公开(公告)号：US11107858B2

公开(公告)日：2021-08-31

申请号：US16666024

申请日：2019-10-28

Applicant: InvenSense, Inc.

Inventor： Renata Melamud Berger ,  Julius Ming-Lin Tsai ,  Stephen Lloyd

IPC: H01L27/20 ,  G01N29/24 ,  G01N29/28 ,  H01L41/113 ,  B81C1/00 ,  G06K9/00 ,  H01L41/08

Abstract: An electronic device comprises a CMOS substrate having a first surface and a second surface opposite the first surface. A plurality of ultrasonic transducers is provided having a transmit/receive surface. A contact surface is piezoelectrically associated with the plurality of ultrasonic transducers and is formed on the first surface of the CMOS substrate. The plurality of ultrasonic transducers is disposed on the second surface of the CMOS substrate, with the transmit/receive side attached to the second surface thereof such that the CMOS substrate is between the plurality of ultrasonic transducers and the platen. An image sensing system is also provided, together with a method for ultrasonic sensing in the electronic device.

公开(公告)号：US10793424B2

公开(公告)日：2020-10-06

申请号：US16558145

申请日：2019-09-01

Applicant: INVENSENSE, INC.

Inventor： Matthew Julian Thompson ,  Stephen Lloyd ,  Joseph Seeger

IPC: B81B7/00 ,  G01N3/02 ,  G01M7/08 ,  G01M17/007 ,  G01M1/16 ,  B81B7/02 ,  B81C99/00 ,  G06F11/30 ,  H01L21/66 ,  H03K21/02

Abstract: A device with a first MEMS device and a second MEMS device is disclosed. The first MEMS device is configured to sense at least one external influence. The second MEMS device is responsive to the at least one external influence. The first MEMS device is configured to change a state when the at least one external influence exceeds a threshold value. The first MEMS device is configured to retain the state below the threshold value, wherein the change in state of the first MEMS device is done passively and wherein the state of the first MEMS device is indicative of a status of the second MEMS device. In one example, the first MEMS device further comprises a normally open switch that closes when the external influence exceeds the threshold value.

公开(公告)号：US09835454B2

公开(公告)日：2017-12-05

申请号：US14617391

申请日：2015-02-09

Applicant: InvenSense, Inc.

Inventor： Stephen Lloyd

IPC: G01C19/5776 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/5614 ,  G01C19/5726

CPC classification number: G01C19/5719 ,  G01C19/5614 ,  G01C19/5726 ,  G01C19/5776

Abstract: A system and/or method for efficiently operating a MEMS gyroscope without drive circuitry and/or with drive circuitry and a non-constant oscillating amplitude. In a non-limiting example, drive circuitry may be utilized to drive the MEMS gyroscope proof mass to a desired oscillating amplitude, and then the drive circuitry may be powered off. Rotational velocity may be sensed while the proof mass is being driven to a desired oscillating amplitude, while the proof mass is being maintained at a desired oscillating amplitude, and/or while the proof mass amplitude decays.

公开(公告)号：US09628713B2

公开(公告)日：2017-04-18

申请号：US14524807

申请日：2014-10-27

Applicant: Invensense Inc

Inventor： Stephen Lloyd ,  Mehran Ayat

IPC: H04N5/232

CPC classification number: H04N5/2328 ,  H04N5/23212 ,  H04N5/23258 ,  H04N5/23287

Abstract: Systems and methods are disclosed for implementing optical image stabilization (OIS) in a mobile device. One or more functions associated with OIS may be performed by hardware and/or processing resources that are provided independently of a camera unit.

公开(公告)号：US09428379B2

公开(公告)日：2016-08-30

申请号：US14174639

申请日：2014-02-06

Applicant: InvenSense, Inc.

Inventor： Erhan Polatkan Ata ,  Martin Lim ,  Xiang Li ,  Stephen Lloyd ,  Michael Julian Daneman

IPC: H01L29/82 ,  B81B7/00 ,  H04R19/00 ,  B81B3/00

CPC classification number: B81B7/0061 ,  B81B3/001 ,  B81B2201/0257 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2207/012 ,  H04R19/005

Abstract: A MEMS device is disclosed. The MEMS device comprises a first plate with a first surface and a second surface; and an anchor attached to a first substrate. The MEMS device further includes a second plate with a third surface and a fourth surface attached to the first plate. A linkage connects the anchor to the first plate, wherein the first plate and second plate are displaced in the presence of an acoustic pressure differential between the first and second surfaces of the first plate. The first plate, second plate, linkage, and anchor are all contained in an enclosure formed by the first substrate and a second substrate, wherein one of the first and second substrates contains a through opening to expose the first surface of the first plate to the environment.

Abstract translation: 公开了MEMS器件。 MEMS器件包括具有第一表面和第二表面的第一板; 以及附接到第一基板的锚。 MEMS器件还包括具有附接到第一板的第三表面和第四表面的第二板。 连杆将锚固件连接到第一板，其中第一板和第二板在第一板的第一和第二表面之间存在声压差的情况下移位。 第一板，第二板，连杆和锚固件都包含在由第一基板和第二基板形成的外壳中，其中第一和第二基板中的一个包含通孔，以将第一板的第一表面暴露于 环境。

公开(公告)号：US20160202224A1

公开(公告)日：2016-07-14

申请号：US14595903

申请日：2015-01-13

Applicant: InvenSense, Inc.

Inventor： Stephen Lloyd

IPC: G01N33/00 ,  G05D7/01 ,  F16K31/02 ,  H04R1/02 ,  G01K13/02

CPC classification number: G01N33/0016 ,  F16K31/02 ,  G01K13/02 ,  G01K2013/024 ,  G05D7/01 ,  H04R1/2811 ,  H04R19/005 ,  H04R2201/003 ,  H04R2499/11

Abstract: A system and method for providing and/or controlling air flow to an air sensor. As a non-limiting example, an air sensor system may include mechanical and/or electromechanical features (e.g., MEMS features) to control air flow to an air sensor. Various aspects of the disclosure may, for example, be implemented in a personal electronic device.

Abstract translation: 一种用于向空气传感器提供和/或控制气流的系统和方法。 作为非限制性示例，空气传感器系统可以包括用于控制到空气传感器的空气流的机械和/或机电特征（例如，MEMS特征）。 本公开的各个方面可以例如在个人电子设备中实现。

公开(公告)号：US20140264645A1

公开(公告)日：2014-09-18

申请号：US13831470

申请日：2013-03-14

Applicant: INVENSENSE, INC.

Inventor： Michael Julian Daneman ,  Martin Lim ,  Li-Wen Hung ,  Stephen Lloyd

IPC: H01L27/12

CPC classification number: H01L27/1203 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/053

Abstract: A Micro-Electro-Mechanical Systems (MEMS) device includes a first substrate with a first surface and a second surface, the first substrate including a base layer, a moveable beam disposed on the base layer, at least one metal layer, and one or more standoffs disposed on the base layer such that one or more metal layers are situated on the top surface of the one or more standoffs. The MEMS device further includes a second substrate including one or more metal layers bonded to the one or more standoffs resulting in an electrical connection between at least a portion of the one or more metal layers of the second substrate and one or more of the at least one electrode on the bottom surface and the at least one electrode on the top surface.

Abstract translation: 微电子机械系统（MEMS）装置包括具有第一表面和第二表面的第一基底，第一基底包括基底层，设置在基底层上的可移动光束，至少一个金属层，以及一个或 更多的间隔设置在基底层上，使得一个或多个金属层位于一个或多个支座的顶表面上。 MEMS器件还包括第二衬底，第二衬底包括一个或多个结合到一个或多个支座的金属层，导致在第二衬底的一个或多个金属层的至少一部分与至少一个或多个之间的电连接 底表面上的一个电极和顶表面上的至少一个电极。