公开(公告)号：US20030211312A1

公开(公告)日：2003-11-13

申请号：US10456299

申请日：2003-06-06

Applicant: International Business Machines Corporation

Inventor： John M. Cotte ,  Kenneth John McCullough ,  Wayne Martin Moreau ,  Kevin Petrarca ,  John P. Simons ,  Charles J. Taft ,  Richard Volant

IPC: B32B003/26

CPC classification number: H01L21/02118 ,  H01L21/0212 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/31058 ,  H01L21/312 ,  H01L21/3121 ,  H01L21/31695 ,  H01L21/7682 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/12044 ,  Y10T428/249978 ,  Y10T428/24999 ,  H01L2924/00

Abstract: A dielectric material formed by contacting a low dielectric constant polymer with liquid or supercritical carbon dioxide, under thermodynamic conditions which maintain the carbon dioxide in the liquid or supercritical state, wherein a porous product is formed. Thereupon, thermodynamic conditions are changed to ambient wherein carbon dioxide escapes from the pores and is replaced with air.

公开(公告)号：US20030008129A1

公开(公告)日：2003-01-09

申请号：US09893104

申请日：2001-06-27

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： John M. Cotte ,  Kenneth John McCullough ,  Wayne Martin Moreau ,  Kevin Petrarca ,  John P. Simons ,  Charles J. Taft ,  Richard Volant

IPC: B32B003/26

CPC classification number: H01L21/02118 ,  H01L21/0212 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/31058 ,  H01L21/312 ,  H01L21/3121 ,  H01L21/31695 ,  H01L21/7682 ,  H01L23/5329 ,  H01L2221/1047 ,  H01L2924/0002 ,  H01L2924/12044 ,  Y10T428/249978 ,  Y10T428/24999 ,  H01L2924/00

Abstract: A dielectric material formed by contacting a low dielectric constant polymer with liquid or supercritical carbon dioxide, under thermodynamic conditions which maintain the carbon dioxide in the liquid or supercritical state, wherein a porous product is formed. Thereupon, thermodynamic conditions are changed to ambient wherein carbon dioxide escapes from the pores and is replaced with air.

Abstract translation: 在将二氧化碳保持在液态或超临界状态的热力学条件下，通过使低介电常数聚合物与液体或超临界二氧化碳接触而形成的电介质材料，其中形成多孔产品。 因此，热力学条件改变为环境，其中二氧化碳从孔中逸出并被空气替代。

公开(公告)号：US20030003762A1

公开(公告)日：2003-01-02

申请号：US09893207

申请日：2001-06-27

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： John Michael Cotte ,  Kenneth John McCullough ,  Wayne Martin Moreau ,  Keith R. Pope ,  John P. Simons ,  Charles J. Taft

IPC: H01L021/302

CPC classification number: H01L21/02101 ,  H01L21/02057

Abstract: A process of removing residue from an etched precision surface. In this process the etched precision surface is contacted with a composition which includes liquid or supercritical carbon dioxide and a fluoride-generating species.

Abstract translation: 从蚀刻精密表面除去残留物的方法。 在该过程中，蚀刻的精密表面与包括液体或超临界二氧化碳和产生氟化物质的组合物接触。

公开(公告)号：US20020088477A1

公开(公告)日：2002-07-11

申请号：US09755267

申请日：2001-01-05

Applicant: International Business Machines Corporation

Inventor： John Michael Cotte ,  Donald J. Delehanty ,  Kenneth John McCullough ,  Wayne Martin Moreau ,  John P. Simons ,  Charles J. Taft ,  Richard P. Volant

IPC: C23G001/00 ,  C03C023/00 ,  C23G001/02 ,  B08B009/00 ,  B08B003/00 ,  B08B003/14 ,  B08B007/00 ,  C11D001/00

CPC classification number: H01L21/02074 ,  B08B7/0021 ,  C11D1/004 ,  C11D3/2075 ,  C11D3/43 ,  C23G5/00 ,  H01L21/02065 ,  Y10S134/902

Abstract: A process of removing residual slurry resulting from chemical mechanical polishing of a workpiece in which the workpiece is contacted with a composition of a supercritical fluid, said supercritical fluid including supercritical carbon dioxide and a co-solvent, and a surfactant.

Abstract translation: 一种从工件与超临界流体的组合物，所述超临界流体包括超临界二氧化碳和共溶剂以及表面活性剂接触的工件的化学机械抛光产生的剩余浆料的除去过程。