公开(公告)号：US06476393B1

公开(公告)日：2002-11-05

申请号：US09321505

申请日：1999-05-27

Applicant: Haruo Yoshida ,  Michiaki Endo ,  Michio Niwano ,  Nobuo Miyamoto ,  Yasuhiro Maeda

Inventor： Haruo Yoshida ,  Michiaki Endo ,  Michio Niwano ,  Nobuo Miyamoto ,  Yasuhiro Maeda

IPC: G01N2100

CPC classification number: G01N21/94 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/108 ,  G01J3/45 ,  G01N21/552 ,  G01N21/9501 ,  G01N21/9503 ,  G01N21/9505 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A surface state monitoring method and apparatus for performing in-situ monitoring of surface states of semiconductor substrates. The apparatus comprises condensing means 30 for condensing infrared radiation to an outer peripheral part of the substrate-to-be-monitored; control means 80 for controlling an incident angle of the infrared radiation condensed by the condensing means 30; condensing means 40 for condensing the infrared radiation which has undergone multiple reflection in the substrate-to-be-monitored; detecting means 50 for detecting the infrared radiation condensed by the infrared radiation condensing means 40, and analyzing means 60 for analyzing the detected infrared radiation detected and measuring contaminants staying on the surfaces of the substrate-to-be-monitored.

Abstract translation: 一种表面状态监测方法和装置，用于对半导体衬底的表面状态进行原位监测。 该装置包括用于将红外辐射聚焦到待监测基板的外周部分的冷凝装置30; 控制装置80，用于控制由冷凝装置30冷凝的红外辐射的入射角; 冷凝装置40，用于冷凝在待监测的基板中经历多次反射的红外辐射; 用于检测由红外辐射聚集装置40聚集的红外辐射的检测装置50，以及用于分析检测到的检测到的红外辐射并测量留在待监测基板的表面上的污染物的分析装置60。

公开(公告)号：US20020126279A1

公开(公告)日：2002-09-12

申请号：US10007796

申请日：2001-11-09

Inventor： Helen L. Kung ,  David A.B. Miller

IPC: G01J003/18

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0256 ,  G01J3/45 ,  G01J3/453

Abstract: A transform spectrometer determines the spectrum of light based on the Talbot effect. Light to be analyzed is passed through a spatially periodic object, thereby generating a series of Talbot images. The intensities of these Talbot images at different optical distances from the spatially periodic object are then detected, and Fourier transformed to determine the spectrum of the light. Preferably, the detector comprises a spatial masking pattern such that the intensities detected are maximized at Talbot planes or at the midpoints between Talbot planes. In one embodiment, the optical distance between the spatially periodic object and the detector is changed in order to detect image intensities at different Talbot planes. In another embodiment, the detector and the spatially periodic object are positioned along a common optical axis at relative angle null such that different detector rows detect intensities at different Talbot planes. In yet another embodiment, the spatially periodic object is both a grating and a detector, and the Talbot images generated by the grating are reflected off a mirror back to the detector.

Abstract translation: 变换光谱仪基于Talbot效应确定光谱。 要分析的光通过空间周期的物体，从而产生一系列Talbot图像。 然后检测这些Talbot图像在距离空间周期物体的不同光学距离处的强度，并进行傅里叶变换以确定光谱。 优选地，检测器包括空间掩蔽图案，使得检测到的强度在Talbot平面或Talbot平面之间的中点处最大化。 在一个实施例中，改变空间周期性物体与检测器之间的光学距离，以便检测不同Talbot平面处的图像强度。 在另一个实施例中，检测器和空间周期性物体沿着公共光轴以相对角度θ定位，使得不同的检测器行检测不同Talbot平面处的强度。 在另一个实施例中，空间周期性物体既是光栅又是检测器，并且由光栅产生的Talbot图像被反射回到检测器。

公开(公告)号：US20010055118A1

公开(公告)日：2001-12-27

申请号：US09727548

申请日：2000-12-04

Inventor： Bernd Nawracala

IPC: G01B009/02

CPC classification number: G01J3/45 ,  G01J2003/2866

Abstract: A procedure is described to calibrate an optical converter (1), especially for use in the field of reflectrometric interference spectroscopy. The converter (1) has a layer/substrate system with a layer (2) and a substrate (3). A light beam (4) shines from the substrate (3) side, and parts of it are reflected (8-10) or transmitted (11) at the interfaces of air/substrate (5), substrate/layer (6) and layer/air (7). The converter (1) in particular serves to convert the light beam (4) into a modulated (especially frequency modulated or phase modulated) signal. The light (4) is varied within a wavelength or frequency range from which a corresponding modulated spectrum is determined. In particular, it is assumed that the performance quantities of especially the converter and a radiation source generating the light (4) are subject to temporal fluctuations. The calibration is carried out in particular by determining reference values of the modulated spectrum at time tnull0, successively determining values of the modulated spectrum for times t>0, and calculating temporal changes in the modulated spectrum for t>0 using in particular a linear disturbance equation based on the assumed infinitisimal changes in at least one of the performance quantitieso the interference spectroscopy measuring setup.

Abstract translation: 描述了一种校准光转换器（1）的过程，特别是用于反射测量干涉光谱领域。 转换器（1）具有具有层（2）和衬底（3）的层/衬底系统。 光束（4）从衬底（3）侧发光，并且其一部分在空气/衬底（5），衬底/层（6）和层（6）的界面处被反射（8-10）或透射（11） /空气（7）。 转换器（1）特别地用于将光束（4）转换成调制（特别是调频或相位调制）信号。 光（4）在确定对应的调制光谱的波长或频率范围内变化。 特别地，假设特别是转换器的性能量和产生光（4）的辐射源受到时间波动的影响。 特别地，通过在时间t = 0确定调制频谱的参考值来进行校准，连续地确定时间t> 0时的调制频谱的值，并且使用特别地在t> 0处计算调制频谱的时间变化 线性干扰方程式基于假设的infinitisimal变化中的至少一个性能数量的干涉光谱测量设置。

公开(公告)号：US6141094A

公开(公告)日：2000-10-31

申请号：US399930

申请日：1999-09-21

Applicant: William G. Tong

Inventor： William G. Tong

IPC: G01J3/45 ,  G01N21/74 ,  G01J3/02

CPC classification number: G01J3/45 ,  G01N21/74

Abstract: Devices and techniques for performing highly-sensitive spectroscopic measurements in a sample vapor by using a four-wave-mixing optical system and an atomizer chamber. One embodiment of a spectrometer comprises a gas-phase atomizer having an atomizer chamber operable to vaporize a sample solution to produce a sample vapor, first and second alignment templates having apertures to align a probe beam, first and second pump beams to form a four-wave mixing configuration, a laser tunable to generate a laser beam at a desired wavelength corresponding to an absorption line in the sample vapor, and a set of optical elements disposed relative to the laser and the atomizer to split the laser beam into the probe beam, the first pump beam, and the second pump beam. The probe beam, the first and second pump beams are directed to overlap with one another in the sample vapor to produce a signal beam through a four-wave mixing process.

Abstract translation: 通过使用四波混合光学系统和雾化室，在样品蒸气中进行高灵敏度的光谱测量的装置和技术。 光谱仪的一个实施例包括气相雾化器，其具有可操作以蒸发样品溶液以产生样品蒸气的雾化室，具有孔以对准探针光束的第一和第二对准模板，第一和第二泵浦光束， 波混频配置，可调谐的激光以产生与样品蒸汽中的吸收线相对应的期望波长的激光束，以及相对于激光和雾化器设置的将激光束分裂成探针光束的一组光学元件， 第一泵浦光束和第二泵浦光束。 探针光束，第一和第二泵浦光束被引导为在样品蒸汽中彼此重叠以通过四波混合过程产生信号光束。

公开(公告)号：US5933792A

公开(公告)日：1999-08-03

申请号：US624470

申请日：1996-04-03

Applicant: Hans Villemoes Andersen ,  Lisa Kjaer ,  Per Waaben Hansen ,  Carsten Ridder

Inventor： Hans Villemoes Andersen ,  Lisa Kjaer ,  Per Waaben Hansen ,  Carsten Ridder

IPC: G01J3/443 ,  G01J3/02 ,  G01J3/28 ,  G01J3/45 ,  G01N21/27

CPC classification number: G01J3/28 ,  G01J3/45 ,  G01N21/274

Abstract: A method for standardizing a spectrometer generating an optical spectrum from a sample, comprising generating at least one optical spectrum from at least one standardization sample each having a chemical composition resulting in the optical spectrum showing a characteristic pattern in a predetermined frequency range, comparing information relating to the pattern(s) to corresponding information relating to at least one reference pattern previously defined as the desired standard response from the at least one standardization sample, determining, based on the comparison, standardizing parameters describing the transition of the pattern(s) of the generated spectrum or spectra to the reference pattern(s) and storing said standardizing parameters in the spectrometer or a computer connected thereto, so that the spectrometer, when presented to an unknown sample, will, using the standardization parameters, generate an optical spectrum substantially identical to that which would be generated in a corresponding spectrometer standardized with a sample of the same chemical composition using the same previously defined reference pattern(s). The present method relates to standardization of the instrument to a well-defined state into which any number of instruments may be brought. In this state, calibrations may be transferred freely from instrument to instrument.

Abstract translation: PCT No.PCT / DK96 / 00068 Sec。 371日期：1996年4月3日 102（e）日期1996年4月3日PCT PCT 1996年2月9日PCT公布。 公开号WO96 / 24832 日期1996年8月15日一种用于标准化从样品产生光谱的光谱仪的方法，包括从至少一个标准化样品产生至少一个光谱，每个标准化样品具有导致光谱显示出预定频率的特征图案的化学组成 将与所述模式相关的信息与先前被定义为来自所述至少一个标准化样本的期望标准响应的至少一个参考模式相关的信息进行比较，基于所述比较，确定描述所述标准化过渡的参数的标准化 将所生成的光谱或光谱的图案与参考图案一起存储，并将所述标准化参数存储在光谱仪或与其连接的计算机上，使得当提供给未知样品时，光谱仪将使用标准化参数， 产生基本上与其相同的光谱 可以在使用相同的先前定义的参考图案的相同化学成分的样品标准化的相应光谱仪中产生。 本方法涉及将仪器标准化到可以带有任何数量的仪器的明确定义的状态。 在这种状态下，校准可以从仪器自由传递给仪器。

公开(公告)号：US5923422A

公开(公告)日：1999-07-13

申请号：US17172

申请日：1998-02-02

Applicant: Axel Keens ,  Norbert Rapp

Inventor： Axel Keens ,  Norbert Rapp

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/453

CPC classification number: G01J3/45 ,  G01B9/02071 ,  G01B9/02084 ,  G01B9/0209 ,  G01J3/4535 ,  G01N2021/3595

Abstract: A method of obtaining an FT spectrum according to Brault is improved in that the compensation filter is determined by recording a broad-band effective interferogram, carrying out complex Fourier transformation, forming a mean value of the phase spectra, converting the abscissa values into electrical frequencies, and establishing the transfer function of the detector and of the further signal processing elements, wherein the free parameters of the transfer function are chosen such that the phase response of the transfer function deviates as little as possible from the mean value of the phase spectrum of the effective recorded interferogram. If necessary, the determined transfer function is then digitized. The compensation filter is then determined as the inverse of the discrete transfer function. In this way, deconvolution of the signal processing elements transfer function from the spectra is facilitated in a particularly simple and effective manner.

Abstract translation: 改进了根据Brault获得FT光谱的方法，其中通过记录宽带有效干涉图来确定补偿滤波器，进行复数傅里叶变换，形成相位谱的平均值，将横坐标值转换成电频率 并且建立检测器和另外的信号处理元件的传递函数，其中选择传递函数的自由参数，使得传递函数的相位响应尽可能地从相位谱的平均值偏离 有效记录干涉图。 如果需要，则确定的传递函数被数字化。 然后将补偿滤波器确定为离散传递函数的倒数。 以这种方式，以特别简单和有效的方式促进信号处理元件从光谱传递函数的去卷积。

公开(公告)号：US5898495A

公开(公告)日：1999-04-27

申请号：US959030

申请日：1997-10-28

Applicant: Christopher J. Manning

Inventor： Christopher J. Manning

IPC: G01B9/02 ,  G01J3/02 ,  G01J3/06 ,  G01J3/28 ,  G01J3/45 ,  G01J3/453 ,  G01J9/02

CPC classification number: G01J3/2889 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/06 ,  G01J3/45 ,  G01J3/453 ,  G01J9/0215

Abstract: A novel variation of Michelson's interferometer uses tilt- and shear-compensation optics to allow various mirror motions to produce variation of path difference. The tilt-compensation mechanism consists of two complementary reflections from a single plane mirror to produce a beam having a constant angle of propagation, typically the same as the input beam. Using a retroreflector to invert the image of the single plane mirror before the second reflection produces the complementary reflections. A particularly efficient embodiment of the present invention uses a balanced disk-shaped mirror to effect very rapid variation of path difference by nutation or precession. Other advantages of tilt-compensation include photometric stability. This interferometer has applications in spectrometry, spectral imaging and metrology.

Abstract translation: 迈克尔逊干涉仪的一个新颖变化使用倾斜和剪切补偿光学元件，以允许各种镜像运动产生路径差异的变化。 倾斜补偿机构由来自单个平面镜的两个互补反射组成，以产生具有恒定传播角的光束，通常与输入光束相同。 在第二次反射之前使用回射器反转单个平面镜的图像产生补偿反射。 本发明的特别有效的实施例使用平衡的盘形镜来通过章动或进动来实现路径差异的非常快速的变化。 倾斜补偿的其他优点包括光度稳定性。 该干涉仪具有光谱，光谱成像和计量学应用。

公开(公告)号：US5771095A

公开(公告)日：1998-06-23

申请号：US710617

申请日：1996-09-20

Applicant: Ivan Prikryl ,  Hollis O'Neal Hall

Inventor： Ivan Prikryl ,  Hollis O'Neal Hall

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/453 ,  G01J9/02

CPC classification number: G01J3/45 ,  G01J3/4535 ,  G01J9/02

Abstract: An optical system for determining aberration in a source beam by comparison of a test beam with a reference beam. The optical system includes a test source for producing a source beam having a spacial intensity distribution including an aberration component, a wavefront analyzer for processing a fringe signal associated with the aberration component, and an interferometer. The interferometer is provided with a beamsplitter for splitting the source beam into a test beam and a reference beam, an imaging device for detecting the test beam and the reference beam, and a mirror disposed in a test beam path for reflecting the test beam toward the imaging device. The interferometer also includes a micromirror disposed in a reference beam path for reflecting a portion of the reference beam toward the imaging device and a piezoelectric translator operatively linked to the mirror and controlled by the wave front analyzer. The mirror is capable of moving relative to the path of the test beam. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam as focused thereon by focusing means so that when the test beam is reflected by the mirror and the portion of the reference beam is reflected by the micromirror, the reflected test beam and the reflected portion of the reference beam are both incident upon the imaging device forming an interference pattern including fringes which are converted into the fringe signal.

Abstract translation: 一种用于通过将测试光束与参考光束进行比较来确定光源光束中的像差的光学系统。 光学系统包括用于产生具有包括像差分量的空间强度分布的源光束的测试源，用于处理与像差分量相关联的条纹信号的波前分析器和干涉仪。 该干涉仪设有分束器，用于将源光束分为测试光束和参考光束，用于检测测试光束和参考光束的成像装置，以及设置在测试光束路径中的反射测试光束朝向 成像装置。 干涉仪还包括设置在参考光束路径中的微镜，用于将参考光束的一部分反射到成像装置，以及可操作地连接到反射镜并由波前分析器控制的压电转换器。 镜子能够相对于测试光束的路径移动。 微镜的横向尺寸不超过聚焦装置聚焦在其上的参考光束的中心波瓣的大致横向尺寸，使得当测试光束被反射镜反射并且参考光束的部分被微反射镜反射时， 反射的测试光束和参考光束的反射部分都入射到成像装置上，形成包含被转换成条纹信号的条纹的干涉图案。

公开(公告)号：US5734471A

公开(公告)日：1998-03-31

申请号：US759215

申请日：1996-12-05

Applicant: Masayuki Nakata

Inventor： Masayuki Nakata

IPC: G01B9/02 ,  G01B11/24 ,  G01J3/45

CPC classification number: G01B9/02064 ,  G01B9/02068 ,  G01B9/0209 ,  G01J3/45

Abstract: When positioning a sample, a sample position adjusting light source section with a long coherence length is inserted into an optical system, and the sample position is adjusted such that the interference fringe pattern observed becomes a predetermined pattern, whereby the position of a surface to be inspected can be easily set within a coherence range in a simple configuration in a light wave interference apparatus using light with a short coherence length. When a sample position adjusting light source section (31) is inserted into the optical system, a light beam with a long coherence length, which has been turned into divergent light, is irradiated on each of a reference surface (4a) and a surface to be inspected (5a), whereby spherical waves reach these two surfaces (4a, 5a). These two divergent light beams are respectively reflected by the reference surface (4a) and the surface to be inspected (5a) so as to become a reference light component and an inspection light component, which are then recombined together by a light-splitting surface (3a) of a beam splitter (3) while interfering with each other, thereby forming an interference fringe on a CCD (8). This interference fringe comprises a pattern of concentric circles. The sample (5) is moved by a minute distance in the optical-axis direction (B) so as to reduce the number of fringes, and then is stopped at the time when the circular interference fringe pattern disappears.

Abstract translation: 当定位样品时，将具有长相干长度的样品位置调节光源部分插入到光学系统中，并且调整样品位置使得观察到的干涉条纹图案变为预定图案，由此表面的位置 在使用具有短相干长度的光的光波干涉装置中，可以以简单的结构容易地将被检查设定在相干范围内。 当将样本位置调整光源部分（31）插入到光学系统中时，已经变成发散光的长相干长度的光束被照射在参考表面（4a）和表面 被检查（5a），由此球面波到达这两个表面（4a，5a）。 这两个发散光束分别被参考表面（4a）和待检测的表面（5a）反射，以便成为参考光分量和检查光分量，然后通过光分离表面（ 在分束器3的相互干涉的同时，在CCD（8）上形成干涉条纹。 该干涉条纹包括同心圆的图案。 样品（5）沿光轴方向（B）移动微小距离，以减少条纹数，然后在圆形干涉条纹图案消失时停止。

公开(公告)号：US5686988A

公开(公告)日：1997-11-11

申请号：US668509

申请日：1996-07-02

Applicant: W. Ray Garrett

Inventor： W. Ray Garrett

IPC: G01J3/443 ,  G01J3/45 ,  G01J3/30 ,  G01J1/58 ,  G01J3/42

CPC classification number: G01J3/443 ,  G01J3/45

Abstract: A method and apparatus for measuring partial pressures of gaseous components within a mixture. The apparatus comprises generally at least one tunable laser source, a beam splitter, mirrors, optical filter, an optical spectrometer, and a data recorder. Measured in the forward direction along the path of the laser, the intensity of the emission spectra of the gaseous component, at wavelengths characteristic of the gas component being measured, are suppressed. Measured in the backward direction, the peak intensities characteristic of a given gaseous component will be wavelength shifted. These effects on peak intensity wavelengths are linearly dependent on the partial pressure of the compound being measured, but independent of the partial pressures of other gases which are present within the sample. The method and apparatus allow for efficient measurement of gaseous components.

Abstract translation: 用于测量混合物中气态组分的分压的方法和装置。 该装置通常包括至少一个可调激光源，分束器，反射镜，滤光器，光谱仪和数据记录器。 沿着激光的路径沿正向测量，被测量的气体成分的波长特性的气体成分的发射光谱的强度被抑制。 在向后的方向上测量，给定气体成分的峰值强度特性将波长偏移。 这些对峰强度波长的影响线性地取决于待测化合物的分压，而与样品中存在的其它气体的分压无关。 该方法和装置允许有效测量气体组分。