公开(公告)号：US20180146851A1

公开(公告)日：2018-05-31

申请号：US15881809

申请日：2018-01-29

Applicant: Cylite Pty Ltd

Inventor： Steven James Frisken ,  Grant Andrew Frisken

IPC: A61B3/10 ,  G01B9/02 ,  A61B3/107 ,  A61B3/117 ,  A61B3/14 ,  G02B27/28 ,  G02B27/10 ,  G01J9/02 ,  A61B3/00 ,  G02C7/02

CPC classification number: A61B3/1015 ,  A61B3/0025 ,  A61B3/1025 ,  A61B3/107 ,  A61B3/117 ,  A61B3/14 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02041 ,  G01B9/02044 ,  G01B9/02091 ,  G01B2290/70 ,  G01J9/02 ,  G01J2009/0219 ,  G01J2009/0238 ,  G02B27/1013 ,  G02B27/283 ,  G02C7/027 ,  G02C2202/24

Abstract: Method and systems are presented for analysing a wavefront using a spectral wavefront analyser to extract optical phase and spectral information at a two dimensional array of sampling points across the wavefront, wherein the relative phase information between the sampling points is maintained. Methods and systems are also presented for measuring an eye by reflecting a wavefront of an eye and measuring the wavefront at a plurality of angles to provide a map of the off-axis relative wavefront curvature and aberration of the eye. The phase accuracy between wavelengths and sample points over a beam aperture offered by these methods and systems have a number of ocular applications including corneal and anterior eye tomography, high resolution retinal imaging, and wavefront analysis as a function of probe beam incident angle for determining myopia progression and for designing and testing lenses for correcting myopia.

公开(公告)号：US09921111B2

公开(公告)日：2018-03-20

申请号：US15209535

申请日：2016-07-13

Applicant: RAM Photonics, LLC

Inventor： Seung-Whan Bahk

IPC: G01B9/02 ,  G01J9/02 ,  G03F7/20 ,  G01J9/00

CPC classification number: G01J9/0215 ,  G01B9/02 ,  G01J9/02 ,  G01J2009/002 ,  G03F7/706

Abstract: A method for performing optical wavefront sensing includes providing an amplitude transmission mask having a light input side, a light output side, and an optical transmission axis passing from the light input side to the light output side. The amplitude transmission mask is characterized by a checkerboard pattern having a square unit cell of size Λ. The method also includes directing an incident light field having a wavelength λ to be incident on the light input side and propagating the incident light field through the amplitude transmission mask. The method further includes producing a plurality of diffracted light fields on the light output side and detecting, at a detector disposed a distance L from the amplitude transmission mask, an interferogram associated with the plurality of diffracted light fields. The relation 0

公开(公告)号：US09719859B2

公开(公告)日：2017-08-01

申请号：US14565703

申请日：2014-12-10

Applicant: Lasertec Corporation

Inventor： Haruhiko Kusunose ,  Kiwamu Takehisa

IPC: G01B9/02 ,  G01J9/02 ,  G01N21/45 ,  G03F1/26 ,  G03F1/84

CPC classification number: G01J9/02 ,  G01B9/02041 ,  G01B9/02049 ,  G01B9/02098 ,  G01B2290/30 ,  G01J9/0215 ,  G01J2009/0219 ,  G01N21/45 ,  G03F1/26 ,  G03F1/84

Abstract: The present invention is directed to the provision of an interferometer and a phase shift amount measuring apparatus that can precisely operate in the EUV region. The interferometer according to the invention comprises an illumination source for generating an illumination beam, an illumination system for projecting the illumination beam emitted from the illumination source onto a sample, and an imaging system for directing the reflected beam by the sample onto a detector. The illumination system includes a first diffraction grating for producing a first and second diffraction beams which respectively illuminate two areas on the sample where are shifted from each other by a given distance, and the imaging system includes a second grating for diffracting the first and second diffraction beams reflected by the sample to produce a third and fourth diffraction beams which are shifted from each other by a given distance.

公开(公告)号：US09658113B2

公开(公告)日：2017-05-23

申请号：US14903607

申请日：2014-07-04

Applicant: INSTITUT NATIONAL POLYTECHNIQUE DE TOULOUSE ,  CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

Inventor： Thierry Bosch ,  Francis Bony ,  Antonio Luna Arriaga

IPC: G01B9/02 ,  G01J9/02

CPC classification number: G01J9/02 ,  G01B9/02083 ,  G01B9/02092

Abstract: An optical device (10) for determining a physical parameter includes: a laser diode (11) for emitting a beam toward a target; an element for detecting (13) an interferometric signal SM(t) which includes the information on the physical parameter to be determined, and which is generated by an interference between the emitted beam and a light beam reflected by the target; element for converting (15) the signal SM(t) obtained by the detection element (13) into a measurement of the physical parameter, the conversion element (15) including: first element (17) for suppressing a continuous component Off(t) of the interferometric signal SM(t); second element (18) for determining interferometric peaks in the interferometric signal SM(t) obtained from the signal obtained at the output of the first element (17). An associated method, particularly suitable for speckle interferometric signals is also described.

公开(公告)号：US09658112B2

公开(公告)日：2017-05-23

申请号：US14771324

申请日：2014-03-10

Applicant: SHENZHEN ORBBEC CO., LTD.

Inventor： Yuanhao Huang

IPC: G01J9/00 ,  G01J9/02

CPC classification number: G01J9/00 ,  G01J9/02

Abstract: A dynamic phase acquisition device includes a light collecting opening, a semi-reflecting and semi-transmitting mirror, a phase shifter, a polarizer, a plane reflector, a photosensing element and a phase processor. In the dynamic phase acquisition device, light passes through the light collecting opening to the semi-reflecting and semi-transmitting mirror, and then is divided into two channels. One channel of the light sequentially passes through the phase shifter, the polarizer to the photosensing element, to form a first image; the other channel of the light, after being reflected by the plane reflector, directly passes through the polarizer to the photosensing element, to form a second image. The photosensing element sends the first image and the second image to the phase processor, and the phase processor obtains phase data; and a leading or lagging phase shift range of the phase shifter is 1 degree to 20 degrees. By using the phase shifter to provide a lead or a lag of a small amount of degrees, such as from 1 to 20 degrees, or even from 5 to 10 degrees, phase data can be obtained via two-path image detection, thus eliminating the need for optical elements for at least one path detection, and thereby simplifying the structure and reducing costs.

公开(公告)号：US09612161B2

公开(公告)日：2017-04-04

申请号：US14601516

申请日：2015-01-21

Applicant: The Boeing Company

Inventor： Barbara A. Capron ,  Benjamin E. C. Koltenbah ,  Claudio G. Parazzoli

IPC: G01N21/35 ,  G01N21/64 ,  G01J9/00 ,  G01J1/04

CPC classification number: G01J9/00 ,  G01J1/0429 ,  G01J9/02 ,  G01J9/04

Abstract: The present disclosure generally relates to techniques for measuring a phase difference between a first set of photons and a second set of photons. The techniques can include directing the first set of photons to a first parametric downconverter, directing the second set of photons to a second parametric downconverter, directing photons output from an exotic photon source to the first downconverter and directing photons output from the first parametric downconverter to a first beam splitter, directing photons output from an exotic photon source to the first beam splitter, directing photons output from the second parametric downconverter to a second beam splitter, directing photons output from the first beam splitter to the second beam splitter, detecting photons output from the second beam splitter, deriving, from the detecting, a phase difference between the first set of photons and the second set of photons, and outputting the phase difference.

公开(公告)号：US20170010133A1

公开(公告)日：2017-01-12

申请号：US15116500

申请日：2014-02-28

Applicant: HALLIBURTON ENERGY SERVICES, INC.

Inventor： David A. Barfoot

IPC: G01D5/353 ,  G01J9/02 ,  E21B47/06 ,  E21B47/12 ,  E21B47/14

CPC classification number: G01D5/35306 ,  E21B47/06 ,  E21B47/065 ,  E21B47/123 ,  E21B47/14 ,  G01J9/02 ,  G01J2009/0226

Abstract: An illustrative interferometric system with high-fidelity optical phase demodulation includes a receiver having a fiberoptic coupler that produces optical interferometry signals having mutual phase separations of 120° and balanced photo-detectors that each produce an electrical difference signal based on a respective pair of said optical interferometry signals. The system further includes circuitry that converts the electrical difference signals into measurements of an interferometric phase.

Abstract translation: 具有高保真光相位解调的说明性干涉测量系统包括具有光纤耦合器的接收机，其产生具有120°的相互相位间隔的光学干涉测量信号和平衡光电检测器，每个光电检测器基于相应的一对所述光学器件产生电差信号 干涉测量信号。 该系统还包括将电差信号转换成干涉测量相位的测量的电路。

公开(公告)号：US09518869B2

公开(公告)日：2016-12-13

申请号：US14313990

申请日：2014-06-24

Applicant: UNIVERSITE DE TECHNOLOGIE DE TROYES

Inventor： Aurelien Pierre Bruyant ,  Julien Vaillant ,  Abeer Al Mohtar

IPC: G01J9/02 ,  G01B9/02 ,  G06F17/10

CPC classification number: G01J9/02 ,  G01B9/02002 ,  G01B9/02041 ,  G06F17/10

Abstract: The invention concerns an electronic method for extracting the amplitude ES and the phase φS of an electrical signal in a synchronous detector, the signal containing a modulated part Imod of the form Imod ∝ ES f(t)*cos(φS−φR(t)), where φR(t) and f(t) are two known temporal modulation functions. The method comprises the following steps: multiplying the signal by two reference signals C(t) and S(t) constructed from φR(t) and f(t); integrating the resulting signals over a time tint; determining the amplitude and phase of said signal from the quantities X and Y resulting from the previous integrations. The method is characterised in that: said electrical signal is multiplied by C(t) and S(t) that can be decomposed on the same set of frequencies as those present in Imod. The invention also concerns the application of the above method in interferometric circuits and the use and execution of the above method.

Abstract translation: 本发明涉及一种用于提取同步检测器中电信号的振幅ES和相位φS的电子方法，该信号包含形式为ImodαES f（t）* cos（φS-φR（t））的调制部分Imod， ），其中φR（t）和f（t）是两个已知的时间调制函数。 该方法包括以下步骤：将信号乘以由φR（t）和f（t）构成的两个参考信号C（t）和S（t）; 在时间色调上整合所得到的信号; 从先前积分产生的量X和Y确定所述信号的幅度和相位。 该方法的特征在于：所述电信号乘以可与在Imod中存在的频率相同的频率分解的C（t）和S（t）。 本发明还涉及上述方法在干涉电路中的应用以及上述方法的使用和执行。

公开(公告)号：US09500531B2

公开(公告)日：2016-11-22

申请号：US14224353

申请日：2014-03-25

Applicant: UNIVERSITY OF ROCHESTER

Inventor： Zhimin Shi ,  Robert W. Boyd ,  Mohammad Mirhosseini ,  Mehul Malik

IPC: G01B9/02 ,  G01J9/02 ,  G01J4/04

CPC classification number: G01J9/02 ,  G01J4/04 ,  G01J2009/0261

Abstract: A wavefront sensing technique using Polarization Rotation INTerferometry (PRINT) provides a self-referencing, high-resolution, direct measurement of the spatially dependent phase profile of a given optical beam. A self-referencing technique is used to create a reference beam in the orthogonal polarization and a polarization measurement to measure the spatial-dependent polarization parameters to directly determine the absolute phase profile of the beam under test. A high-resolution direct measurement of the spatially-resolved phase profile of one or more optical beams is realized.

Abstract translation: 使用极化旋转INTerferometry（PRINT）的波前感测技术提供给定光束的空间依赖相位曲线的自参考，高分辨率直接测量。 使用自参考技术在正交极化中产生参考光束，并使用偏振测量来测量空间相关的极化参数，以直接确定被测光束的绝对相位分布。 实现了一个或多个光束的空间分辨相位轮廓的高分辨率直接测量。

公开(公告)号：US09470883B2

公开(公告)日：2016-10-18

申请号：US14490806

申请日：2014-09-19

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Thomas Kalkbrenner ,  Ingo Kleppe ,  Helmut Lippert ,  Ralf Netz

IPC: G02B26/00 ,  G02B21/00 ,  G02B6/06 ,  G01J9/02 ,  G02B21/02 ,  G02B26/08 ,  G02B27/58

CPC classification number: G02B21/008 ,  G01J9/02 ,  G02B6/06 ,  G02B21/0032 ,  G02B21/0072 ,  G02B21/0076 ,  G02B21/0084 ,  G02B21/025 ,  G02B26/0816 ,  G02B26/0833 ,  G02B27/58

Abstract: A microscope for high resolution scanning microscopy of a sample, having:an illumination device for the purpose of illuminating the sample, an imaging device for the purpose of scanning at least one point or linear spot over the sample and of imaging the point or linear spot into a diffraction-limited, static single image below am imaging scale in a detection plane. A detector device for detecting the single image in the detection plane for various scan positions, with a spatial resolution which, taking into account the imaging scale in at least one dimension/measurement, is at least twice as high as a full width at half maximum of the diffraction-limited single image. The amplitude and/or phase of a wavefront influenced by the sample is detected with spatial resolution by means for wavefront detection, and wherein the influence of the sample on the phase is determined by means of a wavefront sensor.

Abstract translation: 用于照亮样品的照明装置，用于扫描样品上的至少一个点或线性斑点并将点或线性斑点成像成为下面的衍射限制的静态单一图像的成像装置 在检测平面。 用于检测用于各种扫描位置的检测平面中的单个图像的检测器装置，其具有考虑到至少一个维度/测量中的成像刻度的空间分辨率至少为半高的全宽度的两倍 的衍射极限单图像。 通过用于波前检测的方式通过空间分辨率来检测受样本影响的波前的幅度和/或相位，并且其中样本对相位的影响通过波前传感器确定。