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公开(公告)号：US20180059405A1
公开(公告)日：2018-03-01
申请号：US15245805
申请日：2016-08-24
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio Allegato , Sonia Costantini , Federico Vercesi , Roberto Carminati
CPC classification number: G02B26/105 , B81B2201/042 , B81C1/00317 , B81C2203/0109 , B81C2203/019 , G02B26/0833
Abstract: Disclosed herein is a micro-electro mechanical (MEMS) device including a substrate, and a MEMS mirror stack on the substrate. A first bonding layer seals against ingress of environmental contaminants and mechanically anchors the MEMS mirror stack to the substrate. A cap layer is formed on the MEMS mirror stack. A second boding layer seals against ingress of environmental contaminants and mechanically anchors the cap layer to the MEMS mirror stack.
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公开(公告)号：US12078799B2
公开(公告)日：2024-09-03
申请号：US18206363
申请日：2023-06-06
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio Allegato , Sonia Costantini , Federico Vercesi , Roberto Carminati
CPC classification number: G02B26/105 , B81C1/00317 , B81C1/00523 , G02B26/0833 , B81B2201/042 , B81C2203/0109 , B81C2203/019
Abstract: A method of making a MEMS device including forming a mirror stack on a handle layer, applying a first bonding layer to the mirror stack, and disposing a substrate on the first bonding layer. The handle layer is removed and a second bonding layer is applied. A cap layer is disposed on the second bonding layer. The mirror stack is formed by disposing a silicon layer on the handle layer, disposing a first insulating layer on the silicon layer, etching portions of the first insulating layer, and depositing a first conductive layer on the first insulating layer. The formation also includes depositing a second insulating layer on the first conductive layer, a portion of the second insulating layer to expose a portion of the first conductive layer exposed, and forming a conductive pad on the exposed portion of the first conductive layer.
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13.发明授权公开(公告)号：US11681141B2
公开(公告)日：2023-06-20
申请号：US16705677
申请日：2019-12-06
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sonia Costantini , Riccardo Gianola , Linda Montagna , Francesca Maria Carla Carpignano
CPC classification number: G02B26/085 , B81B3/0045 , B81C1/00166 , G02B26/101 , B81B2201/042 , B81B2203/0127 , B81B2203/0154 , B81B2203/0163 , B81B2203/04 , B81C2201/016 , B81C2201/0188
Abstract: A MEMS device is obtained by forming a temporary biasing structure on a semiconductor body, and forming an actuation coil on the semiconductor body, the actuation coil having at least one first end turn, one second end turn and an intermediate turn arranged between the first and the second end turns and electrically coupled to the first end turn through the temporary biasing structure. In this way, the intermediate turn is biased at approximately the same potential as the first end turn during galvanic growth, and, at the end of growth, the actuation coil has an approximately uniform thickness. At the end of galvanic growth, portions of the temporary biasing structure are selectively removed to electrically separate the first end turn from the intermediate turn and from a dummy biasing region adjacent to the first end turn.
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公开(公告)号：US11440794B2
公开(公告)日：2022-09-13
申请号：US16565803
申请日：2019-09-10
Applicant: STMicroelectronics S.r.l.
Inventor： Sonia Costantini , Davide Assanelli , Aldo Luigi Bortolotti , Michele Vimercati , Igor Varisco
Abstract: A bottom semiconductor region is formed to include a main sub-region, extending through a bottom dielectric region that coats a semiconductor wafer, and a secondary sub-region which coats the bottom dielectric region and surrounds the main sub-region. First and second top cavities are formed through the wafer, delimiting a fixed body and a patterned structure that includes a central portion which contacts the main sub-region, and deformable portions in contact with the bottom dielectric region. A bottom cavity is formed through the bottom semiconductor region, as far as the bottom dielectric region, the bottom cavity laterally delimiting a stiffening region including the main sub-region and leaving exposed parts of the bottom dielectric region that contact the deformable portions and parts of the bottom dielectric region that delimit the first and second top cavities. The parts left exposed by the bottom cavity are selectively removed.
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公开(公告)号：US09544573B2
公开(公告)日：2017-01-10
申请号：US14151471
申请日：2014-01-09
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sebastiano Conti , Sonia Costantini
CPC classification number: G02B26/0833 , G01B11/2518 , G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/105 , G03B21/008 , H04N5/2254 , H04N5/2256 , H04N5/2257 , H04N13/211 , H04N13/236 , H04N13/254 , Y10T29/49
Abstract: A mirror micromechanical structure has a mobile mass carrying a mirror element. The mass is drivable in rotation for reflecting an incident light beam with a desired angular range. The mobile mass is suspended above a cavity obtained in a supporting body. The cavity is shaped so that the supporting body does not hinder the reflected light beam within the desired angular range. In particular, the cavity extends as far as a first side edge wall of the supporting body of the mirror micromechanical structure. The cavity is open towards, and in communication with, the outside of the mirror micromechanical structure at the first side edge wall.
Abstract translation: 镜面微机械结构具有携带镜子元件的移动质量。 质量可旋转驱动，以反射具有期望角度范围的入射光束。 移动块悬挂在支撑体中获得的空腔上方。 空腔的形状使得支撑体不会将反射的光束阻碍在期望的角度范围内。 特别地，腔延伸到反射镜微机械结构的支撑体的第一侧边缘壁。 腔体在第一侧边缘壁处朝着反射镜微机械结构的外部打开并且与其连通。
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Patent Agency Ranking
公开(公告)号：US10962431B2
公开(公告)日：2021-03-30
申请号：US16220498
申请日：2018-12-14
Applicant: STMicroelectronics S.R.L.
Inventor： Enri Duqi , Sebastiano Conti , Sonia Costantini
Abstract: A pressure sensor designed to detect a value of ambient pressure of the environment external to the pressure sensor includes: a first substrate having a buried cavity and a membrane suspended over the buried cavity; a second substrate having a recess, hermetically coupled to the first substrate so that the recess defines a sealed cavity the internal pressure value of which provides a pressure-reference value; and a channel formed at least in part in the first substrate and configured to arrange the buried cavity in communication with the environment external to the pressure sensor. The membrane undergoes deflection as a function of a difference of pressure between the pressure-reference value in the sealed cavity and the ambient-pressure value in the buried cavity.
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公开(公告)号：US10914938B2
公开(公告)日：2021-02-09
申请号：US15955107
申请日：2018-04-17
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto Carminati , Sonia Costantini , Marta Carminati
Abstract: An oscillating structure includes first and second torsional elastic elements that define an axis of rotation and a moving element that is interposed between the first and second torsional elastic elements. The moving element, the first torsional elastic element and the second torsional elastic element lie in a first plane and are not in direct contact with one another. A coupling structure mechanically couples the moving element, the first torsional elastic element and the second torsional elastic element together. The moving element, the first torsional elastic element and the second torsional elastic element lie in a second plane different from the first plane. Oscillation of the moving element occurs as a result of a twisting of the first and second torsional elastic elements.
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公开(公告)号：US10473920B2
公开(公告)日：2019-11-12
申请号：US15245805
申请日：2016-08-24
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio Allegato , Sonia Costantini , Federico Vercesi , Roberto Carminati
Abstract: Disclosed herein is a micro-electro mechanical (MEMS) device including a substrate, and a MEMS mirror stack on the substrate. A first bonding layer seals against ingress of environmental contaminants and mechanically anchors the MEMS mirror stack to the substrate. A cap layer is formed on the MEMS mirror stack. A second boding layer seals against ingress of environmental contaminants and mechanically anchors the cap layer to the MEMS mirror stack.
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公开(公告)号：US10197794B2
公开(公告)日：2019-02-05
申请号：US15603614
申请日：2017-05-24
Applicant: STMicroelectronics S.r.l.
Inventor： Sonia Costantini , Marta Carminati , Daniela Angela Luisa Gatti , Laura Maria Castoldi , Roberto Carminati
Abstract: A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.
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公开(公告)号：US09753279B2
公开(公告)日：2017-09-05
申请号：US14564237
申请日：2014-12-09
Inventor： Benedetto Vigna , Marco Ferrera , Sonia Costantini , Marco Salina
CPC classification number: G02B26/0841 , B81B3/0045 , B81B2201/042 , B81B2203/0154 , B81C1/00198 , G02B27/1006 , H02N1/002 , H02N1/006 , H04N9/3129 , H04N9/3135 , Y10T29/49002
Abstract: An electrostatically actuated oscillating structure includes a first stator subregion, a second stator subregion, a first rotor subregion and a second rotor subregion. Torsional elastic elements mounted to the first and second rotor subregions define an axis of rotation. A mobile element is coupled to the torsional elastic elements. The stator subregions are electrostatically coupled to respective regions of actuation on the mobile element. The stator subregions exhibit an element of structural asymmetry such that the electrostatic coupling surface between the first stator subregion and the first actuation region differs from the electrostatic coupling surface between the second stator subregion and the second actuation region.
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