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公开(公告)号：US09745189B1
公开(公告)日：2017-08-29
申请号：US15497741
申请日：2017-04-26
Applicant: NXP USA, Inc.
Inventor： Aaron A. Geisberger
CPC classification number: B81C1/00626 , B81B7/0048 , B81B2201/0235 , B81B2201/0242 , B81B2203/0307
Abstract: An embodiment of a microelectromechanical systems (MEMS) device is provided, which includes a substrate; a proof mass positioned in space above a surface of the substrate, wherein the proof mass is configured to pivot on a rotational axis parallel to the substrate; an anchor structure that includes two or more separated anchors mounted to the surface of the substrate, wherein the anchor structure is aligned with the rotational axis; and an isolation sub-frame structure that surrounds the anchor structure and is flexibly connected to each of the two or more separated anchors of the anchor structure, where the proof mass is flexibly connected to the isolation sub-frame structure.
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公开(公告)号：US11768220B2
公开(公告)日：2023-09-26
申请号：US17470073
申请日：2021-09-09
Applicant: NXP USA, Inc.
Inventor： Aaron A. Geisberger , Jun Tang
IPC: G01P15/125 , G01P15/08
CPC classification number: G01P15/125 , G01P2015/0871
Abstract: A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.
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公开(公告)号：US20230074541A1
公开(公告)日：2023-03-09
申请号：US17470073
申请日：2021-09-09
Applicant: NXP USA, Inc.
Inventor： Aaron A. Geisberger , Jun Tang
IPC: G01P15/125
Abstract: A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.
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公开(公告)号：US20220260372A1
公开(公告)日：2022-08-18
申请号：US17178167
申请日：2021-02-17
Applicant: NXP USA, Inc.
Inventor： Aaron A. Geisberger , Peng Shao
IPC: G01C19/5712
Abstract: An angular rate sensor includes first, second, third, and fourth proof masses spaced apart from a surface of a substrate, each of the first, second, third, and fourth proof masses being configured to move along first and second transverse axes parallel to the surface of the substrate. A first coupling structure is interposed between and interconnects the first and second proof masses. A second coupling structure is interposed between and interconnects the second and third proof masses. A third coupling structure is interposed between and interconnects the third and fourth proof masses. A fourth coupling structure is interposed between and interconnects the fourth and first proof masses. The first, second, third, and fourth coupling structures are configured to constrain an in-phase motion of adjacent ones of the first, second, third, and fourth proof masses along the first and second transverse axes.
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公开(公告)号：US10330475B2
公开(公告)日：2019-06-25
申请号：US15637955
申请日：2017-06-29
Applicant: NXP USA, INC.
Inventor： Thierry Cassagnes , Gerhard Trauth , Margaret Leslie Kniffin , Aaron A. Geisberger
IPC: G01C19/5726 , B81C1/00 , G01C19/5755 , G01C19/5769 , G01C19/5733
Abstract: An integrated device includes a MEMS device, such as a gyroscope, having a movable mass spaced apart from a substrate, the movable mass being configured to oscillate in a drive direction relative to the substrate. The integrated device further comprises an integrated circuit (IC) die having a surface coupled with the MEMS device such that the movable mass is interposed between the substrate and the surface of the IC die. An electrode structure is formed on the surface of the IC die, the electrode structure including a plurality of electrode segments vertically spaced apart from the movable mass. Openings extend through the movable mass and the electrode segments overlie the openings. Suitably selected electrode segments can be activated to electrostatically attract the movable mass toward sense electrodes vertically spaced apart from the MEMS to reduce quadrature motion of the movable mass.
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Patent Agency Ranking
公开(公告)号：US20250026629A1
公开(公告)日：2025-01-23
申请号：US18222926
申请日：2023-07-17
Applicant: NXP USA, Inc.
Inventor： Jun Tang , Aaron A. Geisberger
Abstract: A MEMS inertial sensor device, method of operation, and fabrication process are described wherein a MEMS inertial sensor and drive actuation units are coupled together in operational engagement, where the MEMS inertial sensor includes a substrate and a proof mass array positioned in spaced apart relationship above a surface of the substrate and constructed with a plurality of proof mass sub-structures which are each separately connected to the substrate with orthogonally disposed pairs of spring suspension structures and which are each rigidly connected to one or more adjacent proof mass sub-structures with one or more connector bars so that the plurality of proof mass sub-structures move as a single proof mass array that can operate at resonant frequencies of at least 100 kHz when oscillating in first and second orthogonal directions.
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公开(公告)号：US20250020464A1
公开(公告)日：2025-01-16
申请号：US18221923
申请日：2023-07-14
Applicant: NXP USA, Inc.
IPC: G01C19/5719 , G01P15/08
Abstract: A MEMS inertial sensor device, method of operation, and fabrication process are described with a MEMS inertial sensor, drive actuation unit, drive measurement unit, and PLL circuit coupled together in operational engagement, where the MEMS inertial sensor includes a substrate, a proof mass positioned in spaced apart relationship above the substrate, a proof mass suspension member connected on a first end to the proof mass and connected on a second end to an anchor fixed to the substrate to enable the proof mass to laterally oscillate over the surface of the substrate, and a compliant stop structure positioned in relation to the proof mass suspension member to physically engage with lateral oscillating movement of the proof mass suspension member past a desired stroke travel distance without physically preventing lateral oscillating movement of the proof mass, thereby stiffening a spring stiffness measure of the proof mass suspension member.
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公开(公告)号：US20240329076A1
公开(公告)日：2024-10-03
申请号：US18295232
申请日：2023-04-03
Applicant: NXP USA, Inc.
Inventor： Jun Tang , Jinglun Li , Andrew C. McNeil , Aaron A. Geisberger
CPC classification number: G01P15/08 , B81C1/00198 , G01P2015/0837
Abstract: A MEMS device includes a substrate, a set of spring, and a proof mass suspended above and coupled to the substrate by the springs. Each spring includes a corresponding anchor on the substrate and a beam extending away from that anchor. Each beam has a fixed end that is coupled to the anchor by a first linkage at one end of the beam proximal to the anchor and a free end that is coupled to the proof mass by a second linkage at an end of the beam that is distal to the anchor. The anchors are arranged symmetrically around a center of the proof mass. The proof mass translates vertically with respect to the substrate and when a vertical displacement of the proof mass toward the substrate reaches a predefined value, the free end of each spring contacts the substrate and prevents the proof mass from contacting the substrate.
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公开(公告)号：US11525680B2
公开(公告)日：2022-12-13
申请号：US17178167
申请日：2021-02-17
Applicant: NXP USA, Inc.
Inventor： Aaron A. Geisberger , Peng Shao
IPC: G01C19/5712
Abstract: An angular rate sensor includes first, second, third, and fourth proof masses spaced apart from a surface of a substrate, each of the first, second, third, and fourth proof masses being configured to move along first and second transverse axes parallel to the surface of the substrate. A first coupling structure is interposed between and interconnects the first and second proof masses. A second coupling structure is interposed between and interconnects the second and third proof masses. A third coupling structure is interposed between and interconnects the third and fourth proof masses. A fourth coupling structure is interposed between and interconnects the fourth and first proof masses. The first, second, third, and fourth coupling structures are configured to constrain an in-phase motion of adjacent ones of the first, second, third, and fourth proof masses along the first and second transverse axes.
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公开(公告)号：US10760909B2
公开(公告)日：2020-09-01
申请号：US16010783
申请日：2018-06-18
Applicant: NXP USA, Inc.
Inventor： Aaron A. Geisberger
IPC: G01C19/5712
Abstract: A MEMS device includes first, second, third, and fourth sense masses spaced apart from a surface of a substrate. A first drive coupler interconnects the first sense mass with a first actuator, a second drive coupler interconnects the second sense mass with a second actuator, a third drive coupler interconnects the third sense mass with a third actuator, and a fourth drive coupler interconnects the fourth sense mass with a fourth actuator. Each of the drive couplers includes a torsion bar having a length aligned parallel to an outer sidewall of an adjacent sense mass and first and second coupling links coupled to opposing first and second ends of the torsion bar. The first and second coupling links couple an adjacent one of the first, second, third, and fourth sense masses with a corresponding one of the first, second, third, and fourth actuators.
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