Dichroic optical filter
    1.
    发明授权

    公开(公告)号:US5296961A

    公开(公告)日:1994-03-22

    申请号:US690068

    申请日:1991-04-23

    IPC分类号: G02B5/26 G02B5/28 G02B21/32

    CPC分类号: G02B5/282

    摘要: A dichroic optical filter including a substrate that is substantially transparent to visible radiation, and an oxide semiconductor layer on the substrate for reflecting an infrared wavelength (such as an infrared treatment beam wavelength). An example of a suitable oxide semiconductor for reflecting a treatment beam from a CO.sub.2 layer is indium tin oxide. Preferably, the filter includes a specially designed multilayer coating on the oxide semiconductor layer to enhance the reflection of infrared and longer wavelength radiation. This multilayer coating includes alternating quarter-wave layers of high and low refractive index materials, each having an optical thickness substantially equal to a quarter-wavelength of infrared radiation to be reflected. Preferably also, the multilayer coating includes a thin multilayer coating between each pair of adjacent quarter-wave layers, with these thin multilayer coatings being designed to enhance the filter's transmission of visible radiation, while not significantly affecting the filter's reflection of infrared wavelengths. Also preferably, the multilayer coating includes a second multilayer coating which reflects a narrow band of visible radiation (such as visible radiation from a HeNe laser aiming beam), while transmitting most visible wavelengths.

    Optical coating for reflecting visible and longer wavelength radiation
having grazing incidence angle
    2.
    发明授权
    Optical coating for reflecting visible and longer wavelength radiation having grazing incidence angle 失效
    用于反射具有掠入射角的可见光和较长波长辐射的光学涂层

    公开(公告)号:US5394501A

    公开(公告)日:1995-02-28

    申请号:US136307

    申请日:1993-10-13

    摘要: A waveguide including a folded, coated reflector highly reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The waveguide can be employed for guiding laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. In some embodiments, the invention is a hollow waveguide formed by folding a flat, coated substrate into a polygonal shape. Because the coated substrate is folded, rather than rolled into a cylindrical tube, the bending stress on the coating is concentrated at the corners of the polygonal waveguide rather than distributed over the waveguide's entire surface. Although the coating may crack at the corners of the waveguide's polygonal cross-section, the flat surfaces between the waveguide edges will be intact, and the cracks in the corners will have an insignificant effect on waveguide performance.

    摘要翻译: 一种波导,其包括折射式涂覆的反射器,其高度反射在宽的入射角范围内具有两个不同波长的辐射,包括掠入射角。 波导可用于引导用于医疗或其他应用的激光辐射,例如组合的HeNe和CO 2激光束。 在一些实施例中,本发明是通过将平坦的涂覆的基底折叠成多边形形成的中空波导。 由于涂覆的基材被折叠而不是卷成圆柱形管,涂层上的弯曲应力集中在多边形波导的拐角处,而不是分布在波导的整个表面上。 虽然涂层可能在波导的多边形横截面的拐角处破裂,但是波导边缘之间的平坦表面将是完整的,并且拐角处的裂纹对波导性能将具有不显着的影响。

    Dichroic optical filter
    3.
    发明授权
    Dichroic optical filter 失效
    二向色滤光片

    公开(公告)号:US5341238A

    公开(公告)日:1994-08-23

    申请号:US119336

    申请日:1993-09-09

    CPC分类号: G02B5/282

    摘要: A dichroic optical filter including a substrate that is substantially transparent to visible radiation, and an oxide semiconductor layer on the substrate for reflecting an infrared wavelength (such as an infrared treatment beam wavelength). An example of a suitable oxide semiconductor for reflecting a treatment beam from a CO.sub.2 layer is indium tin oxide. Preferably, the filter includes a specially designed multilayer coating on the oxide semiconductor layer to enhance the reflection of infrared and longer wavelength radiation. This multilayer coating includes alternating quarter-wave layers of high and low refractive index materials, each having an optical thickness substantially equal to a quarter-wavelength of infrared radiation to be reflected. Preferably also, the multilayer coating includes a thin multilayer coating between each pair of adjacent quarter-wave layers, with these thin multilayer coatings being designed to enhance the filter's transmission of visible radiation, while not significantly affecting the filter's reflection of infrared wavelengths. Also preferably, the multilayer coating includes a second multilayer coating which reflects a narrow band of visible radiation (such as visible radiation from a HeNe laser aiming beam), while transmitting most visible wavelengths.

    摘要翻译: 包括对可见光辐射基本透明的基板的二向色滤光器以及用于反射红外波长(例如红外线处理光束波长)的基板上的氧化物半导体层。 用于从CO 2层反射处理光束的合适的氧化物半导体的实例是氧化铟锡。 优选地,过滤器包括在氧化物半导体层上的特别设计的多层涂层,以增强红外线和较长波长辐射的反射。 该多层涂层包括高折射率材料和低折射率材料的交替的四分之一波长层,每一层具有基本上等于要反射的红外辐射的四分之一波长的光学厚度。 优选地,多层涂层还包括在每对相邻四分之一波长层之间的薄多层涂层,其中这些薄多层涂层被设计成增强滤光器的可见光辐射,同时不会显着影响滤光器的红外波长的反射。 还优选地,多层涂层包括反射可见辐射的窄带(例如来自HeNe激光瞄准光束的可见光)的第二多层涂层,同时传输最可见的波长。

    Optical coating for reflecting visible and longer wavelength radiation
having grazing incidence angle
    4.
    发明授权
    Optical coating for reflecting visible and longer wavelength radiation having grazing incidence angle 失效
    用于反射具有掠入射角的可见光和较长波长辐射的光学涂层

    公开(公告)号:US5333090A

    公开(公告)日:1994-07-26

    申请号:US959699

    申请日:1992-10-13

    摘要: A coated reflector reflective of radiation having two different wavelengths over a wide range of incidence angles, including grazing incidence angles. The coated reflector can be employed in a waveguide for laser radiation useful for medical or other applications, such as a combined HeNe and CO.sub.2 laser beam. Preferably, the coated reflector includes a metal substrate and a multi-layer stack thereon, the multi-layer stack consists of alternating dielectric layers of high and low refractive index material, each pair of adjacent high and low index layers of the stack has a combined matched optical thickness substantially equal to an incident short (e.g., visible) wavelength multiplied by a factor M/2, and the total matched optical thickness of the stack is substantially equal to (2N-1).lambda..sub.L /8, where M and N are positive integers and .lambda..sub.L is an incident long wavelength (such as the wavelength of a CO.sub.2 laser beam). Preferably, the substrate is silver, the high index dielectric is zinc sulfide, and the low index dielectric is yttrium fluoride or cerium fluoride. In other embodiments, the invention is a coated substrate having substantially parallel indentations along which it can be folded into a polygonal shape for use a waveguide.

    摘要翻译: 反射辐射的涂覆反射体在宽范围的入射角上具有两个不同的波长,包括掠入射角。 涂覆的反射器可以用于可用于医疗或其他应用的激光辐射的波导中,例如组合的HeNe和CO 2激光束。 优选地,涂覆的反射器包括金属基板和其上的多层堆叠,多层堆叠由交替的高折射率材料和低折射率材料的电介质层组成,堆叠的每对相邻的高和低折射率层具有组合 匹配的光学厚度基本上等于乘以因子M / 2的入射短(例如可见)波长,并且叠层的总匹配光学厚度基本上等于(2N-1)λL / 8,其中M和N 是正整数,λL是入射长波长(例如CO 2激光束的波长)。 优选地,基底是银,高折射率电介质是硫化锌,低折射率电介质是氟化钇或氟化铈。 在其它实施例中,本发明是具有基本上平行的凹陷的涂覆的基底,沿着该凹陷可折叠成多边形形状以用于波导。

    High precision flexure stage
    5.
    发明授权
    High precision flexure stage 失效
    高精度弯曲台

    公开(公告)号:US06555829B1

    公开(公告)日:2003-04-29

    申请号:US09481103

    申请日:2000-01-10

    IPC分类号: G01B902

    摘要: Disclosed is a positioning stage for precisely positioning an object within a limited range of travel (e.g. 100 &mgr;m). By way of example, the stage can be used to position an electron source such as a field emitter in an electron beam microcolumn. The stage includes a block which defines a channel to allow flexure along a first axis. The block also defines another channel to allow flexure along a second axis perpendicular to the first axis. Using actuators in the channels to flex a portion of the block, the object supported by the block can be precisely positioned to a desired location in a horizontal plane defined by the first and second axes.

    摘要翻译: 公开了一种用于在有限的旅行范围内(例如,100mum)精确地定位物体的定位台。 作为示例,该级可用于将诸如场致发射体的电子源定位在电子束微柱中。 舞台包括限定通道以允许沿着第一轴弯曲的块。 该块还限定另一个通道,以允许沿垂直于第一轴线的第二轴线弯曲。 使用通道中的致动器来弯曲块的一部分,由块支撑的物体可精确地定位在由第一和第二轴限定的水平平面中的期望位置。

    Handpiece for producing highly collimated laser beam for dermatological
procedures
    7.
    发明授权
    Handpiece for producing highly collimated laser beam for dermatological procedures 失效
    用于生产高准直激光束用于皮肤病学手术的手机

    公开(公告)号:US5558666A

    公开(公告)日:1996-09-24

    申请号:US183111

    申请日:1994-01-14

    IPC分类号: A61B18/20 A61N5/06

    摘要: A handpiece for use in delivering the output beam of a laser to the surface of a patient's skin for performing a dermatological procedure. In a first and second embodiment of the present invention, the handpiece provides a highly collimated beam of a fixed, non-variable spot size which is largely insensitive to movement of the handpiece over a range of working positions. In a third embodiment the handpiece provides a highly collimated and well defined focused laser spot of variable size where for a selected spot size, the size is largely insensitive to movement of the handpiece over a range of working positions. In all of the embodiments, the highly collimated laser beam permits the surgeon performing the procedure to move the handpiece over a range of positions without significantly defocusing or altering the spot size of the beam.

    摘要翻译: 用于将激光的输出光束传送到患者皮肤表面以进行皮肤病学手术的手持件。 在本发明的第一和第二实施例中,手持件提供固定的,不可变的光斑尺寸的高度准直的光束,其大大不敏感于在一定范围的工作位置上的手持件的移动。 在第三实施例中,手持件提供可变尺寸的高度准直和良好限定的聚焦激光光斑,其中对于所选择的光点尺寸,该尺寸对于在一定范围的工作位置上的手持件的移动很大程度上不敏感。 在所有实施例中,高度准直的激光束允许外科医生执行过程以将手持件移动到一定范围的位置,而不会明显地散焦或改变光束的光点尺寸。

    Electronically pulsed laser system
    8.
    发明授权
    Electronically pulsed laser system 失效
    电脉冲激光系统

    公开(公告)号:US6135995A

    公开(公告)日:2000-10-24

    申请号:US710577

    申请日:1996-09-19

    摘要: Typically, a laser emits significant energy after a control signal is generated to disable the power supply. The inherent delay between generation of a control signal for shutting off a laser power supply and actual termination of an output beam pulse in response to the control signal, is compensated in the context that the control signal is generated automatically upon coincidence of measured output beam power with a preset threshold value. Power supplied to a laser is modulated to cause generation of a pulsed laser output beam. The cumulative energy of each output beam pulse is monitored and a feedback signal indicative of measured output beam pulse energy is supplied to the power supply. The feedback signal is compared with a user-selected threshold value, and a control signal is generated for terminating the output beam pulse (by terminating input power to the laser) when the measured output pulse energy reaches the threshold value. By generating the threshold signal to have a value representing a threshold output beam pulse energy that is lower than a desired output beam pulse energy, the threshold signal is generated in a manner which compensates for the inherent delay between generation of the control signal and the actual termination of the output beam pulse in response to the control signal. This prevents delivery of significant output beam energy in excess of a user-selected amount.

    摘要翻译: 通常,在产生控制信号以禁用电源之后,激光器发射显着的能量。 在响应于控制信号的用于关闭激光电源的控制信号的产生和输出光束脉冲的实际终止之间的固有延迟在上下文中得到补偿,所述上下文中控制信号在测量的输出光束功率一致时自动产生 具有预设的阈值。 对激光器供电的功率被调制以产生脉冲激光输出光束。 监视每个输出光束脉冲的累积能量,并将指示测量的输出光束脉冲能量的反馈信号提供给电源。 将反馈信号与用户选择的阈值进行比较,并且当测量的输出脉冲能量达到阈值时,生成用于终止输出光束脉冲(通过终止对激光器的输入功率)的控制信号。 通过产生阈值信号以具有表示低于期望的输出光束脉冲能量的阈值输出光束脉冲能量的值,该阈值信号以补偿控制信号的产生与实际的信号之间的固有延迟的方式产生 响应于控制信号终止输出光束脉冲。 这防止输出超过用户选择量的显着输出光束能量。

    Method and apparatus for run-time correction of proximity effects in
pattern generation
    10.
    发明授权
    Method and apparatus for run-time correction of proximity effects in pattern generation 失效
    用于图案生成中邻近效应的运行时校正的方法和装置

    公开(公告)号:US5847959A

    公开(公告)日:1998-12-08

    申请号:US789246

    申请日:1997-01-28

    摘要: An electron beam pattern generating system for exposing a pattern on a substrate using a raster scan method. The system stores a rasterized representation of the pattern as a plurality of regular pixel dose exposure levels. These pixel dose exposure levels are evaluated by the system for one or more proximity effects and corrections to the dose exposure level and/or pixel location are calculated. The system includes apparatus for both calculation and storage of intermediate and final results as required. As they are calculated, the corrections are provided to an exposure dose modulator wherein they are applied to forming the pattern. Thus corrections for both long range and short range proximity effects due to both electron scattering and heating as well as for proximity effects due to global thermal expansion can be calculated and provided during run-time and a corrected pattern exposed.

    摘要翻译: 一种电子束图案生成系统,用于使用光栅扫描方法在衬底上曝光图案。 系统将图案的光栅化表示存储为多个规则像素剂量曝光水平。 这些像素剂量暴露水平由系统评估一个或多个邻近效应,并且计算对剂量暴露水平和/或像素位置的校正。 该系统包括用于根据需要计算和存储中间和最终结果的装置。 当它们被计算时,校正被提供给曝光剂量调制器,其中它们被应用于形成图案。 因此,由于电子散射和加热以及由于全局热膨胀引起的邻近效应,对长距离和短距离邻近效应的校正可以在运行时间和校正图案暴露期间被计算和提供。