公开(公告)号：US20160093897A1

公开(公告)日：2016-03-31

申请号：US14869652

申请日：2015-09-29

Applicant: TOTO LTD.

Inventor： Yasuo KAKINUMA ,  Osamu OKAMOTO ,  Shigeru ANDO ,  Hironobu MURAKAMI ,  Seiki FURUYA ,  Yutaka MOMIYAMA ,  Kiyoshi HAYAMA ,  Naoki WATANABE ,  Shuhei TANAKA ,  Nobuo ISAKA ,  Takuya HOSHIKO ,  Masaki SATO

IPC: H01M8/02 ,  H01M8/24 ,  H01M8/12

CPC classification number: H01M8/0202 ,  H01M4/9033 ,  H01M8/0217 ,  H01M8/1246 ,  H01M8/24 ,  H01M8/243 ,  H01M8/2465 ,  H01M2008/1293 ,  H01M2300/0071

Abstract: A solid oxide fuel cell stack includes a support, a plurality of power generation elements provided on a surface of the support, the plurality of power generation elements connected in series, each including at least a fuel electrode, a solid electrolyte, and an air electrode stacked in that order, and an interconnector that electrically connects an air electrode in one of adjacent power generation elements to a fuel electrode in the other power generation element. A solid electrolyte in adjacent one power generation element is provided between a fuel electrode in the adjacent one power generation element and the fuel electrode in the adjacent other power generation element, and an insulating member is provided at a position that is on the solid electrolyte in the adjacent one power generation element and between the air electrode in the adjacent one power generation element and the solid electrolyte therein.

Abstract translation: 固体氧化物燃料电池堆包括支撑体，设置在支撑体的表面上的多个发电元件，串联连接的多个发电元件，每个发电元件至少包括燃料电极，固体电解质和空气电极 以及将相邻发电元件中的一个的空气电极与另一发电元件中的燃料电极电连接的互连器。 相邻一个发电元件中的固体电解质设置在相邻的一个发电元件中的燃料电极和相邻的另一发电元件中的燃料电极之间，绝缘部件设置在固体电解质上的位置 相邻的一个发电元件之间和相邻一个发电元件中的空气电极和其中的固体电解质之间。

公开(公告)号：US20140093809A1

公开(公告)日：2014-04-03

申请号：US14026401

申请日：2013-09-13

Applicant: TOTO LTD.

Inventor： Shigeru ANDO ,  Seiki FURUYA ,  Yutaka MOMIYAMA ,  Kiyoshi HAYAMA ,  Osamu OKAMOTO ,  Naoki WATANABE ,  Nobuo ISAKA ,  Masaki SATO

IPC: H01M8/12

CPC classification number: H01M8/1286 ,  H01M8/004 ,  H01M8/0206 ,  H01M8/0236 ,  H01M8/0245 ,  H01M8/0258 ,  H01M8/0267 ,  H01M8/0271 ,  H01M8/0297 ,  H01M8/1226 ,  H01M8/243 ,  H01M8/2483 ,  H01M2008/1293 ,  Y02E60/521 ,  Y02E60/525

Abstract: An object of the present invention is to provide a fuel cell preventing formation of a diffusion layer containing Ca and other elements, and having an excellent power generation performance at low temperature by preventing breakdown of a crystal structure of an electrolyte by firing. Disclosed is a solid oxide fuel cell which includes an inner electrode, a solid electrolyte, and an outer electrode, each being sequentially laminated on the surface of a porous support. The porous support contains forsterite, and has a Mg/Si molar ratio of 1.90 to 2.2 both inclusive, and an A-to-B ratio (A/B) of 0.0% to 9.0% both inclusive, where A denotes a maximum peak height which appears at a diffraction angle 2θ=26.5° to 27.0° and B denotes a maximum peak height which appears at 36.5° to 37.0° in a powder X-ray diffraction pattern obtained by using Cu—Kα radiation.

Abstract translation: 本发明的目的在于提供一种防止含有Ca等元素的扩散层的形成的燃料电池，并且通过烧结来防止电解液的晶体结构的破坏，在低温下具有优异的发电性能。 公开了一种固体氧化物燃料电池，其包括内电极，固体电解质和外电极，各自依次层压在多孔载体的表面上。 多孔载体含有镁橄榄石，Mg / Si摩尔比为1.90〜2.2，A-B比（A / B）为0.0〜9.0％，其中A表示最大峰高 其出现在衍射角2θ= 26.5°至27.0°，B表示在通过使用Cu-Kα辐射获得的粉末X射线衍射图中在36.5°至37.0°处出现的最大峰高。

公开(公告)号：US20140080034A1

公开(公告)日：2014-03-20

申请号：US14026454

申请日：2013-09-13

Applicant: TOTO LTD.

Inventor： Shigeru ANDO ,  Seiki FURUYA ,  Yutaka MOMIYAMA ,  Kiyoshi HAYAMA ,  Osamu OKAMOTO ,  Naoki WATANABE ,  Nobuo ISAKA ,  Masaki SATO

IPC: H01M8/02

CPC classification number: H01M8/023 ,  H01M8/004 ,  H01M8/1226 ,  H01M8/1246 ,  H01M8/243 ,  H01M2008/1293 ,  Y02E60/525 ,  Y02P70/56

Abstract: An object of the present invention is to provide a fuel cell preventing formation of a diffusion layer containing Ca and other elements, and having an excellent power generation performance at low temperature by preventing breakdown of a crystal structure of an electrolyte by firing. Disclosed is a solid oxide fuel cell which includes a fuel electrode, a solid electrolyte, and an air electrode, each being sequentially laminated on the surface of a porous support. The porous support contains forsterite, and further has a calcium element (Ca) content of more than 0.2 mass % but not more than 2 mass % in terms of CaO.

Abstract translation: 本发明的目的在于提供一种防止含有Ca等元素的扩散层的形成的燃料电池，并且通过烧结来防止电解液的晶体结构的破坏，在低温下具有优异的发电性能。 公开了一种固体氧化物燃料电池，其包括燃料电极，固体电解质和空气电极，其各自依次层压在多孔载体的表面上。 多孔质载体含有镁橄榄石，并且还具有以CaO计为0.2质量％以上2质量％以下的钙元素（Ca）含量。

公开(公告)号：US20240339351A1

公开(公告)日：2024-10-10

申请号：US18745262

申请日：2024-06-17

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01L21/683 ,  B32B7/12 ,  B32B9/00 ,  B32B9/04 ,  B32B15/04 ,  B32B15/08 ,  C23C14/06 ,  C23C14/08

CPC classification number: H01L21/6833 ,  B32B7/12 ,  B32B9/005 ,  B32B9/041 ,  B32B9/045 ,  B32B15/04 ,  B32B15/08 ,  C23C14/0635 ,  C23C14/0641 ,  C23C14/08 ,  B32B2307/54 ,  B32B2307/542

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a bonding layer provided between the ceramic dielectric substrate and the base plate. At least one of the following first to sixth conditions is satisfied: First condition: An elongation percentage α1 is not less than 120%; Second condition: A ratio α1/α2 of the elongation percentage is not less than 0.60; Third condition: A bonding strength β1 is not less than 0.4 MPa and not more than 10 MPa; Fourth condition: A ratio β1/β2 of the bonding strength is not less than 0.6 and not more than 10; Fifth condition: An elastic modulus γ1 is not less than 0.1 MPa and not more than 10 MPa; Sixth condition: A ratio γ1/γ2 of the elastic modulus is not less than 0.6 and not more than 30.

公开(公告)号：US20240282612A1

公开(公告)日：2024-08-22

申请号：US18443461

申请日：2024-02-16

Applicant: TOTO LTD.

Inventor： Shunya MIYAZAKI ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Ikuo ITAKURA

IPC: H01L21/683 ,  C23C16/458 ,  C23C16/46

CPC classification number: H01L21/6833 ,  C23C16/4586 ,  C23C16/463

Abstract: An electrostatic chuck 10 includes: a dielectric substrate 100 which includes a surface 110 on which a substrate W is to be placed and in which through holes (gas holes 150 and lift pin holes 160) that penetrate the surface 110 are formed; an electrode terminal 121 which is provided on a surface 120 of the dielectric substrate 100 on an opposite side to the surface 110; a base plate 200 to be joined to the surface 120 of the dielectric substrate 100; and a joining layer 300 which is provided between the dielectric substrate 100 and the base plate 200 and which is formed of an insulating material. When viewed from a direction perpendicular to the surface 110, spaces 340 are formed at positions within the joining layer 300 that do not overlap with any of the through holes and the electrode terminal 121.

公开(公告)号：US20210175109A1

公开(公告)日：2021-06-10

申请号：US17179994

申请日：2021-02-19

Applicant: TOTO LTD.

Inventor： Masaki SATO ,  Ikuo ITAKURA ,  Shuichiro SAIGAN ,  Jun SHIRAISHI ,  Yutaka MOMIYAMA ,  Kouta KOBAYASHI

IPC: H01L21/683

Abstract: An electrostatic chuck includes: an electrically-conductive base plate including a first part, a second part at an outer circumference of the first part, and a gas inlet path for introducing a cooling gas; a first electrostatic chuck part configured to clamp a wafer on the first part, including a ceramic dielectric substrate that includes an embedded first clamping electrode and at least one through-hole communicating with the gas inlet path; and a second electrostatic chuck part configured to clamp a focus ring on the second part, including a ceramic layer that includes at least one through-hole for introducing a cooling gas and that includes at least a first layer contacting the focus ring when the second electrostatic chuck part clamps the focus ring, in which the first layer is less dense than the ceramic dielectric substrate. Thereby, the electrostatic chuck can increase the device yield.

公开(公告)号：US20200312694A1

公开(公告)日：2020-10-01

申请号：US16829738

申请日：2020-03-25

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a bonding layer provided between the ceramic dielectric substrate and the base plate. At least one of the following first to sixth conditions is satisfied: First condition: An elongation percentage α1 is not less than 120%; Second condition: A ratio α1/α2 of the elongation percentage is not less than 0.60; Third condition: A bonding strength ƒ1 is not less than 0.4 MPa and not more than 10 MPa; Fourth condition: A ratio β1/β2 of the bonding strength is not less than 0.6 and not more than 10; Fifth condition: An elastic modulus γ1 is not less than 0.1 MPa and not more than 10 MPa; Sixth condition: A ratio γ1/γ2 of the elastic modulus is not less than 0.6 and not more than 30.

公开(公告)号：US20200303231A1

公开(公告)日：2020-09-24

申请号：US16825256

申请日：2020-03-20

Applicant: TOTO LTD.

Inventor： Hitoshi SASAKI ,  Yutaka MOMIYAMA

IPC: H01L21/683 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/687 ,  B23Q3/15 ,  C23C16/458

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate has first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface at the first major surface side and a second surface at a side opposite to the first surface. The first electrode layer includes a first portion including the first surface. The first electrode layer includes a ceramic component and a metal component. A concentration of the ceramic component in the first portion is higher than an average concentration of the ceramic component in the first electrode layer.

公开(公告)号：US20200035538A1

公开(公告)日：2020-01-30

申请号：US16523634

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  B23Q3/15

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric, a base plate, a first electrode layer, and a second electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided between the first major surface and the second major surface. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface and a second surface. A distance between the first surface and the first major surface is constant. A distance between the second surface and the first surface at an end portion of the first electrode layer is shorter than a distance between the second surface and the first surface at a central portion of the first electrode layer.

公开(公告)号：US20190287839A1

公开(公告)日：2019-09-19

申请号：US16352899

申请日：2019-03-14

Applicant: TOTO LTD.

Inventor： Kosuke YAMAGUCHI ,  Jun SHIRAISHI ,  Ikuo ITAKURA ,  Yutaka MOMIYAMA ,  Shuichiro SAIGAN

IPC: H01L21/683

Abstract: According to the embodiment, the electrostatic chuck includes a ceramic dielectric substrate having a first major surface and a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface and being opposite to the gas introduction path. The ceramic dielectric substrate includes a first hole part positioned between the first major surface and the first porous part. At least one of the ceramic dielectric substrate or the first porous part includes a second hole part positioned between the first hole part and the first porous part, and a dimension of the second hole part is smaller than a dimension of the first porous part and larger than a dimension of the first hole part.