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公开(公告)号：US08178153B2
公开(公告)日：2012-05-15
申请号：US11395857
申请日：2006-03-31
CPC分类号： H01L23/3735 , H01L23/34 , H01L2924/0002 , H01L2924/00
摘要： A heat transfer control structure and a method for fabrication thereof includes at least one heat transfer control layer interposed between and contacting a heat source material and a heat sink material. The at least one heat transfer control layer is selected predicated upon thermal phonon spectra overlap between the heat source material, the at least one heat transfer control layer and the heat sink material. The at least one heat transfer control layer may enhance or retard heat transfer between the heat source material and the heat sink material. The at least one heat transfer control layer may be selected based upon a value of a thermal phonon correlating parameter such as a Debye temperature, a density or a lattice constant.
摘要翻译： 传热控制结构及其制造方法包括插入在热源材料和散热材料之间并与之接触的至少一个传热控制层。 根据热源材料，至少一个传热控制层和散热材料之间的热声子光谱重叠来选择至少一个传热控制层。 至少一个传热控制层可以增强或延缓热源材料和散热材料之间的热传递。 可以基于诸如德拜温度，密度或晶格常数的热声子相关参数的值来选择至少一个传热控制层。
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12.发明授权Waveguide polarization beam splitters and method of fabricating a waveguide wire-grid polarization beam splitter 有权波导偏振分束器及制造波导线栅偏振光束分离器的方法公开(公告)号：US07486845B2
公开(公告)日：2009-02-03
申请号：US11870463
申请日：2007-10-11
申请人： Charles T. Black , Gian-Luca Bona , Timothy J. Dalton , Nicholas C. M. Fuller , Roland Germann , Maurice McGlashan-Powell , Chandrasekhar Narayan , Robert L. Sandstorm
发明人： Charles T. Black , Gian-Luca Bona , Timothy J. Dalton , Nicholas C. M. Fuller , Roland Germann , Maurice McGlashan-Powell , Chandrasekhar Narayan , Robert L. Sandstorm
CPC分类号： G02B6/126 , B29D11/00759 , G02B6/136 , G02B2006/1215
摘要： A method in effectuating the redirection of light which is propagated within a waveguide, and which eliminates the necessity for a bending of the waveguide, or the drawbacks encountered in directional changes in propagated light involving the need for sharp curves of essentially small-sized radii, which would resultingly lead to excessive losses in light. In this connection, the method relates to the fabricating and the provision of a wire-grid polarization beam splitter within an optical waveguide, which utilizes a diblock copolymer template to formulate the wire-grid.
摘要翻译： 实现在波导内传播的光的重定向并且消除波导的弯曲的必要性的方法或者涉及需要基本上小的半径的尖锐曲线的传播光的方向性变化中遇到的缺点， 这将导致轻微的过度损失。 在这方面，该方法涉及在光波导内制造和提供线栅偏振分束器，其利用二嵌段共聚物模板来配制线栅。
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公开(公告)号：US20070230135A1
公开(公告)日：2007-10-04
申请号：US11395857
申请日：2006-03-31
IPC分类号： H05K7/20
CPC分类号： H01L23/3735 , H01L23/34 , H01L2924/0002 , H01L2924/00
摘要： A heat transfer control structure and a method for fabrication thereof includes at least one heat transfer control layer interposed between and contacting a heat source material and a heat sink material. The at least one heat transfer control layer is selected predicated upon thermal phonon spectra overlap between the heat source material, the at least one heat transfer control layer and the heat sink material. The at least one heat transfer control layer may enhance or retard heat transfer between the heat source material and the heat sink material. The at least one heat transfer control layer may be selected based upon a value of a thermal phonon correlating parameter such as a Debye temperature, a density or a lattice constant.
摘要翻译： 传热控制结构及其制造方法包括插入在热源材料和散热材料之间并与之接触的至少一个传热控制层。 根据热源材料，至少一个传热控制层和散热材料之间的热声子光谱重叠来选择至少一个传热控制层。 至少一个传热控制层可以增强或延缓热源材料和散热材料之间的热传递。 可以基于诸如德拜温度，密度或晶格常数的热声子相关参数的值来选择至少一个传热控制层。
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公开(公告)号：US06358832B1
公开(公告)日：2002-03-19
申请号：US09641834
申请日：2000-08-18
申请人： Daniel C. Edelstein , Timothy J. Dalton , John G. Gaudiello , Mahadevaiyer Krishnan , Sandra G. Malhotra , Maurice McGlashan-Powell , Eugene J. O'Sullivan , Carlos J. Sambucetti
发明人： Daniel C. Edelstein , Timothy J. Dalton , John G. Gaudiello , Mahadevaiyer Krishnan , Sandra G. Malhotra , Maurice McGlashan-Powell , Eugene J. O'Sullivan , Carlos J. Sambucetti
IPC分类号： H01L2144
CPC分类号： H01L21/76849 , H01L21/288 , H01L21/3212 , H01L21/76829 , H01L21/76834 , H01L21/76835
摘要： A damascene interconnect containing a dual etch stop/diffusion barrier. The conductive material of the damascene interconnect is capped with a conductive metal diffusion barrier cap, typically using electroless deposition, and, optionally, with a dielectric etch-stop layer. An optional chemical mechanical polish-stop layer may also be present. The different methods of the invention allow the CMP stop, reactive-ion etch stop, and metal diffusion barrier requirements of the different layers to be decoupled. A preferred conductive material is copper.
摘要翻译： 包含双蚀刻停止/扩散屏障的镶嵌互连。 镶嵌互连的导电材料用导电金属扩散阻挡盖（通常使用无电沉积）和可选地与电介质蚀刻停止层封盖。 还可以存在任选的化学机械抛光 - 停止层。 本发明的不同方法允许不同层的CMP停止，反应离子蚀刻停止和金属扩散阻挡层要求被去耦合。 优选的导电材料是铜。
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公开(公告)号：US08404145B2
公开(公告)日：2013-03-26
申请号：US12819697
申请日：2010-06-21
IPC分类号： C09K13/04
CPC分类号： C09K13/04
摘要： An indium cap layer is formed by blanket depositing indium onto a surface of metallic interconnects separated by interlayer dielectric, and then selectively chemically etching the indium located on the interlayer dielectric leaving an indium cap layer. Etchants containing a strong acid are provided for selectively removing the indium.
摘要翻译： 通过在由层间电介质分离的金属互连件的表面上覆盖沉积铟，然后选择性地化学蚀刻位于层间电介质上的铟而形成铟盖层，留下铟盖层。 提供含有强酸的蚀刻剂用于选择性地除去铟。
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16.发明申请公开(公告)号：US20090080833A1
公开(公告)日：2009-03-26
申请号：US12189143
申请日：2008-08-09
CPC分类号： G02B6/2821 , G02B6/02 , G02B6/02033 , G02B6/03622 , G02B6/283 , G02B6/29316 , G02B6/421 , G02B6/4249
摘要： A single-mode optical waveguide with a core, surrounded by a cladding consisting of an inner soft layer and an outer harder layer is described. The outer layer has a grating structure on its inner surface, whose spatial frequency is the same as that of the guided mode. The thickness of the inner cladding is sufficient to keep the grating outside the mode field in undeformed regions of the waveguide, so that normally no out-coupling of the light results. Connections are made by crossing two such waveguides at an angle and pressing them together. This results in deformation of the two waveguides such that the gratings are brought into proximity with the cores. Light is coupled out of one waveguide and into the other in the deformed region, resulting in a self-aligning optical connection. The out-coupled light propagates normal to the waveguide axis, so errors in the crossing angle cause little change in efficiency. Because the cladding system is sufficiently resilient to recover after deformation, the connection is remakeable.
摘要翻译： 描述了具有由包含内软层和外硬层的覆层围绕的芯的单模光波导。 外层在其内表面具有光栅结构，其空间频率与导向模式相同。 内包层的厚度足以将光栅保持在波导的未变形区域中的模场外，使得通常不会导致光的外耦合。 通过将两个这样的波导以一定角度交叉并将它们压在一起而形成连接。 这导致两个波导的变形，使得光栅与芯接近。 光从一个波导耦合到变形区域中的另一个，导致自对准光学连接。 输出耦合光垂直于波导轴传播，因此交叉角的误差几乎不会导致效率的变化。 因为包层系统具有足够的弹性以在变形后恢复，所以连接是可重新制造的。
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公开(公告)号：US20080284052A1
公开(公告)日：2008-11-20
申请号：US11750559
申请日：2007-05-18
CPC分类号： B29C47/76 , B22F3/20 , B22F2003/208 , B23K35/025 , B29C47/0009 , B29C47/38 , B29C47/82 , B29C47/822 , B29C47/825 , B29C47/827 , H01L23/42 , H01L2924/0002 , H01L2924/00
摘要： A method of manufacturing a thermal paste, in which the method includes feeding the thermal paste into a chamber of an extruder; mixing the thermal paste at elevated temperatures; de-airing the thermal paste; and extruding the thermal paste out of the chamber through a die as a pre-form or into a cartridge, such that air channels and pseudo-grain boundaries are prevented from forming in the thermal paste.
摘要翻译： 一种制造热糊料的方法，其中该方法包括将热糊料进料到挤出机的室中; 在高温下混合热膏; 放热加热膏; 并且通过作为预成型体的模具或者进入筒体，将所述热膏料挤出所述腔室，从而防止在所述热浆料中形成空气通道和假晶粒边界。
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公开(公告)号：US20080179280A1
公开(公告)日：2008-07-31
申请号：US11669496
申请日：2007-01-31
CPC分类号： C09K13/04
摘要： An indium cap layer is formed by blanket depositing indium onto a surface of metallic interconnects separated by interlayer dielectric, and then selectively chemically etching the indium located on the interlayer dielectric leaving an indium cap layer. Etchants containing a strong acid are provided for selectively removing the indium.
摘要翻译： 通过在由层间电介质分离的金属互连件的表面上覆盖沉积铟，然后选择性地化学蚀刻位于层间电介质上的铟而形成铟盖层，留下铟盖层。 提供含有强酸的蚀刻剂用于选择性地除去铟。
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19.发明申请WAVEGUIDE POLARIZATION BEAM SPLITTERS AND METHOD OF FABRICATING A WAVEGUIDE WIRE-GRID POLARIZATION BEAM SPLITTER 有权波导偏振光束分离器及波导波导极化分束器的制作方法公开(公告)号：US20080175527A1
公开(公告)日：2008-07-24
申请号：US11870463
申请日：2007-10-11
申请人： Charles T. Black , Gian-Luca Bona , Timothy J. Dalton , Nicholas C. M. Fuller , Roland Germann , Maurice McGlashan-Powell , Chandrasekhar Narayan , Robert L. Sandstrom
发明人： Charles T. Black , Gian-Luca Bona , Timothy J. Dalton , Nicholas C. M. Fuller , Roland Germann , Maurice McGlashan-Powell , Chandrasekhar Narayan , Robert L. Sandstrom
IPC分类号： G02B6/00
CPC分类号： G02B6/126 , B29D11/00759 , G02B6/136 , G02B2006/1215
摘要： A method in effectuating the redirection of light which is propagated within a waveguide, and which eliminates the necessity for a bending of the waveguide, or the drawbacks encountered in directional changes in propagated light involving the need for sharp curves of essentially small-sized radii, which would resultingly lead to excessive losses in light. In this connection, the method relates to the fabricating and the provision of a wire-grid polarization beam splitter within an optical waveguide, which utilizes a diblock copolymer template to formulate the wire-grid.
摘要翻译： 实现在波导内传播的光的重定向并且消除波导的弯曲的必要性的方法或者涉及需要基本上小的半径的尖锐曲线的传播光的方向性变化中遇到的缺点， 这将导致轻微的过度损失。 在这方面，该方法涉及在光波导内制造和提供线栅偏振分束器，其利用二嵌段共聚物模板来配制线栅。
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公开(公告)号：US06153935A
公开(公告)日：2000-11-28
申请号：US409244
申请日：1999-09-30
申请人： Daniel C. Edelstein , Timothy J. Dalton , John G. Gaudiello , Mahadevaiyer Krishnan , Sandra G. Malhotra , Maurice McGlashan-Powell , Eugene J. O'Sullivan , Carlos J. Sambucetti
发明人： Daniel C. Edelstein , Timothy J. Dalton , John G. Gaudiello , Mahadevaiyer Krishnan , Sandra G. Malhotra , Maurice McGlashan-Powell , Eugene J. O'Sullivan , Carlos J. Sambucetti
IPC分类号： H01L21/30 , H01L21/288 , H01L21/321 , H01L21/768 , H01L21/4763
CPC分类号： H01L21/76849 , H01L21/288 , H01L21/3212 , H01L21/76829 , H01L21/76834 , H01L21/76835
摘要： A damascene interconnect containing a dual etch stop/diffusion barrier. The conductive material of the damascene interconnect is capped with a conductive metal diffusion barrier cap, typically using electroless deposition, and, optionally, with a dielectric etch-stop layer. An optional chemical mechanical polish-stop layer may also be present. The different methods of the invention allow the CMP stop, reactive-ion etch stop, and metal diffusion barrier requirements of the different layers to be decoupled. A preferred conductive material is copper.
摘要翻译： 包含双蚀刻停止/扩散屏障的镶嵌互连。 镶嵌互连的导电材料用导电金属扩散阻挡盖（通常使用无电沉积）和可选地与电介质蚀刻停止层封盖。 还可以存在任选的化学机械抛光 - 停止层。 本发明的不同方法允许不同层的CMP停止，反应离子蚀刻停止和金属扩散阻挡层要求被去耦合。 优选的导电材料是铜。
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