Method of fabricating oxide superconducting films by laser deposition
    12.
    发明授权
    Method of fabricating oxide superconducting films by laser deposition 失效
    通过激光沉积制造氧化物超导膜的方法

    公开(公告)号:US5447910A

    公开(公告)日:1995-09-05

    申请号:US131273

    申请日:1993-10-04

    摘要: An oxide superconducting film is formed using laser deposition of applying an excimer laser beam (1, 21) onto a target (3, 23) through a converging lens (2, 22) and depositing atoms and/or molecules scattered from the target (3, 23) on the base material (5). The converging lens (2) is prepared by a cylindrical lens, or the converging lens (22) is moved, so that a portion (4, 25) irradiated with the laser beam (1, 21) on the target (3, 23) is linearized. Thus, it is possible to form an oxide superconducting film which is homogeneous over a region having a relatively large area on the base material (5) not only in film thickness but also in property.

    摘要翻译: 使用通过会聚透镜(2,22)将准分子激光束(1,21)施加到靶(3,23)上并且沉积从靶(3)散射的原子和/或分子的激光沉积形成氧化物超导膜 ,23)放置在基材(5)上。 会聚透镜(2)由柱面透镜制成,或者会聚透镜(22)移动,使得在靶(3,23)上照射激光束(1,21)的部分(4,51) 线性化。 因此,可以形成在基材(5)上具有相对较大面积的区域上均匀的氧化物超导膜,不仅具有膜厚度,而且性能。