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    Exploitation of second-order effects in atomic force microscopy
    13.
    发明授权
    Exploitation of second-order effects in atomic force microscopy 有权
    在原子力显微镜中利用二阶效应

    公开(公告)号：US09541575B2

    公开(公告)日：2017-01-10

    申请号：US14554394

    申请日：2014-11-26

    申请人： Tufts University

    发明人： Maxim Dokukin ,  Igor Sokolov

    IPC分类号： G01Q30/04 ,  G01Q60/32

    CPC分类号： G01Q30/04 ,  G01Q60/28 ,  G01Q60/32

    摘要： A processing system cooperates with an atomic force microscope operating in ramp mode at a ramp frequency is configured to collect data indicative of at least one of physical and chemical properties of a sample. The system collects data indicative of probe movement at a frequency that is higher than the ramp frequency. This data comprises a second-order portion of the probe's signal. Based at least in part on the second-order portion, the processor obtains a parameter that is indicative at least one of a physical and a chemical property of a sample.

    摘要翻译： 处理系统与以斜坡频率工作在斜坡模式的原子力显微镜配合以收集指示样品的物理和化学特性中的至少一个的数据。 系统以高于斜坡频率的频率收集指示探头移动的数据。 该数据包括探头信号的二阶部分。 至少部分地基于二阶部分，处理器获得指示样品的物理和化学性质中的至少一个的参数。

    Multi-actuator design and control for a high-speed/large-range nanopositioning system
    14.
    发明授权
    Multi-actuator design and control for a high-speed/large-range nanopositioning system 有权
    用于高速/大范围纳米定位系统的多执行器设计和控制

    公开(公告)号：US09397587B2

    公开(公告)日：2016-07-19

    申请号：US14547480

    申请日：2014-11-19

    申请人： Massachusetts Institute of Technology

    发明人： Kamal Youcef-Toumi ,  Iman Soltani Bozchalooi ,  Andrew Careaga Houck

    IPC分类号： H01L39/00 ,  H02N2/06 ,  H02N2/04 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q30/04

    CPC分类号： H02N2/06 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q30/04 ,  H02N2/04

    摘要： Multi-actuator system. The system includes at least two nano positioners having different ranges and bandwidths located in cascaded serial form to contact and move an object. A control system employs data-based control design to combine the at least two nano positioners so as to apportion actuation responsibilities among the at least two nano positioners so as to compensate for their coupled dynamics while moving the object. It is preferred to provide a separate controller for controlling separately each of the at least two nano positioners. Parameters of the separate controllers may be determined by minimizing output error.

    摘要翻译： 多执行器系统 该系统包括具有不同范围和带宽的至少两个纳米定位器，其位于级联串行形式中以接触和移动物体。 控制系统采用基于数据的控制设计来组合至少两个纳米定位器，以便在至少两个纳米定位器之间分配致动责任，以便在移动物体时补偿它们的耦合动力学。 优选地提供单独的控制器，用于分别控制至少两个纳米定位器中的每一个。 可以通过最小化输出误差来确定单独控制器的参数。

    METHOD AND APPARATUS OF TUNING A SCANNING PROBE MICROSCOPE
    16.
    发明申请
    METHOD AND APPARATUS OF TUNING A SCANNING PROBE MICROSCOPE 有权
    调谐扫描探针显微镜的方法和装置

    公开(公告)号：US20150204902A1

    公开(公告)日：2015-07-23

    申请号：US14675140

    申请日：2015-03-31

    申请人： Bruker Nano, Inc.

    发明人： Chanmin Su ,  Paul Silva ,  Lin Huang ,  Bede Pittenger ,  Shuiqing Hu

    IPC分类号： G01Q30/04 ,  G01Q60/34

    CPC分类号： G01Q30/04 ,  B82Y35/00 ,  G01Q30/00 ,  G01Q40/00 ,  G01Q60/24 ,  G01Q60/34

    摘要： An apparatus and method of automatically determining an operating frequency of a scanning probe microscope such as an atomic force microscope (AFM) is shown. The operating frequency is not selected based on a peak of the amplitude response of the probe when swept over a range of frequencies; rather, the operating frequency is selected using only peak data corresponding to a TIDPS curve.

    摘要翻译： 示出了自动确定诸如原子力显微镜（AFM）的扫描探针显微镜的操作频率的装置和方法。 基于在扫描频率范围时探头的振幅响应的峰值，不选择工作频率; 而是仅使用对应于TIDPS曲线的峰值数据来选择工作频率。

    Scanning probe microscope with improved feature location capabilities
    17.
    发明授权
    Scanning probe microscope with improved feature location capabilities 有权
    具有改进的特征位置能力的扫描探针显微镜

    公开(公告)号：US09081028B2

    公开(公告)日：2015-07-14

    申请号：US14386511

    申请日：2013-03-19

    申请人： Bruker Nano, Inc.

    发明人： Charles Meyer

    IPC分类号： G01Q10/04 ,  G01Q30/04 ,  G01Q60/30 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q40/00 ,  G01Q60/38 ,  B82Y35/00

    CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q30/02 ,  G01Q40/00 ,  G01Q60/38

    摘要： An SPM assembly includes an SPM and a wide field image acquisition device that can be used to rapidly locate a region of interest and position that region within a SPM scan range of 100 microns or less. The wide field image acquisition device may include a low resolution camera having wide field of view in excess of 12 mm, and a high magnification camera having a field of view in the single mm range. Alternatively, a single camera could be used if it has sufficient zoom capability to have functionalities commensurate with both cameras. Collocation preferably is employed to coordinate translation between the low magnification and high magnification cameras (if separate cameras are used) and between the high magnification camera and the SPM.

    摘要翻译： SPM组件包括SPM和广域图像采集装置，其可用于快速定位感兴趣区域并将该区域定位在100微米或更小的SPM扫描范围内。 宽视场图像采集装置可以包括具有超过12mm的宽视场的低分辨率相机和具有单mm范围内的视野的高倍率相机。 或者，如果具有足够的变焦能力以具有与两个相机相称的功能，则可以使用单个相机。 配置优选用于协调低倍率和高倍率相机（如果使用分开的相机）之间以及高倍率相机和SPM之间的平移。

    Control system for scanning probe microscope
    19.
    发明授权
    Control system for scanning probe microscope 有权
    扫描探针显微镜控制系统

    公开(公告)号：US08296856B2

    公开(公告)日：2012-10-23

    申请号：US13147864

    申请日：2010-02-04

    申请人： Andrew Humphris ,  David Catto

    发明人： Andrew Humphris ,  David Catto

    IPC分类号： G01N13/16 ,  G01Q10/06 ,  G01Q30/04

    CPC分类号： G01Q10/065 ,  G01Q30/04

    摘要： A control system (32, 75) is for use with a scanning probe microscope of a type in which measurement data is collected at positions within a scan pattern described as a probe and sample are moved relative to each other. The control system is used in conjunction with a position detection system (34) that measures the position of at least one of the probe and sample such that their relative spatial location (x, y) is determined. Measurement data may then be correlated with empirically-determined spatial locations in constructing an image. The use of empirical location data means that image quality is not limited by the ability of a microscope scanning system to control mechanically the relative location of probe and sample.

    摘要翻译： 控制系统（32,75）用于扫描探针显微镜，其中测量数据在被描述为探针和样品相对于彼此移动的扫描图案内的位置被收集。 控制系统与位置检测系统（34）一起使用，位置检测系统（34）测量探针和样本中的至少一个的位置，使得它们的相对空间位置（x，y）被确定。 然后，测量数据可以在构建图像时与经验确定的空间位置相关联。 使用经验位置数据意味着图像质量不受显微镜扫描系统机械控制探针和样品的相对位置的能力的限制。

    Method and apparatus of automatic scanning probe imaging
    20.
    发明授权
    Method and apparatus of automatic scanning probe imaging 有权
    自动扫描探针成像的方法和装置

    公开(公告)号：US07865966B2

    公开(公告)日：2011-01-04

    申请号：US12210075

    申请日：2008-09-12

    申请人： Chanmin Su ,  Sergey Belikov

    发明人： Chanmin Su ,  Sergey Belikov

    IPC分类号： G01Q10/06 ,  G01Q30/04 ,  G01Q30/06

    CPC分类号： G01Q30/04 ,  G01Q10/06 ,  Y10S977/85

    摘要： A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.

    摘要翻译： 操作扫描探针显微镜（SPM）的方法包括扫描样品作为SPM的探针与样品相互作用，并响应于扫描步骤收集样品表面数据。 该方法从样品表面数据识别样品的特征，并基于识别步骤自动执行特征的放大扫描。 该方法用于快速识别和确认感兴趣的特征的位置，例如纳米凹凸，以便于执行特征的定向高分辨率图像。