-
公开(公告)号：US5543017A
公开(公告)日：1996-08-06
申请号：US427687
申请日：1995-04-24
CPC分类号： B29C59/12 , B01J15/00 , B01J19/088 , B01J2219/0894 , B29C2059/145
摘要： An atmospheric pressure glow discharge plasma treatment method, in which a gaseous mixture comprising argon, argon and helium, or argon and hydrogen, mixed with water vapor or water vapor and ketones at room temperature or a specified temperature, is introduced into a plasma reactor having a dielectric-coated electrode comprising a solid dielectric disposed on the surface of at least one of opposing electrodes, and a high-frequency voltage is applied under atmospheric pressure to generate atmospheric pressure glow discharge and excite a plasma, thereby making surface treatment of plastics or fibers disposed between the electrodes.
摘要翻译： 大气压辉光放电等离子体处理方法，其中将包含氩，氩和氦，或氩和氢的气体混合物与水蒸气或水蒸汽和酮在室温或特定温度下混合，引入等离子体反应器， 电介质涂覆的电极，其包括设置在至少一个相对电极的表面上的固体电介质，并且在大气压下施加高频电压以产生大气压辉光放电并激发等离子体，从而进行塑料的表面处理或 布置在电极之间的光纤。
-
公开(公告)号：US5399832A
公开(公告)日：1995-03-21
申请号：US923444
申请日：1992-08-03
CPC分类号： B01J19/088 , B01J8/24 , B01J8/42
摘要： A grounded electrode and a high-voltage applying electrode, each obtained by covering a metal electrode with a dielectric are housed at least within a reactor apparatus. A rare gas can be introduced in the apparatus by way of a gas delivery tube, and a monomer gas can be admitted in the apparatus by way of a gas delivery tube. An additional gas may also be introduced in the apparatus by way of a gas delivery tube. The employed gases may be discharged from within the reactor by way of a discharge tube. Powders are charged in the apparatus with a rare gas, monomer gas, or combination thereof and, optionally, additional gases may be included, the gas components being selected based upon what type of electrical power is to be treated. Powers ape supplied to the electrodes to induce atmospheric-pressure plasma reactions, thereby modifying or enhancing the characteristics of the powders.
摘要翻译： 至少在反应器装置中容纳通过用电介质覆盖金属电极而获得的接地电极和高压施加电极。 可以通过气体输送管在设备中引入稀有气体，并且可以通过气体输送管在装置中进入单体气体。 还可以通过气体输送管在装置中引入另外的气体。 所用的气体可以通过放电管从反应器内排出。 粉末在装置中以稀有气体，单体气体或其组合装入，并且可选地，可以包括另外的气体，基于要处理什么类型的电力来选择气体组分。 将猿提供给电极以诱导大气压等离子体反应，从而改变或增强粉末的特性。
-
公开(公告)号：US5185132A
公开(公告)日：1993-02-09
申请号：US623613
申请日：1990-12-07
IPC分类号： H01J37/32
CPC分类号： H01J37/32009 , H01J37/32018
摘要： This invention provides an atmospheric plasma reaction method characterized by introducing a mixed gas of rare gas and reactive gas into a reaction vessel having a dielectric-coated electrode wherein the surface of two or more electrodes located parallel therewith are provided with solid dielectrics, exciting said mixed gas with plasma at atmospheric pressure, then transporting the active species to the downstream of the plasma and treating the surface of a substrate.This invention also provides an atmospheric plasma reaction apparatus.
-
公开(公告)号：US5124173A
公开(公告)日：1992-06-23
申请号：US731314
申请日：1991-07-17
IPC分类号： H05H1/26 , B01J19/08 , B29C59/12 , B29C59/14 , C08J7/00 , D06M10/00 , D06M10/02 , D06M101/00 , D06M101/16 , D06M101/18 , D06M101/20 , D06M101/22 , D06M101/32 , D06M101/34
CPC分类号： D06M10/025 , B29C59/12 , B29C59/14 , B29C2059/145 , D06M2101/18 , D06M2101/22 , D06M2101/26 , D06M2101/32 , D06M2101/34 , D06M2200/00
摘要： According to this invention, there is provided an atmospheric pressure plasma surface treatment process comprising the steps of introducing a gas in a plasma reaction apparatus having a pair of dielectric-covered electrodes having opposing surfaces on at least one of which is provided with a solid dielectric; performing plasma excitation under atmospheric pressure; and surface treating an object placed between the opposing electrodes, wherein the gas introduced is a gaseous composition consisting essentially of argon, helium and/or ketone. This process makes it possible to quickly imparting hydrophilic nature to surfaces of an object made of a plastic to be treated. The hydrophilic nature given lasts long.
-
15.发明授权
公开(公告)号：US5275665A
公开(公告)日：1994-01-04
申请号：US774143
申请日：1991-10-15
申请人： Satiko Okazaki , Masuhiro Kogoma
发明人： Satiko Okazaki , Masuhiro Kogoma
IPC分类号： C23C16/30 , C23C16/44 , C23C16/455 , C23C16/509 , H01J37/32 , C23C16/50
CPC分类号： C23C16/4558 , C23C16/30 , C23C16/5096 , H01J37/32018
摘要： The apparatus of the present invention comprises a reaction vessel, and disposed within this vessel, a pair of opposed electrodes. The opposed electrodes comprise an upper electrode and a lower electrode which are spaced apart a suitable distance for receiving the substrate. The lower electrode has an upper surface covered with a solid dielectric. The upper electrode may have its lower surface covered with a solid dielectric, or it may be composed of a plurality of fine wires. Near the spaced apart electrodes are a plurality of gas outlets for uniformly dispersing the reaction gas between the spaced apart electrodes.The method of the present invention comprises introducing a reagent gas or a mixture of a reagent gas and a rare gas or an inert gas into the reaction vessel, exciting the gas to produce a glow discharge plasma under atmospheric pressure, and treating the surface of the substrate with the plasma.
摘要翻译： 本发明的装置包括反应容器，并设置在该容器内，一对相对的电极。 相对的电极包括上部电极和下部电极，其间隔开适当的距离以接收衬底。 下电极具有被固体电介质覆盖的上表面。 上电极可以具有被固体电介质覆盖的下表面，也可以由多根细线构成。 在间隔开的电极附近是多个气体出口，用于将反应气体均匀分散在间隔开的电极之间。 本发明的方法包括将反应气体或反应气体与稀有气体或惰性气体的混合物引入反应容器中，激发气体以在大气压下产生辉光放电等离子体，并且处理 衬底与等离子体。
-
16.发明授权Method for monitoring atmospheric pressure glow discharge plasma using current pulse-count and/or Lissajous figure 失效使用当前脉冲计数和/或李萨如图来监测大气压辉光放电等离子体的方法
公开(公告)号：US5539303A
公开(公告)日：1996-07-23
申请号：US244928
申请日：1994-09-01
申请人： Satiko Okazako , Masuhiro Kogoma
发明人： Satiko Okazako , Masuhiro Kogoma
CPC分类号： C23C16/54 , C23C16/505 , C23C16/52 , H05H1/0081
摘要： Generation and stabilization of glow plasma by discharge under atmospheric pressure are monitored by detection of the number of electric current pulses per one-half cycle of an alternating voltage applied to a discharge device. Alternately, or in addition, a Lissajous figure is generated showing a correlation between the applied alternating voltage and a current flow in the discharge device, and a discharge state is discriminated according to the Lissajous figure. Accurate, quick and simple monitoring of atmospheric pressure glow discharge plasma and the control thereof are thus made possible.
摘要翻译： PCT No.PCT / JP92 / 01606 Sec。 371日期：1994年9月1日 102（e）1994年9月1日PCT PCT 1992年12月9日PCT公布。 WO93 / 12632 PCT公开号 日期1993年6月24日通过检测施加到放电装置的交流电压的每半周期的电流脉冲数来监测在大气压下通过放电产生和稳定辉光等离子体。 或者，或另外，生成显示施加的交流电压和放电装置中的电流之间的相关性的李萨如图，并且根据李萨如图来区分放电状态。 因此，可以准确，快速和简单地监测大气压辉光放电等离子体及其控制。
-
公开(公告)号：US5413769A
公开(公告)日：1995-05-09
申请号：US853743
申请日：1992-08-04
CPC分类号： B01J19/088 , C01B13/11 , H05H1/2406 , C01B2201/22 , C01B2201/24 , C01B2201/32 , H05H2001/2418 , H05H2245/121
摘要： An activated species-generating apparatus using a gaseous phase discharge used as an ozonizer and the like is provided. Wire electrodes 21a, 21b, which are obtained by coating surfaces of electrically conductive wires with a dielectric, are entangled and the resulting crowded electrodes 20a, 20b are combined to form a three-dimensional discharge range.
摘要翻译： PCT No.PCT / JP91 / 01396 Sec。 371日期：1992年8月4日 102（e）日期1992年8月4日PCT 1991年10月14日PCT PCT。 出版物WO92 / 06917 日期为1992年4月30日。提供了使用用作臭氧发生器等的气相放电的活化物质产生装置。 通过用电介质涂覆导电线的表面而获得的线电极21a，21b被缠结，并且将所得的拥挤电极20a，20b组合以形成三维放电范围。
-
公开(公告)号：US06429400B1
公开(公告)日：2002-08-06
申请号：US09667437
申请日：2000-09-22
IPC分类号： B23K1000
CPC分类号： H01J37/32366 , H05H1/2406 , H05H2001/2443
摘要： A plasma processing apparatus for performing plasma processing of an article, comprising: a central electrode; a tubular outer electrode which is provided so as to surround the central electrode; a tubular reaction pipe which is disposed between the central electrode and the outer electrode so as to electrically insulate the central electrode and the outer electrode from each other; a gas supply device for supplying a plasma producing gas to a discharge space defined between the central electrode and the outer electrode in the reaction pipe; an AC power source for applying an AC voltage between the central electrode and the outer electrode; wherein not only the plasma producing gas is supplied to the discharge space by the gas supply device but the AC voltage is applied between the central electrode and the outer electrode by the AC power source so as to generate a glow discharge in the discharge space under atmospheric pressure such that a plasma jet is blown to the article from a blow-off outlet of the reaction pipe; and a cooling device for cooling the central electrode and the outer electrode.
摘要翻译： 一种用于执行制品的等离子体处理的等离子体处理装置，包括：中心电极; 设置成围绕中心电极的管状外电极; 管状反应管，其设置在所述中心电极和所述外部电极之间，以使所述中心电极和所述外部电极彼此电绝缘; 气体供给装置，用于将等离子体产生气体供给到在反应管中的中心电极和外部电极之间限定的放电空间; 用于在中心电极和外部电极之间施加AC电压的AC电源; 其中不仅通过气体供应装置将等离子体产生气体供应到放电空间，而且通过AC电源将AC电压施加在中心电极和外部电极之间，以便在大气中的放电空间中产生辉光放电 压力使得等离子体射流从反应管的吹出口吹送到制品; 以及用于冷却中心电极和外部电极的冷却装置。
-
公开(公告)号：US5597456A
公开(公告)日：1997-01-28
申请号：US595835
申请日：1996-02-02
申请人： Tohru Maruyama , Michio Abe , Hiroaki Nomiyama , Sachiko Okazaki , Masuhiro Kogoma , Makoto Kodama
发明人： Tohru Maruyama , Michio Abe , Hiroaki Nomiyama , Sachiko Okazaki , Masuhiro Kogoma , Makoto Kodama
CPC分类号： A61L33/0094 , B29C59/142
摘要： A plastic tube extruded from an extruder is conveyed through a plasma treatment apparatus. The plasma treatment apparatus is equipped with a tubular electrode body having a high-voltage side electrode and a grounded-side electrode disposed on a tubular insulator and a high frequency electric power source connected to the electrodes. When the plastic tube is conveyed through the electrode body with one end of the tube open to the atmosphere, a mixture of a glow discharge-stabilizing gas and a treating gas is fed into the other end of the tube and an alternating-current high-voltage is applied to generate a plasma region at a pressure near to atmospheric pressure in which the tube is treated with a glow discharge plasma. This method allows an interior and/or exterior surface of a plastic tube designed to convey a medical fluid to be continuously treated by a glow discharge plasma at atmospheric pressure to form an anti-thrombotic and blood-compatible film on the surface treated. The resulting surface-treated medical material can be produced at a comparatively low cost and maintains its original bulk material properties.
摘要翻译： 从挤出机挤出的塑料管被输送通过等离子体处理装置。 等离子体处理装置配备有管状电极体，其具有设置在管状绝缘体上的高压侧电极和接地侧电极以及与电极连接的高频电力源。 当塑料管通过电极体输送到管的一端向大气开放时，辉光放电稳定气体和处理气体的混合物被供给到管的另一端， 施加电压以在接近大气压的压力下产生等离子体区域，其中用辉光放电等离子体处理管。 该方法允许塑料管的内表面和/或外表面设计成输送在大气压下由辉光放电等离子体连续处理的医用流体，以在被处理的表面上形成抗血栓形成和血液相容性膜。 得到的经表面处理的医用材料可以以相对较低的成本制造并保持其原始的散装材料性质。
-
20.发明授权Dielectric material used for an ozone generator and a method of forming a film to the dielectric material 失效用于臭氧发生器的电介质材料以及与电介质材料形成膜的方法
公开(公告)号：US5316639A
公开(公告)日：1994-05-31
申请号：US989480
申请日：1992-12-07
CPC分类号： C01B13/11 , C23C16/345 , C23C16/402 , C01B2201/12 , C01B2201/14 , C01B2201/34
摘要： This invention concerns a SiO.sub.2, SiN.sub.x protection film formed by a CVD or PVD gas phase glowing method capable of preventing melting of the matrix ingredients at the surface of a dielectric material in electric discharge of an ozone generator and it relates to a dielectric material used for an ozone generator capable of overcoming the problems for the abrasion of electrode and dielectric material or melting of ions or molecules of during electric discharge, as well as a method of forming a protection film therefor based on the finding that an SiO.sub.2 film or SiN.sub.x film can be formed easily on a surface of a predetermined electric material or, further, on a surface of electrode by processing a specific reaction gas, for example, comprising a crude gas such as SiH.sub.4, SiCl.sub.4, N.sub.2, NH.sub.3 or TEOS or further incorporated with an inert gas or like by means of an atmospheric CVD process such as CVD or heat CVD and, in particular, on the finding that the protection film can be disposed directly to the surface of the dielectric material and the electrode in an ozone generator after the completion of assembling.
摘要翻译： 本发明涉及通过CVD或PVD气相发光法形成的SiO 2，SiN x保护膜，其能够防止在臭氧发生器的放电中电介质材料的表面处的基体成分熔化，并且涉及用于 能够克服电极和介电材料的磨损或放电期间的离子或分子熔化的问题的臭氧发生器，以及形成保护膜的方法基于SiO 2膜或SiN x膜可以 可以容易地形成在预定电材料的表面上，或者通过加工特定的反应气体，例如包含诸如SiH 4，SiCl 4，N 2，NH 3或TEOS的粗气体，或进一步与 惰性气体或类似物，通过诸如CVD或热CVD的大气CVD工艺，并且特别地，基于保护膜可以直接设置在sur 在组装完成后的臭氧发生器中的电介质材料和电极的表面。
-
-
-
-
-
-
-
-
-
搜索结果
20 条记录 (耗时 0.029 秒)