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    Cathode having a reservoir and method of manufacturing the same
    11.
    发明授权
    Cathode having a reservoir and method of manufacturing the same 失效
    具有储存器的阴极及其制造方法

    公开(公告)号：US5838096A

    公开(公告)日：1998-11-17

    申请号：US679727

    申请日：1996-07-12

    申请人： Hiroyuki Shinada ,  Satoru Fukuhara ,  Katsuhiro Kuroda

    发明人： Hiroyuki Shinada ,  Satoru Fukuhara ,  Katsuhiro Kuroda

    IPC分类号： H01J37/06 ,  H01J1/15 ,  H01J1/304

    CPC分类号： H01J1/15

    摘要： A cathode includes a hairpin type filament made of a refractory metal such as W, Mo or Re; a single crystal needle, made of a refractory metal such as W, Mo or Re joined to the filament; and a reservoir formed by applying a slurry of a powder of a metal or metal compound and an organic solvent containing nitrocellulose in the vicinity of a junction between the single crystal needle and the filament. The powder for a reservoir is made of a metal lower than the single crystal needle in a work function or electron affinity, such as Ti, Zr, Hf, Y, Th, Sc or Se, or a compound thereof.

    摘要翻译： 阴极包括由难熔金属如W，Mo或Re制成的发夹型长丝; 由诸如W，Mo或Re的难熔金属制成的单晶针连接到灯丝上; 以及通过在单晶针和丝之间的接合处附近施加金属或金属化合物的粉末和含有硝化纤维素的有机溶剂的浆料形成的储存器。 用于储存器的粉末以比单晶针低的金属，例如Ti，Zr，Hf，Y，Th，Sc或Se或它们的化合物在功函数或电子亲和力下制成。

    Charged particle beam device
    12.
    发明授权
    Charged particle beam device 失效
    带电粒子束装置

    公开(公告)号：US5160884A

    公开(公告)日：1992-11-03

    申请号：US647423

    申请日：1991-01-29

    申请人： Hideo Todokoro ,  Hiroyuki Shinada ,  Satoru Fukuhara

    发明人： Hideo Todokoro ,  Hiroyuki Shinada ,  Satoru Fukuhara

    IPC分类号： G01R31/302 ,  G01Q30/04 ,  G01R31/305 ,  H01J37/28

    CPC分类号： G01R31/305

    摘要： A charged particle beam device radiates a primary charged particle beam of pulse form on a surface of a specimen, once in each clock period, in synchronism with a clock signal that determines an operating period of an internal operating signal of the specimen. A secondary electron or a reflected electron is detected after it is emitted from the surface of the specimen when the primary charged particle beam of pulse form is irradiated. Each detected signal pulse which is generated from the detecting means once in each period of said clock is sampled at two or more positions in a range including the peak value, and data which correspond to the sum or the averaged value calculated from the sampling values of a plurality of the positions are formed. An internal operating signal waveform of said specimen is displayed by using the data, and therefore the internal operating signal waveform of the specimen can be observed and measured with high measuring accuracy and with high efficiency.

    摘要翻译： 带电粒子束装置在每个时钟周期内，与确定样本的内部操作信号的操作周期的时钟信号同步地，在试样的表面上辐射脉冲形式的初级带电粒子束。 当照射脉冲形式的初级带电粒子束后，从样品表面发射二次电子或反射电子。 在所述时钟的每个周期中从检测装置产生的每个检测到的信号脉冲在包括峰值的范围内的两个或更多个位置被采样，并且对应于从根据 形成多个位置。 通过使用该数据显示所述样本的内部操作信号波形，因此可以以高测量精度和高效率观察和测量样本的内部操作信号波形。