公开(公告)号：US5815033A

公开(公告)日：1998-09-29

申请号：US627114

申请日：1996-04-03

申请人： Katsuhito Sakurai ,  Takahiro Shirai ,  Yasushi Matsuno ,  Nobuyuki Hirayama

发明人： Katsuhito Sakurai ,  Takahiro Shirai ,  Yasushi Matsuno ,  Nobuyuki Hirayama

IPC分类号： H03H11/04 ,  H03B1/00

CPC分类号： H03H11/04

摘要： The present invention is to provide an integrated circuit capable of reducing the substrate area, a variable filter adjusting method for the integrated circuit, and an electronic equipment using the integrated circuit, in which disorder of an external element and its temperature characteristic can be automatically corrected following the adjustment of disorder of the internal elements and their temperature characteristics by performing digital/analog conversion of a control signal to be input to a first adjustment unit for adjusting the disorder of internal elements of the integrated circuit and their temperature characteristics, so that the control signal can be input to a second adjustment unit as a reference signal of a digital/analog converter.

摘要翻译： 本发明提供一种能够减小基板面积的集成电路，集成电路的可变滤波器调整方法以及使用该集成电路的电子设备，其中可以自动校正外部元件的紊乱及其温度特性 通过对要输入到第一调整单元的控制信号进行数字/模拟转换来调整内部元件的无序和其温度特性，以调整集成电路的内部元件的混乱及其温度特性，从而使得 控制信号可以作为数/模转换器的参考信号输入到第二调整单元。

公开(公告)号：USRE43201E1

公开(公告)日：2012-02-21

申请号：US12056927

申请日：2008-03-27

申请人： Yasushi Matsuno

发明人： Yasushi Matsuno

IPC分类号： H03L7/00

CPC分类号： H03L7/0812 ,  H03L2207/14 ,  H04N5/23212 ,  H04N5/335

摘要： A DLL circuit which can prevent transition to a pseudo lock state is provided. The DLL circuit includes a delay stage to which a reference clock is input and in which variable delay elements D able to change an amount of delay are connected in a plurality of stages, a phase comparator (PH Comp) which compares the phase of the reference clock to the phase of one delay signal extracted from the delay stage, a delay control circuit which performs delay control of the delay element in the delay stage on the basis of the comparison result by the phase-comparison means, and a DFF which detects a phase relationship of at least two delay signals extracted from the delay stage to discriminate a state which is not a normal lock state and controls the delay control circuit to perform state transition to the normal lock state.

摘要翻译： 提供了可以防止转换到伪锁定状态的DLL电路。 DLL电路包括输入参考时钟的延迟级，其中能够改变延迟量的可变延迟元件D以多级连接;相位比较器（PH Comp），其比较参考的相位 时钟到从延迟级提取的一个延迟信号的相位，延迟控制电路，其基于相位比较装置的比较结果执行延迟级中的延迟元件的延迟控制;以及DFF，其检测 从延迟级提取的至少两个延迟信号的相位关系来区分不是正常锁定状态的状态，并且控制延迟控制电路以执行到正常锁定状态的状态转换。

公开(公告)号：US20070176997A1

公开(公告)日：2007-08-02

申请号：US11698935

申请日：2007-01-26

申请人： Hiroshi Komatsu ,  Yasushi Matsuno ,  Akira Sano

发明人： Hiroshi Komatsu ,  Yasushi Matsuno ,  Akira Sano

IPC分类号： B41J2/41

CPC分类号： B41J2/14314 ,  B41J2002/14411

摘要： An electrostatic actuator, a liquid droplet ejection head, and a liquid droplet ejection device which have a good response and are driven by a small drive voltage includes a vibration plate as a sheet-shaped movable electrode and an individual electrode acting as a rectangular fixed electrode confronting the vibration plate and having stepped portions or an inclined portion in a long side direction with respect to the vibration plate, wherein the thickness of the vibration plate is reduced according to an order by which the vibration plate is made to abut against the individual electrode by electrostatic attracting force generated between the vibration plate and the individual electrode. Methods of manufacturing the above devices are also disclosed.

摘要翻译： 具有良好响应并由小的驱动电压驱动的静电致动器，液滴喷射头和液滴喷射装置包括作为片状可动电极的振动板和用作矩形固定电极的单独电极 面对振动板并具有相对于振动板的长边方向的阶梯部或倾斜部，其中，振动板的厚度根据使振动板抵靠各个电极的顺序而减小 通过在振动板和单独电极之间产生的静电吸引力。 还公开了制造上述装置的方法。

公开(公告)号：US08817268B2

公开(公告)日：2014-08-26

申请号：US13479931

申请日：2012-05-24

申请人： Akira Sano ,  Yasushi Matsuno

发明人： Akira Sano ,  Yasushi Matsuno

IPC分类号： G01J3/45 ,  G01B11/02 ,  G02B27/00

CPC分类号： G01J1/04 ,  G01J1/0488 ,  G01J3/26 ,  G01J2003/1247 ,  G02B26/001

摘要： An optical filter includes fixed substrate, a movable substrate opposed to the fixed substrate, a first reflection film provided on a surface of the fixed substrate facing the movable substrate, a second reflection film provided on the movable substrate and opposed to the first reflection film across a gap, a first electrode formed to cover the first reflection film and to extend beyond an outer circumference of the first reflection film, and a second electrode provided on a surface of the movable substrate facing the fixed substrate and opposed to a part of the first electrode, and the first electrode is formed of a light-transmissive material, and the first electrode and the second reflection film are electrically connected at the same potential.

摘要翻译： 光学滤波器包括固定基板，与固定基板相对的可移动基板，设置在固定基板的面对可移动基板的表面上的第一反射膜，设置在可移动基板上并与第一反射膜相对的第二反射膜 间隙，形成为覆盖所述第一反射膜并延伸超过所述第一反射膜的外周的第一电极，以及设置在所述可动基板的面向所述固定基板的表面上并与所述第一反射膜的一部分相对的第二电极 电极，第一电极由透光材料形成，第一电极和第二反射膜以相同的电位电连接。

公开(公告)号：US08711368B2

公开(公告)日：2014-04-29

申请号：US12986394

申请日：2011-01-07

申请人： Yasushi Matsuno

发明人： Yasushi Matsuno

IPC分类号： G01B9/02

CPC分类号： G01J3/26 ,  G01J3/51 ,  G02B26/001

摘要： An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first reflecting film provided to the first substrate, a second reflecting film provided to the second substrate, and opposed to the first reflecting film, a first electrode provided to the first substrate, a second electrode provided to the second substrate, and opposed to the first electrode, and a voltage control section adapted to control an electrical potential difference between the first electrode and a second electrode, and when switching a wavelength of a light beam to be dispersed by switching the electrical potential difference between the first electrode and the second electrode, and measuring an intensity of the light beam dispersed, the voltage control section switches the electrical potential difference from a first electrical potential difference to a second electrical potential difference larger than the first electrical potential difference.

摘要翻译： 滤光器包括第一基板，与第一基板相对的第二基板，设置在第一基板上的第一反射膜，设置在第二基板上并与第一反射膜相对的第二反射膜， 所述第一基板，设置在所述第二基板上并与所述第一电极相对的第二电极，以及适于控制所述第一电极和第二电极之间的电位差的电压控制部，以及当切换光束的波长时 通过切换第一电极和第二电极之间的电位差来分散，并且测量分散的光束的强度，电压控制部分将电位差从第一电位差切换到第二电位差大 比第一个电位差。

公开(公告)号：US20120002070A1

公开(公告)日：2012-01-05

申请号：US13159518

申请日：2011-06-14

申请人： Takeshi Akiyama ,  Hiroaki Naruse ,  Junji Iwata ,  Yasushi Matsuno

发明人： Takeshi Akiyama ,  Hiroaki Naruse ,  Junji Iwata ,  Yasushi Matsuno

IPC分类号： H04N5/228 ,  H01L31/113

CPC分类号： H01L27/14632 ,  H01L27/14614 ,  H01L27/14636 ,  H01L27/14638

摘要： A solid-state image sensor having a pixel array area where a plurality of pixels are arranged, and a peripheral circuit area, each pixel including a photoelectric converter, and a transfer gate electrode which forms a channel for transferring charges generated by the photoelectric converter to a floating diffusion portion, comprises a first insulating film arranged to cover an upper surface of the photoelectric converter, at least part of an upper surface of the transfer gate electrode, and a side surface of the transfer gate electrode, a second insulating film arranged on a gate electrode of a MOS transistor arranged in the peripheral circuit area, and an interlayer insulating film arranged in contact with the first insulating film and the second insulating film.

摘要翻译： 具有布置多个像素的像素阵列区域的固态图像传感器，以及包括光电转换器的每个像素的外围电路区域和形成用于将由光电转换器产生的电荷传送到该沟道的传输栅极电极 浮动扩散部分包括布置成覆盖光电转换器的上表面的第一绝缘膜，传输栅电极的上表面的至少一部分和传输栅电极的侧表面，第二绝缘膜布置在 布置在外围电路区域中的MOS晶体管的栅电极和与第一绝缘膜和第二绝缘膜接触地布置的层间绝缘膜。

公开(公告)号：US07530670B2

公开(公告)日：2009-05-12

申请号：US11314642

申请日：2005-12-21

申请人： Tomonori Matsushita ,  Yasushi Matsuno ,  Masahiro Fujii

发明人： Tomonori Matsushita ,  Yasushi Matsuno ,  Masahiro Fujii

IPC分类号： B41J2/04

CPC分类号： B41J2/16 ,  B41J2/14314 ,  B41J2/1623 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2002/14411

摘要： To provide an electrostatic actuator, etc. which is capable of miniaturizing the size, and preventing moisture, etc. from entering a gap in an effective manner. An electrostatic actuator includes an electrode substrate 10 having individual electrodes 12 as fixed electrodes, and a cavity substrate 20 having diaphragms 22 as movable electrodes which are disposed so as to be opposed to the fixed electrodes 12 with a predetermined distance, and operated due to an electrostatic force occurring between the cavity substrate 20 and the individual electrodes 12. Sealing portions 26a are formed on one of the electrode substrate 10 and the cavity substrate 20, each of the sealing portions 26a has a plurality of sealing layers (a TEOS layer 25a, a moisture permeation preventing layer 25b) laminated one another, and each of the sealing layers is made of a sealing material 25 for isolating a space formed between the individual electrode 12 and the diaphragm 22.

摘要翻译： 提供能够使尺寸小型化并且防止湿气等以有效的方式进入间隙的静电致动器等。 静电致动器包括具有作为固定电极的单独电极12的电极基板10和具有作为可动电极的隔膜22的空腔基板20，该隔膜22以与预定距离的固定电极12相对的方式设置， 在空穴基板20和各个电极12之间产生静电力。密封部分26a形成在电极基板10和空腔基板20之一上，每个密封部分26a具有多个密封层（TEOS层25a， 防潮层25b），并且每个密封层由用于隔离形成在单独电极12和隔膜22之间的空间的密封材料25制成。

公开(公告)号：US20060186174A1

公开(公告)日：2006-08-24

申请号：US11354619

申请日：2006-02-15

申请人： Yasushi Matsuno ,  Masahiro Fujii ,  Akira Sano

发明人： Yasushi Matsuno ,  Masahiro Fujii ,  Akira Sano

IPC分类号： B23K1/00 ,  B23K5/00 ,  B23K20/08

CPC分类号： B41J2/14314 ,  B41J2002/14411 ,  B41J2002/14491

摘要： A droplet jet head includes a nozzle substrate having a plurality of nozzle holes; a cavity substrate having recesses whose bottoms serve as diaphragms, and the recesses serving as ejection chambers; an electrode substrate having separate electrodes opposed to the diaphragms; a reservoir substrate having a recess serving as a common droplet chamber for supplying droplets to the ejection chambers, through holes for transferring the droplets from the common droplet chamber to the ejection chambers, and nozzle communicating holes for transferring the droplets from the ejection chambers to the nozzle holes; and a driver IC that supplies a driving signal to the separate electrodes. The cavity substrate has a first hole, and the reservoir substrate has a second hole. The first hole and the second hole communicate with each other to form a housing. The driver IC is housed in the housing.

摘要翻译： 液滴喷头包括具有多个喷嘴孔的喷嘴基板; 具有凹部的空腔基板，其底部用作隔膜，所述凹部用作喷射室; 具有与隔膜相对的分离电极的电极基板; 储存器基板，其具有用作向喷射室供应液滴的共同液滴室的凹槽，通过用于将液滴从共同液滴室传送到喷射室的孔，以及用于将液滴从喷射室传送到喷嘴的喷嘴连通孔 喷嘴孔; 以及向单独的电极提供驱动信号的驱动器IC。 空腔基板具有第一孔，并且储存器基板具有第二孔。 第一孔和第二孔彼此连通以形成壳体。 驱动器IC安装在外壳中。

公开(公告)号：US6143190A

公开(公告)日：2000-11-07

申请号：US967732

申请日：1997-11-12

申请人： Takayuki Yagi ,  Junichi Kobayashi ,  Yasushi Kawasumi ,  Genzo Momma ,  Kenji Makino ,  Kei Fujita ,  Yasushi Matsuno ,  Yukihiro Hayakawa ,  Masahiro Takizawa

发明人： Takayuki Yagi ,  Junichi Kobayashi ,  Yasushi Kawasumi ,  Genzo Momma ,  Kenji Makino ,  Kei Fujita ,  Yasushi Matsuno ,  Yukihiro Hayakawa ,  Masahiro Takizawa

IPC分类号： B41J2/05 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00 ,  G01B21/30 ,  G01N37/00 ,  G01Q60/38 ,  G01Q70/16 ,  H01L21/28 ,  H01L21/302 ,  H01L21/306 ,  H01L21/3065 ,  B44C1/22

CPC分类号： B81C1/00087 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646 ,  B41J2202/13 ,  B81B2201/052

摘要： The invention provides a method of producing a through-hole, a substrate used to produce a through-hole, a substrate having a through-hole, and a device using such a through-hole or a substrate having such a through-hole, which are characterized in that: a through-hole can be produced only by etching a silicon substrate from its back side; the opening length d can be precisely controlled to a desired value regardless of the variations in the silicon wafer thickness, and the orientation flat angle, and also regardless of the type of a silicon crystal orientation-dependent anisotropic etchant employed; high productivity, high production reproducibility, and ease of production can be achieved; a high-liberality can be achieved in the shape of the opening end even if temperature treatment is performed at a high temperature for a long time; and a high-precision through-hole can be produced regardless of the shape of a device formed on the surface of a substrate.

摘要翻译： 本发明提供一种制造通孔的方法，用于制造通孔的基板，具有通孔的基板以及使用这种通孔的装置或具有这种通孔的基板，其中 其特征在于：只能通过从其背面蚀刻硅衬底来制造通孔; 无论硅晶片厚度和取向平面角度的变化如何，也可以将开口长度d精确地控制到期望值，并且不管所采用的取决于硅晶体取向的各向异性蚀刻剂的类型如何; 可以实现高生产率，高生产重现性和易生产性; 即使长时间在高温下进行温度处理，也可以在开口形状中实现高自由度; 并且可以产生高精度通孔，而不管形成在基板表面上的器件的形状如何。

公开(公告)号：US09448176B2

公开(公告)日：2016-09-20

申请号：US13602885

申请日：2012-09-04

申请人： Yasushi Matsuno ,  Akira Sano

发明人： Yasushi Matsuno ,  Akira Sano

IPC分类号： G01J3/50 ,  G01J3/26 ,  G02B26/00 ,  G01N21/65

CPC分类号： G01N21/658 ,  G01J3/26 ,  G01J3/502 ,  G02B26/001

摘要： A variable wavelength interference filter includes a stationary substrate, a movable substrate bonded to the stationary substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate, and opposed to the stationary reflecting film across an inter-reflecting film gap, and an electrostatic actuator adapted to vary the gap amount of the inter-reflecting film gap by deflecting the movable substrate toward the stationary substrate, a releasing space to which air between the stationary reflecting film and the movable reflecting film moves when the gap amount of the inter-reflecting film gap is reduced is provided between the stationary substrate and the movable substrate, and assuming that a spring constant of the movable substrate is kv, and a spring constant of the air existing in the inter-reflecting film gap is kair, kv≧20×kair is satisfied.

摘要翻译： 可变波长干涉滤光器包括固定基板，与固定基板接合的可移动基板，设置在固定基板上的固定反射膜，设置在可移动基板上的可移动反射膜， 以及静电致动器，其适于通过使可移动基板朝向固定基板偏转来改变反射膜间隙的间隙量;释放空间，当静止反射膜和可移动反射膜之间的空气移动时， 在固定基板和可动基板之间设置反射膜间隙的间隙量，并且假定可动基板的弹簧常数为kv，并且存在于反射膜间隙中的空气的弹簧常数 是kair，kv≥20×kair。