Hermetic conductive feedthroughs for a semiconductor wafer

    公开(公告)号:US11485670B2

    公开(公告)日:2022-11-01

    申请号:US16673572

    申请日:2019-11-04

    申请人: Medtronic, Inc.

    摘要: A glass wafer has an internal surface and an opposing external surface separated by a wafer thickness. A hermetic, electrically conductive feedthrough extends through the wafer from the internal surface to the opposing external surface. The feedthrough includes a feedthrough member having an inner face exposed along the internal surface for electrically coupling to an electrical circuit. The feedthrough member extends from the inner face partially through the wafer thickness to an exteriorly-facing outer face hermetically embedded within the wafer.

    Feedthrough assemblies and methods of forming same

    公开(公告)号:US10535596B2

    公开(公告)日:2020-01-14

    申请号:US15850061

    申请日:2017-12-21

    申请人: Medtronic, Inc.

    摘要: Various embodiments of a feedthrough assembly and methods of forming such assemblies are disclosed. In one or more embodiments, the feedthrough assembly can include a non-conductive substrate and a feedthrough. The feedthrough can include a via from an outer surface to an inner surface of the non-conductive substrate, a conductive material disposed in the via, and an external contact disposed over the via on the outer surface of the non-conductive substrate. The external contact can be electrically coupled to the conductive material disposed in the via. And the external contact can be hermetically sealed to the outer surface of the non-conductive substrate by a bond surrounding the via. In one or more embodiments, the bond can be a laser bond.

    FEEDTHROUGH ASSEMBLIES AND METHODS OF FORMING SAME
    14.
    发明申请
    FEEDTHROUGH ASSEMBLIES AND METHODS OF FORMING SAME 有权
    有意义的组装及其形成方法

    公开(公告)号:US20160190052A1

    公开(公告)日:2016-06-30

    申请号:US14966101

    申请日:2015-12-11

    申请人: Medtronic, Inc.

    IPC分类号: H01L23/498 H01L21/48

    摘要: Various embodiments of a feedthrough assembly and methods of forming such assemblies are disclosed. In one or more embodiments, the feedthrough assembly can include a non-conductive substrate and a feedthrough. The feedthrough can include a via from an outer surface to an inner surface of the non-conductive substrate, a conductive material disposed in the via, and an external contact disposed over the via on the outer surface of the non-conductive substrate. The external contact can be electrically coupled to the conductive material disposed in the via. And the external contact can be hermetically sealed to the outer surface of the non-conductive substrate by a bond surrounding the via. In one or more embodiments, the bond can be a laser bond.

    摘要翻译: 公开了馈通组件的各种实施例和形成这种组件的方法。 在一个或多个实施例中,馈通组件可以包括非导电衬底和馈通。 馈通可以包括从非导电衬底的外表面到内表面的通孔,设置在通孔中的导电材料和设置在非导电衬底的外表面上的通孔上的外部触点。 外部接触件可以电耦合到布置在通孔中的导电材料。 并且外部接触可以通过围绕通孔的键气密密封到非导电衬底的外表面。 在一个或多个实施方案中,该键可以是激光键。