公开(公告)号：US20130155413A1

公开(公告)日：2013-06-20

申请号：US13765936

申请日：2013-02-13

Applicant: Jan Liesener ,  Mark Davidson ,  Peter J. de Groot ,  Xavier Colonna de Lega ,  Leslie L. Deck

Inventor： Jan Liesener ,  Mark Davidson ,  Peter J. de Groot ,  Xavier Colonna de Lega ,  Leslie L. Deck

IPC: G01B9/02

CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

Abstract: A system includes an interference microscope having one or more optical elements arranged to image a test object to an image plane by combining test light from the test object with reference light from a reference object to form an interference pattern at the image plane, wherein the test and reference light are derived from a common broadband light source. The system includes a scanning stage configured to scan an optical path difference (OPD) between the test and reference light, a multi-element detector positioned at the image plane and configured to record the interference pattern for each of a series of OPD increments and to generate multiple interferometry signals each having a fringe carrier frequency indicative of changes in the OPD as the OPD is scanned, where there is phase diversity among the interferometry signals, and an electronic processor coupled to the multi-element detector and scanning stage and configured to process the interference signals based on the phase diversity to determine information about the OPD increments having sensitivity to perturbations to the OPD increments at frequencies greater than the fringe carrier frequency.

Abstract translation: 一种系统包括具有一个或多个光学元件的干涉显微镜，该光学元件被布置成通过将来自测试对象的测试光与来自参考对象的参考光组合在一起而在图像平面上形成干涉图案来将测试对象图像成像平面，其中测试 参考光源自普通宽带光源。 该系统包括被配置为扫描测试和参考光之间的光程差（OPD）的扫描级，位于图像平面处的多元件检测器，并且被配置为记录一系列OPD增量中的每一个的干涉图案，并且 生成多个干涉测量信号，每个干涉测量信号具有指示在扫描OPD时OPD变化的边缘载波频率，其中在干涉测量信号之间存在相位分集，以及耦合到多元件检测器和扫描级的电子处理器并且被配置为处理 基于相位分集的干扰信号以确定关于具有对大于边缘载波频率的频率的对OPD的扰动敏感度的OPD增量的信息。

公开(公告)号：US20080180694A1

公开(公告)日：2008-07-31

申请号：US12020351

申请日：2008-01-25

Applicant: Peter J. de Groot ,  Xavier Colonna de Lega

Inventor： Peter J. de Groot ,  Xavier Colonna de Lega

IPC: G01B9/02

CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

Abstract: A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

Abstract translation: 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

公开(公告)号：US20120224183A1

公开(公告)日：2012-09-06

申请号：US13408003

申请日：2012-02-29

Applicant: Martin Fay ,  Jan Liesener ,  Xavier Colonna de Lega

Inventor： Martin Fay ,  Jan Liesener ,  Xavier Colonna de Lega

IPC: G01B9/02

CPC classification number: G01B11/2441 ,  G01B9/0209 ,  G01B2210/56

Abstract: An interferometry method for determining information about a test object includes directing test light to the test object positioned at a plane, wherein one or more properties of the test light vary over a range of incidence angles at the plane, the properties of the test light being selected from the group consisting of the spectral content, intensity, and polarization state; subsequently combining the test light with reference light to form an interference pattern on a multi-element detector so that different regions of the detector correspond to different angles of the test light emerging from the test object, wherein the test and reference light are derived from a common source; monitoring the interference pattern using the multi-element detector while varying an optical path difference between the test light and the reference light; determining the information about the test object based on the monitored interference pattern.

Abstract translation: 用于确定关于测试对象的信息的干涉测量方法包括将测试光引导到位于平面处的测试对象，其中测试光的一个或多个属性在平面处的入射角范围内变化，测试光的特性为 选自光谱含量，强度和偏振态; 随后将测试光与参考光组合以在多元素检测器上形成干涉图案，使得检测器的不同区域对应于从测试对象出射的测试光的不同角度，其中测试和参考光源自 共同来源 在改变测试光和参考光之间的光程差的同时使用多元素检测器来监测干涉图案; 基于所监测的干扰模式确定关于测试对象的信息。

公开(公告)号：US07468799B2

公开(公告)日：2008-12-23

申请号：US12020351

申请日：2008-01-25

Applicant: Peter J. de Groot ,  Xavier Colonna de Lega

Inventor： Peter J. de Groot ,  Xavier Colonna de Lega

IPC: G01B9/02 ,  G01B11/28

CPC classification number: G01B11/0675 ,  G01B9/02057 ,  G01B9/0207 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/8422 ,  G02F1/13392 ,  G02F2001/133354

Abstract: A method including: providing a low coherence scanning interferometry data for at least one spatial location of a sample having multiple interfaces, wherein the data is collected using a low coherence scanning interferometer having an illumination geometry and an illumination frequency spectrum, and wherein the data comprises a low coherence scanning interferometry signal having multiple regions of fringe contrast corresponding to the multiple interfaces; and determining a distance between at least one pair of interfaces based on a distance between the corresponding regions of fringe contrast and information about the illumination geometry.

Abstract translation: 一种方法，包括：为具有多个接口的样本的至少一个空间位置提供低相干扫描干涉测量数据，其中使用具有照明几何形状和照明频谱的低相干扫描干涉仪来收集数据，并且其中数据包括 低相干扫描干涉测量信号，具有对应于多个界面的多个边缘对比区域; 以及基于条纹对比的对应区域和关于照明几何形状的信息之间的距离来确定至少一对界面之间的距离。

公开(公告)号：US07466429B2

公开(公告)日：2008-12-16

申请号：US11768550

申请日：2007-06-26

Applicant: Peter J. de Groot ,  Robert Stoner ,  Xavier Colonna de Lega

Inventor： Peter J. de Groot ,  Robert Stoner ,  Xavier Colonna de Lega

IPC: G01B11/02

CPC classification number: G01B11/0675 ,  G01B9/0201 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/02084 ,  G01B9/02088 ,  G01B9/0209 ,  G01B2290/50 ,  G01B2290/70 ,  G01N21/211 ,  G01N21/8422 ,  G01N21/9501

Abstract: A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics for the test object. The derivable information being compared may relate to a shape of the scanning interferometry signal for the first surface location of the test object.

Abstract translation: 一种方法，包括将来自测试对象的第一表面位置的扫描干涉测量信号的可导出信息与对应于测试对象的多个模型的信息进行比较，其中通过测试对象的一系列特征对多个模型进行参数化。 被比较的可推导信息可以涉及测试对象的第一表面位置的扫描干涉测量信号的形状。

公开(公告)号：US6072581A

公开(公告)日：2000-06-06

申请号：US183057

申请日：1998-10-30

Applicant: David Stephenson ,  Xavier Colonna de Lega

Inventor： David Stephenson ,  Xavier Colonna de Lega

IPC: G01B9/02 ,  G01B11/24 ,  G01B11/30 ,  G02B5/18

CPC classification number: G01B11/2441 ,  G01B11/306

Abstract: The optical assembly of a GDI instrument is configured to deviate or steer stray beams away from the pupil of the instrument's imaging device and/or to suppress stray beams. Stray beam deviation is optimized by selecting particular wedge and/or tilt configurations that achieve the desired stray beam deviation while avoiding or at least minimizing phase offset at the optimum metrology plane. Stray beam suppression can be achieved by providing the diffractive groove profile of the instrument's optical assembly with smooth edges. The resultant profile facilitates effective diffraction order management as well as a reduction in back reflection. The invention is particularly well-suited for use with a GDI instrument in which the optical assembly comprises first and second diffraction gratings. In this case, any average phase offset that remains after setting wedge and/or tilt can be eliminated by inserting a suitable compensating plate between the first and second diffraction gratings or between the second diffraction grating and the object.

Abstract translation: GDI仪器的光学组件被配置为偏离或引导杂散光束远离仪器的成像装置的光瞳和/或抑制杂散光束。 通过选择实现期望的杂散光束偏移的特定楔形和/或倾斜配置来优化杂散光束偏移，同时避免或至少最小化最佳计量平面处的相位偏移。 可以通过提供具有光滑边缘的仪器光学组件的衍射凹槽轮廓来实现杂散光束抑制。 所得到的轮廓有助于有效的衍射顺序管理以及减少背反射。 本发明特别适用于GDI仪器，其中光学组件包括第一和第二衍射光栅。 在这种情况下，通过在第一和第二衍射光栅之间或第二衍射光栅与物体之间插入合适的补偿板，可以消除在设置楔形和/或倾斜之后保留的任何平均相位偏移。