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    Micromachined membrane with locally compliant and stiff regions and method of making same
    12.
    发明授权
    Micromachined membrane with locally compliant and stiff regions and method of making same 失效
    具有局部顺应性和刚性区域的微加工膜及其制造方法

    公开(公告)号：US06168906A

    公开(公告)日：2001-01-02

    申请号：US09084508

    申请日：1998-05-26

    Applicant: Jonathan J. Bernstein ,  Brian Thomas Cunningham

    Inventor： Jonathan J. Bernstein ,  Brian Thomas Cunningham

    IPC: G03F726

    CPC classification number: G03F7/40 ,  B81B3/007 ,  B81B2203/0127 ,  G03F7/00

    Abstract: A method of making a micromachined membrane having both stiff and flexible regions includes depositing a photoresist on a substrate; exposing the photoresist to actinic radiation through a mask to define openings having a first width in the photoresist in the stiff region and openings having a second width greater than the first width in the flexible region; developing the exposed photoresist to create the openings; etching the openings through the developed photoresist to create grooves in the substrate; and coating the substrate including the grooves with a film of material having a thickness greater than one half the first width and less than half of the second width to form adjacent contacting rigid corrugations in the stiff region and spaced compliant corrugations in the flexible region. Also disclosed is a micromachined membrane with a first region having as plurality of spaced nonintersecting corrugations being flexible in the direction transverse to the corrugations and a second region having a plurality of adjacent contacting intersecting corrugations being stiff in the plane of the intersecting corrugations and the direction transverse to the plane.

    Abstract translation: 制造具有刚性和柔性区域的微加工膜的方法包括在基底上沉积光致抗蚀剂; 通过掩模将光致抗蚀剂暴露于光化辐射以限定刚性区域中的光致抗蚀剂中具有第一宽度的开口和具有大于柔性区域中的第一宽度的第二宽度的开口; 显影曝光的光致抗蚀剂以形成开口; 通过显影的光致抗蚀剂蚀刻开口以在衬底中产生凹槽; 以及使用具有大于所述第一宽度的一半并且小于所述第二宽度的一半的材料的膜涂覆包括所述凹槽的所述基底，以在所述柔性区域中形成相邻的接触刚性波纹并且在所述柔性区域中形成间隔开的柔性波纹。 还公开了一种具有第一区域的微加工膜，该第一区域具有多个间隔开的非接触波纹，该波纹在横向于波纹的方向上是柔性的，并且第二区域具有多个相邻接触相交的波纹，在交叉波纹的平面中是刚性的， 横向飞机。

    Acoustic transducer
    13.
    发明授权
    Acoustic transducer 失效
    声换能器

    公开(公告)号：US5146435A

    公开(公告)日：1992-09-08

    申请号：US444996

    申请日：1989-12-04

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: G01H11/06 ,  H04R1/44 ,  H04R19/00 ,  H04R19/04

    CPC classification number: G01H11/06 ,  H04R19/005 ,  H04R1/44 ,  H04R19/04 ,  Y10T29/435

    Abstract: An acoustic transducer includes a perforated capacitor plate; a movable capacitor plate spaced from the perforated plate; springs for movably supporting the movable capacitor plate relative to the perforated plate; and a support structure for supporting the perforated and movable plates, where the movable plate is interconnected to the support structure by the springs and where the plates, springs and support structure form a unified, monolithic structure. The movable plate, springs and support structure are made from a silicon wafer. The transducer also includes a dielectric fluid in the space between the plates; and equipment for applying an electric field across the plates for producing an output signal representative of the variation in capacitance induced by the variation in space between the plates in response to an acoustic signal.

    Abstract translation: 声换能器包括多孔电容器板; 与多孔板间隔开的可移动电容器板; 用于可移动地支撑可移动电容器板相对于多孔板的弹簧; 以及用于支撑穿孔和可移动板的支撑结构，其中可移动板通过弹簧与支撑结构互连，并且其中板，弹簧和支撑结构形成统一的整体结构。 可移动板，弹簧和支撑结构由硅晶片制成。 传感器还包括在板之间的空间中的介电流体; 以及用于在板之间施加电场的设备，用于响应于声信号产生表示由板之间的空间变化引起的电容变化的输出信号。

    APPARATUS FOR PROVIDING ENDOSCOPIC HIGH-SPEED OPTICAL COHERENCE TOMOGRAPHY
    16.
    发明申请
    APPARATUS FOR PROVIDING ENDOSCOPIC HIGH-SPEED OPTICAL COHERENCE TOMOGRAPHY 审中-公开
    用于提供内窥镜高速光学相干图像的装置

    公开(公告)号：US20090225324A1

    公开(公告)日：2009-09-10

    申请号：US12356386

    申请日：2009-01-20

    Applicant: Jonathan J. Bernstein ,  Fran J. Rogomentich ,  Ki Hean Kim ,  Tom W. Lee ,  Joahnnes F. De Boer ,  James A. Burns

    Inventor： Jonathan J. Bernstein ,  Fran J. Rogomentich ,  Ki Hean Kim ,  Tom W. Lee ,  Joahnnes F. De Boer ,  James A. Burns

    IPC: G01B9/02

    CPC classification number: G01B9/02091 ,  A61B1/018 ,  A61B1/04 ,  A61B5/0066 ,  A61B5/0084 ,  A61B5/6852 ,  A61B2090/373 ,  G01B9/0205 ,  G01B2290/65 ,  G01N21/4795 ,  G01N2021/4792

    Abstract: Exemplary embodiments of an apparatus can be provided which can include at least one first arrangement which is configured to generate a magnetic field. Further, the exemplary apparatus can include at least one second arrangement coupled to the first arrangement(s) and configured to receive at least one first electro-magnetic radiation from a sample to generate at least one second electro-magnetic radiation. The second arrangement(s) can include at least one surface that is at least partially reflective, and the magnetic field can control a motion of the at least one surface. At least one third interferometric arrangement can also be provided which is configured to receive the second electro-magnetic radiation(s) from the second arrangement(s) and at least one third electro-magnetic radiation from a reference. Further, it is possible for the second electro-magnetic radiation(s) to effect a structure of the sample.

    Abstract translation: 可以提供装置的示例性实施例，其可以包括被配置为产生磁场的至少一个第一布置。 此外，示例性装置可以包括耦合到第一装置的至少一个第二装置，并且被配置为从样品接收至少一个第一电磁辐射以产生至少一个第二电磁辐射。 第二布置可以包括至少一个至少部分反射的表面，并且磁场可以控制至少一个表面的运动。 还可以提供至少一个第三干涉布置，其被配置为从第二布置接收第二电磁辐射和从参考中接收至少一个第三电磁辐射。 此外，第二电磁辐射可以实现样品的结构。

    Metal alloy elements in micromachined devices
    17.
    发明授权
    Metal alloy elements in micromachined devices 有权
    微加工装置中的金属合金元素

    公开(公告)号：US07244367B2

    公开(公告)日：2007-07-17

    申请号：US10015086

    申请日：2001-12-11

    Applicant: Jonathan J. Bernstein ,  William P. Taylor

    Inventor： Jonathan J. Bernstein ,  William P. Taylor

    IPC: H01L21/00 ,  B44C1/22 ,  C23F1/00

    CPC classification number: H01H1/0036 ,  B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118 ,  C23C14/165 ,  H01H1/023 ,  H01H2001/0057 ,  Y10T428/12597

    Abstract: A micromechanical device is provided, which includes at least one flexible member formed from an alloy, where the alloy is made up of one or more noble metals and one or more alloying elements, wherein each of the alloying elements has an equilibrium solid solubility in the noble metal, and wherein the one or more alloying elements are present in an amount that does not result in precipitates. A method for making a micromechanical device includes depositing an alloy on a substrate to form at least one flexible member, the alloy comprising one or more noble metals and one or more alloying elements, wherein the one or more alloying elements form a solid solution with the one or more noble metals; and removing a portion of the substrate or a sacrificial layer beneath the deposited alloy layer to obtain a flexible member.

    Abstract translation: 提供了一种微机械装置，其包括由合金形成的至少一个柔性构件，其中所述合金由一种或多种贵金属和一种或多种合金元素构成，其中每种合金元素在所述合金元素中具有平衡的固体溶解度 贵金属，并且其中所述一种或多种合金元素以不会导致沉淀物的量存在。 一种用于制造微机械装置的方法包括在基底上沉积合金以形成至少一个柔性构件，所述合金包括一种或多种贵金属和一种或多种合金元素，其中所述一种或多种合金元素形成固溶体， 一种或多种贵金属; 以及去除所沉积的合金层下面的衬底或牺牲层的一部分以获得柔性构件。

    Actuator for dual-axis rotation micromirror
    18.
    发明授权
    Actuator for dual-axis rotation micromirror 失效
    双轴旋转微镜执行器

    公开(公告)号：US06760145B1

    公开(公告)日：2004-07-06

    申请号：US10349860

    申请日：2003-01-23

    Applicant: William P. Taylor ,  John D. Brazzle ,  Jonathan J. Bernstein

    Inventor： William P. Taylor ,  John D. Brazzle ,  Jonathan J. Bernstein

    IPC: G02B2600

    CPC classification number: G02B26/0841 ,  G02B26/0833 ,  G02B26/085

    Abstract: An array of movable MEMS mirror devices is provided being electromagnetically actuated in one axis and using an additional set of coils, or a single coil, positioned off of the main axis of rotation to achieve a second axis of rotation while allowing for a very high linear mirror fill factor (>80%). This second set of coils, or second electrically wired coil, is capable of generating the necessary torque about an axis that is perpendicular to the major axis of rotation. A second embodiment is provided using electromagnetic actuation in one axis of rotation, which typically has larger rotation angles than the second axis, and electrostatic actuation in the second axis of rotation. Electrostatic pads can be used to sense rotation. When staggering adjacent pixels a center array of mirrors with no coils or electrodes provides increased radius of curvature and reducing undesirable cross-talk between adjacent mirror devices.

    Abstract translation: 提供了可移动的MEMS反射镜装置的阵列，其在一个轴上被电磁致动，并且使用一组额外的线圈或单个线圈，其位于主旋转轴线之外，以实现第二旋转轴线，同时允许非常高的线性 镜面填充因子（> 80％）。 该第二组线圈或第二电线线圈能够围绕垂直于主旋转轴的轴产生必要的扭矩。 提供了一个第二实施例，其使用一个旋转轴线中的电磁致动器，其通常具有比第二轴线更大的旋转角度，以及在第二旋转轴线中的静电致动。 静电垫可用于感测旋转。 当交错相邻像素时，没有线圈或电极的反射镜的中心阵列提供增加的曲率半径并减少相邻镜器件之间的不期望的串扰。

    Resonator with preferred oscillation mode
    19.
    发明授权
    Resonator with preferred oscillation mode 有权

    公开(公告)号：US06455980B1

    公开(公告)日：2002-09-24

    申请号：US09649290

    申请日：2000-08-28

    Applicant: Jonathan J. Bernstein

    Inventor： Jonathan J. Bernstein

    IPC: H01L4108

    CPC classification number: H03H3/0072 ,  H03H9/02259 ,  H03H9/2405

    Abstract: A resonator with mechanical node reinforcement includes a substrate, an intermediate portion adjacent to the substrate, and a resonant portion adjacent to the intermediate portion. The intermediate portion may include multiple layers, such as an insulating layer and/or a conductive layer. The resonant portion of the resonator is adapted for an oscillation mode with a nodal point located within its periphery. Preferably, the resonant portion contacts the intermediate portion at points located at the periphery and at the nodal point. The resonant portion may include multiple layers and its primary layer may be a membrane or a plate. An alternative embodiment of the resonator excludes the intermediate layer allowing the resonant portion to contact the substrate instead of the intermediate layer.

    Electrostatic memory micromirror display system
    20.
    发明授权
    Electrostatic memory micromirror display system 失效
    静电记忆微镜显示系统

    公开(公告)号：US5903383A

    公开(公告)日：1999-05-11

    申请号：US858518

    申请日：1997-05-19

    Applicant: Jonathan J. Bernstein ,  Brian Cunningham

    Inventor： Jonathan J. Bernstein ,  Brian Cunningham

    IPC: G02B26/08

    CPC classification number: G02B26/0841

    Abstract: An electrostatic memory micromirror display system including an array of electrostatic memory and display assemblies each including a memory and display element having a mirror surface and a conductive medium; a support device for movably mounting the memory and display element; and a set of electrodes including at least first and second electrodes proximate the conductive medium; and means for selectively applying a voltage to the first electrode of predetermined ones of the memory and display assemblies to establish an electrostatic field between the first electrode and the conductive medium to urge the associated display element from a first position toward a second position and for applying a voltage to the second electrode of the assemblies to establish an electric field between the second electrode and the conductive medium to set the memory and display element in the second position.

    Abstract translation: 一种静电存储微镜显示系统，包括静电存储器和显示组件阵列，每个静电存储器和显示组件包括具有镜面和导电介质的存储器和显示元件; 用于可移动地安装存储器和显示元件的支撑装置; 以及一组电极，其包括靠近导电介质的至少第一和第二电极; 以及用于选择性地向所述存储器和显示组件中的预定存储器和显示组件的第一电极施加电压的装置，以在所述第一电极和所述导电介质之间建立静电场，以将所述相关联的显示元件从第一位置向第二位置推动并施加 电压到组件的第二电极，以在第二电极和导电介质之间建立电场，以将存储器和显示元件设置在第二位置。

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