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公开(公告)号：US20240093994A1
公开(公告)日：2024-03-21
申请号：US18467306
申请日：2023-09-14
发明人： Yoshiyuki MATSUURA
IPC分类号： G01C19/56 , G01P1/00 , G01P15/125 , G01P15/18
CPC分类号： G01C19/56 , G01P1/00 , G01P15/125 , G01P15/18
摘要： An inertial measurement device includes: a first case and a second case; a board that is disposed in a space formed by the first case and the second case, that includes a first surface and a second surface, and in which a first inertial sensor is disposed at the first surface; a first filling material configured to fill between the first surface of the board and the first case and between the first inertial sensor and the first case; and a second filling material configured to fill between the second surface of the board and the second case.
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公开(公告)号：US11933812B2
公开(公告)日：2024-03-19
申请号：US18046358
申请日：2022-10-13
发明人： Wonyoung Uhm , Junyong Jang , Kangsun Suh , Hanseong Jo , Young-Ho Cho , Minho Seok
IPC分类号： G01P15/18 , G01P15/08 , G01P15/09 , G01P15/097 , G01P15/125
CPC分类号： G01P15/18 , G01P15/08 , G01P15/09 , G01P15/0922 , G01P15/097 , G01P15/125
摘要： Provided is an accelerometer. The accelerometer includes a frame portion with an opening formed inside, a central portion disposed in the opening, a connecting portion disposed on an upper surface and a lower surface of the central portion and connecting the frame portion and the central portion, and a sensing portion that converts a sensed acceleration into an electrical signal, and the accelerometer senses an acceleration in a Z-axis direction penetrating an upper surface and a lower surface of the central portion, and reduces a sensing of an acceleration in an X-axis direction and a Y-axis direction crossing the Z-axis direction.
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公开(公告)号：US11913808B2
公开(公告)日：2024-02-27
申请号：US17276683
申请日：2019-09-16
发明人： Xin Zhou , Chun Zhao , Ashwin A. Seshia
IPC分类号： G01P15/097 , G01C19/56 , G01C19/5726 , G01C19/5755 , G01C25/00 , G01P15/125 , G01P21/00 , G05D19/02 , G01P15/08
CPC分类号： G01C25/005 , G01P15/097 , G01P21/00 , G01C19/56 , G01C19/5726 , G01C19/5755 , G01P2015/0814 , G01P15/125 , G05D19/02
摘要： There is provided an inertial sensor comprising a frame, a resonator assembly fixed to the frame comprising a first and second resonator coupled to one another by a mechanical coupling and a drive means coupled to the resonator assembly for driving the first and second resonators to vibrate. The resonator assembly is configured such that energy is transferred between the first and second resonators through the mechanical coupling. An amount of energy transferred through the mechanical coupling is dependent on the value of an input measurand acting on one of the first and second resonators. The inertial sensor also comprises a pumping means coupled to the resonator assembly for applying a pumping signal to the resonator assembly, the pumping means controlled by electrical circuitry, and a sensor assembly configured to detect the amplitude of oscillation of the first resonator at a first resonant frequency and the amplitude of oscillation of the second resonator at a second resonant frequency. The electrical circuitry is configured to control the pumping means to apply a pumping signal that has a frequency substantially equal to a difference between the first resonant frequency and the second resonant frequency. When the input measurand has the first value, the signal from the pumping means adjusts an amplitude ratio of the amplitudes of oscillation of the first and second resonator detected by the sensor assembly so that the amplitude ratio is within a predetermined amplitude ratio range over an expected range of input measurand values. An output of the inertial sensor is based on the amplitude ratio.
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公开(公告)号：US20240053378A1
公开(公告)日：2024-02-15
申请号：US18446537
申请日：2023-08-09
发明人： Koichiro KOMIZO
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0882
摘要： According to a physical quantity sensor, a first movable electrode group, a second movable electrode group, a third movable electrode group, and a fourth movable electrode group are arranged in this order along a first direction. In a third direction, a thickness of a second movable electrode in the second movable electrode group and a thickness of a third movable electrode in the third movable electrode group are different from a thickness of a first movable electrode in the first movable electrode group and a thickness of a fourth movable electrode in the fourth movable electrode group. When an imaginary line extending in a second direction from a center of a fixed portion is an axis of symmetry, the first movable electrode is disposed line-symmetrically with the fourth movable electrode, and the second movable electrode is disposed line-symmetrically with the third movable electrode.
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公开(公告)号：US20240053377A1
公开(公告)日：2024-02-15
申请号：US18365630
申请日：2023-08-04
申请人： ROHM CO., LTD.
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： An acceleration sensor includes a first substrate and a second substrate, wherein the first substrate includes: a first anchor region provided on a partial region of a bottom surface of a first substrate cavity; a first anchor protruding from the first anchor region toward the second substrate along a first direction; a spring extending from the first anchor in a second direction perpendicular to the first direction; and a movable electrode mechanically connected to and electrically insulated from the spring, and configured to be displaced in the first direction, and wherein the second substrate includes: a second anchor region provided on a partial region of a bottom surface of a second substrate cavity; a second anchor protruding from the second anchor region toward the first substrate along the first direction; and a fixed electrode mechanically fixed to the second anchor and facing the movable electrode.
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公开(公告)号：US20240044937A1
公开(公告)日：2024-02-08
申请号：US18488793
申请日：2023-10-17
申请人： ROHM CO., LTD.
发明人： Hiroki MIYABUCHI
IPC分类号： G01P15/18 , G01P15/125
CPC分类号： G01P15/18 , G01P15/125
摘要： An acceleration sensor includes a semiconductor substrate that has a cavity formed in an interior, a fixed structure that includes a fixed electrode supported by the semiconductor substrate in a state of floating with respect to the cavity, and a movable structure that includes a movable electrode supported by the semiconductor substrate via an elastic structure in a state of floating with respect to the cavity and displacing with respect to the fixed electrode. The elastic structure includes a first end portion supported by the semiconductor substrate, a second end portion connected to the movable structure, and an intermediate portion connecting the first end portion and the second end portion and has a rectilinearly-extending rectilinear portion at least at a portion of the intermediate portion and the rectilinear portion includes a plurality of rectilinear frames extending in parallel to each other in a direction in which the rectilinear portion extends.
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公开(公告)号：US20240027489A1
公开(公告)日：2024-01-25
申请号：US18357303
申请日：2023-07-24
发明人： Satoru TANAKA
IPC分类号： G01P15/125
CPC分类号： G01P15/125
摘要： A physical quantity sensor includes a fixed portion, a support beam, a movable body, a first fixed electrode portion, and a second fixed electrode portion. The movable body includes a first coupling portion, a first base portion, a first movable electrode portion, a second coupling portion, a second base portion, and a second movable electrode portion. The first base portion is coupled to the first coupling portion. A first movable electrode of the first movable electrode portion extends from the first base portion in a first direction, and faces a first fixed electrode of the first fixed electrode portion in a second direction. The second base portion is coupled to the second coupling portion. A second movable electrode of the second movable electrode portion extends from the second base portion in the first direction, and faces a second fixed electrode of the second fixed electrode portion in the second direction.
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公开(公告)号：US11858805B2
公开(公告)日：2024-01-02
申请号：US17447002
申请日：2021-09-07
申请人： Robert Bosch GmbH
IPC分类号： B81B3/00 , G01P15/08 , G01P15/18 , G01P15/125
CPC分类号： B81B3/0021 , G01P15/0802 , G01P15/125 , G01P15/18 , B81B2201/0235 , G01P2015/0862
摘要： A micromechanical structure, including a substrate, a seismic mass movable with respect to the substrate, and first and second detectors. A first direction and a second direction perpendicular to the first direction define a main extension plane of the substrate. The first and second detectors respectively detect a translatory deflection, and a rotatory deflection. The seismic mass is connected to the substrate via an anchoring element and four torsion spring sections. The first detector include an electrode structure, including first electrodes attached at the seismic mass and second electrodes attached at the substrate. The first and second electrodes have a two-dimensional extension in the second direction and in a third direction perpendicular to the main extension plane. The anchoring element includes first and second sections with a gap between them. A connecting element connects two first electrodes and is guided through the gap.
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公开(公告)号：US20230417794A1
公开(公告)日：2023-12-28
申请号：US18341021
申请日：2023-06-26
发明人： Shinichi MITSUNAGA
IPC分类号： G01P15/125 , G01P15/14 , G01P15/18
CPC分类号： G01P15/125 , G01P15/14 , G01P15/18
摘要： An inertial sensor module includes: a first inertial sensor; a second inertial sensor; and a processing device configured to receive a first detection signal output from the first inertial sensor and a second detection signal output from the second inertial sensor, and output measurement data based on the first detection signal and the second detection signal and based on output instruction information received from outside. The processing device is configured to output the measurement data in a format corresponding to output format selection information received from the outside.
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公开(公告)号：US11852650B2
公开(公告)日：2023-12-26
申请号：US17675501
申请日：2022-02-18
IPC分类号： G01P15/125 , B81B7/02 , G01P15/08 , G01P15/18
CPC分类号： G01P15/125 , B81B7/02 , G01P15/18 , B81B2201/0235 , G01P2015/082
摘要： The present disclosure is directed to micro-electromechanical system (MEMS) accelerometers that are configured for a user interface mode and a true wireless stereo (TWS) mode of an audio device. The accelerometers are fabricated with specific electromechanical parameters, such as mass, stiffness, active capacitance, and bonding pressure. As a result of the specific electromechanical parameters, the accelerometers have a resonance frequency, quality factor, sensitivity, and Brownian noise density that are suitable for both the user interface mode and the TWS mode.
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