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43 条记录 (耗时 0.019 秒)

    Coupled FBAR filter
    11.
    发明申请
    Coupled FBAR filter 失效
    耦合FBAR滤波器

    公开(公告)号：US20060284702A1

    公开(公告)日：2006-12-21

    申请号：US11453064

    申请日：2006-06-15

    申请人： Tomohiro Iwasaki ,  Hiroshi Nakatsuka ,  Keiji Onishi ,  Hiroyuki Nakamura

    发明人： Tomohiro Iwasaki ,  Hiroshi Nakatsuka ,  Keiji Onishi ,  Hiroyuki Nakamura

    IPC分类号： H03H9/70 ,  H03H9/58

    CPC分类号： H03H9/564 ,  H03H9/0207

    摘要： A coupled FBAR filter 100 includes first and second input/output vibration portions110 and 111 respectively including first and second lower electrodes 104 and 106, first and second upper electrodes 105 and 107, and a piezoelectric thin film 103 interposed therebetween; and a cavity 102 for commonly guaranteeing vibrations of the first and second input/output vibration portions 110 and 111 so as to couple the vibrations. The first and second input/output vibration portions 110 and 111 are located adjacently in contact with each other with a step therebetween, such that the first and second lower electrodes 104 and 106 are not electrically connected to each other and such that the first and second upper electrodes 105 and 107 are not electrically connected to each other. Insulators 108 and 109 are provided in the vicinity of the step.

    摘要翻译： 耦合的FBAR滤波器100包括分别包括第一和第二下部电极104和106的第一和第二输入/输出振动部分110和111，第一和第二上部电极105和107以及介于其间的压电薄膜103; 以及用于共同地保证第一和第二输入/输出振动部分110和111的振动以便耦合振动的空腔102。 第一和第二输入/输出振动部分110和111彼此相邻地彼此接触地定位，使得第一和第二下部电极104和106彼此不电连接，并且使得第一和第二输入/输出振动部分110和111 上电极105和107彼此不电连接。 绝缘体108和109设置在台阶附近。

    Coupled FBAR filter
    15.
    发明申请
    Coupled FBAR filter 失效
    耦合FBAR滤波器

    公开(公告)号：US20060284703A1

    公开(公告)日：2006-12-21

    申请号：US11453070

    申请日：2006-06-15

    申请人： Tomohiro Iwasaki ,  Hiroshi Nakatsuka ,  Keiji Onishi ,  Hiroyuki Nakamura

    发明人： Tomohiro Iwasaki ,  Hiroshi Nakatsuka ,  Keiji Onishi ,  Hiroyuki Nakamura

    IPC分类号： H03H9/70 ,  H03H9/58

    CPC分类号： H03H9/0095 ,  H03H9/0004 ,  H03H9/0207 ,  H03H9/02157 ,  H03H9/564

    摘要： In a balanced/unbalanced type coupled FBAR filter 100, an area size of a first lower electrode 102 is generally equal to a total area size of second and third lower electrodes 104 and 106 and an area for isolating the second and third lower electrodes 104 and 106. An area size of a first upper electrode 103 is generally equal to a total area size of second and third upper electrodes 105 and 107 and an area for isolating the second and third upper electrodes 105 and 107. The third lower electrode 106 and the second upper electrode 105 are located to face each other, and the third upper electrode 107 and the second lower electrode 104 are located to face each other. Apart of the second lower electrode 104 and a part of the second upper electrode 105 are located to face each other.

    摘要翻译： 在平衡/不平衡型耦合FBAR滤波器100中，第一下电极102的面积大小通常等于第二和第三下电极104和106的总面积尺寸，以及用于隔离第二和第三下电极104和 106。 第一上部电极103的面积尺寸大体上等于第二和第三上部电极105和107的总面积尺寸以及用于隔离第二和第三上部电极105和107的区域。 第三下部电极106和第二上部电极105相对配置，第三上部电极107和第二下部电极104相对配置。 第二下电极104和第二上电极105的一部分位于彼此面对。

    OSCILLATOR
    16.
    发明申请
    OSCILLATOR 有权
    振荡器

    公开(公告)号：US20130147567A1

    公开(公告)日：2013-06-13

    申请号：US13702396

    申请日：2012-06-08

    申请人： Takehiko Yamakawa ,  Tomohiro Iwasaki ,  Kunihiko Nakamura ,  Keiji Onishi

    发明人： Takehiko Yamakawa ,  Tomohiro Iwasaki ,  Kunihiko Nakamura ,  Keiji Onishi

    IPC分类号： H03B5/30

    CPC分类号： H03B5/30 ,  H03L1/02 ,  H03L1/027 ,  H03L5/00 ,  H03L7/183

    摘要： A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.

    摘要翻译： 具有包括MEMS谐振器和放大器的反馈型振荡电路的MEMS振荡器，可操作以控制施加到MEMS谐振器的振荡部件的偏置电压的电压控制单元和接收来自所述MEMS谐振器的输出的自动增益控制单元 放大器，并且基于输出的电平，输出用于控制放大器对放大器的增益的幅度控制信号，使得放大器的输出电平达到预定电平，其中电压控制单元控制 基于MEMS谐振器的工作温度施加到振荡构件的偏置电压，使得MEMS谐振器的峰值增益与工作温度无关地具有预定值，并且电压控制单元导出MEMS的工作温度 谐振器通过监控振幅控制信号。

    Piezoelectric resonator and method for producing the same
    18.
    发明授权
    Piezoelectric resonator and method for producing the same 失效
    压电谐振器及其制造方法

    公开(公告)号：US07417360B2

    公开(公告)日：2008-08-26

    申请号：US11580032

    申请日：2006-10-13

    申请人： Tomohide Kamiyama ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohiro Iwasaki

    发明人： Tomohide Kamiyama ,  Keiji Onishi ,  Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Tomohiro Iwasaki

    IPC分类号： H01L41/053

    CPC分类号： H03H3/02 ,  H03H9/02118 ,  H03H9/0514 ,  H03H9/132 ,  H03H9/172 ,  H03H9/564 ,  H03H9/568 ,  H03H9/706

    摘要： An upper electrode is provided on one main surface of a piezoelectric layer, and a lower electrode is provided on the other main surface thereof. A vibration section is an area in which the lower electrode, the piezoelectric layer and the upper electrode overlap in a vertical projection direction. Line electrodes for respectively connecting the lower electrode and the upper electrode to input/output electrodes are provided on the one main surface and the other main surface of the piezoelectric layer. The vibration section is placed on (connected to) the substrate via the support section. The support section is provided on an area of the piezoelectric layer excluding the area on which the vibration section is provided and the area on which the input/output electrodes and the line electrodes are provided.

    摘要翻译： 上电极设置在压电层的一个主表面上，下电极设置在另一个主表面上。 振动部是下部电极，压电体层和上部电极在垂直方向上重叠的区域。 用于将下电极和上电极分别连接到输入/输出电极的线电极设置在压电层的一个主表面和另一个主表面上。 振动部分经由支撑部分放置在（连接到）基板上。 支撑部设置在除了设置振动部的区域以外的压电层的区域和设置有输入输出电极和线电极的区域。

    MEMS PRESSURE SENSOR
    19.
    发明申请
    MEMS PRESSURE SENSOR 有权
    MEMS压力传感器

    公开(公告)号：US20130047746A1

    公开(公告)日：2013-02-28

    申请号：US13583379

    申请日：2012-04-02

    申请人： Kunihiko Nakamura ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Keiji Onishi

    发明人： Kunihiko Nakamura ,  Tomohiro Iwasaki ,  Takehiko Yamakawa ,  Keiji Onishi

    IPC分类号： G01L1/10

    CPC分类号： G01L9/0019 ,  H03H9/2463 ,  H03H2009/02488

    摘要： A MEMS resonator 100 including a substrate 112; an vibrator 102 including an mechanically vibrating part and a fixed part; at least one electrode 108 that is close to the vibrator and has an area overlapping with the vibrator across a gap 109 in a direction perpendicular to a surface of the substrate; and a pressure transferring mechanism to displace the at least one electrode according to an externally applied pressure so as to change the gap; is connected to a detection circuit that detects transmission characteristics of an AC signal from an input electrode to an output electrode, the input and output electrodes being one and the other of the vibrator 102 and the at least one electrode 108, and the pressure is detected based on the transmission characteristics of the AC signal that is detected by the detection circuit.

    摘要翻译： 包括基板112的MEMS谐振器100; 包括机械振动部分和固定部分的振动器102; 至少一个电极108，其靠近振动器并且具有与垂直于衬底的表面的方向上的跨越间隙109的振动器重叠的区域; 以及压力传递机构，用于根据外部施加的压力移动所述至少一个电极，以便改变所述间隙; 连接到检测电路，其检测从输入电极到输出电极的AC信号的传输特性，输入和输出电极是振动器102和至少一个电极108中的一个和另一个，并且检测到压力 基于由检测电路检测到的AC信号的传输特性。

    MEMS ELEMENT, AND MANUFACTURING METHOD OF MEMS ELEMENT
    20.
    发明申请
    MEMS ELEMENT, AND MANUFACTURING METHOD OF MEMS ELEMENT 有权
    MEMS元件和MEMS元件的制造方法

    公开(公告)号：US20120075030A1

    公开(公告)日：2012-03-29

    申请号：US13322990

    申请日：2011-02-24

    申请人： Tomohiro Iwasaki ,  Keiji Onishi ,  Kunihiko Nakamura

    发明人： Tomohiro Iwasaki ,  Keiji Onishi ,  Kunihiko Nakamura

    IPC分类号： H03B5/30 ,  H01L21/306 ,  H02N1/00

    CPC分类号： H03H9/1057 ,  B81B3/00 ,  B81B7/0077 ,  B81C1/00333 ,  B81C1/00476 ,  H03H3/0072 ,  H03H9/2405 ,  H03H9/2447

    摘要： In a MEMS device having a substrate 1, a sealing membrane 7, and a movable portion 3 of beam and an electrode 5 which have a region wherein they overlap with a gap in perpendicular to a substrate 1 surface, a first cavity 9 is on the side of the movable portion 3 in the direction perpendicular to the surface of the substrate, and a second cavity is the other cavity, and an inner surface a of a side wall A in contact with the electrode 5, of the first cavity 9, is positioned more inside than an inner surface b of a side wall B in contact with the electrode 5, of the second cavity 10, in the direction parallel to the substrate surface, such that the movable portion 3 does not collide with the electrode 5 when mechanical stress is applied from outside to the sealing membrane 7.

    摘要翻译： 在具有基板1，密封膜7和梁的可动部分3以及具有与垂直于基板1表面的间隙重叠的区域的电极5的MEMS装置中，第一空腔9位于 可动部3的与该基板的表面垂直的方向的一侧，第二空腔为另一个空腔，与第一空腔9的电极5接触的侧壁A的内表面a为 定位在比与第二腔10的电极5接触的侧壁B的内表面b更靠内侧表面b的平行于基底表面的方向上，使得当机械的时候可动部分3不与电极5碰撞 从外部向密封膜7施加应力。