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公开(公告)号:US20240038684A1
公开(公告)日:2024-02-01
申请号:US17889389
申请日:2022-08-16
Applicant: United Microelectronics Corp.
Inventor: Ming-Hua Tsai , Hao Ping Yan , Chin-Chia Kuo , Wei Hsuan Chang
IPC: H01L23/00 , H01L23/544 , H01L23/58
CPC classification number: H01L23/562 , H01L23/544 , H01L23/564 , H01L23/585 , H01L2223/5446 , H01L2223/54426
Abstract: A semiconductor structure including a substrate and protection structures is provided. The substrate includes a die region. The die region includes corner regions. The protection structures are located in the corner region. Each of the protection structures has a square top-view pattern. The square top-view patterns located in the same corner region have various sizes.
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公开(公告)号:US20230335609A1
公开(公告)日:2023-10-19
申请号:US17736071
申请日:2022-05-03
Applicant: United Microelectronics Corp.
Inventor: Ming-Hua Tsai , Wei Hsuan Chang , Chin-Chia Kuo
IPC: H01L29/423 , H01L29/40 , H01L21/8234
CPC classification number: H01L29/42368 , H01L29/401 , H01L21/823462 , H01L27/088
Abstract: The invention provides a transistor structure and a manufacturing method thereof. The transistor structure includes a substrate, a first gate, a second gate, a first gate dielectric layer, and a second gate dielectric layer. The first gate and the second gate are located on the substrate. The first gate dielectric layer is located between the first gate and the substrate. The first gate dielectric layer has a single thickness. The second gate dielectric layer is located between the second gate and the substrate. The second gate dielectric layer has a plurality of thicknesses. A maximum thickness of the first gate dielectric layer is the same as a maximum thickness of the second gate dielectric layer. The transistor structure may reduce process complexity.
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公开(公告)号:US11114390B2
公开(公告)日:2021-09-07
申请号:US16737928
申请日:2020-01-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wei-Hsuan Chang , Ming-Hua Tsai , Chin-Chia Kuo
IPC: H01L23/522 , H01L27/06 , H01L23/00 , H01L49/02 , H01L21/762 , H01L27/08 , H01L21/3105
Abstract: A semiconductor device includes a substrate, a first isolation structure, a second isolation structure and a dummy pattern. The substrate includes a first part surrounding a second part at a top view. The first isolation structure is disposed between the first part and the second part, to isolate the first part from the second part. The second isolation structure is disposed at at least one corner of the first part. The dummy pattern is disposed on the second isolation structure. The present invention also provides a method of forming said semiconductor device.
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公开(公告)号:US20240222455A1
公开(公告)日:2024-07-04
申请号:US18107516
申请日:2023-02-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wei-Hsuan Chang , Ming-Hua Tsai , Chin-Chia Kuo
IPC: H01L29/423 , H01L27/088 , H01L29/10 , H01L29/78
CPC classification number: H01L29/42368 , H01L27/088 , H01L29/1066 , H01L29/7816 , H01L29/41725
Abstract: A high-voltage transistor includes a well region disposed in a semiconductor substrate, a gate structure disposed above the well region, a gate oxide layer disposed between the gate structure and the well region, a first drift region, and a second drift region. A first portion of the gate oxide layer is thicker than a second portion of the gate oxide layer. A thickness of the second portion is greater than or equal to one eighth of a thickness of the first portion. The first drift region and the second drift region are disposed in the well region, at least partially located at two opposite sides of the gate structure, respectively, and disposed adjacent to the first portion and the second portion, respectively. A conductivity type of the first drift region is identical to that of the second drift region. A level-up shifting circuit includes the high-voltage transistor described above.
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公开(公告)号:US20230006062A1
公开(公告)日:2023-01-05
申请号:US17366053
申请日:2021-07-02
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wei-Hsuan Chang , Ming-Hua Tsai , Chin-Chia Kuo
Abstract: A semiconductor structure is provided, and the semiconductor structure includes a substrate, and an active area is defined thereon, a gate structure spanning the active area, wherein the overlapping range of the gate structure and the active area is defined as an overlapping region, and the overlapping region includes four corners, and at least one salicide block covering the four corners of the overlapping region.
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公开(公告)号:US20190252513A1
公开(公告)日:2019-08-15
申请号:US15892671
申请日:2018-02-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Mou Lin , Chin-Chia Kuo , Ming-Hua Tsai , Su-Hua Tsai , Pai-Tsang Liu , Chiao-Yu Li , Chun-Ning Wu , Wei-Hsuan Chang
Abstract: A high-voltage device includes a semiconductor substrate, a source diffusion region, a drain diffusion region, a channel diffusion region and a gate electrode. The source diffusion region and the drain diffusion region with a first conductive type are disposed in the semiconductor substrate. The channel diffusion region is disposed in the semiconductor substrate and between the source diffusion region and the drain diffusion region. The gate dielectric layer is disposed on the channel diffusion region and having a first modified portion with a second conductive type extending inwards from a first edge of the gate dielectric layer. The gate electrode is disposed on the gate electric layer, wherein the first modified portion, the gate electrode and the channel diffusion region at least partially overlap with each other.
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公开(公告)号:US20250015161A1
公开(公告)日:2025-01-09
申请号:US18237420
申请日:2023-08-24
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Wei-Hsuan Chang , Ming-Hua Tsai , Chin-Chia Kuo
IPC: H01L29/66 , H01L21/285 , H01L29/423 , H01L29/45 , H01L29/78
Abstract: A semiconductor device includes a substrate; a channel region disposed in the substrate; and a diffusion region disposed in the substrate on a side of the channel region. The diffusion region comprises a LDD region and a heavily doped region within the LDD region. A gate electrode is disposed over the channel region. The gate electrode partially overlaps with the LDD region. A spacer is disposed on a sidewall of the gate electrode. A gate oxide layer is disposed between the gate electrode and the channel region, between the gate electrode and the LDD region, and between the spacer and the LDD region. A silicide layer is disposed on the heavily doped region and is spaced apart from the edge of the spacer.
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公开(公告)号:US10468494B2
公开(公告)日:2019-11-05
申请号:US15892671
申请日:2018-02-09
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chih-Mou Lin , Chin-Chia Kuo , Ming-Hua Tsai , Su-Hua Tsai , Pai-Tsang Liu , Chiao-Yu Li , Chun-Ning Wu , Wei-Hsuan Chang
IPC: H01L29/49 , H01L29/06 , H01L29/51 , H01L21/28 , H01L29/78 , H01L29/66 , H01L21/3115 , H01L21/3215
Abstract: A high-voltage device includes a semiconductor substrate, a source diffusion region, a drain diffusion region, a channel diffusion region and a gate electrode. The source diffusion region and the drain diffusion region with a first conductive type are disposed in the semiconductor substrate. The channel diffusion region is disposed in the semiconductor substrate and between the source diffusion region and the drain diffusion region. The gate dielectric layer is disposed on the channel diffusion region and having a first modified portion with a second conductive type extending inwards from a first edge of the gate dielectric layer. The gate electrode is disposed on the gate electric layer, wherein the first modified portion, the gate electrode and the channel diffusion region at least partially overlap with each other.
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