Dielectric material used for an ozone generator and a method of forming
a film to the dielectric material
    2.
    发明授权
    Dielectric material used for an ozone generator and a method of forming a film to the dielectric material 失效
    用于臭氧发生器的电介质材料以及与电介质材料形成膜的方法

    公开(公告)号:US5316639A

    公开(公告)日:1994-05-31

    申请号:US989480

    申请日:1992-12-07

    摘要: This invention concerns a SiO.sub.2, SiN.sub.x protection film formed by a CVD or PVD gas phase glowing method capable of preventing melting of the matrix ingredients at the surface of a dielectric material in electric discharge of an ozone generator and it relates to a dielectric material used for an ozone generator capable of overcoming the problems for the abrasion of electrode and dielectric material or melting of ions or molecules of during electric discharge, as well as a method of forming a protection film therefor based on the finding that an SiO.sub.2 film or SiN.sub.x film can be formed easily on a surface of a predetermined electric material or, further, on a surface of electrode by processing a specific reaction gas, for example, comprising a crude gas such as SiH.sub.4, SiCl.sub.4, N.sub.2, NH.sub.3 or TEOS or further incorporated with an inert gas or like by means of an atmospheric CVD process such as CVD or heat CVD and, in particular, on the finding that the protection film can be disposed directly to the surface of the dielectric material and the electrode in an ozone generator after the completion of assembling.

    摘要翻译: 本发明涉及通过CVD或PVD气相发光法形成的SiO 2,SiN x保护膜,其能够防止在臭氧发生器的放电中电介质材料的表面处的基体成分熔化,并且涉及用于 能够克服电极和介电材料的磨损或放电期间的离子或分子熔化的问题的臭氧发生器,以及形成保护膜的方法基于SiO 2膜或SiN x膜可以 可以容易地形成在预定电材料的表面上,或者通过加工特定的反应气体,例如包含诸如SiH 4,SiCl 4,N 2,NH 3或TEOS的粗气体,或进一步与 惰性气体或类似物,通过诸如CVD或热CVD的大气CVD工艺,并且特别地,基于保护膜可以直接设置在sur 在组装完成后的臭氧发生器中的电介质材料和电极的表面。

    Plasma processing apparatus and method
    3.
    发明授权
    Plasma processing apparatus and method 失效
    等离子体处理装置及方法

    公开(公告)号:US06429400B1

    公开(公告)日:2002-08-06

    申请号:US09667437

    申请日:2000-09-22

    IPC分类号: B23K1000

    摘要: A plasma processing apparatus for performing plasma processing of an article, comprising: a central electrode; a tubular outer electrode which is provided so as to surround the central electrode; a tubular reaction pipe which is disposed between the central electrode and the outer electrode so as to electrically insulate the central electrode and the outer electrode from each other; a gas supply device for supplying a plasma producing gas to a discharge space defined between the central electrode and the outer electrode in the reaction pipe; an AC power source for applying an AC voltage between the central electrode and the outer electrode; wherein not only the plasma producing gas is supplied to the discharge space by the gas supply device but the AC voltage is applied between the central electrode and the outer electrode by the AC power source so as to generate a glow discharge in the discharge space under atmospheric pressure such that a plasma jet is blown to the article from a blow-off outlet of the reaction pipe; and a cooling device for cooling the central electrode and the outer electrode.

    摘要翻译: 一种用于执行制品的等离子体处理的等离子体处理装置,包括:中心电极; 设置成围绕中心电极的管状外电极; 管状反应管,其设置在所述中心电极和所述外部电极之间,以使所述中心电极和所述外部电极彼此电绝缘; 气体供给装置,用于将等离子体产生气体供给到在反应管中的中心电极和外部电极之间限定的放电空间; 用于在中心电极和外部电极之间施加AC电压的AC电源; 其中不仅通过气体供应装置将等离子体产生气体供应到放电空间,而且通过AC电源将AC电压施加在中心电极和外部电极之间,以便在大气中的放电空间中产生辉光放电 压力使得等离子体射流从反应管的吹出口吹送到制品; 以及用于冷却中心电极和外部电极的冷却装置。

    Method for producing medical materials
    4.
    发明授权
    Method for producing medical materials 失效
    生产医疗材料的方法

    公开(公告)号:US5597456A

    公开(公告)日:1997-01-28

    申请号:US595835

    申请日:1996-02-02

    CPC分类号: A61L33/0094 B29C59/142

    摘要: A plastic tube extruded from an extruder is conveyed through a plasma treatment apparatus. The plasma treatment apparatus is equipped with a tubular electrode body having a high-voltage side electrode and a grounded-side electrode disposed on a tubular insulator and a high frequency electric power source connected to the electrodes. When the plastic tube is conveyed through the electrode body with one end of the tube open to the atmosphere, a mixture of a glow discharge-stabilizing gas and a treating gas is fed into the other end of the tube and an alternating-current high-voltage is applied to generate a plasma region at a pressure near to atmospheric pressure in which the tube is treated with a glow discharge plasma. This method allows an interior and/or exterior surface of a plastic tube designed to convey a medical fluid to be continuously treated by a glow discharge plasma at atmospheric pressure to form an anti-thrombotic and blood-compatible film on the surface treated. The resulting surface-treated medical material can be produced at a comparatively low cost and maintains its original bulk material properties.

    摘要翻译: 从挤出机挤出的塑料管被输送通过等离子体处理装置。 等离子体处理装置配备有管状电极体,其具有设置在管状绝缘体上的高压侧电极和接地侧电极以及与电极连接的高频电力源。 当塑料管通过电极体输送到管的一端向大气开放时,辉光放电稳定气体和处理气体的混合物被供给到管的另一端, 施加电压以在接近大气压的压力下产生等离子体区域,其中用辉光放电等离子体处理管。 该方法允许塑料管的内表面和/或外表面设计成输送在大气压下由辉光放电等离子体连续处理的医用流体,以在被处理的表面上形成抗血栓形成和血液相容性膜。 得到的经表面处理的医用材料可以以相对较低的成本制造并保持其原始的散装材料性质。

    Atmospheric pressure plasma reaction method of forming a hydrophobic film
    6.
    发明授权
    Atmospheric pressure plasma reaction method of forming a hydrophobic film 失效
    形成疏水膜的大气压等离子体反应方法

    公开(公告)号:US5733610A

    公开(公告)日:1998-03-31

    申请号:US401290

    申请日:1995-03-09

    摘要: A plasma reaction method is conducted at atmospheric pressure and is used to treat a surface of a substrate with a reactive plasma. The reaction method involves introducing a mixture of helium and a reactant (monomer) gas into a reaction vessel having upper and lower electrodes. In a preferred embodiment the upper electrode is provided with grooves for diffusing the plasma uniformly over the surface of the electrode. The helium and reactant gas mixture is excited at atmospheric pressure to produce a stable glow discharge plasma which reacts with the surface of the substrate. The preferred gas mixture has helium present at greater than 90% and uses ethylene or tetrafluoromethane as a reactant component.

    摘要翻译: 等离子体反应方法在大气压下进行,用于用反应性等离子体处理衬底的表面。 反应方法包括将氦和反应物(单体)气体的混合物引入具有上电极和下电极的反应容器中。 在优选实施例中,上电极设置有用于在电极的表面上均匀地扩散等离子体的凹槽。 氦和反应气体混合物在大气压下被激发,以产生与衬底表面反应的稳定辉光放电等离子体。 优选的气体混合物具有大于90%的氦气,并且使用乙烯或四氟甲烷作为反应物组分。

    Method for monitoring atmospheric pressure glow discharge plasma using
current pulse-count and/or Lissajous figure
    7.
    发明授权
    Method for monitoring atmospheric pressure glow discharge plasma using current pulse-count and/or Lissajous figure 失效
    使用当前脉冲计数和/或李萨如图来监测大气压辉光放电等离子体的方法

    公开(公告)号:US5539303A

    公开(公告)日:1996-07-23

    申请号:US244928

    申请日:1994-09-01

    摘要: Generation and stabilization of glow plasma by discharge under atmospheric pressure are monitored by detection of the number of electric current pulses per one-half cycle of an alternating voltage applied to a discharge device. Alternately, or in addition, a Lissajous figure is generated showing a correlation between the applied alternating voltage and a current flow in the discharge device, and a discharge state is discriminated according to the Lissajous figure. Accurate, quick and simple monitoring of atmospheric pressure glow discharge plasma and the control thereof are thus made possible.

    摘要翻译: PCT No.PCT / JP92 / 01606 Sec。 371日期:1994年9月1日 102(e)1994年9月1日PCT PCT 1992年12月9日PCT公布。 WO93 / 12632 PCT公开号 日期1993年6月24日通过检测施加到放电装置的交流电压的每半周期的电流脉冲数来监测在大气压下通过放电产生和稳定辉光等离子体。 或者,或另外,生成显示施加的交流电压和放电装置中的电流之间的相关性的李萨如图,并​​且根据李萨如图来区分放电状态。 因此,可以准确,快速和简单地监测大气压辉光放电等离子体及其控制。

    Method for utilizing a plasma reaction under an atmospheric pressure
    8.
    发明授权
    Method for utilizing a plasma reaction under an atmospheric pressure 失效
    在大气压下利用等离子体反应的方法

    公开(公告)号:US5340618A

    公开(公告)日:1994-08-23

    申请号:US916492

    申请日:1992-07-21

    摘要: A method is disclosed for the treatment of a powder by use of a plasma reactor under atmospheric pressure, comprising the steps of providing a reaction chamber having first and second electrodes covered with a dielectric, an upper gas exhaust means and a lower gas inlet means, feeding a fluidizing gas comprising a rare gas, a monomer gas or a mixture thereof through said gas inlet means into said chamber to agitate a powder to be treated in said chamber, concurrently removing said gas from said chamber through said gas exhaust means; and generating a glow plasma under atmospheric pressure in said chamber by applying a voltage to said first electrode and grounding said second electrode whereby said powder is provided with an anticorrosive surface treatment.

    摘要翻译: 公开了一种用于在大气压下使用等离子体反应器处理粉末的方法,包括以下步骤:提供具有覆盖有电介质的第一和第二电极的反应室,上部排气装置和下部气体入口装置, 将包含稀有气体,单体气体或其混合物的流化气体通过所述气体入口装置进料到所述室中,以搅拌在所述室中待处理的粉末,同时通过所述排气装置从所述室除去所述气体; 以及通过向所述第一电极施加电压并使所述第二电极接地,在大气压下产生辉光等离子体,由此所述粉末设置有防腐表面处理。

    Timber surface improving treatment process
    9.
    发明授权
    Timber surface improving treatment process 失效
    木材表面改良处理工艺

    公开(公告)号:US5143748A

    公开(公告)日:1992-09-01

    申请号:US783022

    申请日:1991-10-25

    IPC分类号: B01J19/08 B27K5/00

    摘要: A surface treatment process for improving surface properties of a timber as to wetness by exposing the timber to a plasma mixture of an inert gas and a reactive gas at a near atmospheric pressure. Prior to being exposed to the plasma mixture, the timber is treated to reduce a moisture content below a fiber saturation point of the timber so as to eliminate free moisture from the fibers of the timber which would otherwise lead to unstable plasma and therefore detract an uniform improvement over substantially the entire surface expected at the subsequent exposure to the plasma mixture. Thus, the plasma treatment can be effected in the absence of the free moisture to obtain a desired surface improvement uniformly across the surface of the timber, which gives an enhanced practicability of improving the surface properties of the timber, in addition to that the plasma mixture is generated at near the atmospheric pressures readily available without requiring substantial vacuum generating equipments.

    摘要翻译: 一种用于通过将木材暴露于接近大气压下的惰性气体和反应性气体的等离子体混合物来改善木材表面性能的表面处理方法。 在暴露于等离子体混合物之前,木材被处理以减少低于木材的纤维饱和点的水分含量,以消除木材纤维中的游离水分,否则会导致不稳定的等离子体,因此损害均匀 在随后暴露于等离子体混合物中预期的基本上整个表面的改进。 因此,等离子体处理可以在没有游离水分的情况下进行,以在木材的表面上均匀地获得期望的表面改进,这提高了改进木材表面性能的实用性,除了等离子体混合物 在大气压附近产生,而不需要大量的真空发生设备。