摘要:
A method for manufacturing an electronic device comprising the steps of: dry-etching a Ti-containing metal film formed on a substrate with a gas containing fluorine; and treating the substrate with a chemical solution containing fluorine ions after the dry etching step.
摘要:
Electronic device cleaning equipment includes a cleaning stage having a processing face on which a substrate having an obverse face at which an electronic device is formed is to be placed, a vapor supply nozzle for supplying vapor to the obverse face of the substrate, and chemical solution supply means for supplying a chemical solution to the obverse face of the substrate. Accordingly, static electricity present on the obverse face of the substrate is diselectrified.
摘要:
An electric power steering apparatus having a displacing mechanism in which a fitting hole potion is provided to a gear housing for fitting with and holding a bearing to which a worm shaft for transmitting rotating force of a steering assisting motor to a steering shaft provided with a worm wheel is fitted, the portion being formed of a pair of split members formed by splitting the portion into two, one split member being movable toward the other split member to adjust a distance between a shaft center of the worm shaft and a rotation center of the worm wheel.
摘要:
A thermally sensitive recording medium comprising, a thermally sensitive recording medium providing an undercoating layer containing a pigment and a binder as main components and a thermally sensitive recording layer containing a colorless or pale colored basic leuco dye and a color developing agent, which reacts with said basic leuco dye, as main components on a substrate, wherein said undercoating layer contains carboxymethyl cellulose whose etherification degree is from 0.55 to 0.75. Causing the undercoating layer to further contain hydroxyethyl cellulose from the view point of high effectiveness.
摘要:
There is described an image forming apparatus, in which the influence of the overall controlling section startup time is reduced, thereby cutting down the time from turning on of power to enabling of image formation. The image forming apparatus includes: a main power switch to turn ON/OFF an AC power source to be supplied into the image forming apparatus; a DC power current generating section to convert AC power current, fed from the AC power source, to DC power current; an overall-controlling section to control overall operations of the image forming apparatus; an engine-controlling section to conduct a predetermined controlling operation among from controlling operations to be conducted in the image forming apparatus; a first power-controlling section, included in the overall-controlling section and/or controlled by the overall-controlling section; and a second power-controlling section, having a starting time shorter than that of the first power-controlling section.
摘要:
A switch of the present invention is featured as one employing: a contact to make and break an electrical circuit, and an electromagnet, both of which are installed in a case, and a handle to make and break the contact by operation from outside of the case, wherein a permanent magnet is installed with one of its poles facing the electromagnet inside of the handle, and wherein the direction of the current passing through the electromagnet is changed so that the permanent magnets are attracted to or released from the electromagnet, and thereby the contact is opened or closed.
摘要:
In a vacuum pressure control system constituted of a vacuum vessel, a vacuum pump sucking gas in the vacuum vessel, a vacuum proportional opening and closing valve disposed on a pipe connecting the vacuum vessel and the vacuum pump, the vacuum proportional opening and closing valve changing its opening to change the vacuum pressure in the vacuum vessel, a pressure sensor to measure the vacuum pressure in the vacuum vessel and a vacuum pressure control device to control the opening of the vacuum proportional opening and closing valve based on the output of the pressure sensor, the vacuum proportional opening and closing valve is provided with a valve seat, a valve member with a tapered surface in its outer periphery and a pilot valve, the valve member being movable along a center line of the valve seat to change a clearance area between the valve seat and the tapered surface, and the vacuum pressure control device controls a servo valve to change the pressure of air to be supplied to the pilot valve based on the output of the pressure sensor.
摘要:
An acceleration responsive switch includes a receptacle including a housing having a conical face on an inner bottom face and a header fixed to the housing to close an open end of the housing, a lead terminal fixed in a through-aperture of the header, a contact member secured to an end of the lead terminal located in the housing and including a plurality of feather portions arranged radially to be approximately concentric with the housing, an electrically conductive inertia ball enclosed in the closed receptacle so as to be capable of rolling on the inner bottom face of the housing, a plurality of protrusions formed an inner peripheral wall of the housing, an oscillation damping liquid contained in the receptacle and having a viscosity suitable to apply resistance to the inertia ball so that the inertia ball terminates its rotation when the inertia ball is subjected to an external oscillation to be rotated. When subjected to acceleration, the inertia ball rolls to come into contact with one or more of the feather portions of the contact member so that it electrically conducts between the feather portions and the housing. The inertia ball in a rotational motion collides against the protrusion, changing the course of its movement.
摘要:
A semiconductor device is constituted by a semiconductor substrate of a first conductivity type. An associated circuit element has a first electrode, a second electrode, and an impurity diffusion region of a second conductivity type formed in the semiconductor substrate and connected to the second electrode. An insulating layer is formed to cover the circuit element, and a conductive layer is formed on the insulating layer to cover the circuit element and thereby conceals the first and second electrodes and the impurity diffusion region of the circuit element. An aperture is selectively formed in the conductive layer such that respective parts of the first and second electrodes and the impurity diffusion region are exposed through the aperture, enabling transmission of electrons through the aperture and facilitating testing by an electron beam tester.
摘要:
Even if a stop position of a supplied workpiece is not accurate, in order which an online robot can accurately perform works such as welding and painting, through the use of an offline robot of the same type as the online robot, detecting three reference positions on a workpiece by a first optical three-dimensional position detection means and teaching can be performed. The first coordinate transform matrix A1 stores the coordinates of each of the positions for an operation on the workpiece as the taught contents, when it is assumed that the workpiece is at a first reference position. The online robot uses a second coordinate transform matrix A2 to calculate coordinates when it is assumed that the workpiece is at a second reference position of the online robot and stores these in a second memory, and the reference points of the workpiece which is supplied for processing are detected by a second optical three-dimensional position detection means and a third coordinate transform matrix A3 is used to determine each of the positions for operation on the supplied workpiece and the online robot reproduces them and performs the work. Even if the stop position of the supplied workpiece is not accurate, it is possible for operations to be accurately performed on the work.