Apparatus and method for inspecting soldered portions
    12.
    发明授权
    Apparatus and method for inspecting soldered portions 失效
    用于检查焊接部分的装置和方法

    公开(公告)号:US4772125A

    公开(公告)日:1988-09-20

    申请号:US875974

    申请日:1986-06-19

    摘要: An apparatus for inspecting an appearance of soldered portions connected between the pads formed on a printed circuit board and leads of an electronic body part. A slit light beam is directed to portions to be inspected and scanned thereon with a light fluorescent image generated from the substrate portion of the printed circuit board and a dark fluorescent image generated from the leads, pads and soldered portions being detected with an image signal being generated in accordance therewith. The image signal is binarized and different functions are extracted from the binarized signal which functions are utilized in connection with other functions and previously obtained data to determine whether an abnormal portion is present or not in a predetermined position on the circuit board.

    摘要翻译: 一种用于检查连接在形成在印刷电路板上的焊盘和电子主体部分的引线之间的焊接部分的外观的装置。 利用从印刷电路板的基板部分产生的荧光图像将狭缝光束引导到要检查和扫描的部分,并且从引线,焊盘和焊接部分产生的暗荧光图像被图像信号检测到 根据其产生。 图像信号被二值化,并且从二值化信号中提取不同的功能,该功能与其他功能相关联使用,并且先前获得的数据用于确定在电路板上的预定位置是否存在异常部分。

    Method and apparatus for detecting edge of fine pattern on specimen
    13.
    发明授权
    Method and apparatus for detecting edge of fine pattern on specimen 失效
    用于检测样品上精细图案边缘的方法和装置

    公开(公告)号:US4556797A

    公开(公告)日:1985-12-03

    申请号:US530044

    申请日:1983-09-07

    CPC分类号: G01B15/04 H01J37/28

    摘要: In a method and apparatus for detecting the edge of a fine pattern formed on a specimen such as a fine circuit pattern formed on a semiconductor element or the like, there is prepared a predetermined model waveform based on theoretical secondary electron emission from the edge portion. Secondary electrons emitted from successive scanning points across the pattern edge portion through the irradiation of a scanning electron beam thereonto are detected to produce an actual signal waveform reflecting the secondary electron emission from the pattern edge portion. The actual signal waveform is compared with the model waveform, and one of the scanning points at which the highest coincidence exists between both the actual and model waveforms, is determined as a position of the pattern edge.

    摘要翻译: 在形成在半导体元件等上形成的精细电路图案的试样上形成的精细图案的边缘的方法和装置中,根据来自边缘部分的理论二次电子发射,制备预定的模型波形。 检测从连续的扫描点通过扫描电子束照射到图案边缘部分的二次电子,以产生反映来自图案边缘部分的二次电子发射的实际信号波形。 将实际信号波形与模型波形进行比较,确定实际波形和模型波形之间存在最高一致性的扫描点之一,作为图形边缘的位置。

    Laser processing machine and laser processing method
    15.
    发明申请
    Laser processing machine and laser processing method 审中-公开
    激光加工机和激光加工方法

    公开(公告)号:US20060102608A1

    公开(公告)日:2006-05-18

    申请号:US11270600

    申请日:2005-11-10

    IPC分类号: B23K26/03

    摘要: The laser beam machine of the present invention includes: an XY stage on which to rest a workpiece with multiple machining objects arrayed on it, and which moves the workpiece in an XY direction on the basis of NC data; an image acquisition head which is provided in an image acquisition station and has oblique illumination optical system and detection optical system; and a laser machining head which is provided in a laser machining station and has a laser light source, an XY optical beam deflector for deflecting a laser beam in the XY direction on the basis of the deflection control data obtained in accordance with the image signals from each machining object that have been acquired by the image acquisition head, and an irradiation lens for admitting the above-deflected laser beam into each machining object from a substantially perpendicular direction.

    摘要翻译: 本发明的激光束机包括:XY台,其上放置有多个加工对象的工件,并且基于NC数据在XY方向上移动工件; 图像获取头,设置在图像采集站中,具有倾斜照明光学系统和检测光学系统; 以及激光加工头,其设置在激光加工台中并具有激光光源,XY光束偏转器,用于根据根据来自于...的图像信号获得的偏转控制数据在XY方向上偏转激光束 由图像获取头获取的每个加工对象以及用于从大致垂直的方向将上述偏转的激光束进入每个加工对象的照射透镜。

    Method and apparatus for detecting photoacoustic signal to detect
surface and subsurface information of the specimen
    17.
    发明授权
    Method and apparatus for detecting photoacoustic signal to detect surface and subsurface information of the specimen 失效
    用于检测光声信号以检测样品的表面和地下信息的方法和装置

    公开(公告)号:US5781294A

    公开(公告)日:1998-07-14

    申请号:US548015

    申请日:1995-10-25

    摘要: A method and an apparatus for detecting a photoacoustic signal are provided which irradiate an excitation light beam, modulated by a desired frequency, simultaneously to a plurality of points being measured on a surface of a sample, irradiate the excitation light and a probe light simultaneously to the plurality of the points being measured, detect an interference light of a reflected light beam of the probe light and a specified reference light with a detector made up of a plurality of photoelectric converting elements corresponding to the respective points being measured, the detector being in conjugate relation with the surface of the sample, detect a thermal distortion of the frequency component equal to the intensity-modulated frequency at the plurality of the points being measured from the interference light intensity signal detected by the detector, and detect information relative to the surface and the subsurface of the measuring points on the sample from the thermal distortion of the frequency component. A plurality of measuring points on a specimen are excited simultaneously with an intensity-modulated flat light beam and the thermal expansion displacements of the measuring points are detected simultaneously by interference between a flat probe light beam and a flat reference light beam to detect photothermal displacement signals representing the photothermal displacements of the plurality of measuring points simultaneously.

    摘要翻译: 提供了一种用于检测光声信号的方法和装置,其将在期望频率下调制的激发光束同时照射到在样品表面上测量的多个点,同时将激发光和探针光照射到 测量的多个点,利用由与被测量的各个点相对应的多个光电转换元件组成的检测器检测探测光的反射光束和指定参考光的干涉光,检测器处于 与样品表面的共轭关系,根据由检测器检测到的干涉光强度信号测量的多个点处,检测与等于强度调制频率的频率成分的热失真,并检测相对于表面的信息 和样品上的测量点的地表从热失真 的频率分量。 试样上的多个测量点与强度调制的平坦光束同时激发,并且通过平坦探测光束和平坦参考光束之间的干涉同时检测测量点的热膨胀位移,以检测光热位移信号 同时表示多个测量点的光热位移。

    INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME
    18.
    发明申请
    INTERNAL DEFECT INSPECTION METHOD AND APPARATUS FOR THE SAME 有权
    内部缺陷检查方法及其设备

    公开(公告)号:US20130160552A1

    公开(公告)日:2013-06-27

    申请号:US13819355

    申请日:2011-06-01

    IPC分类号: G01N29/22 G01N29/04

    摘要: It is intended to provide an internal defect inspection method and an apparatus for implementing the method by which an ultrasonic wave is excited in a sample without contact with the sample and accordingly without damaging the sample, and an ultrasonic wave from any internal defect of the sample is detected without being affected by the sample surface, in a non-contact state and with high sensitivity.By the internal defect inspection method, an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, an ultrasonic wave reflected by the sample is detected as an interference signal with an imaging type common-path interferometer, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal.

    摘要翻译: 旨在提供一种内部缺陷检查方法和实现这样一种方法的装置,其中超声波在样品中被激发而不与样品接触,因此不损伤样品,并且来自样品的任何内部缺陷的超声波 被检测而不受样品表面的影响,处于非接触状态并具有高灵敏度。 通过内部缺陷检查方法,从超声波发射器向样品发射超声波,将由样本反射的超声波作为干涉信号与成像式共轨干涉仪进行检测,从超声波信号 从超声波信号中检测出干扰信号和样本内的任何缺陷。

    HEATING COOKER
    19.
    发明申请
    HEATING COOKER 有权
    加热烹饪机

    公开(公告)号:US20110126819A1

    公开(公告)日:2011-06-02

    申请号:US12999518

    申请日:2009-07-24

    IPC分类号: F24C15/00

    CPC分类号: F24C15/322 F24C15/16

    摘要: The cooker is equipped with a heating chamber (2) that has an open part (2d) in the front surface and that holds the material to be cooked, an opening/closing door (3) that has a see-through window (4) and that opens and closes the open part, a suction intake opening (2a) that is open in one of the side walls that faces the heating chamber (2), an air discharge outlet (2b) that is open in the other side wall of the heating chamber (2), and a circulation duct (20) that has first and second side surface parts (20a, 20b) that are provided outside of the two side walls of the heating chamber (2) and that connect the suction intake opening (2a) provided at the first side surface part (20a) and the air discharge outlet (2b) provided at the second side surface part (20b), and a circulation fan (21) that is provided inside the circulation duct (20) and that draws in gas inside the heating chamber (2) through the suction intake opening (2a) and blows it out through the air discharge outlet (2b).

    摘要翻译: 炊具配备有在前表面具有开口部分(2d)并且保持待烹饪材料的加热室(2),具有透视窗(4)的开/关门(3) 并且打开和关闭所述打开部分,在与所述加热室(2)相对的一个侧壁中开口的吸入口(2a),在所述加热室(2)的另一侧壁中敞开的排气口(2b) 加热室(2)和循环管道(20),其具有设置在加热室(2)的两个侧壁外侧的第一和第二侧面部分(20a,20b),并将吸入口 (2a)和设置在第二侧面部(20b)的排气口(2b),以及设置在循环管道(20)的内部的循环风扇(21),以及 其通过吸入口(2a)吸入加热室(2)内的气体,并通过排气出口(2b)吹出, 。