公开(公告)号：US08871433B2

公开(公告)日：2014-10-28

申请号：US13501897

申请日：2010-10-14

申请人： Takaaki Suzuki ,  Hidetoshi Kotera ,  Isaku Kanno ,  Daisuke Hiramaru

发明人： Takaaki Suzuki ,  Hidetoshi Kotera ,  Isaku Kanno ,  Daisuke Hiramaru

IPC分类号： G03F7/20 ,  G03F7/00 ,  B81C1/00 ,  B81C99/00 ,  G03F1/00 ,  G03F1/38

CPC分类号： G03F7/0037 ,  B81C1/00126 ,  B81C99/002 ,  G03F1/14 ,  G03F1/38 ,  G03F1/50 ,  G03F7/2002 ,  G03F7/201

摘要： The disclosed method for producing a microstructure can form a complicated three-dimensionally formed microstructure with few steps.A first mask pattern (22) containing a light transmitting section and a light blocking section is disposed along an unexposed photosensitive resin (42), and a second mask pattern (32) containing a light transmitting section and a light blocking section is disposed on the reverse side of the first mask pattern (22) from the photosensitive resin (42). Additionally, by means of integrally rotating the photosensitive resin (42) and the first mask pattern (22) around a central axis (Z) that passes through the photosensitive resin (42) and the first mask pattern (22), and at the same time radiating exposure light from the reverse side of the second mask pattern (32) from the photosensitive resin (42) and the first mask pattern (22) in a direction that is inclined obliquely with respect to the direction of the central axis (Z), the light beam of the exposure light that is transmitted through the light transmitting section of the second mask pattern (32) and the light transmitting section of the first mask pattern (22) exposes the photosensitive resin (42).

摘要翻译： 所公开的微结构制造方法可以以几步形成复杂的三维形成的微结构。 沿着未曝光的感光性树脂（42）设置包含透光部和遮光部的第一掩模图案（22），将含有透光部和遮光部的第二掩模图案（32）配置在 第一掩模图案（22）与感光性树脂（42）的反面。 此外，通过使感光性树脂（42）和第一掩模图案（22）围绕通过感光性树脂（42）和第一掩模图案（22）的中心轴（Z）一体地旋转，并且在同一 在相对于中心轴线（Z）的方向倾斜倾斜的方向上，从第二掩模图案的背面照射来自感光性树脂（42）和第一掩模图案（22）的曝光光， 通过第二掩模图案（32）的透光部分透射的曝光光的光束和第一掩模图案（22）的透光部分暴露感光性树脂（42）。

公开(公告)号：US20120214104A1

公开(公告)日：2012-08-23

申请号：US13501897

申请日：2010-10-14

申请人： Takaaki Suzuki ,  Hidetoshi Kotera ,  Isaku Kanno ,  Daisuke Hiramaru

发明人： Takaaki Suzuki ,  Hidetoshi Kotera ,  Isaku Kanno ,  Daisuke Hiramaru

IPC分类号： G03F7/20

CPC分类号： G03F7/0037 ,  B81C1/00126 ,  B81C99/002 ,  G03F1/14 ,  G03F1/38 ,  G03F1/50 ,  G03F7/2002 ,  G03F7/201

摘要： The disclosed method for producing a microstructure can form a complicated three-dimensionally formed microstructure with few steps.A first mask pattern (22) containing a light transmitting section and a light blocking section is disposed along an unexposed photosensitive resin (42), and a second mask pattern (32) containing a light transmitting section and a light blocking section is disposed on the reverse side of the first mask pattern (22) from the photosensitive resin (42). Additionally, by means of integrally rotating the photosensitive resin (42) and the first mask pattern (22) around a central axis (Z) that passes through the photosensitive resin (42) and the first mask pattern (22), and at the same time radiating exposure light from the reverse side of the second mask pattern (32) from the photosensitive resin (42) and the first mask pattern (22) in a direction that is inclined obliquely with respect to the direction of the central axis (Z), the light beam of the exposure light that is transmitted through the light transmitting section of the second mask pattern (32) and the light transmitting section of the first mask pattern (22) exposes the photosensitive resin (42).

摘要翻译： 所公开的微结构制造方法可以以几步形成复杂的三维形成的微结构。 沿着未曝光的感光性树脂（42）设置包含透光部和遮光部的第一掩模图案（22），将含有透光部和遮光部的第二掩模图案（32）配置在 第一掩模图案（22）与感光性树脂（42）的反面。 此外，通过使感光性树脂（42）和第一掩模图案（22）围绕通过感光性树脂（42）和第一掩模图案（22）的中心轴（Z）一体地旋转，并且在同一 在相对于中心轴线（Z）的方向倾斜倾斜的方向上，从第二掩模图案的背面照射来自感光性树脂（42）和第一掩模图案（22）的曝光光， 通过第二掩模图案（32）的透光部分透射的曝光光的光束和第一掩模图案（22）的透光部分暴露感光性树脂（42）。

公开(公告)号：US20080206828A1

公开(公告)日：2008-08-28

申请号：US11908882

申请日：2006-03-17

申请人： Hidetoshi Kotera ,  Isaku Kanno ,  Takaaki Suzuki ,  Masao Washizu

发明人： Hidetoshi Kotera ,  Isaku Kanno ,  Takaaki Suzuki ,  Masao Washizu

IPC分类号： C12M1/42 ,  C12N13/00 ,  G03F7/20

CPC分类号： G01N33/48728 ,  C12M35/02

摘要： A device for introducing a substance into a cell which can realize a high-efficient external substance introduction by means of electro-poration not depending on a cell size, a cell clamping device capable of clamping a cell at many locations, and a flow path forming method capable of efficiently forming a flow path. The device for introducing a substance into a cell (10a) comprises an insulating thin film (2) having a pore (1) and a pair of electrodes (6, 7) disposed on the opposite sides of the film (2) across the pore (1). When a cell (9) is fixed to the pore (1) and a pulse voltage is applied to between the electrodes (6, 7) with a space (5) filled with a fluid containing substance (4) to be introduced into the cell (9), a field concentration to a pore portion is used to destroy a cell membrane to thereby introduce the substance (4) into the cell (9).

摘要翻译： 一种用于将物质引入电池的装置，其可以通过不依赖于电池尺寸的电铸而实现高效的外部物质的引入，能够在多个位置处夹持电池的电池夹持装置和形成流路的装置 方法能够有效地形成流路。 用于将物质引入电池（10a）的装置包括具有孔（1）的绝缘薄膜（2）和设置在薄膜（2）的相对侧上的一对电极（6,7） 孔（1）。 当电池（9）固定到孔（1）上并且脉冲电压被施加到电极（6,7）之间时，其中填充有含有流体的物质（4）的空间（5）被引入电池 （9）中，使用细孔部分的场浓度来破坏细胞膜，从而将物质（4）引入细胞（9）。

公开(公告)号：US20130163061A1

公开(公告)日：2013-06-27

申请号：US13820327

申请日：2011-08-19

申请人： Isaku Kanno ,  Naoki Inoue ,  Manabu Murayama

发明人： Isaku Kanno ,  Naoki Inoue ,  Manabu Murayama

IPC分类号： G02B26/08

CPC分类号： G02B26/0841 ,  G02B7/1821 ,  G02B26/101

摘要： A vibrating mirror element including a detection electrode to detect driving and capable of being easily manufactured is provided. This vibrating mirror element includes a mirror portion and a driving portion driving the mirror portion, and the driving portion has a drive electrode to deform the driving portion by application of a voltage to drive the driving portion and a detection electrode to detect the amount of deformation of the driving portion, both arranged therein.

摘要翻译： 提供了一种包括检测电极以检测驱动并且易于制造的振动镜元件。 该振动镜元件包括镜部分和驱动镜部分的驱动部分，驱动部分具有驱动电极，通过施加电压使驱动部分变形以驱动驱动部分和检测电极以检测变形量 的驱动部分。

公开(公告)号：US06688731B1

公开(公告)日：2004-02-10

申请号：US09701856

申请日：2000-12-01

申请人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

发明人： Satoru Fujii ,  Isaku Kanno ,  Ryoichi Takayama ,  Osamu Watanabe ,  Kenji Tomita ,  Shigeyuki Takao

IPC分类号： B41J2045

CPC分类号： B41J2/1629 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2002/1425 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/313 ,  H01L41/316

摘要： A piezoelectric thin film element D, in which a piezoelectric thin film 1 with first and second electrode films 2 and 3 respectively formed on its opposite surfaces in the thickness direction is held by a hold film 5, is fabricated by forming each film 1, 2, 3, and 5 on a film formation substrate 11 and removing the film formation substrate 11 by etching. Even when the hold film 5 is made of material such as resin and therefore exhibits relatively poor adhesion with respect to the other films, the piezoelectric thin film 1 is protected from damage by etchant because the first electrode film 2 which comes into contact with the film formation substrate 11 is formed such that the overall circumference of a peripheral edge portion of the first electrode film 2 laterally extends beyond the lateral surface of the piezoelectric thin film 1 and closely adheres to the hold film 5.

摘要翻译： 通过形成每个膜1,2制造压电薄膜元件D，其中分别在其厚度方向的相对表面上形成有第一和第二电极膜2和3的压电薄膜1由保持膜5保持 ，3和5在成膜基板11上，并通过蚀刻去除成膜基板11。 即使当保持膜5由诸如树脂的材料制成并且因此相对于其它膜显示相对较差的粘合力时，由于与膜接触的第一电极膜2，保护了压电薄膜1免受腐蚀剂损伤 形成基板11形成为使得第一电极膜2的周边部分的整个周边横向延伸超过压电薄膜1的侧表面并且紧密地附着到保持膜5。

公开(公告)号：US06326621B1

公开(公告)日：2001-12-04

申请号：US09323730

申请日：1999-06-01

申请人： Takeshi Kamada ,  Ryoichi Takayama ,  Satoru Fujii ,  Atsushi Tomozawa ,  Isaku Kanno

发明人： Takeshi Kamada ,  Ryoichi Takayama ,  Satoru Fujii ,  Atsushi Tomozawa ,  Isaku Kanno

IPC分类号： G01J502

CPC分类号： G01J5/20 ,  G01J5/34

摘要： The invention provides a compact and high performance infrared radiation detector. The infrared radiation detector contains: a substrate; and at least two infrared radiation detector units selected from the group consisting of a pyroelectric infrared radiation detector unit, a resistive bolometer type infrared radiation detector unit and a ferroelectric bolometer type infrared radiation detector unit, the infrared radiation detector units being disposed on the same side of the substrate.

摘要翻译： 本发明提供了一种紧凑且高性能的红外辐射探测器。 红外辐射检测器包含：基板; 以及选自热电型红外线辐射检测器单元，电阻辐射热计型红外线检测器单元和铁电测辐射热计型红外线检测器单元的至少两个红外线检测器单元，所述红外线检测器单元设置在同一侧 的基底。

公开(公告)号：US06900579B2

公开(公告)日：2005-05-31

申请号：US10333705

申请日：2001-07-23

申请人： Isaku Kanno ,  Shintarou Hara ,  Takanori Nakano

发明人： Isaku Kanno ,  Shintarou Hara ,  Takanori Nakano

IPC分类号： H01L41/187 ,  H01L41/22 ,  H01L41/24 ,  H01L41/316 ,  H02N2/00 ,  H01L41/18

CPC分类号： H01L41/1876 ,  H01L41/0973 ,  H01L41/316

摘要： To provide a piezoelectric thin film having an improved and stable characteristic by controlling stress applied during forming a piezoelectric thin film and providing the piezoelectric thin film having a perovskite structure. A thin film piezoelectric element in which a lower electrode is formed on a substrate, a piezoelectric thin film containing lead is formed on the lower electrode, and an upper electrode is further placed on the piezoelectric thin film, characterized in that the piezoelectric thin film is a dielectric with the perovskite structure having lead, zirconium, and titanium as the main ingredients, and is in a composition region in which, in the composition of the whole piezoelectric thin film, the. Zr/(Zr+Ti) ratio is not less than substantially 0.53, and has a crystal structure of the tetragonal system in which a c axis is longer than an a axis.

摘要翻译： 通过控制在形成压电薄膜期间施加的应力并提供具有钙钛矿结构的压电薄膜来提供具有改善和稳定特性的压电薄膜。 一种在基板上形成下电极的薄膜压电元件，在下电极上形成含有铅的压电薄膜，并且还将上电极放置在压电薄膜上，其特征在于，压电薄膜为 具有以铅，锆和钛为主要成分的钙钛矿结构的电介质，并且在整个压电薄膜的组成中的组成区域中。 Zr /（Zr + Ti）比不小于0.53，并且具有c轴长于轴的四方晶系的晶体结构。

公开(公告)号：US06554408B1

公开(公告)日：2003-04-29

申请号：US09506751

申请日：2000-02-18

申请人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

发明人： Katsumasa Miki ,  Masaya Nakatani ,  Isaku Kanno ,  Ryoichi Takayama ,  Koji Nomura

IPC分类号： B41J2045

CPC分类号： B41J2/1623 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2002/14387

摘要： A fluid ejection device, such as for an ink jet printer or the like, having increased increasing nozzle density. A through-hole (15) is provided in a glass substrate (18) to which a second silicon substrate (19) is directly bonded to form an ink outlet (14). The first silicon substrate (17) is etched to form a pressure chamber (12), an ink channel (13) and an ink inlet (16), and bonded directly to the glass substrate (18). A piezoelectric thin film (11), having a conductive, elastic body (20), is bonded to the first substrate covering the pressure chamber (12). The elastic body (20) is sandwiched between the piezoelectric thin film (11) and a resin layer (25). The second substrate (19) has a thickness of less than about 0.8 mm in a range of thickness comprising about 1.2 to about 1.9 times (rg-rs), wherein rg is the diameter of the wide end of the through-hole (15) and rs is the diameter of the narrow end of the through-hole (15).

摘要翻译： 诸如用于喷墨打印机等的流体喷射装置具有增加的喷嘴密度的增加。 在玻璃基板（18）上设置有通孔（15），第二硅基板（19）直接接合在该玻璃基板（18）上形成出墨口（14）。 蚀刻第一硅衬底（17）以形成压力室（12），墨水通道（13）和墨水入口（16），并直接粘合到玻璃基底（18）上。 具有导电弹性体（20）的压电薄膜（11）与覆盖压力室（12）的第一基板接合。 弹性体（20）夹在压电薄膜（11）和树脂层（25）之间。 第二基板（19）的厚度小于约0.8mm，其厚度范围为约1.2至约1.9倍（rg-rs），其中rg是通孔（15）的宽端的直径， 并且rs是通孔（15）的窄端的直径。

公开(公告)号：US20070091481A1

公开(公告)日：2007-04-26

申请号：US11585858

申请日：2006-10-25

申请人： Hideki Chouji ,  Shigeo Maeda ,  Hideroshi Kotera ,  Isaku Kanno

发明人： Hideki Chouji ,  Shigeo Maeda ,  Hideroshi Kotera ,  Isaku Kanno

IPC分类号： G02B5/08

CPC分类号： G11B7/1362 ,  G02B26/0825 ,  G11B7/0956 ,  G11B7/13927 ,  G11B2007/0006

摘要： A variable-shape mirror has a driver portion, which includes a piezoelectric film and first and second electrode films that sandwich it therebetween, and a substrate arranged on the first electrode film to support the driver portion. As the driver portion is driven, the shape of a mirror film is varied. The substrate is formed of at least one material selected from the group of Si, SiO2, and MgO. The piezoelectric film is formed of PZT or of a perovskite oxide that contains Nb and that is the same kind as PZT. The first electrode film is formed of a plurality of layers of different compositions, and, of those layers, the one formed on the substrate is a metal layer of a composition containing at least one element selected from the group of Ti, Cr, and W and the one formed on the piezoelectric film is a metal layer of a composition containing at least one element selected from the group of Pt, Ir, and Ru.

摘要翻译： 可变形反射镜具有驱动部分，其包括压电膜和夹在其间的第一和第二电极膜，以及布置在第一电极膜上以支撑驱动器部分的基板。 当驱动部分被驱动时，镜膜的形状是变化的。 基板由选自Si，SiO 2和MgO的至少一种材料形成。 该压电膜由PZT或含有Nb的钙钛矿氧化物形成，与PZT相同。 第一电极膜由多层不同的组成形成，并且在这些层中，形成在基底上的层是含有选自Ti，Cr和W中的至少一种元素的组合物的金属层 并且在压电膜上形成的是包含选自Pt，Ir和Ru中的至少一种元素的组合物的金属层。

公开(公告)号：US06557986B2

公开(公告)日：2003-05-06

申请号：US10191614

申请日：2002-07-09

申请人： Osamu Watanabe ,  Koji Matsuo ,  Kenji Tomita ,  Isaku Kanno

发明人： Osamu Watanabe ,  Koji Matsuo ,  Kenji Tomita ,  Isaku Kanno

IPC分类号： B41J2045

CPC分类号： B41J2/1646 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/1425 ,  B41J2002/14387 ,  Y10T29/42 ,  Y10T29/49346

摘要： In order to provide a miniaturized ink jet head having a piezoelectric actuator 21 by which ink in a pressure chamber 3 is emitted and to improve its productivity and reliability, a vibration plate 22 is made up of two layers having different Young's moduli, i.e., a layer 27 having a smaller Young's modulus and a layer 28 having a greater Young's modulus. Further, the Young's modulus of each of the layers 27 and 28 is set at values ranging from 50 GPa to 350 GPa and the total thickness of the vibration plate 22 is set at values ranging from 1 &mgr;m to 7 &mgr;m.