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11.发明授权Interferometric optical systems having simultaneously scanned optical path length and focus 失效具有同时扫描的光程长度和焦距的干涉光学系统公开(公告)号：US07012700B2
公开(公告)日：2006-03-14
申请号：US10464723
申请日：2003-06-17
IPC分类号： G01B9/02
CPC分类号： G01B11/2441 , G01B9/02039 , G01B9/02063 , G01B9/0209
摘要： In certain aspects, the invention features scanning interferometry systems and methods that can scan an optical measurement surface over distances greater than a depth of focus of imaging optics in the interferometry system, while keeping an optical measurement surface in focus (i.e., maintaining an image of the optical measurement surface coincident with the detector). The optical measurement surface refers to a theoretical test surface in the path of test light in the interferometer that would reflect the test light to produce an optical path length difference (OPD) between it and reference light that is equal to a constant across a detector.
摘要翻译： 在某些方面，本发明的特征在于扫描干涉测量系统和方法，其可以在保持光学测量表面聚焦的同时在干涉测量系统中扫描光学测量表面的距离大于成像光学元件的焦深， 光学测量表面与检测器重合）。 光学测量表面是指干涉仪中的测试光路径中的理论测试表面，其将反射测试光以产生其与参考光之间的光程长度差（OPD），该参考光等于检测器上的常数。
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公开(公告)号：US20110007323A1
公开(公告)日：2011-01-13
申请号：US12818753
申请日：2010-06-18
IPC分类号： G01B9/02
CPC分类号： G01B9/02058 , G01B9/02039 , G01B9/02057 , G01B9/02059 , G01B9/0209 , G02B21/14
摘要： An optical assembly for use in an interferometer is provided. The optical assembly includes first and second partially reflective surfaces positioned along an optical axis and oriented at different non-normal angles to the optical axis. The second partially reflective surface is configured to receive light transmitted through the first partially reflective surface along the optical path, transmit a portion of the received light to a test object to define measurement light for the interferometer and reflect another portion of the received light back towards the first partially reflective surface to define reference light for the interferometer. The reference light makes at least one round trip path between the second and first partially reflective surfaces.
摘要翻译： 提供了一种用于干涉仪的光学组件。 光学组件包括沿着光轴定位并且以与光轴不同的非法向角度定向的第一和第二部分反射表面。 第二部分反射表面被配置为接收沿着光路传输通过第一部分反射表面的光，将接收到的光的一部分传输到测试对象以限定用于干涉仪的测量光，并将接收到的光的另一部分反射回 第一部分反射表面以限定干涉仪的参考光。 参考光在第二和第一部分反射表面之间形成至少一个往返路径。
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公开(公告)号：US08300233B2
公开(公告)日：2012-10-30
申请号：US13028787
申请日：2011-02-16
IPC分类号： G01B9/02
摘要： A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
摘要翻译： 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束，并组合第一和第二波束以形成输出波束，其中第一和第二波束从 公共源，第一和第二光束具有不同的频率，其中第一光束以非Littrow角接触编码器刻度，并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号，所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。
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公开(公告)号：US08045175B2
公开(公告)日：2011-10-25
申请号：US12818753
申请日：2010-06-18
CPC分类号： G01B9/02058 , G01B9/02039 , G01B9/02057 , G01B9/02059 , G01B9/0209 , G02B21/14
摘要： An optical assembly for use in an interferometer is provided. The optical assembly includes first and second partially reflective surfaces positioned along an optical axis and oriented at different non-normal angles to the optical axis. The second partially reflective surface is configured to receive light transmitted through the first partially reflective surface along the optical path, transmit a portion of the received light to a test object to define measurement light for the interferometer and reflect another portion of the received light back towards the first partially reflective surface to define reference light for the interferometer. The reference light makes at least one round trip path between the second and first partially reflective surfaces.
摘要翻译： 提供了一种用于干涉仪的光学组件。 光学组件包括沿着光轴定位并且以与光轴不同的非法向角度定向的第一和第二部分反射表面。 第二部分反射表面被配置为接收沿着光路传输通过第一部分反射表面的光，将接收到的光的一部分传输到测试对象以限定用于干涉仪的测量光，并将接收到的光的另一部分反射回 第一部分反射表面以限定干涉仪的参考光。 参考光在第二和第一部分反射表面之间形成至少一个往返路径。
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15.发明授权Interferometer for measuring the thickness profile of thin transparent substrates 失效用于测量薄透明基板厚度分布的干涉仪公开(公告)号：US06744522B2
公开(公告)日：2004-06-01
申请号：US10061238
申请日：2002-02-01
申请人： Peter J. De Groot , Leslie L. Deck
发明人： Peter J. De Groot , Leslie L. Deck
IPC分类号： G01B902
摘要： An method for measuring an optical thickness of a test object, the method includes: interfering a first optical wave front from the test object and a second optical wave front from a reference surface to produce an interference signal; for a selected location on the test object, obtaining an interference pattern of the test object at a first wavelength &lgr;1; for the selected location, calculating a first estimate of the optical thickness from the interference pattern recorded at wavelength &lgr;1; for the selected location obtaining an interference pattern of the test object at a second wavelength &lgr;2; for the selected location, calculating a second estimate of the optical thickness from the interference pattern recorded at wavelength &lgr;2; and for the selected location, calculating a third estimate of the optical thickness by combining the first and second estimates of optical thickness.
摘要翻译： 一种用于测量被测物体的光学厚度的方法，所述方法包括：从测试对象干涉第一光波前沿和从参考表面干涉第二光波前沿以产生干涉信号; 对于测试对象上的选定位置，获得第一波长λ1的测试对象的干涉图案; 对于所选择的位置，从记录在波长λ1处的干涉图案计算光学厚度的第一估计; 对于所选择的位置，获得第二波长λ2的测试对象的干涉图案; 对于所选择的位置，从记录在波长λ2处的干涉图案计算光学厚度的第二估计; 并且对于所选位置，通过组合光学厚度的第一和第二估计来计算光学厚度的第三估计。
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公开(公告)号：US07030995B2
公开(公告)日：2006-04-18
申请号：US10304426
申请日：2002-11-26
申请人： Peter J. De Groot , Leslie L. Deck
发明人： Peter J. De Groot , Leslie L. Deck
IPC分类号： G01B9/02
CPC分类号： G01B9/02084 , G01B9/02057 , G01B2290/35 , G01N21/19 , G01N21/23 , G01N21/45
摘要： An interferometry method including: i) forming an optical interference image by combining different portions of an optical wave front reflected from a pair of surfaces; ii) recording an interference signal at different locations of the optical interference image in response to varying the relative position of the two surfaces over a range of positions; iii) transforming the interference signal for at least one of the locations to produce a spectrum having a peak at a spectral coordinate corresponding to the variation in the relative position of the two surfaces over a range of positions; iv) identifying the spectral coordinate of the peak; and v) for each location, extracting the spectral phase of the interference signal at the coordinate of the peak. For example, the method may further include, for each of the different locations, determining a surface profile of one of the surfaces based on the spectral phase of the interference signal at each of the multiple locations.
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公开(公告)号：US20120170048A1
公开(公告)日：2012-07-05
申请号：US13326117
申请日：2011-12-14
IPC分类号： G01B9/02
摘要： A method for determining information about changes along a degree of freedom of an encoder scale includes directing a first beam and a second beam along different paths and combining the first and second beams to form an output beam, where the first and second beams are derived from a common source, the first and second beams have different frequencies, where the first beam contacts the encoder scale at a non-Littrow angle and the first beam diffracts from the encoder scale at least once; detecting an interference signal based on the output beam, the interference signal including a heterodyne phase related to an optical path difference between the first beam and the second beam; and determining information about a degree of freedom of the encoder scale based on the heterodyne phase.
摘要翻译： 用于确定关于沿着编码器刻度的自由度的变化的信息的方法包括沿不同的路径引导第一波束和第二波束，并组合第一和第二波束以形成输出波束，其中第一和第二波束从 公共源，第一和第二光束具有不同的频率，其中第一光束以非Littrow角接触编码器刻度，并且第一光束从编码器刻度至少一次衍射; 基于所述输出光束检测干扰信号，所述干扰信号包括与所述第一光束和所述第二光束之间的光程差有关的外差相位; 以及基于所述外差相位确定关于所述编码器刻度的自由度的信息。
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18.发明授权Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures 有权用于椭偏仪，反射测量和散射测量的干涉测量方法，包括薄膜结构的表征公开(公告)号：US07812963B2
公开(公告)日：2010-10-12
申请号：US12173972
申请日：2008-07-16
申请人： Peter J. De Groot
发明人： Peter J. De Groot
IPC分类号： G01B11/02
CPC分类号： G01B9/0201 , G01B9/02043 , G01B9/02057 , G01B9/02072 , G01B9/02084 , G01B9/02088 , G01B9/0209 , G01B11/0675 , G01B2290/50 , G01B2290/70 , G01N21/211 , G01N21/8422 , G01N21/9501
摘要： A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.
摘要翻译： 一种方法，包括：对在测试对象上出现的角度范围内的测试光进行成像，以干涉检测器上的参考光，其中测试和参考光源自公共源; 对于每个角度，同时改变与测试光和参考光的干涉部分之间的光源与检测器之间的光程长度差，其速率取决于测试光从测试对象出射的角度; 并且基于作为光路长度差的测试参考光之间的干涉测定被测物体的光学特性的角度依赖性，对于每个角度而变化。
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19.发明申请公开(公告)号：US20100060898A1
公开(公告)日：2010-03-11
申请号：US12552452
申请日：2009-09-02
申请人： Peter J. De Groot
发明人： Peter J. De Groot
CPC分类号： G03F7/70491 , G01B9/02019 , G01B9/02022 , G01B9/02084 , G01B9/02087 , G01B9/0209 , G01B11/0675 , G01B2290/30 , G01B2290/70 , G03F7/70608 , G03F7/70641 , G03F7/70775 , G03F9/7003 , G03F9/7049 , G03F9/7088
摘要： A method for determining a spatial property of an object includes obtaining a scanning low coherence interference signal from a measurement object that includes two or more interfaces. The scanning low coherence interference signal includes two or more overlapping low coherence interference signals, each of which results from a respective interface. Based on the low coherence interference signal, a spatial property of at least one of the interfaces is determined. In some cases, the determination is based on a subset of the low coherence interference signal rather than on the entirety of the signal. Alternatively, or in addition, the determination can be based on a template, which may be indicative of an instrument response of the interferometer used to obtain the low coherence interference signal.
摘要翻译： 用于确定对象的空间属性的方法包括从包括两个或多个接口的测量对象获得扫描低相干干扰信号。 扫描低相干干涉信号包括两个或多个重叠的低相干干涉信号，每个干涉信号由相应的接口产生。 基于低相干干扰信号，确定至少一个接口的空间属性。 在某些情况下，确定是基于低相干干扰信号的子集而不是整个信号。 或者或另外，该确定可以基于模板，其可以指示用于获得低相干干扰信号的干涉仪的仪器响应。
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公开(公告)号：US07492469B2
公开(公告)日：2009-02-17
申请号：US11354534
申请日：2006-02-15
申请人： Peter J. De Groot
发明人： Peter J. De Groot
IPC分类号： G01B9/02
CPC分类号： G01B9/02032 , G01B9/02039 , G01B9/02057 , G01B9/02079 , G01B11/2441 , G01B2290/70
摘要： In general, in one aspect, the invention features an apparatus that includes an interferometer having a main cavity and an auxiliary reference surface, the main cavity including a partially reflective surface defining a primary reference surface and a test surface. The interferometer is configured to direct a primary portion of input electromagnetic radiation to the main cavity and an auxiliary portion of the input electromagnetic radiation to reflect from the auxiliary reference surface, wherein a first portion of the primary portion in the main cavity reflects from the primary reference surface and a second portion of the primary portion in the main cavity passes through the primary reference surface and reflects from the test surface. The interferometer is further configured to direct the electromagnetic radiation reflected from the test surface, the primary reference surface, and the auxiliary reference surface to a multi-element detector to interfere with one another to form an interference pattern. The auxiliary reference surface is tilted so that the paths of the electromagnetic radiation reflected from the primary reference surface and auxiliary reference are non-parallel at the multi-element detector and the auxiliary reference surface is in the path of the primary portion of the electromagnetic radiation.
摘要翻译： 通常，在一个方面，本发明的特征在于一种装置，其包括具有主腔和辅助参考表面的干涉仪，所述主腔包括限定主参考表面和测试表面的部分反射表面。 所述干涉仪被配置为将输入电磁辐射的主要部分引导到所述主腔和所述输入电磁辐射的辅助部分以从所述辅助参考表面反射，其中所述主腔中的所述主要部分的第一部分从所述主腔 主空腔中的主要部分的第二部分通过主参考表面并从测试表面反射。 干涉仪还被配置为将从测试表面，主参考表面和辅助参考表面反射的电磁辐射引导到多元件检测器以彼此干扰以形成干涉图案。 辅助参考表面倾斜，使得从主参考表面和辅助基准反射的电磁辐射的路径在多元件检测器处不平行，并且辅助参考表面处于电磁辐射的主要部分的路径中 。
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