公开(公告)号：US20240264530A1

公开(公告)日：2024-08-08

申请号：US18147472

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Ryan Carrazzone ,  Kyle Arrington ,  Brandon Rawlings ,  Bohan Shan ,  Dingying Xu

IPC: G03F7/16 ,  C08G75/20 ,  G03F7/038 ,  G03F7/039

CPC classification number: G03F7/168 ,  C08G75/20 ,  G03F7/038 ,  G03F7/039

Abstract: Light responsive photoresists, and methods of using light responsive photoresists in processes, such as lithography processes. The light responsive photoresists may include a polymer featuring a photocleavable group. Due to the photocleavable group, the polymer may depolymerize when irradiated with one or more wavelengths of light. The depolymerized products may be in the gas phase.

公开(公告)号：US20240222243A1

公开(公告)日：2024-07-04

申请号：US18091555

申请日：2022-12-30

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Bai Nie ,  Srinivas Venkata Ramanuja Pietambaram ,  Gang Duan ,  Kyle Jordan Arrington ,  Ziyin Lin ,  Hongxia Feng ,  Yiqun Bai ,  Xiaoying Guo ,  Dingying Xu ,  Kristof Darmawikarta

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/15

CPC classification number: H01L23/49822 ,  H01L21/4857 ,  H01L23/15 ,  H01L23/49816 ,  H01L23/49827 ,  H01L23/49894 ,  H01L24/16 ,  H01L2224/16227

Abstract: An integrated circuit device substrate includes a first glass layer with a redistribution layer mounting region and an integrated circuit device mounting region, wherein a first major surface of the first glass layer is overlain by a first dielectric layer, and wherein the first glass layer includes a first plurality of conductive pillars. A second glass layer is on the redistribution layer mounting region on the first glass layer, wherein the second glass layer includes a second dielectric layer on a second major surface thereof, and wherein the second dielectric layer is bonded to the first dielectric layer on the first major surface of the first glass layer, the second glass layer including a second plurality of conductive pillars electrically interconnected with the first plurality of conductive pillars in the first glass layer.

公开(公告)号：US20240219656A1

公开(公告)日：2024-07-04

申请号：US18089963

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Ziyin Lin ,  Yiqun Bai ,  Bohan Shan ,  Kyle Jordan Arrington ,  Haobo Chen ,  Dingying Xu ,  Robert Alan May ,  Gang Duan ,  Bai Nie ,  Srinivas Venkata Ramanuja Pietambaram

IPC: G02B6/42 ,  H01L23/15 ,  H01L25/16

CPC classification number: G02B6/4214 ,  H01L23/15 ,  H01L25/167 ,  H01L24/16 ,  H01L2224/16227

Abstract: A semiconductor device and associated methods are disclosed. In one example, the electronic device includes a photonic die and a glass substrate. In selected examples, the semiconductor device includes one or more turning mirrors to direct an optical signal between the photonic die and the glass substrate. Configurations of turning mirrors are provided to improve signal integrity and manufacturability.

公开(公告)号：US20240219654A1

公开(公告)日：2024-07-04

申请号：US18089892

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Ziyin Lin ,  Yiqun Bai ,  Bohan Shan ,  Kyle Jordan Arrington ,  Haobo Chen ,  Dingying Xu ,  Robert Alan May ,  Gang Duan ,  Bai Nie ,  Srinivas Venkata Ramanuja Pietambaram

IPC: G02B6/42 ,  H01L25/16

CPC classification number: G02B6/4214 ,  H01L25/167

Abstract: A semiconductor device and associated methods are disclosed. In one example, the electronic device includes a photonic die and a glass substrate. In selected examples, the semiconductor device includes one or more turning mirrors to direct an optical signal between the photonic die and the glass substrate. Configurations of turning mirrors are provided to improve signal integrity and manufacturability.

公开(公告)号：US20240213169A1

公开(公告)日：2024-06-27

申请号：US18086265

申请日：2022-12-21

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Yiqun Bai ,  Dingying Xu ,  Srinivas Venkata Ramanuja Pietambaram ,  Hongxia Feng ,  Gang Duan ,  Xiaoying Guo ,  Ziyin Lin ,  Bai Nie ,  Kyle Jordan Arrington ,  Jeremy D. Ecton ,  Brandon C. Marin

IPC: H01L23/538 ,  H01L21/48 ,  H01L21/56 ,  H01L23/15 ,  H01L23/31 ,  H01L23/498 ,  H01L23/64 ,  H10B80/00

CPC classification number: H01L23/5389 ,  H01L21/4857 ,  H01L21/486 ,  H01L21/565 ,  H01L23/15 ,  H01L23/3128 ,  H01L23/49822 ,  H01L23/49838 ,  H01L23/5382 ,  H01L23/5386 ,  H01L23/645 ,  H10B80/00 ,  H01L24/32

Abstract: An electronic system includes a substrate and a top surface active component die. The substrate includes a glass core layer including a cavity formed through the glass core layer; a glass core layer active component die disposed in the cavity; a first buildup layer contacting a first surface of the glass core layer; a second buildup layer contacting a second surface of the glass core layer; and a mold layer contacting a surface of the first buildup layer. The mold layer includes a mold layer active component die disposed in the mold layer, and the first buildup layer includes electrically conductive interconnect providing electrical continuity between the glass core layer active component die and the mold layer active component die. The top surface active component die is attached to the top surface of the substrate and electrically connected to the mold layer active component die.

公开(公告)号：US20240112971A1

公开(公告)日：2024-04-04

申请号：US17957359

申请日：2022-09-30

Applicant: Intel Corporation

Inventor： Yiqun Bai ,  Dingying Xu ,  Srinivas Pietambaram ,  Hongxia Feng ,  Gang Duan ,  Xiaoying Guo ,  Ziyin Lin ,  Bai Nie ,  Haobo Chen ,  Kyle Arrington ,  Bohan Shan

IPC: H01L23/15 ,  H01L21/02 ,  H01L23/495

CPC classification number: H01L23/15 ,  H01L21/02354 ,  H01L23/49506

Abstract: An integrated circuit (IC) device comprises a substrate comprising a glass core. The glass core comprises a first surface and a second surface opposite the first surface, and a first sidewall between the first surface and the second surface. The glass core may include a conductor within a through-glass via extending from the first surface to the second surface and a build-up layer. The glass cord comprises a plurality of first areas of the glass core and a plurality of laser-treated areas on the first sidewall. A first one of the plurality of laser-treated areas may be spaced away from a second one of the plurality of laser-treated areas. A first area may comprise a first nanoporosity and a laser-treated area may comprise a second nanoporosity, wherein the second nanoporosity is greater than the first nanoporosity.

公开(公告)号：US20250022786A1

公开(公告)日：2025-01-16

申请号：US18899851

申请日：2024-09-27

Applicant: Intel Corporation

Inventor： Jeremy Ecton ,  Hiroki Tanaka ,  Haobo Chen ,  Brandon Christian Marin ,  Srinivas Venkata Ramanuja Pietambaram ,  Gang Duan ,  Jason Gamba ,  Bohan Shan ,  Robert May ,  Benjamin Taylor Duong ,  Bai Nie ,  Whitney Bryks

IPC: H01L23/498 ,  H01L23/08

Abstract: Methods and apparatus for edge protected glass cores are disclosed herein. An example package substrate includes a first glass layer including a first surface, a second surface opposite the first surface, and first lateral surfaces extending between the first and second surfaces, the first glass layer having a first via extending between the first surface and the second surface; and a dielectric material in contact with the first surface of the first glass layer and in contact with the first lateral surfaces of the first glass layer.

公开(公告)号：US12119326B2

公开(公告)日：2024-10-15

申请号：US17126505

申请日：2020-12-18

Applicant: Intel Corporation

Inventor： Omkar G. Karhade ,  Bohan Shan

IPC: H01L23/538 ,  H01L23/00 ,  H01L25/065

CPC classification number: H01L25/0655 ,  H01L23/5381 ,  H01L23/5383 ,  H01L24/16 ,  H01L2224/16227

Abstract: Disclosed herein are microelectronic structures including bridges, as well as related assemblies and methods. In some embodiments, a microelectronic structure may include a substrate and a bridge.

公开(公告)号：US20240312865A1

公开(公告)日：2024-09-19

申请号：US18182879

申请日：2023-03-13

Applicant: Intel Corporation

Inventor： Kyle Arrington ,  Bohan Shan ,  Haobo Chen ,  Bai Nie ,  Srinivas Pietambaram ,  Gang Duan ,  Ziyin Lin ,  Hongxia Feng ,  Yiqun Bai ,  Xiaoying Guo ,  Dingying Xu

IPC: H01L23/373 ,  H01L21/48 ,  H01L23/498

CPC classification number: H01L23/3733 ,  H01L21/486 ,  H01L23/49827 ,  H01L23/49866 ,  H01L23/49877 ,  H01L23/15

Abstract: Methods, systems, apparatus, and articles of manufacture to improve reliability of vias in a glass substrate of an integrated circuit package are disclosed. An example integrated circuit (IC) package substrate includes a glass substrate, a via extending between first and second surfaces of the glass substrate, and a conductive material provided in the via, the conductive material including gallium and silver.

公开(公告)号：US20240222257A1

公开(公告)日：2024-07-04

申请号：US18089801

申请日：2022-12-28

Applicant: Intel Corporation

Inventor： Bohan Shan ,  Haobo Chen ,  Srinivas Venkata Ramanuja Pietambaram ,  Hongxia Feng ,  Gang Duan ,  Xiaoying Guo ,  Yiqun Bai ,  Dingying Xu ,  Bai Nie ,  Kyle Jordan Arrington ,  Ziyin Lin ,  Rahul N. Manepalli ,  Brandon C. Marin ,  Jeremy D. Ecton

IPC: H01L23/498 ,  H01L21/48 ,  H01L23/538

CPC classification number: H01L23/49894 ,  H01L21/481 ,  H01L21/486 ,  H01L23/49827 ,  H01L23/5384 ,  H01L23/15

Abstract: A substrate for an electronic system includes a glass core layer. The glass core layer includes a first surface and a second surface opposite the first surface; and at least one through-glass via (TGV) extending through the glass core layer from the first surface to the second surface. The TGV includes an opening filled with an electrically conductive material; and a via liner including a sidewall material disposed on a sidewall of the opening between the glass of the glass core layer and the electrically conductive material, wherein the sidewall material includes carbon.