RESIST COMPOSITION AND PATTERN FORMING PROCESS

    公开(公告)号:US20240310725A1

    公开(公告)日:2024-09-19

    申请号:US18590834

    申请日:2024-02-28

    发明人: Jun Hatakeyama

    IPC分类号: G03F7/004 G03F7/038 G03F7/039

    摘要: The present invention relates to a resist composition and a pattern forming process. The quencher is capable of improving the LWR of line patterns or the dimensional uniformity (CDU) of hole patterns and enhancing sensitivity. The resist composition exhibits higher sensitivity and improved LWR and CDU regardless of whether it is of positive or negative tone, and a pattern forming process using the resist composition. The resist composition comprises a quencher containing a disulfonium salt having formula (1).

    ORGANOALKOXYSILANE-CONTAINING COMPOSITION AND METHOD FOR MANUFACTURING THE SAME, AND WATER-ABSORPTION INHIBITOR

    公开(公告)号:US20240301206A1

    公开(公告)日:2024-09-12

    申请号:US18698857

    申请日:2022-09-20

    发明人: Takumi FUKAMACHI

    摘要: An organoalkoxysilane-containing composition including: (A) an organohydrogenpolysiloxane having a structural unit selected from the group consisting of SiO2, HSiO1.5, R1SiO1.5, R1HSiO, R12SiO, R12HSiO0.5, and R13SiO0.5; (B) an organopolysiloxane having a structural unit selected from the group consisting of SiO2, R2SiO1.5, R1SiO1.5, R1R2SiO, R12SiO, R13SiO0.5, and R12R2SiO0.5, wherein R1 represents a monovalent hydrocarbon group except for an aliphatic unsaturated group, and R2 represents an alkenyl group; and (C) an organoalkoxysilane represented by R3aSi(OR4)4-a and/or a partial hydrolytic condensate thereof, wherein an amount of (C) is 100 to 10,000 parts by mass relative to 100 parts by mass of a total amount of (A) and (B). This provides a composition that can be a water-absorption inhibitor that can impart an excellent water-absorption inhibiting property to a surface of a structural material.

    Pellicle
    26.
    发明授权
    Pellicle 有权

    公开(公告)号:US12085847B2

    公开(公告)日:2024-09-10

    申请号:US18241442

    申请日:2023-09-01

    发明人: Yu Yanase

    IPC分类号: G03F1/64 G03F1/62

    CPC分类号: G03F1/64 G03F1/62

    摘要: A pellicle characterized by having an amount of released aqueous gas of 1×10−3 Pa·L/s or less per pellicle, an amount of released hydrocarbon-based gas of 1×10−5 Pa·L/s or less per pellicle in a range of measured mass number of 45 to 100 amu, and an amount of released hydrocarbon-based gas of 4×10−7 Pa·L/s or less per pellicle in a range of measured mass number of 101 to 200 amu, under vacuum after the pellicle has been left to stand for 10 minutes in an atmosphere of 23° C. and 1×10−3 Pa or less.

    Bio-Electrode And Method For Manufacturing Bio-Electrode

    公开(公告)号:US20240285211A1

    公开(公告)日:2024-08-29

    申请号:US18427617

    申请日:2024-01-30

    发明人: Jun HATAKEYAMA

    摘要: The present invention is a bio-electrode includes an electro-conductive polymer composite layer, an electro-conductive layer (C), and a substrate (D). The electro-conductive polymer composite layer consists of an electro-conductive polymer composite which includes (A) a π-conjugated polymer and (B) a dopant polymer. The substrate (D) has a transmittance of 20% or more at a wavelength of 600 nm and is yellow-red (YR) with a value in the range of 1 to 9 and a chroma in the range of 1 to 12 in the Munsell color system. This provides: a bioelectrode which is thin film, highly transparent, slightly different from the skin in color, highly sensitive to biological signals, excellent in biocompatibility, light-weight, manufacturable at low cost, capable of preventing significant reduction in the sensitivity to biological signals when wetted with water or dried and when attached on the skin for a long time; and a method for manufacturing the bio-electrode.