摘要:
A transmission electron microscope makes it possible to search for defects without applying an undesirable treatment to a specimen by using a reference specimen prepared separately from a specimen to be observed. A pair of specimen holders detachable from the column of the electron microscope are adjacently arranged at upper and lower stages respectively along an electron beam axis to position the specimens closely to each other in an electron beam illuminating position. The pair of holders can be independently set to or removed from the electron beam illuminating position. The specimen holders include devices for selectively finely adjusting the spacing between the specimens, the angle of the specimen with respect to the electron beam axis and with respect to a plane perpendicular to the electron beam axis.
摘要:
A mass spectrometer for analyzing trace impurities on a level between ppt and ppb contained in silicon material gas such as monosilane gas. The mass spectrometer includes an ion formation region, reaction region, and mass analysis region. Ion formation gas is introduced into the ion formation region and sample gas (silicon material gas) is introduced into the reaction region. The ion formation region ionizes ion formation gas by an ionizer and forms primary ions. When the pressure of ion formation gas is made higher than the pressure of sample gas, the ion formation gas flows into the reaction region from the ion formation region together with primary ions and is mixed with the sample gas. In the reaction region, an ion-molecule reaction is produced between the primary ions and trace impurities contained in the sample gas and the trace impurities contained in the sample gas are ionized. The ion intensity of trace impunities, the concentration of trace impurities in the sample gas is determined using a calibration curve. When the gas pressure in the reaction region is kept at almost 1 atmosphere, the reaction is promoted and when the ion-molecule reaction time is optimized according to the size of the reaction region and the voltage condition, impurities on a level between ppt and ppb can be detected and determined.
摘要:
A mass spectrometer, including an evacuable vessle, mass separation means provided in the evacuable vessel for separating ions in accordance with the mass thereof, and ion detection means provided in the evacuable vessel for detecting ions emitted from the mass separation means to convert the emitted ions into an electric signal, in which the ion detection means includes an electron-multiplier for detecting positive ions and a photo-multiplier for detecting negative ions. According to this mass spectrometer, positive ions can be detected at high sensitivity, and negative ions are readily detected.
摘要:
An apparatus for measuring metabolites contained in human expired air and for measuring metabolites contained in human urine and for extracting a correlation between the metabolite data in the expired air and the metabolite data in the urine is suitable for parallel analysis of the metabolites in human urine and expired air. An atmospheric pressure ionization mass spectrometer is suitable for measuring metabolites in the expired air. By storing reference data showing the relation between the metabolites in the expired air and those in the urine and, by comparing such data with a subject's metabolite data in the expired air and the metabolite data in the urine, abnormality of a subject can be detected.
摘要:
A slide device for an electronic device includes a substrate including a substrate including a pair of side edges; an intermediate plate including a pair of sandwiching portions slidably sandwiching the pair of side edges in the front and back direction, respectively, and a pair of outer edges at outer sides of the side edges in the width direction, respectively; a slide plate including a pair of outer sandwiching portions slidably sandwiching the pair of outer edges in the front and back direction, respectively; an intermediate housing position defining portion that protrudes an outer side in the width direction from the front end portion of the outer edge for defining an intermediate housing position of the slide plate with respect to the intermediate plate; an intermediate using position defining portion that protrudes the outer side in the width direction from the back end portion of the outer edge for defining an intermediate using position of the slide plate with respect to the intermediate plate; a housing position defining portion that protrudes in an upper direction of an upper and lower direction at a front portion of the substrate for defining a housing position of the intermediate plate with respect to the substrate; and a using position defining portion that protrudes in the upper direction at a back portion of the substrate for defining a using position of the intermediate plate with respect to the substrate.
摘要:
The sliding apparatus includes a substrate fixed to a main body, a slide plate being fixed to a sub-body and being slidable between a closed position and an open position in an opening/closing direction, a hole formed in the slide plate, a sloped surface part being formed in the main body, and being engaged with the hole in the closed position, and including a sloped surface being sloped toward a rear direction in the opening/closing direction, a slide guiding part guiding the slide plate in a sliding direction, a restricting part restricting movement of a closing direction end of the slide plate in the front/rear direction during an initial stage of sliding the slide plate from the closed position to the open position, and a sloped part being formed in a closing direction end of the slide guiding part and being sloped in a rear direction.
摘要:
An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.
摘要:
The present invention relates to a thin slide mechanism that can be incorporated in a portable electronic device. A slide unit mechanism having: a plate 1 of a quadrangular shape in a plane view in which a protruding portion A is formed in a sliding direction in the center of the rear surface and receding portions B are formed in two locations respectively to the left and to the right of the protruding portion; two sliding members 2 slidably joined to both ends of the plate; and a linking member 22 that integrally links the two sliding members on the front surface side of the plate and has a width substantially equal to or less than a longitudinal width of the sliding member in the sliding direction, wherein the entire portion or a part of the rear surface portion of the folded sliding member, when folded to the rear surface, is extended to serve as stopper portions 3, a torsion spring is arranged in each of the left and right receding portions of the plate, one end of each torsion spring is locked to the substantially central portion, in the sliding direction, of the side surface of the protruding portion formed on the plate, the other end of each torsion spring is locked to the stopper portions of the sliding members, connection members for connection to a housing are formed at the approximately four corners of the plate, and sliding ends are formed when the connection members and the stopper portions of the sliding members abut on each other.
摘要:
An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.
摘要:
An object of the invention is to realize a method and an apparatus for processing and observing a minute sample which can observe a section of a wafer in horizontal to vertical directions with high resolution, high accuracy and high throughput without splitting any wafer which is a sample. In an apparatus of the invention, there are included a focused ion beam optical system and an electron optical system in one vacuum container, and a minute sample containing a desired area of the sample is separated by forming processing with a charged particle beam, and there are included a manipulator for extracting the separated minute sample, and a manipulator controller for driving the manipulator independently of a wafer sample stage.