公开(公告)号：US4485339A

公开(公告)日：1984-11-27

申请号：US502997

申请日：1983-06-10

申请人： David Trost

发明人： David Trost

IPC分类号： H01L21/30 ,  G03F7/20 ,  G03F9/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  G05B1/06

CPC分类号： G03F7/70716 ,  H02K41/031 ,  H02K2201/18

摘要： This invention is directed to electro-magnetic alignment devices, which are particularly adapted, among other possible uses, for use in aligning the wafers in a microlithography system, said devices comprising in combination a base plate, a first current carrying coil assembly mounted on the base plate, a second current carrying coil assembly mounted on the base plate in spaced relationship with respect to the first coil assembly, a first magnet mounted adjacent the first coil assembly and a second magnet mounted adjacent the second coil assembly, an upper connecting piece connecting the first and second magnets, a mount for receiving an object on the upper connecting piece, the base plate and magnets and upper connecting piece coacting to form a magnetic circuit, a controller for controlling the flow and direction of current through the coil assemblies to move the magnets and upper connecting piece with respect to the base plate, a plurality of linear actuators mounted between the magnets and the upper connecting piece respectively for moving the connecting piece with respect to the magnets.

摘要翻译： 本发明涉及电磁对准装置，其特别适用于在微光刻系统中对准晶片的其它可能用途，所述装置包括基板，安装在所述第一载流线圈组件上的第一载流线圈组件 基板，相对于第一线圈组件以间隔的关系安装在基板上的第二载流线圈组件，邻近第一线圈组件安装的第一磁体和邻近第二线圈组件安装的第二磁体，连接 第一和第二磁体，用于接收上连接件上的物体的安装座，基板和磁体以及上连接件共同形成磁路;控制器，用于控制通过线圈组件的电流流动和方向移动 磁体和上连接片相对于基板，多个线性致动器安装在磁卡之间 网和上连接片分别用于相对于磁体移动连接件。

公开(公告)号：US06888619B2

公开(公告)日：2005-05-03

申请号：US10394839

申请日：2003-03-21

申请人： David Trost

发明人： David Trost

IPC分类号： G03F7/20 ,  H01L21/68 ,  G03B27/58 ,  G03B27/42

CPC分类号： F16C29/025 ,  F16C32/0603 ,  F16C32/0666 ,  F16C33/748 ,  F16C2300/62 ,  G03F7/70758 ,  G03F7/70816 ,  G03F7/70941 ,  H01J2237/20 ,  H01L21/68

摘要： This invention is directed to precision positioning devices which are well suited to manufacturing and inspection of semiconductor devices. A pair of coil assembles are attached to a base plate. The base plate forms a static portion of a gas bearing assembly. A carriage assembly, forming a movable portion of the gas bearing assembly, is capable of in-plane motion over the coil assembly. The carriage assembly contains permanent magnets and a soft magnetic bridge. A metrology component, such as a mirror, is attached to the carriage kinematically. Three in-plane constraints consist of substantially straight line connections between the metrology component and the carriage in a plane substantially parallel to the plane of motion of the gas bearings. Three out-of-plane constraints on the metrology component comprise substantially straight line connections between it and the gas bearings. The positioning device is operable in vacuum by directing the flow of gas out of the bearings to a vacuum pump. The positioning device is further capable of creating an area of low stray magnetic fields through the use of moving magnetic shielding material.

摘要翻译： 本发明涉及非常适合半导体器件的制造和检验的精密定位装置。 一对线圈组件连接到基板。 基板形成气体轴承组件的静止部分。 形成气体轴承组件的可移动部分的托架组件能够在线圈组件上面内运动。 托架组件包含永磁体和软磁桥。 计量部件，如反射镜，以运动方式连接到滑架。 三个面内约束由基本上平行于气体轴承的运动平面的平面中的测量部件和滑架之间的大致直线连接构成。 对测量部件的三个面外约束包括其与气体轴承之间的大致直线连接。 定位装置通过将气流从轴承引导到真空泵在真空中可操作。 定位装置还能够通过使用移动磁屏蔽材料产生低杂散磁场的面积。

公开(公告)号：US5781574A

公开(公告)日：1998-07-14

申请号：US873823

申请日：1997-06-12

申请人： Kevin P. Connors ,  James L. Hobart ,  Edward D. Reed ,  David Trost ,  Kenneth J. Bossie ,  Thomas William McCurnin ,  Gerald M. Mitchell ,  J. Michael Yarborough

发明人： Kevin P. Connors ,  James L. Hobart ,  Edward D. Reed ,  David Trost ,  Kenneth J. Bossie ,  Thomas William McCurnin ,  Gerald M. Mitchell ,  J. Michael Yarborough

IPC分类号： G02B6/42 ,  H01S3/04 ,  H01S3/042 ,  H01S3/0915 ,  H01S3/092 ,  H01S3/23

CPC分类号： G02B6/4296 ,  H01S3/042 ,  H01S3/092 ,  H01S3/2383 ,  H01S3/005 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/0931 ,  H01S3/10046 ,  H01S3/10053 ,  H01S3/1022 ,  Y10S165/303 ,  Y10S165/314

摘要： A liquid circulation system for cooling a laser head is disclosed. The circulation system comprises a main storage tank for holding a cooling liquid and a pump for circulating the liquid from the tank through the laser head and back into the tank. The cooling system includes a heat exchanger for cooling the liquid. The heat exchanger includes liquid carrying coils and an impeller fan rotatable about an axis. The fan being located adjacent the coils for drawing air across the coils in an axial direction with respect to the fan and for expelling the air radially with respect to the fan.

摘要翻译： 公开了一种用于冷却激光头的液体循环系统。 循环系统包括用于保持冷却液的主储罐和用于使来自罐的液体通过激光头循环并返回到罐中的泵。 冷却系统包括用于冷却液体的热交换器。 热交换器包括液体承载线圈和可围绕轴线旋转的叶轮风扇。 所述风扇位于所述线圈附近，以相对于所述风扇在轴向方向上吸引空气，并相对于所述风扇径向排出所述空气。

公开(公告)号：US5394501A

公开(公告)日：1995-02-28

申请号：US136307

申请日：1993-10-13

申请人： Philip Baumeister ,  Dennis Fischer ,  David Trost

发明人： Philip Baumeister ,  Dennis Fischer ,  David Trost

IPC分类号： G02B1/10 ,  G02B5/08 ,  G02B5/26 ,  G02B5/28 ,  G02B6/02 ,  G02B6/032 ,  G02B6/20

CPC分类号： G02B5/0833 ,  G02B5/0858 ,  Y10T428/24479 ,  Y10T428/24537

摘要： A waveguide including a folded, coated reflector highly reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The waveguide can be employed for guiding laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. In some embodiments, the invention is a hollow waveguide formed by folding a flat, coated substrate into a polygonal shape. Because the coated substrate is folded, rather than rolled into a cylindrical tube, the bending stress on the coating is concentrated at the corners of the polygonal waveguide rather than distributed over the waveguide's entire surface. Although the coating may crack at the corners of the waveguide's polygonal cross-section, the flat surfaces between the waveguide edges will be intact, and the cracks in the corners will have an insignificant effect on waveguide performance.

摘要翻译： 一种波导，其包括折射式涂覆的反射器，其高度反射在宽的入射角范围内具有两个不同波长的辐射，包括掠入射角。 波导可用于引导用于医疗或其他应用的激光辐射，例如组合的HeNe和CO 2激光束。 在一些实施例中，本发明是通过将平坦的涂覆的基底折叠成多边形形成的中空波导。 由于涂覆的基材被折叠而不是卷成圆柱形管，涂层上的弯曲应力集中在多边形波导的拐角处，而不是分布在波导的整个表面上。 虽然涂层可能在波导的多边形横截面的拐角处破裂，但是波导边缘之间的平坦表面将是完整的，并且拐角处的裂纹对波导性能将具有不显着的影响。

公开(公告)号：US5375132A

公开(公告)日：1994-12-20

申请号：US57084

申请日：1993-05-05

申请人： Kevin P. Connors ,  James L. Hobart ,  Edward D. Reed ,  David Trost ,  Kenneth J. Bossie ,  Thomas W. McCurnin ,  Gerald M. Mitchell ,  J. Michael Yarborough

发明人： Kevin P. Connors ,  James L. Hobart ,  Edward D. Reed ,  David Trost ,  Kenneth J. Bossie ,  Thomas W. McCurnin ,  Gerald M. Mitchell ,  J. Michael Yarborough

IPC分类号： G02B6/42 ,  H01S3/04 ,  H01S3/042 ,  H01S3/0915 ,  H01S3/092 ,  H01S3/23 ,  H01S3/102

CPC分类号： G02B6/4296 ,  H01S3/042 ,  H01S3/092 ,  H01S3/2383 ,  H01S3/005 ,  H01S3/025 ,  H01S3/0407 ,  H01S3/0931 ,  H01S3/10046 ,  H01S3/10053 ,  H01S3/1022 ,  Y10S165/303 ,  Y10S165/314

摘要： A pulsed solid state laser system is disclosed which utilizes a plurality of individual laser rods which are sequentially pumped and whose beans are combined into a single interleaved output bean. The individual laser rods are pumped at an average power level which is below that for maximum output power from each rod, thereby obviating the need for refrigeration cooling. A compact optical system is disclosed which permits a constant beam size even at different pump levels and other advantages. A compact cooling system is also disclosed.

摘要翻译： 公开了一种脉冲固态激光系统，其利用了顺序泵浦的多个单独的激光棒，并将其组合成单个交错输出豆。 单个激光棒的平均功率水平被泵浦，该功率水平低于来自每个杆的最大输出功率的激光棒，从而避免了对制冷冷却的需要。 公开了一种紧凑的光学系统，即使在不同的泵水平和其他优点下也允许恒定的光束尺寸。 还公开了紧凑的冷却系统。

公开(公告)号：US5341238A

公开(公告)日：1994-08-23

申请号：US119336

申请日：1993-09-09

申请人： David Trost ,  Philip Baumeister ,  Dennis Fischer

发明人： David Trost ,  Philip Baumeister ,  Dennis Fischer

IPC分类号： G02B5/26 ,  G02B5/28 ,  G02B21/32 ,  G02B5/20 ,  G02B1/10

CPC分类号： G02B5/282

摘要： A dichroic optical filter including a substrate that is substantially transparent to visible radiation, and an oxide semiconductor layer on the substrate for reflecting an infrared wavelength (such as an infrared treatment beam wavelength). An example of a suitable oxide semiconductor for reflecting a treatment beam from a CO.sub.2 layer is indium tin oxide. Preferably, the filter includes a specially designed multilayer coating on the oxide semiconductor layer to enhance the reflection of infrared and longer wavelength radiation. This multilayer coating includes alternating quarter-wave layers of high and low refractive index materials, each having an optical thickness substantially equal to a quarter-wavelength of infrared radiation to be reflected. Preferably also, the multilayer coating includes a thin multilayer coating between each pair of adjacent quarter-wave layers, with these thin multilayer coatings being designed to enhance the filter's transmission of visible radiation, while not significantly affecting the filter's reflection of infrared wavelengths. Also preferably, the multilayer coating includes a second multilayer coating which reflects a narrow band of visible radiation (such as visible radiation from a HeNe laser aiming beam), while transmitting most visible wavelengths.

摘要翻译： 包括对可见光辐射基本透明的基板的二向色滤光器以及用于反射红外波长（例如红外线处理光束波长）的基板上的氧化物半导体层。 用于从CO 2层反射处理光束的合适的氧化物半导体的实例是氧化铟锡。 优选地，过滤器包括在氧化物半导体层上的特别设计的多层涂层，以增强红外线和较长波长辐射的反射。 该多层涂层包括高折射率材料和低折射率材料的交替的四分之一波长层，每一层具有基本上等于要反射的红外辐射的四分之一波长的光学厚度。 优选地，多层涂层还包括在每对相邻四分之一波长层之间的薄多层涂层，其中这些薄多层涂层被设计成增强滤光器的可见光辐射，同时不会显着影响滤光器的红外波长的反射。 还优选地，多层涂层包括反射可见辐射的窄带（例如来自HeNe激光瞄准光束的可见光）的第二多层涂层，同时传输最可见的波长。

公开(公告)号：US5333090A

公开(公告)日：1994-07-26

申请号：US959699

申请日：1992-10-13

申请人： Philip Baumeister ,  Dennis Fischer ,  David Trost

发明人： Philip Baumeister ,  Dennis Fischer ,  David Trost

IPC分类号： G02B1/10 ,  G02B5/08 ,  G02B5/26 ,  G02B5/28 ,  G02B6/02 ,  G02B6/032 ,  B32B3/00 ,  G02B6/00

CPC分类号： G02B5/0833 ,  G02B5/0858 ,  Y10T428/24479 ,  Y10T428/24537

摘要： A coated reflector reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The coated reflector can be employed in a waveguide for laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. Preferably, the coated reflector includes a metal substrate and a multi-layer stack thereon, the multi-layer stack consists of alternating dielectric layers of high and low refractive index material, each pair of adjacent high and low index layers of the stack has a combined matched optical thickness substantially equal to an incident short (e.g., visible) wavelength multiplied by a factor M/2, and the total matched optical thickness of the stack is substantially equal to (2N-1).lambda..sub.L /8, where M and N are positive integers and .lambda..sub.L is an incident long wavelength (such as the wavelength of a CO.sub.2 laser beam). Preferably, the substrate is silver, the high index dielectric is zinc sulfide, and the low index dielectric is yttrium fluoride or cerium fluoride. In other embodiments, the invention is a coated substrate having substantially parallel indentations along which it can be folded into a polygonal shape for use a waveguide.

摘要翻译： 反射辐射的涂覆反射体在宽范围的入射角上具有两个不同的波长，包括掠入射角。 涂覆的反射器可以用于可用于医疗或其他应用的激光辐射的波导中，例如组合的HeNe和CO 2激光束。 优选地，涂覆的反射器包括金属基板和其上的多层堆叠，多层堆叠由交替的高折射率材料和低折射率材料的电介质层组成，堆叠的每对相邻的高和低折射率层具有组合 匹配的光学厚度基本上等于乘以因子M / 2的入射短（例如可见）波长，并且叠层的总匹配光学厚度基本上等于（2N-1）λL / 8，其中M和N 是正整数，λL是入射长波长（例如CO 2激光束的波长）。 优选地，基底是银，高折射率电介质是硫化锌，低折射率电介质是氟化钇或氟化铈。 在其它实施例中，本发明是具有基本上平行的凹陷的涂覆的基底，沿着该凹陷可折叠成多边形形状以用于波导。

公开(公告)号：US5257992A

公开(公告)日：1993-11-02

申请号：US841426

申请日：1992-02-26

申请人： Robert B. Estrada ,  David Trost

发明人： Robert B. Estrada ,  David Trost

IPC分类号： A61B18/20 ,  A61B19/00 ,  B23K26/02 ,  G02B7/182 ,  G02B26/08 ,  A61B17/36

CPC分类号： A61B18/20 ,  A61B34/72 ,  B23K26/02 ,  B23K26/035 ,  G02B26/0816 ,  G02B7/1824 ,  A61B2034/742 ,  Y10T74/20201

摘要： An improved apparatus for manually manipulating a surgical laser beam is disclosed. The preferred embodiment of the invention includes a mirror nominally positioned at a 45 degree angle to the incident laser beam, a joy stick for manipulating the mirror, and a linkage interconnecting the two. The mirror is mounted to allow it to rotate about two mutually perpendicular and intersecting axes. The linkage operates to direct the reflected laser beam in two orthogonal dimensions such that a ratio between the movement of the reflected beam in each dimension is equivalent to the ratio of the movement of the joy stick in each dimension. This yields a reflected laser beam that moves a distance proportional to the amount of motion input to the joy stick. The reduction or amplification ratio between the input motion and the reflected laser beam motion remains constant, regardless of the direction of motion. In this manner, by moving the joy stick in a circular motion, the reflected laser beam also moves in a circular motion, rather than in an elliptical motion. A simplified joint that allows spherical rotation and axial translation between its two members is also disclosed. In the preferred embodiment, an adjustable hand rest is provided that moves out of the way when not in use.

摘要翻译： 公开了一种用于手动操作外科激光束的改进的装置。 本发明的优选实施例包括一个与入射激光束成45度角的镜子，用于操纵反射镜的操纵杆以及将两者相互连接的连杆。 镜子被安装成允许其围绕两个相互垂直和相交的轴线旋转。 联动操作以将反射的激光束引导成两个正交的尺寸，使得反射光束在每个维度上的运动之间的比率等于每个维度中的操纵杆的移动比。 这产生一个反射激光束，该反射激光束与输入到操纵杆的运动量成正比的距离。 输入运动与反射激光束运动之间的减小或放大比率保持恒定，而与运动方向无关。 以这种方式，通过以圆周运动来移动操纵杆，反射的激光束也以圆周运动而不是椭圆运动而移动。 还公开了允许其两个构件之间的球面旋转和轴向平移的简化接头。 在优选实施例中，提供了可调节的扶手，其在不使用时移动。

公开(公告)号：US4506205A

公开(公告)日：1985-03-19

申请号：US502998

申请日：1983-06-10

申请人： David Trost ,  Daniel Galburt

发明人： David Trost ,  Daniel Galburt

IPC分类号： H01L21/30 ,  G03F7/20 ,  G03F9/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68 ,  G05B1/06

CPC分类号： G03F7/70716

摘要： This invention is directed to electromagnetic alignment apparatus, which is particularly adapted, among many other possible uses, for use in aligning the wafers in a microlithography system, said apparatus comprising in combination three or more spaced magnets, three or more coil assemblies mounted to pass through the magnetic fields of the magnets respectively, means for controlling the flow of current through the coil assemblies respectively, said coil assemblies being joined together to form a structure movable with respect to the magnets and adapted to carry an object thereon, the coil assemblies being wound with respect to each other so that by controlling the supply of current to the coils the structure can be moved selectively in three degrees of freedom.

摘要翻译： 本发明涉及电磁对准装置，其特别适用于许多其他可能的用途，用于在微光刻系统中对准晶片，所述装置包括组合三个或更多间隔的磁体，三个或更多个线圈组件安装成通过 分别通过磁体的磁场，用于分别控制通过线圈组件的电流的装置，所述线圈组件被连接在一起以形成相对于磁体可移动的结构，并适于在其上承载物体，线圈组件 相对于彼此缠绕，使得通过控制向线圈的电流的供应，结构可以以三个自由度选择性地移动。

公开(公告)号：US06878950B2

公开(公告)日：2005-04-12

申请号：US10844223

申请日：2004-05-12

申请人： Bassam Shamoun ,  David Trost

发明人： Bassam Shamoun ,  David Trost

IPC分类号： G03F1/00 ,  G03F7/20 ,  H01J37/317 ,  H01L21/027 ,  G01B11/26 ,  H01J37/00

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F1/00 ,  H01J37/3174 ,  H01J2237/31794

摘要： The present invention relates generally to methods, apparatus and materials to reduce or minimize the heating of a substrate (and associated distortions of the photomask) caused by electron-beam energy deposited in the substrate during patterning. Heating of the substrate is exacerbated by radiative transfer of infrared energy from the substrate to other nearby components of the e-beam apparatus followed by reflection or re-radiation of a portion of the energy back to the substrate. The present invention provides useful materials and methods for reducing such reflection or re-radiation effects, leading to temperature stability of the substrate, reduced thermal distortion and the possibility of increased patterning accuracy. The infrared absorbing materials of the present invention also possess sufficient electrical conductivity to dissipate scattered electrons residing on the material, and sufficient thermal conductivity to dissipate heat rapidly and not result in local heating or significant temperature rise of the absorber. The semiconducting material silicon carbide (SiC) is satisfactory for the practice of the present invention. Doped SiC having altered electrical conductivity may also be used. It is shown that emission and re-absorption from the uncoated face of the substrate dominates the substrate's temperature rise.

摘要翻译： 本发明一般涉及减少或最小化在图案化期间由衬底中沉积的电子束能量引起的衬底加热（和光掩模的相关变形）的方法，设备和材料。 衬底的加热通过将红外能量从电子束设备的基底辐射转移到其它附近的部件，随后将能量的一部分反射或重新辐射回到衬底来加剧。 本发明提供用于减少这种反射或再辐射效应的有用的材料和方法，导致衬底的温度稳定性，降低的热变形和增加图案精度的可能性。 本发明的红外线吸收材料还具有足够的电导率以消散驻留在材料上的散射电子，并且具有足够的导热性以快速散发热量，并且不会导致吸收体的局部加热或显着的温度升高。 半导体材料碳化硅（SiC）对于本发明的实践是令人满意的。 也可以使用具有改变的导电性的掺杂的SiC。 显示从衬底的未涂覆面的发射和再吸收主导衬底的温度升高。