor device and methods of forming mask patterns are provided which are capable of enhancing the breakdown voltage of the fabricated semiconductor device by accurately correcting a line width pattern error of a semiconductor substrate due to a mask error during a process for forming a well ion implantation mask pattern. A disclosed mask used to manufacture a semiconductor device having complementary N-well and P-well includes: a master mask for the complementary N-well and P-well; and a light-blocking pattern on the master mask, wherein a region of the master mask, which is not a portion of the master mask adjacent to the light-blocking pattern, is etched by a predetermined thickness to have a phase shifting function.

    摘要翻译: 提供了用于制造半导体器件的掩模和形成掩模图案的方法,其能够通过在形成半导体器件的工艺期间由于掩模误差精确校正半导体衬底的线宽图案误差而增强制造的半导体器件的击穿电压 良好的离子注入掩模图案。 用于制造具有互补N阱和P阱的半导体器件的公开掩模包括:用于互补N阱和P阱的主掩模; 以及主掩模上的遮光图案,其中不是与遮光图案相邻的主掩模的一部分的主掩模的区域被蚀刻预定厚度以具有相移功能。

    Exposure methods
    19.
    发明申请
    Exposure methods 失效
    曝光方法

    公开(公告)号:US20050142500A1

    公开(公告)日:2005-06-30

    申请号:US11025123

    申请日:2004-12-28

    申请人: Jun Seok Lee

    发明人: Jun Seok Lee

    IPC分类号: H01L21/027 G03F7/00 G03F7/20

    CPC分类号: G03F7/70433 G03F7/2022

    摘要: The present disclosure provides an exposure method for a semiconductor device, in which whether a specific pattern corresponds to a sparse area or a dense area is decided to employ a specific phase-shift mask and by which critical dimension uniformity and resolution of the pattern are enhanced. One example method includes defining a hole area for a plurality of holes into a dense area and a sparse area, coating a photoresist layer on a substrate having a plurality of elements formed thereon, carrying out a first exposure on the photoresist layer using a first photomask having patterns corresponding to the dense and sparse areas, respectively, and carrying out a second exposure on the photoresist layer using a second photomask having at least two halftone layers provided to portions corresponding to the dense and sparse areas, respectively wherein the at least two halftone layers differ from each other in transmitivity, respectively.

    摘要翻译: 本公开提供一种用于半导体器件的曝光方法,其中特定图案是否对应于稀疏区域或致密区域被决定采用特定相移掩模,并且通过该方法提高图案的临界尺寸均匀性和分辨率 。 一个示例性方法包括将用于多个孔的孔区域定义为致密区域和稀疏区域,在其上形成有多个元件的基板上涂覆光致抗蚀剂层,使用第一光掩模在光致抗蚀剂层上进行第一曝光 分别具有对应于致密和稀疏区域的图案,并且使用具有至少两个半色调层的第二光掩模在光致抗蚀剂层上进行第二曝光,所述第二光掩模分别设置在对应于致密和稀疏区域的部分上,其中至少两个半色调 层的透射率分别不同。

    Optical proximity correction mask for semiconductor device fabrication
    20.
    发明授权
    Optical proximity correction mask for semiconductor device fabrication 有权
    用于半导体器件制造的光学邻近校正掩模

    公开(公告)号:US6033811A

    公开(公告)日:2000-03-07

    申请号:US134374

    申请日:1998-08-14

    申请人: Jun Seok Lee

    发明人: Jun Seok Lee

    CPC分类号: G03F7/70441 G03F1/36

    摘要: A mask for fabricating a semiconductor device, which is capable of correcting an optical proximity effect, includes a transparent mask plate, a main pattern formed on the mask plate as a light blocking layer, and a subsidiary pattern a corner of which is offset in a direction of 45.+-.10 degrees or 135.+-.10 degrees from a line longitudinally extended from the main pattern's edge line. The corner of the subsidiary pattern may be contiguous or non-contiguous with a corner of the main pattern.

    摘要翻译: 用于制造能够校正光学邻近效应的半导体器件的掩模包括透明掩模板,形成在掩模板上作为遮光层的主图案,以及辅助图案,其角部偏移在 方向与从主图案的边缘线纵向延伸的线的45 +/- 10度或135 +/- 10度。 辅助图案的角可以与主图案的角连续或不连续。