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11.发明申请X-Ray System for Dental Diagnosis and Oral Cancer Therapy Based on Nano-Material and Method Thereof 有权基于纳米材料及其方法的牙科诊断和口腔癌治疗X射线系统公开(公告)号：US20090310742A1
公开(公告)日：2009-12-17
申请号：US12181791
申请日：2008-07-29
申请人： Jong Uk Kim , Hae Young Choi
发明人： Jong Uk Kim , Hae Young Choi
CPC分类号： H01J35/065 , A61B6/14 , A61B6/145 , A61N5/1014 , H01J1/3048 , H01J35/32
摘要： The present invention relates to applying an existing carbon nanotube X-ray tube for a dental X-ray imaging system that can replace a carbon nanotube electron emission source installed in a cathode portion. An X-ray tube system formed in a pen according to the present invention can be inserted in the oral cavity due to its thin thickness, thereby displaying an accurate image of an inner location of the oral cavity needing a diagnosis. For therapy of oral cancer requiring an appropriate amount of radiation therapy, since radiation can be directly irradiated to a diseased part, brachytherapy is enabled without concern of exposure dose of normal tissues. Therefore, when the system is commercialized, a great amount of distribution effect may be expected. The X-ray tube system that can be used for medical services such as a dental service includes an X-ray emission module emitting X-rays using a chipped nano-structured material, for example, carbon nanotube. The X-ray emission module is separable from a body in order to replace a cathode portion that is included in the X-ray emission module and is based on the nano-structured material.
摘要翻译： 本发明涉及应用现有的用于牙科X射线成像系统的碳纳米管X射线管，其可以替代安装在阴极部分中的碳纳米管电子发射源。 根据本发明的用笔形成的X射线管系统由于其厚度薄而能够插入口腔，从而显示需要诊断的口腔内部位置的精确图像。 对于需要适量辐射治疗的口腔癌的治疗，由于辐射可以直接照射到患病部位，所以可以进行近距离放射治疗而不考虑正常组织的暴露剂量。 因此，当系统商业化时，可以预期大量的分配效应。 可用于医疗服务如牙科服务的X射线管系统包括使用切片纳米结构材料（例如碳纳米管）发射X射线的X射线发射模块。 为了更换X射线发射模块中包含的阴极部分并且基于纳米结构材料，X射线发射模块可与主体分离。
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公开(公告)号：US07558375B2
公开(公告)日：2009-07-07
申请号：US11737947
申请日：2007-04-20
CPC分类号： H01J35/16 , H01J35/06 , H01J35/101 , H01J35/305 , H01J2235/1006 , H01J2235/1046 , H01J2235/1216
摘要： An x-ray tube includes a stationary base and a passage therein. The x-ray tube includes an anode frame having an anode positioned adjacent to a first end and having a neck at a second end, the neck extends into the passage, wherein the anode frame is configured to rotate about a longitudinal axis of the passage. A hermetic seal is positioned about the neck between the neck and the stationary base.
摘要翻译： X射线管包括固定基座和其中的通道。 X射线管包括阳极框架，阳极框架具有邻近第一端设置的阳极，并且在第二端具有颈部，颈部延伸到通道中，其中阳极框架构造成围绕通道的纵向轴线旋转。 气密密封件围绕颈部和固定基座之间的颈部定位。
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公开(公告)号：US07378673B2
公开(公告)日：2008-05-27
申请号：US11358983
申请日：2006-02-21
IPC分类号： H01J35/20
摘要： A source material dispenser for an EUV light source is disclosed that comprises a source material reservoir, e.g. tube, that has a wall and is formed with an orifice. The dispenser may comprise an electro-actuatable element, e.g. PZT material, that is spaced from the wall and operable to deform the wall and modulate a release of source material from the dispenser. A heat source heating a source material in the reservoir may be provided. Also, the dispenser may comprise an insulator reducing the flow of heat from the heat source to the electro-actuatable element. A method of dispensing a source material for an EUV light source is also described. In one method, a first signal may be provided to actuate the electro-actuatable elements to modulate a release of source material and a second signal, different from the first, may be provided to actuate the electro-actuatable elements to unclog the orifice.
摘要翻译： 公开了一种用于EUV光源的源材料分配器，其包括源材料储存器，例如， 管，其具有壁并形成有孔。 分配器可以包括电致动元件，例如 PZT材料，其与壁间隔开并且可操作以使壁变形并且调制源材料从分配器的释放。 可以提供加热储存器中的源材料的热源。 此外，分配器可以包括绝缘体，其减少从热源到可电致动元件的热流。 还描述了分配用于EUV光源的源材料的方法。 在一种方法中，可以提供第一信号来致动电致动元件以调制源材料的释放，并且可以提供与第一信号不同的第二信号以致动电致动元件以阻塞孔口。
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14.发明申请公开(公告)号：US20060171505A1
公开(公告)日：2006-08-03
申请号：US11298031
申请日：2005-12-08
IPC分类号： H01J35/20
摘要： In an expansion device for an x-ray apparatus, in particular with a rotary piston x-ray tube with a sealed coolant and/or insulation volume under a minimum pressure and pressing with this minimum pressure against an elastic pressure element, an elastic pressure element with a linear force-displacement characteristic curve (in particular in the form of a gas pressure spring with a linear elastic characteristic curve) is provided to prevent an excessive pressure load given a temperature rise.
摘要翻译： 在用于x射线设备的扩展装置中，特别是具有在最小压力下具有密封的冷却剂和/或绝缘体积的旋转活塞x射线管并且以对该弹性压力元件的最小压力进行压制，弹性压力元件 提供线性力 - 位移特性曲线（特别是具有线性弹性特性曲线的气体压力弹簧的形式），以防止给定温度升高的过大的压力负载。
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公开(公告)号：US06972421B2
公开(公告)日：2005-12-06
申请号：US10409254
申请日：2003-04-08
申请人： Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , I. Roger Oliver , Richard M. Ness , Norbert Bowering , Oleh Khodykin , Curtis L. Rettig , Gerry M. Blumenstock , Timothy S. Dyer , Rodney D. Simmons , Jerzy R. Hoffman , R. Mark Johnson
发明人： Stephan T. Melnychuk , William N. Partlo , Igor V. Fomenkov , I. Roger Oliver , Richard M. Ness , Norbert Bowering , Oleh Khodykin , Curtis L. Rettig , Gerry M. Blumenstock , Timothy S. Dyer , Rodney D. Simmons , Jerzy R. Hoffman , R. Mark Johnson
IPC分类号： G21K5/00 , G01J1/00 , G03F7/20 , G21K5/02 , H01L21/027 , H01S3/00 , H05G2/00 , H05H1/06 , H05H1/24 , H01J35/20
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70175 , G03F7/70916 , H01S3/005 , H05G2/005 , H05G2/008 , H05H1/06
摘要： The present invention provides a reliable, high-repetition rate, production line compatible high energy photon source. A very hot plasma containing an active material is produced in vacuum chamber. The active material is an atomic element having an emission line within a desired extreme ultraviolet (EUV) range. A pulse power source comprising a charging capacitor and a magnetic compression circuit comprising a pulse transformer, provides electrical pulses having sufficient energy and electrical potential sufficient to produce the EUV light at an intermediate focus at rates in excess of 5 Watts. In preferred embodiments designed by Applicants in-band, EUV light energy at the intermediate focus is 45 Watts extendable to 105.8 Watts.
摘要翻译： 本发明提供了一种可靠，高重复率的生产线兼容高能光子源。 在真空室中产生含有活性物质的非常热的等离子体。 活性物质是具有期望的极紫外（EUV）范围内的发射线的原子元素。 包括充电电容器和包括脉冲变压器的磁压缩电路的脉冲电源提供电脉冲，其具有足够的能量和电势，足以以超过5瓦的速率在中间焦点处产生EUV光。 在由申请人带内设计的优选实施例中，中间焦点处的EUV光能量可以45瓦可扩展到105.8瓦特。
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公开(公告)号：US20050199829A1
公开(公告)日：2005-09-15
申请号：US10900839
申请日：2004-07-27
申请人： William Partlo , Norbert Bowering , Alexander Ershov , Igor Fomenkov , David Myers , Ian Oliver , John Viatella , Robert Jacques
发明人： William Partlo , Norbert Bowering , Alexander Ershov , Igor Fomenkov , David Myers , Ian Oliver , John Viatella , Robert Jacques
CPC分类号： G03F7/70033 , B82Y10/00 , G03F7/70175 , G03F7/70916 , G21K1/062 , G21K2201/061 , G21K2201/065 , G21K2201/067 , H05G2/003 , H05G2/005 , H05G2/006 , H05G2/008
摘要： An apparatus and method for EUV light production is disclosed which may comprise a laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprising a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, comprising: a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, wherein the target stream track results from the imaging speed of the camera being too slow to image individual plasma formation targets forming the target stream imaged as the target stream track; a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site. At least one target crossing detector may be aimed at the target track and detecting the passage of a plasma formation target through a selected point in the target track. A drive laser triggering mechanism utilizing an output of the target crossing detector to determine the timing of a drive laser trigger in order for a drive laser output pulse to intersect the plasma initiation target at a selected plasma initiation site along the target track at generally its closest approach to the desired plasma initiation site. A plasma initiation detector may be aimed at the target track and detecting the location along the target track of a plasma initiation site for a respective target. An intermediate focus illuminator may illuminate an aperture formed at the intermediate focus to image the aperture in the at least one imaging device. The at least one imaging device may be at least two imaging devices each providing an error signal related to the separation of the target track from the vertical centerline axis of the image of the intermediate focus based upon an analysis of the image in the respective one of the at least two imaging devices. A target delivery feedback and control system may comprise a target delivery unit; a target delivery displacement control mechanism displacing the target delivery mechanism at least in an axis corresponding to a first displacement error signal derived from the analysis of the image in the first imaging device and at least in an axis corresponding to a second displacement error signal derived from the analysis of the image in the second imaging device.
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公开(公告)号：US06923625B2
公开(公告)日：2005-08-02
申请号：US10338351
申请日：2003-01-07
申请人： Douglas Ray Sparks
发明人： Douglas Ray Sparks
CPC分类号： B81C1/00285 , B32B9/00 , Y10T428/12493 , Y10T428/12806 , Y10T428/12847 , Y10T428/12889 , Y10T428/12993
摘要： A method for preventing contamination, oxidation and gas absorption of reactive materials, and articles formed thereby. The method generally entails depositing a first layer of a reactive material and a second layer of a substantially nonreactive material so that the second layer protects the first layer from a surrounding atmosphere. For example, the first and second layers may be deposited to form a film on a surface within a chamber that is desired to be maintained in a vacuum during use of the article. The second layer is sufficiently thin such that appropriately heating the first and second layers causes the reactive material of the first layer to become interdiffused with the nonreactive material of the second layer, to the extent that at least a portion of the reactive material is able to react and getter gases from the surrounding atmosphere.
摘要翻译： 一种防止反应性物质的污染，氧化和气体吸收的方法以及由此形成的制品。 该方法通常需要沉积反应性材料的第一层和基本上非反应性材料的第二层，使得第二层保护第一层免受周围环境的影响。 例如，可以将第一层和第二层沉积成在室内的表面上形成薄膜，期望在制品的使用期间保持在真空中。 第二层足够薄，使得适当加热第一层和第二层导致第一层的反应性材料与第二层的非反应性材料相互扩散，至少一部分反应性材料能够 反应和吸收来自周围大气的气体。
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公开(公告)号：US6051841A
公开(公告)日：2000-04-18
申请号：US093416
申请日：1998-06-08
申请人： William N. Partlo
发明人： William N. Partlo
CPC分类号： H05G2/003 , B82Y10/00 , G03F7/70033 , G03F7/70166 , G03F7/70916 , H05G2/005
摘要： A high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. A working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharge between the electrodes to produce very high temperature, high density plasma pinch in the working gas providing radiation at the spectral line of the active gas. An external reflection radiation collector-director collects radiation produced in the plasma pinches and directs the radiation in a desired direction. In a preferred embodiment the active gas is lithium and the buffer gas is helium and the radiation-collector is coated with the material used for the electrodes. A good choice for the material is tungsten. In a second preferred embodiment the buffer gas is argon and lithium gas is produced by vaporization of solid lithium located in a hole along the axis of the central electrode of a coaxial electrode configuration.
摘要翻译： 高能光子源。 一对等离子体夹紧电极位于真空室中。 一种工作气体，其包括贵金属缓冲气体和选择用于提供所需光谱线的活性气体。 脉冲电源提供电压足够高的电脉冲以在电极之间产生电放电，以在工作气体中产生非常高温，高密度的等离子体夹紧，从而在活性气体的谱线处提供辐射。 外部反射辐射收集器 - 导向器收集在等离子体夹中产生的辐射，并将辐射引导到期望的方向。 在一个优选的实施方案中，活性气体是锂，缓冲气体是氦气，辐射收集器涂覆有用于电极的材料。 材料的一个不错的选择是钨。 在第二优选实施例中，缓冲气体是氩气，并且通过沿着同轴电极构造的中心电极的轴的孔中的固体锂的汽化来产生锂气体。
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公开(公告)号：US6044129A
公开(公告)日：2000-03-28
申请号：US975727
申请日：1997-11-21
摘要： An x-ray tube includes an anode, a cathode, and an electrode disposed in an evacuated envelope. The electrode is positioned such that the electrode is remote from an area in immediate proximity to the envelope. An electric field defined by electrode is of sufficient strength such that arcing preferentially occurs between the electrode and the anode as opposed to occurring between the cathode and anode. The electrode is further situated such that metal sputtered from the electrode substantially falls in a define region on the anode and serves as an active getter for pumping gas from the envelope. The electrode is composed of an active metal which, upon being passively heated by the anode, also acts as a getter material to aid in pumping gas from the envelope.
摘要翻译： X射线管包括阳极，阴极和设置在抽真空的外壳中的电极。 电极被定位成使得电极远离紧邻信封的区域。 由电极限定的电场具有足够的强度，使得在电极和阳极之间优先发生电弧，而不是发生在阴极和阳极之间。 电极进一步定位成使得从电极溅射的金属基本上落在阳极上的限定区域中，并且用作用于从封套泵送气体的主动吸气剂。 电极由活性金属组成，其在被阳极被动加热时也用作吸气剂材料以有助于从封套泵送气体。
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20.发明授权Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications 失效毛细管放电极紫外灯源用于EUV微光刻等相关应用
公开(公告)号：US6031241A
公开(公告)日：2000-02-29
申请号：US1696
申请日：1997-12-31
CPC分类号： H05G2/003 , B82Y10/00 , G01J3/10 , G03F7/70016 , G03F7/70033 , G03F7/70916 , G03F7/70983 , H01J61/12 , H01J61/28 , H01J61/30 , H05G2/005
摘要： Capillary discharge extreme ultraviolet lamp sources for EUV microlithography and other applications. The invention covers operating conditions for a pulsed capillary discharge lamp for EUVL and other applications such as resist exposure tools, microscopy, interferometry, metrology, biology and pathology. Techniques and processes are described to mitigate against capillary bore erosion, pressure pulse generation, and debris formation in capillary discharge-powered lamps operating in the EUV. Additional materials are described for constructing capillary discharge devices fore EUVL and related applications. Further, lamp designs and configurations are described for lamps using gasses and metal vapors as the radiating species.
摘要翻译： 毛细管放电极紫外灯源用于EUV微光刻等应用。 本发明涵盖用于EUVL的脉冲毛细管放电灯和诸如抗蚀剂曝光工具，显微镜，干涉测量，计量学，生物学和病理学的其它应用的操作条件。 描述了技术和过程，以减轻在EUV中操作的毛细管放电动力灯中的毛细管孔侵蚀，压力脉冲产生和碎片形成。 描述了用于在EUVL和相关应用之前构建毛细管放电装置的附加材料。 此外，对于使用气体和金属蒸气作为辐射种类的灯描述了灯的设计和配置。
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