Method of manufacturing ZnO-based thin film transistor
    13.
    发明授权
    Method of manufacturing ZnO-based thin film transistor 有权
    制造ZnO基薄膜晶体管的方法

    公开(公告)号:US08735229B2

    公开(公告)日:2014-05-27

    申请号:US12110744

    申请日:2008-04-28

    CPC classification number: H01L29/7869

    Abstract: A ZnO-based thin film transistor (TFT) is provided herein. Also provided is a method for manufacturing the TFT. The ZnO-based TFT is very sensitive to the oxygen concentration present in a channel layer. In order to prevent damage to a channel layer of a bottom gate TFT, and to avoid a deep negative threshold voltage resulting from damage to the channel layer, the method for manufacturing the ZnO-based TFT comprises formation of an etch stop layer or a passivation layer comprising unstable or incompletely bonded oxygen, and annealing the layers to induce an interfacial reaction between the oxide layer and the channel layer and to reduce the carrier concentration.

    Abstract translation: 本文提供了一种ZnO基薄膜晶体管(TFT)。 还提供了一种用于制造TFT的方法。 ZnO基TFT对通道层中存在的氧浓度非常敏感。 为了防止对底栅TFT的沟道层的损坏,并且为了避免由于对沟道层的损坏而产生的深负阈值电压,制造ZnO基TFT的方法包括形成蚀刻停止层或钝化层 层,其包含不稳定或不完全结合的氧,并且退火层以在氧化物层和沟道层之间引起界面反应并降低载流子浓度。

    Foldable display device
    15.
    发明授权
    Foldable display device 有权
    可折叠显示设备

    公开(公告)号:US08593372B2

    公开(公告)日:2013-11-26

    申请号:US13360991

    申请日:2012-01-30

    CPC classification number: H04M1/0266 H04M1/0202

    Abstract: A foldable display device includes a first display panel which displays a portion of an image; a second display panel which displays a second portion different from the first portion of the image; a first protecting window on the first display panel; a second protecting window on the second display panel; and a flexible material layer between the first and second protecting windows. Side surfaces of the first and second protecting windows which contact the flexible material layer, respectively, are inclined with respect to a surface of each of the first and second protecting windows.

    Abstract translation: 可折叠显示装置包括:第一显示面板,其显示图像的一部分; 显示与图像的第一部分不同的第二部分的第二显示面板; 第一显示面板上的第一保护窗口; 第二显示面板上的第二保护窗; 以及在第一和第二保护窗之间的柔性材料层。 分别接触柔性材料层的第一和第二保护窗的侧表面相对于第一和第二保护窗中的每一个的表面倾斜。

    ZnO-based thin film transistor and method of manufacturing the same
    16.
    发明授权
    ZnO-based thin film transistor and method of manufacturing the same 有权
    ZnO系薄膜晶体管及其制造方法

    公开(公告)号:US07915610B2

    公开(公告)日:2011-03-29

    申请号:US12615315

    申请日:2009-11-10

    CPC classification number: H01L29/7869

    Abstract: A ZnO-based thin film transistor (TFT) is provided herein, as is a method of manufacturing the TFT. The ZnO-based TFT has a channel layer that comprises ZnO and ZnCl, wherein the ZnCl has a higher bonding energy than ZnO with respect to plasma. The ZnCl is formed through the entire channel layer, and specifically is formed in a region near the surface of the channel layer. Since the ZnCl is strong enough not to be decomposed when exposed to plasma etching gas, an increase in the carrier concentration can be prevented. The distribution of ZnCl in the channel layer, may result from the inclusion of chlorine (Cl) in the plasma gas during the patterning of the channel layer.

    Abstract translation: 这里提供了一种ZnO基薄膜晶体管(TFT),以及TFT的制造方法。 ZnO基TFT具有包含ZnO和ZnCl的沟道层,其中ZnCl相对于等离子体具有比ZnO高的结合能。 ZnCl是通过整个沟道层形成的,具体地形成在沟道层表面附近的区域。 由于ZnCl强度足够暴露于等离子体蚀刻气体时不会分解,因此可以防止载流子浓度的增加。 ZnCl在沟道层中的分布可能是由于在沟道层图案化期间在等离子体气体中包含氯(Cl)。

    Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device
    19.
    发明授权
    Nanostructured acousto-optic device, and optical scanner, optical modulator, and holographic display apparatus using the nanostructured acousto-optic device 有权
    纳米结构声光装置,以及使用纳米结构声光装置的光学扫描器,光学调制器和全息显示装置

    公开(公告)号:US09477101B2

    公开(公告)日:2016-10-25

    申请号:US13360616

    申请日:2012-01-27

    Abstract: An acousto-optic device capable of increasing a range of a diffraction angle of output light by using a nanostructured acousto-optic medium, and an optical scanner, an optical modulator, a two-dimensional/three-dimensional (2D/3D) conversion stereoscopic image display apparatus, and a holographic display apparatus using the acousto-optic device. The acousto-optic device may include a nanostructured acousto-optic medium formed by at least two different mediums repeatedly alternating with each other, wherein at least one of the at least two different mediums includes an acousto-optic medium. The acousto-optic device having the aforementioned structure may increase the range of a diffraction angle of output light. Thus, various systems such as the optical scanner, the optical modulator, the 2D/3D conversion stereoscopic image display apparatus, and the holographic display apparatus may not require a separate optical system to increase an operational angle range, thereby decreasing a size of the system and/or improving a resolution of the system.

    Abstract translation: 一种能够通过使用纳米结构的声光介质和光学扫描器,光学调制器,二维/三维(2D / 3D)转换立体视觉增强输出光的衍射角的范围的声光器件 图像显示装置和使用该声光装置的全息显示装置。 声光装置可以包括由至少两个不同介质形成的纳米结构的声光介质,所述至少两个介质彼此重复交替,其中所述至少两种不同介质中的至少一种包括声光介质。 具有上述结构的声光装置可以增加输出光的衍射角的范围。 因此,诸如光学扫描器,光学调制器,2D / 3D转换立体图像显示装置和全息显示装置的各种系统可能不需要单独的光学系统来增加操作角度范围,从而减小系统的尺寸 和/或提高系统的分辨率。

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