公开(公告)号：US20110090657A1

公开(公告)日：2011-04-21

申请号：US12966251

申请日：2010-12-13

申请人： Yutaka YOSHINO ,  Takahiro Shirai ,  Shinji Kadono ,  Mineo Kawamoto ,  Minoru Enomoto ,  Masakatsu Goto ,  Makoto Araki ,  Naoki Toda

发明人： Yutaka YOSHINO ,  Takahiro Shirai ,  Shinji Kadono ,  Mineo Kawamoto ,  Minoru Enomoto ,  Masakatsu Goto ,  Makoto Araki ,  Naoki Toda

IPC分类号： H05K1/18

CPC分类号： H01L23/5389 ,  H01L25/105 ,  H01L2224/16237 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48228 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/82039 ,  H01L2924/01004 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/12044 ,  H01L2924/3011 ,  H05K1/023 ,  H05K1/186 ,  H05K3/4602 ,  H05K3/4623 ,  H05K3/4652 ,  H05K2201/0187 ,  H05K2201/10674 ,  Y10T29/49146 ,  H01L2924/00014

摘要： A printed wiring board includes a built-in semiconductor element. A protective film is formed on a semiconductor element-mounted surface of a base substrate to which the built-in semiconductor element is connected to protect the semiconductor element-mounted surface excepting a mounting pad. Upper and side surfaces of the built-in semiconductor element are covered with a first insulating film formed by filling a sealing material. The first insulating film is covered with a second insulating film formed of an insulating resin melted from an insulating layer that is provided in side and upper portions of the built-in semiconductor element.

摘要翻译： 印刷电路板包括内置的半导体元件。 在与内置半导体元件连接的基底基板的半导体元件安装面上形成保护膜，以保护除了安装焊盘之外的半导体元件安装表面。 通过填充密封材料形成的第一绝缘膜覆盖内置半导体元件的上表面和侧表面。 第一绝缘膜被由设置在内置半导体元件的侧部和上部的绝缘层熔化的绝缘树脂形成的第二绝缘膜覆盖。

公开(公告)号：US07622727B2

公开(公告)日：2009-11-24

申请号：US11617163

申请日：2006-12-28

申请人： Takahiro Shirai ,  Kyohei Seki

发明人： Takahiro Shirai ,  Kyohei Seki

IPC分类号： H01J7/36 ,  H05H1/00

CPC分类号： G03F7/70033 ,  B82Y10/00 ,  G21K2201/065 ,  H05G2/003 ,  H05G2/005

摘要： An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with a laser. Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.

摘要翻译： 具有腔室的EUV辐射源装置，其被分成放电空间和设置有EUV收集器光学器件的收集器反射镜空间。 在它们之间提供了具有被冷却的开口的孔部件。 旋转第一放电电极和第二放电电极。 用激光照射Sn或Li。 在第一和第二放电电极之间施加脉冲功率以在两个电极之间形成高密度和高温等离子体，从而发射波长为13.5nm的EUV辐射，由EUV收集器光学器件聚焦并被引导到辐照 曝光工具的光学系统。 存在用于泵送放电空间和收集器反射镜空间的第一泵送装置和第二泵送装置。 放电空间保持在几Pa，收集器反射镜空间保持在几百Pa。

公开(公告)号：US20080099699A1

公开(公告)日：2008-05-01

申请号：US11976526

申请日：2007-10-25

申请人： Hironobu Yabuta ,  Takahiro Shirai

发明人： Hironobu Yabuta ,  Takahiro Shirai

IPC分类号： H05B43/00

CPC分类号： H05G2/003 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70841 ,  G03F7/70916 ,  G03F7/70925 ,  H05G2/005

摘要： An extreme ultraviolet radiation source device comprises a vessel; an electric discharge section including a pair of main discharge electrodes; a material supply unit which supplies an extreme ultraviolet radiating species to the electric discharge section; a high voltage generating section which impress high voltage to the pair of main discharge electrodes; a grazing incidence type collector unit which condenses extreme ultraviolet light emitted from high temperature plasma; a light extraction section formed in the vessel; a gas supply unit which supplies gas into the vessel from a light emitting side of the collector unit, an exhaust unit which discharges the gas from a light incidence side of the collector unit; wherein a flow path through which the gas supplied from the light emitting side of the collector unit passes is formed only inside the collector unit.

摘要翻译： 极紫外线辐射源装置包括一个容器; 放电部，包括一对主放电电极; 材料供应单元，其向所述放电部分提供极紫外辐射物质; 高压产生部，其对所述一对主放电电极施加高电压; 用于冷凝从高温等离子体发射的极紫外光的掠入射型收集器单元; 在所述容器中形成的光提取部; 从收集器单元的发光侧向容器供给气体的气体供给单元，从集电体单元的入射侧排出气体的排气单元; 其中从集电体单元的发光侧供给的气体通过的流路仅形成在集电体内。

公开(公告)号：US20060044424A1

公开(公告)日：2006-03-02

申请号：US11212636

申请日：2005-08-29

申请人： Takahiro Shirai ,  Daisuke Yoshida

发明人： Takahiro Shirai ,  Daisuke Yoshida

IPC分类号： H04N5/217

CPC分类号： H04N5/3658

摘要： When clamping a signal from a solid state image sensor, float of an optical black pixel output due to incoming of infrared light avoids a malfunction of a clamp from occurring. When clamping a signal from the solid state image sensor, the difference between the optical black pixel output and a clamp target level is output as a difference output, the difference output is compared with a comparison level to integrate the number of times larger than the comparison level every horizontal line. When the number of times is equal to or more than a certain rate (⅔) from the number of optical black pixels on the horizontal line, an optical black float state is determined and clamping operation is performed in accordance with a held value immediately before.

摘要翻译： 当夹持来自固态图像传感器的信号时，由于红外光的入射而导致的光学黑色像素的浮动避免了夹具的故障发生。 当从固态图像传感器夹紧信号时，输出光学黑色像素输出和钳位目标电平之间的差作为差分输出，将差分输出与比较电平进行比较，以将比较大于比较的次数 水平每一行。 当数量等于或大于水平线上的光学黑色像素数量的一定速率（2/3）时，确定光学黑色浮动状态，并且立即根据保持值执行夹紧操作 之前。

公开(公告)号：US06417656B1

公开(公告)日：2002-07-09

申请号：US09943652

申请日：2001-08-31

申请人： Takahiro Shirai

发明人： Takahiro Shirai

IPC分类号： G05F316

CPC分类号： G05F3/225 ,  Y10S323/907

摘要： A temperature characteristic compensating circuit is capable of carrying out temperature compensation of a signal that varies in proportion to absolute temperature by analog processing and without using a thermistor, to thereby enable use of a smaller IC. A first current source supplies a first current that is proportional to the absolute temperature and inversely proportional to the resistance value of a first resistor. A second current source supplies a second current that is inversely proportional to the resistance value of a second resistor. A first circuit carries out logarithmic compression of an input voltage using the first current as a bias current, and a second circuit carries out logarithmic expansion of the logarithmically compressed voltage using the second current as a bias current. The gain of the logarithmically expanded voltage relative to the input voltage is proportional to the ratio of the second current to the first current. As a result, a temperature characteristic compensating circuit that does not use an external thermistor but nevertheless gives a gain inversely proportional to absolute temperature can be formed.

摘要翻译： 温度特性补偿电路能够对通过模拟处理与绝对温度成比例变化的信号进行温度补偿，并且不使用热敏电阻，从而能够使用更小的IC。 第一电流源提供与绝对温度成正比并与第一电阻器的电阻值成反比的第一电流。 第二电流源提供与第二电阻器的电阻值成反比的第二电流。 第一电路使用第一电流作为偏置电流来进行输入电压的对数压缩，第二电路使用第二电流作为偏置电流来进行对数压缩电压的对数扩展。 相对于输入电压的对数扩展电压的增益与第二电流与第一电流的比例成比例。 结果，可以形成不使用外部热敏电阻但仍然给出与绝对温度成反比的增益的温度特性补偿电路。

公开(公告)号：US5815033A

公开(公告)日：1998-09-29

申请号：US627114

申请日：1996-04-03

申请人： Katsuhito Sakurai ,  Takahiro Shirai ,  Yasushi Matsuno ,  Nobuyuki Hirayama

发明人： Katsuhito Sakurai ,  Takahiro Shirai ,  Yasushi Matsuno ,  Nobuyuki Hirayama

IPC分类号： H03H11/04 ,  H03B1/00

CPC分类号： H03H11/04

摘要： The present invention is to provide an integrated circuit capable of reducing the substrate area, a variable filter adjusting method for the integrated circuit, and an electronic equipment using the integrated circuit, in which disorder of an external element and its temperature characteristic can be automatically corrected following the adjustment of disorder of the internal elements and their temperature characteristics by performing digital/analog conversion of a control signal to be input to a first adjustment unit for adjusting the disorder of internal elements of the integrated circuit and their temperature characteristics, so that the control signal can be input to a second adjustment unit as a reference signal of a digital/analog converter.

摘要翻译： 本发明提供一种能够减小基板面积的集成电路，集成电路的可变滤波器调整方法以及使用该集成电路的电子设备，其中可以自动校正外部元件的紊乱及其温度特性 通过对要输入到第一调整单元的控制信号进行数字/模拟转换来调整内部元件的无序和其温度特性，以调整集成电路的内部元件的混乱及其温度特性，从而使得 控制信号可以作为数/模转换器的参考信号输入到第二调整单元。

公开(公告)号：US08039820B2

公开(公告)日：2011-10-18

申请号：US12396674

申请日：2009-03-03

申请人： Takahiro Shirai

发明人： Takahiro Shirai

IPC分类号： G21K5/00

CPC分类号： G03F7/70933 ,  G03F7/70033 ,  G03F7/70841 ,  G03F7/70908 ,  G03F7/70916

摘要： There is provided a connection device for connecting a first depressurization vessel to a second depressurization vessel. The connection device includes a communication hole comprising a first opening which is connected to the first depressurization vessel, and a second opening which is connected to the second depressurization vessel, the first opening and the second opening being, respectively, at opposite ends of the communication hole such that extreme ultraviolet radiation passes in a radiation direction from the first opening to the second opening; a gas inlet through which a gas flows into the communication hole in a direction perpendicular to the radiation direction of the extreme ultraviolet radiation; and a gas outlet which is opposed to the gas inlet such that the gas passes out the gas outlet.

摘要翻译： 提供了一种用于将第一减压容器连接到第二减压容器的连接装置。 连接装置包括连通孔，该连通孔包括连接到第一减压容器的第一开口和连接到第二减压容器的第二开口，第一开口和第二开口分别位于通信的相对端 使得极紫外线辐射从第一开口到第二开口的辐射方向通过; 气体入口，气体沿垂直于远紫外线辐射方向的方向流入连通孔; 以及与气体入口相对的气体出口，使得气体排出气体出口。

公开(公告)号：US08035979B2

公开(公告)日：2011-10-11

申请号：US12966251

申请日：2010-12-13

申请人： Yutaka Yoshino ,  Takahiro Shirai ,  Shinji Kadono ,  Mineo Kawamoto ,  Minoru Enomoto ,  Masakatsu Goto ,  Makoto Araki ,  Naoki Toda

发明人： Yutaka Yoshino ,  Takahiro Shirai ,  Shinji Kadono ,  Mineo Kawamoto ,  Minoru Enomoto ,  Masakatsu Goto ,  Makoto Araki ,  Naoki Toda

IPC分类号： H05K1/18

CPC分类号： H01L23/5389 ,  H01L25/105 ,  H01L2224/16237 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48228 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/82039 ,  H01L2924/01004 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/12044 ,  H01L2924/3011 ,  H05K1/023 ,  H05K1/186 ,  H05K3/4602 ,  H05K3/4623 ,  H05K3/4652 ,  H05K2201/0187 ,  H05K2201/10674 ,  Y10T29/49146 ,  H01L2924/00014

摘要： A printed wiring board includes a built-in semiconductor element. A protective film is formed on a semiconductor element-mounted surface of a base substrate to which the built-in semiconductor element is connected to protect the semiconductor element-mounted surface excepting a mounting pad. Upper and side surfaces of the built-in semiconductor element are covered with a first insulating film formed by filling a sealing material. The first insulating film is covered with a second insulating film formed of an insulating resin melted from an insulating layer that is provided in side and upper portions of the built-in semiconductor element.

摘要翻译： 印刷电路板包括内置的半导体元件。 在与内置半导体元件连接的基底基板的半导体元件安装面上形成保护膜，以保护除了安装焊盘之外的半导体元件安装表面。 通过填充密封材料形成的第一绝缘膜覆盖内置半导体元件的上表面和侧表面。 第一绝缘膜被由设置在内置半导体元件的侧部和上部的绝缘层熔化的绝缘树脂形成的第二绝缘膜覆盖。

公开(公告)号：US20090191462A1

公开(公告)日：2009-07-30

申请号：US12351387

申请日：2009-01-09

申请人： Keitaro Matsui ,  Takahiro Shirai ,  Izaya Okae

发明人： Keitaro Matsui ,  Takahiro Shirai ,  Izaya Okae

IPC分类号： H01M4/58 ,  H01M4/88 ,  B29C43/02

CPC分类号： H01M4/587 ,  C01B32/20 ,  C01P2004/61 ,  C01P2006/12 ,  H01M4/0433 ,  H01M4/133 ,  H01M4/1393 ,  H01M2004/021

摘要： A battery that has a higher capacity and superior charge and discharge efficiency is provided. The battery includes a cathode, an anode, and an electrolyte. The anode has an anode active material layer provided on an anode current collector, and the anode active material layer contains a spherocrystal graphitized substance of mesophase spherule provided with a fine pore as an anode active material.

摘要翻译： 提供了具有更高容量和更好的充放电效率的电池。 电池包括阴极，阳极和电解质。 阳极具有设置在阳极集电体上的负极活性物质层，负极活性物质层含有以细孔作为阳极活性物质的中间相球形球状石墨化物质。

公开(公告)号：US6091294A

公开(公告)日：2000-07-18

申请号：US150564

申请日：1998-09-10

申请人： Takahiro Shirai ,  Shinichi Yamashita

发明人： Takahiro Shirai ,  Shinichi Yamashita

IPC分类号： H04N5/14 ,  H03F1/34 ,  H03F3/347 ,  H03F3/45 ,  H03F3/68

CPC分类号： H03F3/347

摘要： An amplifier circuit for amplifying an input signal and outputting the amplified signal includes a first amplifier for outputting from a first output terminal a current proportional to a difference voltage between voltages at a first input terminal and a second input terminal, and a second amplifier for outputting from a second output terminal a current proportional to a difference voltage between voltages at the first input terminal and the second input terminal and for feeding back a current outputted from the second output terminal to the second input terminal, so that the amplifier circuit is operable at a supply voltage of 3 V.

摘要翻译： 用于放大输入信号并输出​​放大信号的放大器电路包括：第一放大器，用于从第一输出端输出与第一输入端和第二输入端之间的电压之间的差分电压成正比的电流;以及第二放大器，用于输出 从第二输出端子输出与第一输入端子和第二输入端子处的电压之间的差分电压成比例的电流，并将从第二输出端子输出的电流反馈到第二输入端子，使得放大器电路可操作在 电源电压为3 V.