摘要:
This invention discloses a method and apparatus where a pre-treatment which reduce interfacial level density is carried out before thin film deposition on a substrate utilizing a catalytic gas phase reaction. The catalytic gas phase reaction is generated with a treatment gas which is supplied with the substrate via a thermal catalysis body provided near the substrate surface. Thin film deposition on the substrate surface is carried out after this pre-treatment. The thermal catalysis body is made of tungsten, molybdenum, tantalum, titanium or vanadium, and is heated by a heater. And, this invention also discloses a semiconductor device having a semiconductor-insulator junction with its interfacial level density is 1012 eV −1cm−2 or less, which is brought by the above pre-treatment in the insulator film deposition process.
摘要翻译:本发明公开了一种方法和装置,其中在使用催化气相反应的薄膜沉积在基板上之前进行降低界面密度的预处理。 催化气相反应是通过设置在基板表面附近的热催化体被提供给基板的处理气体产生的。 在该预处理之后进行在基板表面上的薄膜沉积。 热催化体由钨,钼,钽,钛或钒制成,并被加热器加热。 并且,本发明还公开了一种具有半导体 - 绝缘体结的半导体器件,其界面密度为10 12 eV -1 cm -2以下,这是通过上述预处理在绝缘体中产生的 薄膜沉积工艺。
摘要:
A solar cell (100) comprising a semiconductor solar cell substrate (66) having a light receiving surface formed on the first major surface and generating photovoltaic power based on the light impinging on the light receiving surface, wherein the light receiving surface of the semiconductor solar cell substrate (66) is coated with a light receiving surface side insulating film (61) composed of an inorganic insulating material where the cationic component principally comprising silicon, and the light receiving surface side insulating film (61) is a low hydrogen content inorganic insulating film containing less than 10 atm % of hydrogen. A solar cell having an insulating film exhibiting excellent passivation effect insusceptible to aging can thereby be provided.
摘要:
Conventional methods of crystallizing a semiconductor film through scanning with a pulse laser have had a problem in that variation in particle diameter or shape of a crystal grain causes variation in characteristics of a thin film transistor, which lowers display quality of a liquid crystal display. In view of this, in a method of crystallizing a semiconductor film according to the present invention, after a step of performing scanning with a first pulse laser, scanning with a second pulse laser, which has a higher energy density than that of the first pulse laser, is performed in a substantially orthogonal direction to a traveling direction of scanning with the first pulse laser. With this method, the semiconductor film can be crystallized uniformly.
摘要:
The object of the present invention is to provide an end point detection method in a gas phase reaction processing apparatus.An end point detection method in the case where a catalyst 9 arranged in a treatment chamber is heated at high temperature by supplying electric power thereto and the treatment is carried out by cracking a reaction gas by the catalyst 9 heated at high temperature, comprises the steps of supplying the electric power to the catalyst 9 from a constant current source 10, detecting electric potential difference between both ends of the catalyst 9, performing primary differentiation of the detected electric potential difference, and determining an end point of the treatment based on obtained primary differential value.
摘要:
This invention discloses a method and apparatus where a pre-treatment which reduce interfacial level density is carried out before thin film deposition on a substrate utilizing a catalytic gas phase reaction. The catalytic gas phase reaction is generated with a treatment gas which is supplied with the substrate via a thermal catalysis body provided near the substrate surface. Thin film deposition on the substrate surface is carried out after this pre-treatment. The thermal catalysis body is made of tungsten, molybdenum, tantalum, titanium or vanadium, and is heated by a heater. And, this invention also discloses a semiconductor device having a semiconductor-insulator junction with its interfacial level density is 1012 eV−1 cm−2 or less, which is brought by the above pre-treatment in the insulator film deposition process.
摘要:
An apparatus includes a display control section configured to control display of image data for an image, the image data including flash reach information identifying at least one portion of the image corresponding to at least one region reached by light from a flash. Also described are a method and computer-readable storage medium for controlling display of image data for the image.
摘要:
An information processing apparatus includes: a rechargeable battery that is electrically connected to a charging electric power generating device; a switch that is disposed between the rechargeable battery and the charging electric power generating device; an electric power measuring unit that measures electric power produced by the charging electric power generating device; and a charge controller that controls the switch to be turned OFF when the electric power measured by the electric power measuring unit is smaller than a first electric power threshold.
摘要:
A high-level synthesis apparatus for automatically generating a register transfer level (RTL) logic circuit from a behavioral description has a scheduling unit configured to perform data flow analysis and scheduling to generate a data flow graph showing an operation cycle of an operation from the behavioral description, a scheduling result inputting/outputting unit configured to extract a point to be allocated to a register from the data flow graph and output register information indicating the point, the scheduling result inputting/outputting unit being provided with dynamic analysis data that includes at least one of the number of times that data at the point has been substituted and the number of times that a value stored at the point has changed by a predetermined simulation, an allocating unit configured to consult dynamic analysis data and allocate circuit elements to the behavioral description, and an RTL description generating unit configured to generate the logic circuit based on the allocation of circuit elements by the allocating unit.
摘要:
A data processing system includes a block setting module setting a to-be-processed block shape including subject data, which is one of 2-dimentional data in a matrix stored in a virtual storage area, and influenced data influenced by results of processing subject data, a division module dividing 2-dimentional data into a plurality of execution blocks based on information of the to-be processed block shape, and a processing module sequentially processing data in each execution block along a row direction in units of execution blocks.
摘要:
A design apparatus for designing a processor re-configurable for an application, includes an analysis unit that analyzes the content of a program to be executed by the processor; a hardware extension unit that searches the program for a part of the program allowing hardware extension in accordance with the analysis results by the analysis unit and generates hardware extension information for the searched part; an extended instruction definition unit that searches the program for a part allowing use of an extended instruction in accordance with the analysis results by the analysis unit and generates definition of an extended instruction for the searched part; and a performance estimation unit that estimates whether or not the performance of the processor satisfies a target performance using at least one of the hardware extension information generated by the hardware extension unit and the definition of the extended instruction generated by the extended instruction definition unit.