公开(公告)号：US20140220913A1

公开(公告)日：2014-08-07

申请号：US13761679

申请日：2013-02-07

Applicant: MKS INSTRUMENTS, INC.

Inventor： David J. COUMOU ,  Larry J. FISK, II

IPC: H04B1/04

CPC classification number: H01J37/32183 ,  H01J37/32935 ,  H03H7/40

Abstract: A distortion module includes a first module, at least one module and a correction module. The first module is configured to (i) receive radio frequency signals from radio frequency sensors of a power amplifier, and (ii) generate a distortion signal indicating distortion values for the radio frequency signals. The radio frequency signals are indicative of radio frequency power out of the power amplifier and received by a transmission line. At least one module is configured to estimate a phase of the distortion signal. The phase of the distortion signal is indicative of a phase of the transmission line. The correction module is configured to generate a distortion correction signal based on the phase to correct at least one of the distortion values of the radio frequency signals.

Abstract translation: 失真模块包括第一模块，至少一个模块和校正模块。 第一模块被配置为（i）从功率放大器的射频传感器接收射频信号，以及（ii）产生指示射频信号的失真值的失真信号。 射频信号表示功率放大器的射频功率并由传输线接收。 至少一个模块被配置为估计失真信号的相位。 失真信号的相位表示传输线的相位。 校正模块被配置为基于相位产生失真校正信号，以校正射频信号的失真值中的至少一个。

公开(公告)号：US20140218076A1

公开(公告)日：2014-08-07

申请号：US13761955

申请日：2013-02-07

Applicant: MKS INSTRUMENTS, INC.

Inventor： David J. COUMOU ,  Larry J. FISK, II ,  Aaron T. RADOMSKI ,  Jaehyun KIM ,  Sang-Won LEE ,  Jonathan SMYKA

IPC: H01J37/32 ,  H03L7/00

CPC classification number: H01J37/32174 ,  H01J37/3299

Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.

Abstract translation: 公开了射频（RF）系统。 RF系统包括RF传感器，模数转换器（ADC）模块，处理模块和同步模块。 RF传感器测量RF输出的参数，并根据参数产生RF信号。 ADC模块将RF信号的采样转换为数字值。 处理模块基于数字值产生处理的值。 响应于RF输出中的转换，同步模块输出其中一个处理值。

公开(公告)号：US20190333738A1

公开(公告)日：2019-10-31

申请号：US16509088

申请日：2019-07-11

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Ross REINHARDT ,  Yuriy ELNER ,  Daniel M. GILL ,  Richard PHAM

IPC: H01J37/32

Abstract: A system for controlling RF power supplies applying power to a load, such as a plasma chamber, includes a master power supply and a slave power supply. The master power supply provides a control signal, such as a frequency and phase signal, to the slave power supply. The slave power supply receives the frequency and phase signal and also receives signals characteristic of the spectral emissions detected from the load. The slave RF power supply varies the phase and power of its RF output signal applied to the load. Varying the power controls the width of an ion distribution function, and varying the phase controls a peak of the ion distribution. Depending upon the coupling between the RF generators and the load, different spectral emissions are detected, including first harmonics, second harmonics, and, in the case of a dual frequency drive system, intermodulation distortion.

公开(公告)号：US20140320013A1

公开(公告)日：2014-10-30

申请号：US14249972

申请日：2014-04-10

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Michael L. KIRK ,  Daniel M. GILL

IPC: H01J37/32

CPC classification number: H01J37/32082 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/32935

Abstract: A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.

Abstract translation: 系统具有第一RF发生器和第二RF发生器。 第一个RF发生器控制第二个RF发生器的频率。 第一RF发生器包括电源，传感器和传感器信号处理单元。 传感器信号处理单元耦合到电源和传感器。 传感器信号处理单元缩放第一RF发生器的频率以控制第二RF发生器的频率。

公开(公告)号：US20140306754A1

公开(公告)日：2014-10-16

申请号：US14324540

申请日：2014-07-07

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU ,  Richard PHAM

IPC: H03G1/00 ,  H03F3/189 ,  H03F3/20 ,  H03F1/56

CPC classification number: H03G1/00 ,  H03F1/0211 ,  H03F1/56 ,  H03F3/189 ,  H03F3/20 ,  H03H7/40

Abstract: A RF power supply system for delivering periodic RF power to a load. A power amplifier outputs a RF signal to the load. A sensor measures the RF signal provided to the load and outputs signals that vary in accordance with the RF signal. A first feedback loop enables control the RF signal based upon power determined in accordance with output from the sensor. A second feedback loop enables control the RF signal based upon energy measured in accordance with signals output from the sensor. Energy amplitude and duration provide control values for varying the RF signal. The control system and techniques are applicable to both pulsed RF power supplies and in various instances to continuous wave power supplies.

Abstract translation: 用于向负载提供周期性RF功率的RF电源系统。 功率放大器将RF信号输出到负载。 传感器测量提供给负载的RF信号，并输出根据RF信号变化的信号。 第一反馈环路使得能够根据根据传感器的输出确定的功率来控制RF信号。 第二反馈回路使得能够根据根据从传感器输出的信号测量的能量来控制RF信号。 能量幅度和持续时间提供用于改变RF信号的控制值。 控制系统和技术适用于脉冲式RF电源以及各种情况下的连续波浪电源。

公开(公告)号：US20140263199A1

公开(公告)日：2014-09-18

申请号：US13834786

申请日：2013-03-15

Applicant: MKS Instruments, Inc.

Inventor： Nicholas NELSON ,  David J. COUMOU

IPC: B23K10/00

Abstract: A radio frequency (RF) power delivery system includes a first RF generator and a second RF generator. The first RF generator operates as a master RF generator, and the second RF generator operates as a slave RF generator. The slave RF generator includes a detector for sensing an electrical characteristic of the RF signal of the slave RF generator. The slave RF generator also includes a detector for sensing an electrical characteristic of the RF signal from the master RF generator. Operation of the slave RF generator is controlled by a host or controller. The host or controller operates the slave RF generator in accordance with electrical properties determined by the second detector.

Abstract translation: 射频（RF）功率传递系统包括第一RF发生器和第二RF发生器。 第一RF发生器作为主RF发生器工作，第二RF发生器作为从RF发生器工作。 从RF发生器包括用于感测从RF发生器的RF信号的电特性的检测器。 从RF发生器还包括用于感测来自主RF发生器的RF信号的电特性的检测器。 从RF发射器的操作由主机或控制器控制。 主机或控制器根据由第二检测器确定的电特性来操作从RF发生器。

公开(公告)号：US20140028389A1

公开(公告)日：2014-01-30

申请号：US14044547

申请日：2013-10-02

Applicant: MKS Instruments, Inc.

Inventor： David J. COUMOU

IPC: H03F1/56

CPC classification number: H03F1/56 ,  H03F1/32 ,  H03F3/189 ,  H03F3/191

Abstract: A radio frequency system includes a power amplifier that outputs a radio frequency signal to a matching network via a transmission line between the power amplifier and the matching network. A sensor monitors the radio frequency signal and generates first sensor signals based on the radio frequency signal. A distortion module determines a first distortion value according to at least one of (i) a sinusoidal function of the first sensor signals and (ii) a cross-correlation function of the first sensor signals. A first correction circuit (i) generates a first impedance tuning value based on the first distortion value and a first predetermined value, and (ii) provides feedforward control of impedance matching performed within the matching network including outputting the first impedance tuning value to one of the power amplifier and the matching network.

Abstract translation: 射频系统包括功率放大器，其通过功率放大器和匹配网络之间的传输线将射频信号输出到匹配网络。 传感器监测射频信号，并根据射频信号产生第一传感器信号。 失真模块根据（i）第一传感器信号的正弦函数和（ii）第一传感器信号的互相关函数中的至少一个来确定第一失真值。 第一校正电路（i）基于第一失真值和第一预定值产生第一阻抗调谐值，并且（ii）提供在匹配网络内执行的阻抗匹配的前馈控制，包括将第一阻抗调谐值输出到 功率放大器和匹配网络。