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公开(公告)号:US20210134806A1
公开(公告)日:2021-05-06
申请号:US16903040
申请日:2020-06-16
Applicant: Samsung Electronics Co., Ltd.
Inventor: Yanghee Lee , Jonghyuk Park , Ilyoung Yoon , Boun Yoon , Heesook Cheon
IPC: H01L27/108
Abstract: A semiconductor device includes a substrate including first and second region, a bit line structure on the first region, key structures on the second region, each key structure having an upper surface substantially coplanar with an upper surface of the bit line structure, a first trench disposed between two adjacent key structures spaced apart from each other in a first direction, a filling pattern in a lower portion of the first trench, the filling pattern having a flat upper surface and including a first conductive material, and a first conductive structure on the flat upper surface of the filling pattern, an upper sidewall of the first trench, and the upper surface of each of the plurality of key structures, the first conductive structure including a second conductive material.
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公开(公告)号:USD833431S1
公开(公告)日:2018-11-13
申请号:US29568429
申请日:2016-06-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Designer: Junwon Bae , Deokyeol Lee , Jonghyuk Park , Euiju Lee
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公开(公告)号:USD793932S1
公开(公告)日:2017-08-08
申请号:US29566717
申请日:2016-06-02
Applicant: Samsung Electronics Co., Ltd.
Designer: Kihyun Yoon , Jonghyuk Park
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公开(公告)号:USD793314S1
公开(公告)日:2017-08-01
申请号:US29566709
申请日:2016-06-02
Applicant: Samsung Electronics Co., Ltd.
Designer: Kihyun Yoon , Jonghyuk Park
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公开(公告)号:USD768624S1
公开(公告)日:2016-10-11
申请号:US29533078
申请日:2015-07-14
Applicant: Samsung Electronics Co., Ltd.
Designer: Junwon Bae , Jonghyuk Park , Hoyoung Joo , Gunwoong Kim , Kio Lee
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公开(公告)号:US20240341086A1
公开(公告)日:2024-10-10
申请号:US18622473
申请日:2024-03-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yanghee Lee , Jonghyuk Park , Ilyoung Yoon
IPC: H10B12/00
CPC classification number: H10B12/482 , H10B12/09 , H10B12/50
Abstract: An example semiconductor device includes a bit line structure and a bit line capping pattern that are stacked on a memory cell array region. The device further includes a peripheral gate structure including a peripheral gate dielectric layer, a peripheral gate electrode, and a peripheral gate capping pattern that are stacked on a peripheral circuit region. The device further includes a gate spacer on a side surface of the peripheral gate structure, a first peripheral interlayer insulating layer covering the peripheral gate structure and the gate spacer, and a first peripheral contact plug penetrating through the first peripheral interlayer insulating layer. The bit line capping pattern includes a lower bit line capping layer and an upper bit line capping layer that are stacked. A material of the upper bit line capping layer is same as a material of the first peripheral interlayer insulating layer.
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公开(公告)号:US11222897B2
公开(公告)日:2022-01-11
申请号:US16819920
申请日:2020-03-16
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Hyesung Park , Jinwoo Bae , Youngho Koh , Jonghyuk Park , Boun Yoon , Myungjae Jang
IPC: H01L27/108
Abstract: A semiconductor device including a substrate having a cell region and a peripheral region; a cell gate structure disposed on the cell region; a first impurity region and a second impurity region, arranged on first and second sides of the cell gate structure in the cell region; a bit line structure disposed on the cell gate structure and connected to the first impurity region; a peripheral gate structure disposed on the peripheral region; a peripheral capping layer disposed on the peripheral region, covering the peripheral gate structure, and having an upper surface at substantially the same level as an upper end of the bit line structure; and a cell contact structure disposed on the second impurity region, and having a conductive barrier and a contact material layer on the conductive barrier, wherein the conductive barrier covers the upper end of the bit line structure.
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公开(公告)号:US20180166529A1
公开(公告)日:2018-06-14
申请号:US15831757
申请日:2017-12-05
Applicant: Samsung Electronics Co., Ltd.
Inventor: Hyesung Park , Suyoung Shin , Jonghyuk Park , Boun Yoon , llyoung Yoon , Sangyeol Kang , SeungHo Park , Yanghee Lee , Wooin Lee
IPC: H01L49/02 , H01L27/108
CPC classification number: H01L28/84 , H01L27/10808 , H01L27/10814 , H01L27/10852 , H01L27/10885 , H01L27/10894 , H01L28/90
Abstract: A semiconductor memory devices and methods of fabricating the same are disclosed. For example, the semiconductor memory device including a semiconductor substrate including a cell area and a peripheral area, a plurality of bottom electrodes on the semiconductor substrate at the cell area, a dielectric layer conformally covering top surfaces and sidewalls of the bottom electrodes, and an upper electrode on the dielectric layer and filling between the bottom electrodes may be provided. A surface roughness of a top surface of the upper electrode may be less than a surface roughness of a side surface of the upper electrode.
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公开(公告)号:USD791753S1
公开(公告)日:2017-07-11
申请号:US29567912
申请日:2016-06-14
Applicant: Samsung Electronics Co., Ltd.
Designer: Junwon Bae , Deokyeol Lee , Jonghyuk Park , Euiju Lee
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公开(公告)号:US20250159867A1
公开(公告)日:2025-05-15
申请号:US18662164
申请日:2024-05-13
Applicant: Samsung Electronics Co., Ltd.
Inventor: Donghoon Kwon , Jonghyuk Park
Abstract: A semiconductor device includes an active pattern, a gate structure that extends in a first direction on the active pattern, a bit line electrically connected to the active pattern and extending in a second direction, a gate contact electrically connected to the gate structure, a dummy line between the gate contact and the bit line, and a dummy dielectric layer at least partially surrounded by the dummy line, where the dummy line includes: a first dummy line part between the dummy dielectric layer and the bit line, a second dummy line part spaced apart from the first dummy line part, and a plurality of connection parts that electrically connect the first and second dummy line parts to each other, and where the dummy dielectric layer is between the first dummy line part and the second dummy line part and is between the plurality of connection parts.
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