Low cost, high density diffusion diode-capacitor
    16.
    发明授权
    Low cost, high density diffusion diode-capacitor 有权
    低成本,高密度扩散二极管电容器

    公开(公告)号:US06798641B1

    公开(公告)日:2004-09-28

    申请号:US10647602

    申请日:2003-08-25

    IPC分类号: H01G4228

    CPC分类号: H01L27/0805 H01L29/92

    摘要: A multiple-layer diffusion junction capacitor structure includes multiple layers of inter-digitated P-type dopant and N-type dopant formed in a semiconductor substrate. An opening in a hard mask is formed taking care to control the angle of the sidewall using a dry, anisotropic etching process. P-type and N-type dopant are then implanted at positive and negative shallow angles, respectively, each with a different energy and dose. By utilizing the properly determined implant angles, implant energies and implant doses for each of the dopant types, a high capacitance and high density diode junction capacitor, with inter-digitated N-type and P-type regions in the vertical direction is provided.

    摘要翻译: 多层扩散结电容器结构包括在半导体衬底中形成的多层数字化P型掺杂剂和N型掺杂剂。 形成硬掩模的开口,其中形成了使用干燥的各向异性蚀刻工艺来控制侧壁的角度。 然后分别以正和负的浅角度注入P型和N型掺杂剂,每种具有不同的能量和剂量。 通过利用适当确定的植入角度,提供每种掺杂剂类型的注入能量和注入剂量,高电容和高密度二极管结电容器,在垂直方向上具有数字化的N型和P型区域。

    Vertical photodiode with heavily-doped regions of alternating conductivity types
    18.
    发明授权
    Vertical photodiode with heavily-doped regions of alternating conductivity types 有权
    具有交替导电类型的重掺杂区域的垂直光电二极管

    公开(公告)号:US07105373B1

    公开(公告)日:2006-09-12

    申请号:US10640963

    申请日:2003-08-14

    IPC分类号: H01L21/00

    摘要: A single junction interdigitated photodiode utilizes a stack of alternating highly doped first regions of a first conductivity type and highly doped second regions of a second conductivity type, which are formed below and contact the first regions, to collect photons. In addition, a highly doped sinker of a first conductivity type contacts each first region, and a highly doped sinker of a second conductivity type contacts each second region.

    摘要翻译: 单结交叉光电二极管利用第一导电类型的交替的高度掺杂的第一区域和第二导电类型的高度掺杂的第二区域的堆叠,其在下面形成并接触第一区域以收集光子。 此外,第一导电类型的高掺杂沉降片接触每个第一区域,并且第二导电类型的高掺杂沉降片接触每个第二区域。