公开(公告)号：US06324015B1

公开(公告)日：2001-11-27

申请号：US09630019

申请日：2000-07-31

Applicant: Keiji Fuse

Inventor： Keiji Fuse

IPC: G02B900

CPC classification number: B23K26/064 ,  B23K26/0643 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/382 ,  B23K2103/42 ,  B23K2103/50 ,  G02B13/0005 ,  G02B13/22

Abstract: An f&thgr; lens containing a first lens group having an object-side convex positive lens, a second lens group having an object-side concave negative lens, a third lens group having a positive refractive power, the third lens group being a single positive lens, an assembly of a positive lens and a negative lens or another assembly of a positive lens and another positive lens. The lens components satisfy the conditions (a) to (c); (a) −2.2≦f2/f≦−0.3  (31) (b) 0.4≦f3/f≦0.9  (32) (c) 1.8≦d/f≦2.4.  (33) where f2 is the focal length of the second lens group, f3 is the focal length of the third lens group, f is the focal length of the whole lens system and d is the distance from the front focus to the image plane. The material of the lens is zinc selenide (ZnSe) or germanium (Ge). Adoption of an aspherical lens facilitates the design of the f&thgr; lens.

Abstract translation: 包含具有物体侧凸正透镜的第一透镜组，具有物侧凹透镜的第二透镜组，具有正折光力的第三透镜组，第三透镜​​组为单正透镜的第一透镜组， 正透镜和负透镜的组件或正透镜和另一正透镜的另一组件。 透镜组件满足条件（a）至（c）;其中，f2是第二透镜组的焦距，f3是第三透镜组的焦距，f是整个透镜系统的焦距，d是 从前焦距到图像平面的距离。 透镜的材料是硒化锌（ZnSe）或锗（Ge）。 采用非球面透镜有助于设计ftheta透镜。

公开(公告)号：US07773315B2

公开(公告)日：2010-08-10

申请号：US11883367

申请日：2006-09-21

Applicant: Keiji Fuse

Inventor： Keiji Fuse

IPC: G02B9/00 ,  G02B5/18 ,  G02B3/02

CPC classification number: G02B27/0955 ,  B23K26/066 ,  B23K26/0732 ,  B23K26/21 ,  B23K26/38 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/006 ,  B23K2101/18 ,  B23K2101/36 ,  B23K2103/04 ,  B23K2103/50 ,  G02B19/0014 ,  G02B19/0052 ,  G02B27/0927 ,  G02B27/0944

Abstract: In a laser optical device including a beam shaping optical system 3 for shaping a laser beam 2 into a predetermined cross-sectional intensity distribution and converging the light and an image formation optical system 6 for forming an image of a shaped beam 4 shaped and converged through the beam shaping optical system 3, the image formation optical system 6 is made up of an objective lens system 8 having a negative focal length placed ahead of a focal plane 7 of the beam shaping optical system 3 and an imaging lens system 9 placed behind the objective lens system 8.

Abstract translation: 在包括用于将激光束2成形为预定的横截面强度分布并会聚光束的光束整形光学系统3的激光光学装置和用于形成成形并会聚的成形光束4的图像的成像光学系统6 光束整形光学系统3，成像光学系统6由具有放置在光束整形光学系统3的焦平面7之前的负焦距的物镜系统8和放置在光束整形光学系统3之后的成像透镜系统9 物镜系统8。

公开(公告)号：US20060013277A1

公开(公告)日：2006-01-19

申请号：US10532044

申请日：2004-02-05

Applicant: Keiji Fuse

Inventor： Keiji Fuse

IPC: H01S3/08

CPC classification number: G02B27/12 ,  B23K26/066 ,  G02B27/1086

Abstract: A conventional diffractive optical element (DOE), which consists of repetition of a unit pattern Υ, has an advantage of applicability of the Fast Fourier Transform algorithm to calculate diffraction beam spots intensities on lattice points on an image plane. But, the conventional DOE has a drawback of impossibility of diffracting a laser beam off the lattice points. This invention designs a DOE by giving arbitrary complex amplitude transmittance {tmn} to every pixel (m, n), calculating actual Fourier transform from {tmn} to intensity W(α, β), and obtaining intensity of a diffraction beam directing in any a and 0 direction. Since α, β are not necessary to be on lattice points, the FFT is of no use. Angular resolutions U and V satisfy inequalities U

Abstract translation: 传统的衍射光学元件（DOE）由重复的单位图形Upsilon组成，具有快速傅里叶变换算法适用于计算图像平面上的格点上的衍射光束点强度的优点。 但是，传统的DOE具有不可能将激光束衍射离开晶格点的缺点。 本发明通过对每个像素（m，n）给出任意复振幅透射率（m，n）来设计DOE，从{t> mn}计算实际傅里叶变换到强度W （α，β），并获得在任何a和0方向上引导的衍射光束的强度。 由于alpha，beta不需要在格点上，所以FFT是没有用的。 角度分辨率U和V满足不等式U <λ/ aR和V <λ/ bS，其中λ是波长，aR和bS是DOE的大小。 DOE可以在图像的任何地方生成多衍射光束，并可以高精度同时照射多个任意排列的点。 DOE在任意位置实现精确的多点微处理，这是生产电子部件所必需的。 DOE适用于高速和低成本的激光加工。

公开(公告)号：US06937327B2

公开(公告)日：2005-08-30

申请号：US10340620

申请日：2003-01-13

Applicant: Keiji Fuse

Inventor： Keiji Fuse

IPC: G01M11/00 ,  B23K26/067 ,  B23K26/38 ,  B23K26/42 ,  G01M11/02 ,  G02B5/18 ,  G01B9/00

CPC classification number: G01M11/0228 ,  B23K26/067 ,  B23K26/382 ,  B23K26/705

Abstract: A laser beam emitted from a laser source is split by a beam-splitting means such as a beam sampler, and the power Q of the split beam is measured by a first detector. In addition, the power q1 of light that has passed through a pinhole while a DOE is not set is measured by a second detector, and the power ratio α=q1/Q is calculated. Then, the DOE is set and the power ratio βk=qk/Q, where qk is the power of each light beam, is calculated. The power ratio βk is evaluated on the basis of the power ratio α, so the optical properties of a diffractive optical element, in particular, in terms of diffraction efficiency in laser-beam diffraction and intensity uniformity of split beams can be measured with high accuracy.

Abstract translation: 从激光源发射的激光束被诸如光束采样器之类的光束分离装置分开，并且分割光束的功率Q由第一检测器测量。 此外，通过第二检测器测量未通过DOE通过针孔的光的功率q 1，并且功率比α= q 1 / / Q计算。 然后，设置DOE，并且功率比βQ k = Q k k，其中q k是每个光束的功率， 被计算。 基于功率比α来评估功率比βk，因此衍射光学元件的光学性质，特别是在激光束衍射中的衍射效率和强度均匀性方面 可以高精度地测量分束。

公开(公告)号：US06775066B2

公开(公告)日：2004-08-10

申请号：US10051023

申请日：2002-01-22

Applicant: Kenichi Kurisu ,  Keiji Fuse

Inventor： Kenichi Kurisu ,  Keiji Fuse

IPC: G02B518

CPC classification number: G02B5/1857

Abstract: The present invention provides a different optical element having superior optical characteristics. A polycrystalline substrate having crystal grains whose sizes are not more than 1 &mgr;m or an amorphous phase at the dry-etched surface thereof, or an upper film layer 8 formed on a polycrystalline substrate 1 being the same materials as that of the polycrystalline substrate 1, which has finer crystal grains than-those of the substrate. The upper film layer 8 is dry etched, and AR coat 6 is formed thereon.

Abstract translation: 本发明提供了具有优异的光学特性的不同的光学元件。 尺寸不大于1μm的晶粒或其干蚀刻表面的非晶相或多晶基板1上形成的上层膜8的多晶基板与多晶基板1的材料相同， 其具有比基板更细的晶粒。 上层膜8被干蚀刻，并在其上形成AR涂层6。

公开(公告)号：US08338744B2

公开(公告)日：2012-12-25

申请号：US12516336

申请日：2007-11-29

Applicant: Kenichi Watatani ,  Keiji Fuse ,  Yutaka Kobayashi

Inventor： Kenichi Watatani ,  Keiji Fuse ,  Yutaka Kobayashi

IPC: B23K26/00 ,  G02B19/00

CPC classification number: G02B26/101 ,  B23K26/0648 ,  B23K26/0665 ,  B23K26/0821 ,  B23K26/38 ,  B23K26/40 ,  B23K2103/50 ,  B28D5/00

Abstract: A condensing optical system having a condensed light spot with a small size and a large focal depth without causing a problem of a decrease in intensity of the condensed light spot or discontinuity of an intensity distribution in front and rear areas of a focal position is provided. The condensing optical system that condenses a laser beam generated by a laser source at a predetermined focal length is designed to satisfy Expressions (a) to (d), thereby producing 3rd and 5th spherical aberrations: |Z8|≧0.1λ or |Z15|≧0.05λ,  (a) Z8/Z15≧3 or Z8/Z15

Abstract translation: 提供了具有小尺寸和大焦深的聚光点的聚光光学系统，而不会引起聚焦光斑强度降低或焦点位置前后区域强度分布不连续性的问题。 将由激光源产生的激光束以预定焦距进行会聚的聚光光学系统设计为满足表达式（a）至（d），从而产生第三和第五球面像差：| Z8 |≥0.1λ或| Z15 | ≧0.05λ，（a）Z8 /Z15≥3或Z8 / Z15 <1，（b）| Z8 | <1.4λ，（c）| Z15 | <0.5λ，（d）其中λ是波长，Z8 是对应于三阶球面像差的波前像差的泽尼克条纹多项式的第八系数系数，Z15是对应于第五球面像差的波前像差的泽尼克条纹多项式的系数的第十五系数。

公开(公告)号：US07907341B2

公开(公告)日：2011-03-15

申请号：US11902966

申请日：2007-09-26

Applicant: Motoki Kakui ,  Keiji Fuse

Inventor： Motoki Kakui ,  Keiji Fuse

IPC: G02B27/08 ,  G02B27/10 ,  H04B10/17

CPC classification number: H01S3/06754 ,  B23K26/067 ,  B23K26/0676 ,  B23K26/073 ,  H01S3/005 ,  H01S3/094023 ,  H01S3/094069 ,  H01S3/09408 ,  H01S3/09415 ,  H01S3/1618

Abstract: The present invention relates to a laser processing method and laser processing apparatus for enabling improvement and maintenance of homogenization of a beam intensity distribution in an irradiated region. The laser processing apparatus comprises, at least, an ASE light generation section for emitting ASE light, and a homogenizer for splitting the ASE light into multiple beams. The ASE generation section for emitting the ASE light as processing laser light is provided, and whereby the deterioration of homogenization due to inter-beam interference is suppressed. The homogenization of beam intensity distribution is improved by locating a condenser lens relative to an object such that the object is shifted from a focus position of the condenser lens in the homogenizer, by intentionally deteriorating a beam quality M2 of the ASE light itself emitted from the ASE light generation section to about 2 to 10, or by a combination of these, in laser processing.

Abstract translation: 激光加工方法及激光加工装置技术领域本发明涉及激光加工方法和激光加工装置，其能够改善和维持照射区域中的光束强度分布的均匀化。 激光加工装置至少包括用于发射ASE光的ASE光发生部分和用于将ASE光分解成多个光束的均质器。 提供了用于发射ASE光作为处理激光的ASE生成部，抑制了由于束间干涉而产生的均匀化的劣化。 通过将聚光透镜相对于物体定位，使得物体从均匀器中的聚光透镜的聚焦位置偏移，有意地劣化从其发射的ASE光本身的光束质量M2，从而提高光束强度分布的均匀化 ASE光产生部分约为2〜10，或通过这些组合，在激光加工中。

公开(公告)号：US07193791B2

公开(公告)日：2007-03-20

申请号：US10973614

申请日：2004-10-27

Applicant: Takayuki Hirai ,  Keiji Fuse

Inventor： Takayuki Hirai ,  Keiji Fuse

IPC: G02B13/20

CPC classification number: G02B27/0927 ,  G02B27/0955

Abstract: A single lens homogenizer for converting a wide, parallel, in-phase Gaussian beam into a narrow uniform-power beam and shooting an object with the narrow uniform-power beam is proposed. A tilt error induces beam deformation. A single lens homogenizer which can reduce the beam deformation induced by the tilt error is proposed. A suitable homogenizer is a convex/flat lens having a convex aspherical surface on the light source side and a flat surface on the object side. Another preferable homogenizer is a convex/convex lens having a convex surface on the light source side and a convex surface on the object side. At least one of the convex surfaces is an aspherical convex surface.

Abstract translation: 提出了一种单透镜均匀器，用于将宽的，平行的同相高斯光束转换成窄的均匀功率光束，并用窄的均匀功率光束拍摄物体。 倾斜误差引起光束变形。 提出了一种可以减少由倾斜误差引起的光束变形的单透镜均质器。 合适的均化器是在光源侧具有凸非球面并且在物体侧具有平坦表面的凸/平透镜。 另一种优选的均化器是在光源侧具有凸面并且在物体侧具有凸面的凸凸透镜。 凸面中的至少一个是非球面凸面。

公开(公告)号：US20050094288A1

公开(公告)日：2005-05-05

申请号：US10973614

申请日：2004-10-27

Applicant: Takayuki Hirai ,  Keiji Fuse

Inventor： Takayuki Hirai ,  Keiji Fuse

IPC: G02B13/00 ,  G02B3/02 ,  G02B13/18 ,  G02B27/09 ,  G02B27/10

CPC classification number: G02B27/0927 ,  G02B27/0955

Abstract: A single lens homogenizer for converting a wide, parallel, in-phase Gaussian beam into a narrow uniform-power beam and shooting an object with the narrow uniform-power beam is proposed. A tilt error induces beam deformation. A single lens homogenizer which can reduce the beam deformation induced by the tilt error is proposed. A suitable homogenizer is a convex/flat lens having a convex aspherical surface on the light source side and a flat surface on the object side. Another preferable homogenizer is a convex/convex lens having a convex surface on the light source side and a convex surface on the object side. At least one of the convex surfaces is an aspherical convex surface.

Abstract translation: 提出了一种单透镜均匀器，用于将宽的，平行的同相高斯光束转换成窄的均匀功率光束，并用窄的均匀功率光束拍摄物体。 倾斜误差引起光束变形。 提出了一种可以减少由倾斜误差引起的光束变形的单透镜均质器。 合适的均化器是在光源侧具有凸非球面并且在物体侧具有平坦表面的凸/平透镜。 另一种优选的均化器是在光源侧具有凸面并且在物体侧具有凸面的凸凸透镜。 凸面中的至少一个是非球面凸面。

公开(公告)号：US5690845A

公开(公告)日：1997-11-25

申请号：US539161

申请日：1995-10-04

Applicant: Keiji Fuse

Inventor： Keiji Fuse

IPC: G02B17/00 ,  B23K26/06 ,  B23K26/067 ,  B23K26/24 ,  B23K26/38 ,  G02B27/10

CPC classification number: B23K26/38 ,  B23K26/0608 ,  B23K26/067 ,  B23K26/24

Abstract: A unit for splitting a laser beam into a plurality of beams is provided separately from a converging unit so that both units can be manufactured easily, replaced at low cost and are less likely to be polluted or damaged during laser machining. A laser beam produced by a laser oscillator and guided into a machining head through a transmitter is split into a plurality of beams by a plane reflecting mirror. The laser beams thus split are reflected by another reflecting mirror having a single paraboloidal surface so as to be converged on focal points. The first plane reflecting mirror comprises two semicircular mirrors which can be inclined independently of each other.

Abstract translation: 与会聚单元分开设置用于将激光束分割为多个光束的单元，从而可以容易地制造两个单元，以低成本替换，并且在激光加工期间不太可能被污染或损坏。 由激光振荡器产生并通过发射器被引导到加工头中的激光束被平面反射镜分成多个光束。 这样分离的激光束被具有单一抛物面的另一反射镜反射，以便会聚在焦点上。 第一平面反射镜包括可以彼此独立地倾斜的两个半圆形反射镜。