公开(公告)号：US07333191B2

公开(公告)日：2008-02-19

申请号：US10893364

申请日：2004-07-19

申请人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

发明人： Ken Murayama ,  Yukio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa

IPC分类号： G01B1/00

CPC分类号： G01Q20/02 ,  G01Q30/06 ,  G01Q70/04

摘要： A scanning probe microscope has a cantilever with a probe facing a sample and a measurement section for measuring a physical quantity occurring between the probe and the sample when the probe scans a surface of the sample, holding the physical quantity constant to measure the surface of the sample. The above microscope further has a probe tilt mechanism, an optical microscope etc. for detecting a position of the probe when the probe is tilted, and a control section for setting the probe in a first tilt posture and second tilt posture, measuring a surface of the sample by the measurement section at each tilt posture, detecting the position of the probe at least at the second tilt posture by the optical microscope etc., and making a measurement location at the second tilt posture match with a measurement location at the first tilt posture for measurement.

摘要翻译： 扫描探针显微镜具有悬臂，探针面向样品和测量部分，用于测量探头和样品之间发生的物理量，当探针扫描样品的表面时，保持物理量常数以测量样品的表面 样品。 上述显微镜还具有探针倾斜机构，光学显微镜等，用于在探头倾斜时检测探头的位置;以及控制部，用于将探针设置在第一倾斜姿势和第二倾斜姿势中， 通过测量部分在每个倾斜姿势下的样本，至少通过光学显微镜等检测第二倾斜姿势的探测器的位置，并且使第二倾斜姿势的测量位置与第一倾斜处的测量位置匹配 测量姿势。

公开(公告)号：US20070266780A1

公开(公告)日：2007-11-22

申请号：US11737779

申请日：2007-04-20

申请人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

发明人： SHUICHI BABA ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Toru Kurenuma ,  Hiroshi Kuroda ,  Takafumi Morimoto ,  Yukio Kembo ,  Manabu Edamura

IPC分类号： G01N13/10

CPC分类号： G01Q60/28 ,  G01Q10/06 ,  G01Q30/04

摘要： With a scanning probe microscope, if a plurality of sample properties are measured using a scanning scheme of allowing a probe to approach and withdraw from a sample, the sample properties need to be accurately and reliably detected in the minimum required measurement time. Further, the acting force between the probe and the sample varies depending on the type of the probe and the wear condition of a probe tip. Thus, disadvantageously, property values acquired using different probes cannot be compared with one another unless the artifactual effect of the measuring probes are eliminated. In accordance with the present invention, with a scanning probe microscope, the probe is brought into intermittent contact with the sample, while driving means repeatedly allows the probe to approach and withdraw from the sample with a variable amplitude. The sample property is thus acquired at a high speed. Further, a calibration sample is used in a given environment (given temperature and humidity) to acquire a force curve for at least one point. Information obtained from the force curve is used to correct measurements to display the distribution of the sample property.

摘要翻译： 使用扫描探针显微镜，如果使用允许探针进入和退出样本的扫描方案测量多个样品特性，则需要在最小所需测量时间内精确可靠地检测样品性质。 此外，探针和样品之间的作用力根据探针的类型和探针尖端的磨损情况而变化。 因此，不利的是，使用不同探针获得的特性值不能相互比较，除非消除了测量探针的人为影响。 根据本发明，利用扫描探针显微镜，使探针与样品间歇接触，同时驱动装置反复允许探针以可变的幅度从样品接近和退出。 因此，以高速度获取样品特性。 此外，在给定的环境（给定的温度和湿度）中使用校准样品以获得至少一个点的力曲线。 从力曲线获得的信息用于校正测量值以显示样品属性的分布。

公开(公告)号：US20070180889A1

公开(公告)日：2007-08-09

申请号：US10565509

申请日：2004-03-22

申请人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

发明人： Ken Murayama ,  Yokio Kenbou ,  Yuuichi Kunitomo ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Takashi Furutani

IPC分类号： G12B21/00 ,  G01N13/10

CPC分类号： G01Q10/06 ,  G01Q30/06 ,  G01Q70/02

摘要： A probe replacement method for a scanning probe microscope for measuring the surface of a sample, having a cantilever (21) having a probe (20), and a measurement unit for measuring a physical quantity between the probe and sample. The scanning probe microscope is provided with a cantilever mount (22), a cantilever cassette (30), an XY stage (14) and Z stage (15) for moving the cantilever cassette, and an optical microscope (18). In a first step, a cantilever is selected from the cantilever cassette and is mounted on the cantilever mount. In a second step, an optical microscope is moved and the mounted cantilever is set in a prescribed position in the field of view after the cantilever is mounted in the scanning probe microscope. In the second step, a step is provided for moving the optical microscope side or the cantilever side and performing positional adjustment.

摘要翻译： 一种用于测量具有具有探针（20）的悬臂（21）的样品表面的扫描探针显微镜的探针替换方法和用于测量探针和样品之间的物理量的测量单元。 扫描探针显微镜具有用于移动悬臂盒的悬臂安装座（22），悬臂盒（30），XY台（14）和Z台（15）以及光学显微镜（18）。 在第一步中，从悬臂盒中选择悬臂，并安装在悬臂安装座上。 在第二步骤中，移动光学显微镜，并且在将悬臂安装在扫描探针显微镜中之后，将安装的悬臂设置在视野中的规定位置。 在第二步骤中，提供移动光学显微镜侧或悬臂侧并执行位置调整的步骤。

公开(公告)号：US20060284084A1

公开(公告)日：2006-12-21

申请号：US10570198

申请日：2004-09-03

申请人： Takafumi Morimoto ,  Tooru Seinaki ,  Yoshiyuki Nag-No ,  Yukio Kenbou ,  Yuuichi Xunitomo ,  Takenori Hiroki ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Ken Murayama ,  Mitsuo Hayashirara ,  Kishio Hidaka ,  Tadashi Fujieda

发明人： Takafumi Morimoto ,  Tooru Seinaki ,  Yoshiyuki Nag-No ,  Yukio Kenbou ,  Yuuichi Xunitomo ,  Takenori Hiroki ,  Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Shigeru Miwa ,  Ken Murayama ,  Mitsuo Hayashirara ,  Kishio Hidaka ,  Tadashi Fujieda

IPC分类号： G21K7/00

CPC分类号： G01Q70/12

摘要： A method of producing a probe by attaching a carbon nanotube etc. to a mounting base end and bonding it there using a carbon film etc., which method of producing a probe eliminates the effects of a carbon contamination film to increase the bonding strength, increases the conductivity of the probe, and strengthens the bonding performance by coating the entire circumference rather than coating one side, the probe, and a scanning probe microscope are provided. The method of producing a probe is a method of producing a probe comprised of a carbon nanotube 12, a mounting base ends 13 holding this carbon nanotube, and a coating film 17 bonding the carbon nanotube to a mounting base, comprising performing the mounting work of the carbon nanotube and mounting base end under observation by a microscope and stripping off the carbon contamination film 14 formed by an electron microscope at a stage before bonding by the coating film.

摘要翻译： 通过使用碳膜等将碳纳米管等附接到安装基端并在其上进行接合来制造探针的方法，制造探针的方法消除了碳污染膜的作用，增加了接合强度，增加了 提供探针的导电性，并且通过涂覆整个周边而不是涂覆一侧，探针和扫描探针显微镜来增强粘合性能。 制造探针的方法是制造由碳纳米管12，保持该碳纳米管的安装基端13和将碳纳米管粘合到安装基底的涂膜17的探针的制造方法，其特征在于， 碳纳米管和安装基端通过显微镜观察，并在通过涂膜粘合之前的阶段剥离由电子显微镜形成的碳污染膜14。

公开(公告)号：US20060284083A1

公开(公告)日：2006-12-21

申请号：US10569373

申请日：2004-08-27

申请人： Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Yasushi Minomoto ,  Shigeru Miwa ,  Ken Murayama ,  Yukio Kenbou ,  Yuuichi Yuuichi ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto

发明人： Tooru Kurenuma ,  Hiroaki Yanagimoto ,  Hiroshi Kuroda ,  Yasushi Minomoto ,  Shigeru Miwa ,  Ken Murayama ,  Yukio Kenbou ,  Yuuichi Yuuichi ,  Takenori Hiroki ,  Yoshiyuki Nagano ,  Takafumi Morimoto

IPC分类号： G21K7/00

CPC分类号： G01Q10/06 ,  G01Q30/06 ,  Y10T29/49828

摘要： The probe tip movement control method of the scanning probe microscope is used for a scanning probe microscope provided with a cantilever 21 having a probe tip 20 facing a sample 12. The atomic force occurring between the probe tip and sample is measured when the probe tip scans the surface of the sample. X-, Y-, and Z-fine movement mechanisms 23, 29, and 30 are used to relatively change the positions of the probe tip and sample. It is possible to maintain a high measurement accuracy and enable scan movement of a probe tip on a sample surface by simple control when measuring a part having a gradient in measurement of an uneven shape on a sample surface.

摘要翻译： 扫描探针显微镜的探针头移动控制方法用于具有面向样品12的探针尖端20的悬臂21的扫描探针显微镜。 当探针尖端扫描样品的表面时，测量探针尖端和样品之间发生的原子力。 X，Y和Z精细运动机构23,29和30用于相对改变探针尖端和样品的位置。 通过简单的控制，可以在测量样品表面上具有不均匀形状的测量梯度的部分时，保持高测量精度并且能够使探针尖端在样品表面上进行扫描运动。

公开(公告)号：US06278113B1

公开(公告)日：2001-08-21

申请号：US09166790

申请日：1998-10-06

申请人： Ken Murayama ,  Takashi Shirai ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato ,  Tsuyoshi Nishigaki

发明人： Ken Murayama ,  Takashi Shirai ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato ,  Tsuyoshi Nishigaki

IPC分类号： H01J3720

CPC分类号： G01Q10/02 ,  G01Q10/04 ,  G01Q30/06 ,  H01J2237/20221 ,  Y10S977/872

摘要： A scanning probe microscope is provided with a probe tip directed to a sample surface, an XYZ fine movement mechanism for providing a relative positional change between the sample and the probe tip, and a displacement detecting section for detecting the displacement of the probe tip. The scanning probe microscope measures the surface characteristic of the sample by using a control signal. This control signal is generated on a signal outputted from the displacement detecting section and is used for keeping a state of a mutual action generated between the sample and the probe tip identical to a predetermined state, while the probe tip scans the surface of the sample based on the operation of the XYZ fine movement mechanism. Further, it comprises a moving section arranged on a standard surface of a microscope stage, which has the sample on an upper surface and moves along the standard surface based on a static pressure guide, a height-position control section for selectively supplying high-pressure fluid to the moving section so as to carry out the static pressure guide and controlling the height-position of the moving section to the standard surface, and an actuating mechanism for moving the moving section in directions parallel to the standard surface.

摘要翻译： 扫描探针显微镜设置有指向样品表面的探针尖端，用于提供样品和探针尖端之间的相对位置变化的XYZ精细运动机构，以及用于检测探针尖端的位移的位移检测部。 扫描探针显微镜通过使用控制信号测量样品的表面特性。 该控制信号是从位移检测部输出的信号生成的，并且用于保持样品与探针尖端之间产生的相互作用的状态与预定状态相同，同时探针尖端基于样品的表面扫描 关于XYZ精细机芯的操作。 此外，它包括布置在显微镜载物台的标准表面上的移动部分，其具有在上表面上的样品并且基于静压导向件沿着标准表面移动;高度位置控制部分，用于选择性地供应高压 流体移动到移动部分，以便执行静压引导件并将移动部分的高度位置控制到标准表面;以及致动机构，用于沿平行于标准表面的方向移动移动部分。

公开(公告)号：US06184533B2

公开(公告)日：2001-02-06

申请号：US09166850

申请日：1998-10-06

申请人： Takashi Shirai ,  Ken Murayama ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato

发明人： Takashi Shirai ,  Ken Murayama ,  Takafumi Morimoto ,  Hiroshi Kuroda ,  Harumasa Onozato

IPC分类号： H01J3720

CPC分类号： G01Q10/02 ,  Y10S977/872

摘要： A stage unit used for moving a sample comprises a vertical stage for moving a sample stand in a vertical direction, a horizontal stage for moving the vertical stage in a horizontal direction. In the stage unit, the horizontal stage is fixed on a horizontal slide surface of a surface table and the vertical stage is slidably arranged on the slide surface. The vertical stage is coupled with the horizontal stage by means of plate springs having strong rigidity in the horizontal direction and weak rigidity in the vertical direction. The whole rigidity of the stage unit is determined only by the vertical stage and is not subject to the effect of the rigidity of the sections included in the horizontal stage and the rigidity of a driving section as to each axis direction. The rigidity of the stage unit can be increased. The standstill rigidity of the stage unit is determined only by the rigidity of the vertical stage. All stages of the stage unit are not piled up. Therefore the height of stage unit can be decreased as low as possible.

摘要翻译： 用于移动样品的平台单元包括用于沿垂直方向移动样品台的垂直平台，用于沿垂直方向移动垂直平台的水平台。 在舞台单元中，水平台被固定在表台的水平滑动表面上，并且垂直平台可滑动地布置在滑动表面上。 垂直平台通过在水平方向上具有强刚性和垂直方向的弱刚性的板簧与水平台相结合。 舞台装置的整体刚度仅由垂直平台确定，并且不受包括在水平台中的部分的刚度和驱动部分对于每个轴线方向的刚性的影响。 可以增加舞台装置的刚度。 舞台装置的静止刚度仅由垂直舞台的刚度决定。 舞台单元的所有阶段都不堆积。 因此，台架单元的高度尽可能地降低。

公开(公告)号：US20080087820A1

公开(公告)日：2008-04-17

申请号：US11867476

申请日：2007-10-04

申请人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

发明人： Toru KURENUMA ,  Hiroaki Yanagimoto ,  Yukio Kembo ,  Yuichi Kunitomo ,  Takafumi Morimoto ,  Satoshi Sekino

IPC分类号： G01N23/00

CPC分类号： G01Q10/06 ,  G01Q30/06

摘要： This probe control method is applied to the scanning probe microscope having a probe section with a probe pointed at a sample, a detection section for detecting physical quantity between the sample and the probe, a measurement section for measuring the surface of the sample to obtain the surface information on the basis of the physical quantity when scanning the sample surface by the probe, and a movement mechanism with at least two degree of freedom. The probe control method has steps of moving the probe in a scanning direction different from the contact direction while making the probe come into contact with the sample surface, detecting the torsional state of the probe during the movement of the probe, and adjusting either or both of the rate in the scanning direction and the force in the contact direction on the basis of the detected value obtained by the detection step.

摘要翻译： 将该探针控制方法应用于具有探针指向样品的探针部的扫描探针显微镜，用于检测样品与探针之间的物理量的检测部，测定样品表面的测定部， 基于通过探针扫描样品表面时的物理量的表面信息，以及具有至少两个自由度的移动机构。 探针控制方法具有使探针沿着与接触方向不同的扫描方向移动的步骤，同时使探针与样品表面接触，检测探针移动期间探针的扭转状态，并且调节任一或两者 基于通过检测步骤获得的检测值，扫描方向上的速率和接触方向上的力。

公开(公告)号：US08844061B2

公开(公告)日：2014-09-23

申请号：US13726764

申请日：2012-12-26

申请人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Yukio Kembo ,  Toru Kurenuma ,  Takafumi Morimoto ,  Manabu Edamura ,  Satoshi Sekino

发明人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Yukio Kembo ,  Toru Kurenuma ,  Takafumi Morimoto ,  Manabu Edamura ,  Satoshi Sekino

IPC分类号： G01Q60/28 ,  G01Q10/04 ,  G01Q60/24 ,  G01Q10/00 ,  G01Q60/34 ,  B82Y35/00

CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q60/28 ,  G01Q60/34

摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

摘要翻译： 在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加 探针和样品之间的接触力。 此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。

公开(公告)号：US08342008B2

公开(公告)日：2013-01-01

申请号：US12187430

申请日：2008-08-07

申请人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Yukio Kembo ,  Toru Kurenuma ,  Takafumi Morimoto ,  Manabu Edamura ,  Satoshi Sekino

发明人： Shuichi Baba ,  Masahiro Watanabe ,  Toshihiko Nakata ,  Yukio Kembo ,  Toru Kurenuma ,  Takafumi Morimoto ,  Manabu Edamura ,  Satoshi Sekino

IPC分类号： G01B5/28 ,  G01Q60/28

CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q60/28 ,  G01Q60/34

摘要： In the case of measuring a pattern having a steep side wall, a probe adheres to the side wall by the van der Waals forces acting between the probe and the side wall when approaching the pattern side wall, and an error occurs in a measured profile of the side wall portion. When a pattern having a groove width almost equal to a probe diameter is measured, the probe adheres to both side walls, the probe cannot reach the groove bottom, and the groove depth cannot be measured. When the probe adheres to a pattern side wall in measurements of a microscopic high-aspect ratio pattern using an elongated probe, the probe is caused to reach the side wall bottom by detecting the adhesion of the probe to the pattern side wall, and temporarily increasing a contact force between the probe and the sample. Also, by obtaining the data of the amount of torsion of a cantilever with the shape data of the pattern, a profile error of the side wall portion by the adhesion is corrected by the obtained data of the amount of torsion.

摘要翻译： 在测量具有陡峭侧壁的图案的情况下，当接近图案侧壁时，探针通过作用在探针和侧壁之间的范德华力附着在侧壁上，并且在测量的轮廓中发生错误 侧壁部分。 当测量具有几乎等于探针直径的槽宽度的图案时，探针粘附到两个侧壁，探针不能到达凹槽底部，并且不能测量凹槽深度。 当使用细长的探针测量微观高纵横比图案时探头粘附到图案侧壁上时，通过检测探针与图案侧壁的粘附力使探针到达侧壁底部，并暂时增加 探针和样品之间的接触力。 此外，通过利用图案的形状数据获得悬臂的扭转量的数据，通过获得的扭转量的数据来校正侧壁部分的粘附的轮廓误差。