Silicon-oxide-nitride-oxide-silicon (SONOS) memory cell and forming method thereof

    公开(公告)号:US11621271B2

    公开(公告)日:2023-04-04

    申请号:US17177164

    申请日:2021-02-16

    Inventor: Chia-Ching Hsu

    Abstract: A silicon-oxide-nitride-oxide-silicon (SONOS) memory cell includes a memory gate, a dielectric layer, two charge trapping layers and two selective gates. The memory gate is disposed on a substrate. The two charge trapping layers are at two ends of the dielectric layer, and the charge trapping layers and the dielectric layer are sandwiched by the substrate and the memory gate. The two selective gates are disposed at two opposite sides of the memory gate, thereby constituting a two bit memory cell. The present invention also provides a method of forming said silicon-oxide-nitride-oxide-silicon (SONOS) memory cell.

    MAGNETIC TUNNEL JUNCTION (MTJ) DEVICE AND FORMING METHOD THEREOF

    公开(公告)号:US20230091364A1

    公开(公告)日:2023-03-23

    申请号:US18073574

    申请日:2022-12-02

    Abstract: A magnetic tunnel junction (MTJ) device includes two magnetic tunnel junction elements and a magnetic shielding layer. The two magnetic tunnel junction elements are arranged side by side. The magnetic shielding layer is disposed between the magnetic tunnel junction elements. A method of forming said magnetic tunnel junction (MTJ) device includes the following steps. An interlayer including a magnetic shielding layer is formed. The interlayer is etched to form recesses in the interlayer. The magnetic tunnel junction elements fill in the recesses. Or, a method of forming said magnetic tunnel junction (MTJ) device includes the following steps. A magnetic tunnel junction layer is formed. The magnetic tunnel junction layer is patterned to form magnetic tunnel junction elements. An interlayer including a magnetic shielding layer is formed between the magnetic tunnel junction elements.

    MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

    公开(公告)号:US20230079155A1

    公开(公告)日:2023-03-16

    申请号:US17990749

    申请日:2022-11-21

    Inventor: Po-Yu Yang

    Abstract: A manufacturing method of a semiconductor device includes the following steps. A first transistor is formed on a substrate. The first transistor includes a first semiconductor channel structure and two first source/drain structures. The first semiconductor channel structure includes first horizontal portions and a first vertical portion. The first horizontal portions are stacked in a vertical direction and separated from one another. Each of the first horizontal portions is elongated in a horizontal direction. The first vertical portion is elongated in the vertical direction and connected with the first horizontal portions. The two first source/drain structures are disposed at two opposite sides of each of the first horizontal portions in the horizontal direction respectively. The two first source/drain structures are connected with the first horizontal portions.

    SEMICONDUCTOR DEVICE
    290.
    发明申请

    公开(公告)号:US20230073022A1

    公开(公告)日:2023-03-09

    申请号:US17987867

    申请日:2022-11-16

    Abstract: Provided is a semiconductor device includes a substrate, an isolation structure, an alignment mark, and a dielectric layer. The substrate includes a first region and a second region. The isolation structure is disposed in the substrate in the first region, wherein the isolation structure extends from a first surface of the substrate toward a second surface of the substrate.
    The alignment mark is disposed in the substrate in the second region. The alignment mark extends from the first surface of the substrate toward the second surface of the substrate and at the same level as the isolation structure. The dielectric layer is buried in the substrate in the second region and overlapping the alignment mark.

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