公开(公告)号：US20200096339A1

公开(公告)日：2020-03-26

申请号：US16697092

申请日：2019-11-26

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO ,  Luca Giuseppe FALORNI ,  Claudia COMI ,  Valentina ZEGA

IPC: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.

公开(公告)号：US20160169931A1

公开(公告)日：2016-06-16

申请号：US14858563

申请日：2015-09-18

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO

IPC: G01P15/02

CPC classification number: G01P15/02 ,  B81B7/0048 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01C19/5712 ,  G01P15/125 ,  G01P2015/0831 ,  G01P2015/0837

Abstract: Described herein is a microelectromechanical detection structure, provided with: a substrate having a top surface extending in a plane; a detection-electrode arrangement; an inertial mass, suspended above the substrate and the detection-electrode arrangement; and elastic elements, coupling the inertial mass to a central anchorage element fixed with respect to the substrate, in such a way that it is free to rotate about an axis of rotation as a function of a quantity to be detected along a vertical axis, the central anchorage element being arranged at the axis of rotation. A suspension structure is coupled to the detection-electrode arrangement for supporting it, suspended above the substrate and underneath the inertial mass, and is anchored to the substrate via at least one first anchorage region; the fixed-electrode arrangement is anchored to the suspension structure via at least one second anchorage region.

Abstract translation: 本文描述的是一种微机电检测结构，其具有：具有在平面内延伸的顶表面的基底; 检测电极装置; 悬浮在衬底上的惯性质量块和检测电极装置; 以及将惯性质量联接到相对于衬底固定的中心锚固元件，使得其可以围绕作为沿着垂直轴检测的量的函数的旋转轴线自由旋转， 中心锚固元件布置在旋转轴线处。 悬架结构耦合到检测电极装置，用于支撑它，悬浮在基底上方和惯性块下方，并且经由至少一个第一锚固区域锚固到基底; 固定电极装置经由至少一个第二锚定区域锚固到悬挂结构。

公开(公告)号：US20200216305A1

公开(公告)日：2020-07-09

申请号：US16736485

申请日：2020-01-07

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Francesco RIZZINI ,  Alessandro TOCCHIO

IPC: B81B7/00 ,  G01P15/02 ,  G01C19/5712

Abstract: A MEMS device with teeter-totter structure includes a mobile mass having an area in a plane and a thickness in a direction perpendicular to the plane. The mobile mass is tiltable about a rotation axis extending parallel to the plane and formed by a first and by a second half-masses arranged on opposite sides of the rotation axis. The first and the second masses have a first and a second centroid, respectively, arranged at a first and a second distance b1, b2, respectively, from the rotation axis. First through openings are formed in the first half-mass and, together with the first half-mass, have a first total perimeter p1 in the plane. Second through openings are formed in the second half-mass and, together with the second half-mass, have a second total perimeter p2 in the plane, where the first and the second perimeters p1, p2 satisfy the equation: p1×b1=p2×b2.

公开(公告)号：US20190195964A1

公开(公告)日：2019-06-27

申请号：US16290778

申请日：2019-03-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Giacomo LAGHI ,  Giacomo LANGFELDER ,  Gabriele GATTERE ,  Alessandro TOCCHIO ,  Dario PACI

IPC: G01R33/02 ,  G01R33/00 ,  G01R33/028 ,  G01R33/038

Abstract: A MEMS triaxial magnetic sensor device includes a sensing structure having: a substrate; an outer frame, which internally defines a window and is elastically coupled to first anchorages fixed with respect to the substrate by first elastic elements; a mobile structure arranged in the window, suspended above the substrate, which is elastically coupled to the outer frame by second elastic elements and carries a conductive path for flow of an electric current; and an elastic arrangement operatively coupled to the mobile structure. The mobile structure performs, due to the first and second elastic elements and the arrangement of elastic elements, first, second, and third sensing movements in response to Lorentz forces from first, second, and third magnetic-field components, respectively. The first, second, and third sensing movements are distinct and decoupled from one another.

公开(公告)号：US20190152769A1

公开(公告)日：2019-05-23

申请号：US16240415

申请日：2019-01-04

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO ,  Lorenzo CORSO

IPC: B81B7/00 ,  B81C1/00

Abstract: An integrated semiconductor device includes: a MEMS structure; an ASIC electronic circuit; and conductive interconnection structures electrically coupling the MEMS structure to the ASIC electronic circuit. The MEMS structure and the ASIC electronic circuit are integrated starting from a same substrate including semiconductor material; wherein the MEMS structure is formed at a first surface of the substrate, and the ASIC electronic circuit is formed at a second surface of the substrate, vertically opposite to the first surface in a direction transverse to a horizontal plane of extension of the first surface and of the second surface.

公开(公告)号：US20180120342A1

公开(公告)日：2018-05-03

申请号：US15639524

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Alessandro TOCCHIO ,  Francesco RIZZINI

IPC: G01P15/18 ,  G01P15/097 ,  G01P15/125

CPC classification number: G01P15/18 ,  G01P15/097 ,  G01P15/125 ,  G01P2015/0845 ,  G01P2015/0848

Abstract: A MEMS tri-axial accelerometer is provided with a sensing structure having: a single inertial mass, with a main extension in a horizontal plane defined by a first horizontal axis and a second horizontal axis and internally defining a first window that traverses it throughout a thickness thereof along a vertical axis orthogonal to the horizontal plane; and a suspension structure, arranged within the window for elastically coupling the inertial mass to a single anchorage element, which is fixed with respect to a substrate and arranged within the window, so that the inertial mass is suspended above the substrate and is able to carry out, by the inertial effect, a first sensing movement, a second sensing movement, and a third sensing movement in respective sensing directions parallel to the first, second, and third horizontal axes following upon detection of a respective acceleration component. In particular, the suspension structure has at least one first decoupling element for decoupling at least one of the first, second, and third sensing movements from the remaining sensing movements.

公开(公告)号：US20180112981A1

公开(公告)日：2018-04-26

申请号：US15639608

申请日：2017-06-30

Applicant: STMICROELECTRONICS S.R.L. ,  Politecnico di Milano

Inventor： Alessandro TOCCHIO ,  Luca Giuseppe FALORNI ,  Claudia COMI ,  Valentina ZEGA

IPC: G01C19/5747 ,  G01C19/5769

CPC classification number: G01C19/5747 ,  G01C19/574 ,  G01C19/5769

Abstract: A frequency modulation MEMS triaxial gyroscope, having two mobile masses; a first and a second driving body coupled to the mobile masses through elastic elements rigid in a first direction and compliant in a second direction transverse to the first direction; and a third and a fourth driving body coupled to the mobile masses through elastic elements rigid in the second direction and compliant in the first direction. A first and a second driving element are coupled to the first and second driving bodies for causing the mobile masses to translate in the first direction in phase opposition. A third and a fourth driving element are coupled to the third and fourth driving bodies for causing the mobile masses to translate in the second direction and in phase opposition. An out-of-plane driving element is coupled to the first and second mobile masses for causing a translation in a third direction, in phase opposition. Movement-sensing electrodes generate frequency signals as a function of external angular velocities.