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公开(公告)号：US06657708B1
公开(公告)日：2003-12-02
申请号：US09807581
申请日：2001-09-25
IPC分类号： G01N2100
CPC分类号： G01N21/65 , G01N21/211 , G01N2021/656
摘要： The invention concerns an apparatus for optically characterising a thin-layer material by backscattering Raman spectometry comprising a frame, a monochromatic excitation laser source (21), optical means (23, 24) directing a light flux emitted by the source towards the material to be characterised, provided with means (22) homogenising the distribution of energy per surface unit, over a minimum surface of some tens of square micrometers, and means for collecting (24) and selecting (27, 28) the light diffused by Raman effect. The apparatus further comprises reflectometric measuring means (3-14) integral with the Raman measuring means, including reflectometric excitation means (3-9) directed on the same sample zone as the Raman excitation means.
摘要翻译： 本发明涉及一种用于通过后向散射拉曼光谱来光学表征薄层材料的装置，该装置包括框架，单色激发激光源（21），光源装置（23,24），其将由光源发射的光通量引向材料 其特征在于，具有在几十平方微米的最小表面上均匀化每表面单元的能量分布的装置（22），以及用于收集（24）并选择（27,28）由拉曼效应扩散的光的装置。 该装置还包括与拉曼测量装置成一体的反射测量装置（3-14），包括与拉曼激发装置相对的样品区域的反射激励装置（3-9）。
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22.发明授权Optical component for polarization modulation, a mueller polarimeter and ellipsometer containing such an optical component, a process for the calibration of this ellipsometer, and an ellipsometric measurement process 失效用于偏振调制的光学部件，包含这种光学部件的微调偏振计和椭偏仪，用于校准该椭偏仪的方法以及椭圆测量过程公开(公告)号：US06175412B1
公开(公告)日：2001-01-16
申请号：US09091400
申请日：1998-10-06
申请人： Bernard Drevillon , Eric Compain
发明人： Bernard Drevillon , Eric Compain
IPC分类号： G01J400
CPC分类号： G01N21/211 , G01J4/00 , G02F1/0327
摘要： An optical component for modulation of polarization, a Mueller polarimeter and ellipsometer containing such an optical component. The optical component modulates a linearly polarized incident beam and returns a modulated beam. It includes a coupled phase modulator which modulates the incident beam twice in succession, the two modulations having the same frequency of &ohgr;/2&pgr;, and a coupling system modifying the polarization state of the light between the two modulations. The ellipsometer includes the means for detection of a measurement beam returned by a sample, which receives the modulated beam, in addition to a processing unit. The means of detection include a polarimeter producing n measured quantities representing the polarization states of the beam, and the processing unit produces m values for each of these quantities by Fourier transform, with n×m≧16 and m≧4, providing simultaneous access to the sixteen components of the Mueller matrix of the sample.
摘要翻译： 用于调制偏振的光学部件，包含这种光学部件的Mueller偏振计和椭偏仪。 光学部件调制线性偏振的入射光束并返回调制光束。 它包括耦合相位调制器，其连续两次调制入射光束，两个调制具有相同的ω/ 2pi频率，以及修改两个调制之间的光的偏振状态的耦合系统。 该椭偏仪包括除了处理单元之外还用于检测由样品返回的测量光束的装置，其接收调制光束。 检测装置包括产生表示光束偏振态的n个测量量的偏振计，并且处理单元通过傅里叶变换产生每个这些量的m个值，其中nxm> = 16且m≥4，提供同时访问 样品的Mueller矩阵的十六个成分。
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23.发明授权
公开(公告)号：US5666200A
公开(公告)日：1997-09-09
申请号：US607810
申请日：1996-02-27
CPC分类号： G01N21/211 , H01L22/12
摘要： This invention relates to a method and a device for the ellipsometric measurement of physical parameters representative of a sample.The measured values I.sub.om, I.sub.sm and I.sub.cm are calculated (51, 52) from the signal (50) which represents the measured intensity I(t).In a first step (55, 57), initial theoretical values I.sub.st /I.sub.ot and I.sub.ct /I.sub.ot are produced from initial estimations (56) of the physical parameters. In a second step (58, 59) subsequent estimations (59) of physical parameters are determined from which subsequent theoretical values I.sub.st /I.sub.ot and I.sub.ct /I.sub.ot are deduced (55, 57). The second step is reiterated to an Nth estimation (59) of the physical parameters, so as to minimise the difference between the theoretical values and those measured.The physical parameters are evaluated (54) in the course of the Nth estimation.
摘要翻译： 本发明涉及用于代表样品的物理参数的椭偏测量的方法和装置。 从表示测量强度I（t）的信号（50）计算测量值Iom，Ism和Icm（51,52）。 在第一步（55,57）中，从物理参数的初始估计（56）产生初始理论值Ist / Iot和Ict / Iot。 在第二步骤（58,59）中，确定随后的理论值Ist / Iot和Ict / Iot的理论值的估计（59）（55,57）。 第二步重复到物理参数的第N次估计（59），以便最小化理论值与测量值之间的差异。 在第N次估计过程中对物理参数进行评估（54）。
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公开(公告)号：US5485271A
公开(公告)日：1996-01-16
申请号：US418162
申请日：1995-04-06
CPC分类号： G01N21/211
摘要： The invention relates to an infrared ellipsometer intended to take measurements of a sample (1). An exciter group (3) of the ellipsometer includes a source (101), a Michelson interferometer (103), a polarizer (105), and an optical device (107) to align the source (101) and the sample (1). An analysis group (7) has a polarizer-analyzer (701), a detector (703), and an optical device (705) for aligning the sample (1) and the detector (703). This infrared ellipsometer also incorporates a phase modulator (8). An electronic devices (9) controls the modulator (8) and the Michelson interferometer (103), and receives the signal produced by the detector (703).
摘要翻译： 本发明涉及一种用于对样品（1）进行测量的红外椭偏仪。 椭圆计的激励器组（3）包括源（101），迈克尔逊干涉仪（103），偏振器（105）和对准源（101）和样品（1）的光学装置（107）。 分析组（7）具有偏振器分析器（701），检测器（703）和用于对准样品（1）和检测器（703）的光学装置（705）。 该红外椭偏仪还包括相位调制器（8）。 电子设备（9）控制调制器（8）和迈克尔逊干涉仪（103），并接收由检测器（703）产生的信号。
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公开(公告)号：US07777880B2
公开(公告)日：2010-08-17
申请号：US11793674
申请日：2005-12-22
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01B11/0641 , G01N2021/213
摘要： Method and a polarimetric measurement device of a planar object carrying patterns repeated regularly and forming the lines of a grid. A first measurement is carried out at zero order, under an angle of incidence θ1 and for a first azimuthal angle φ1, a second measurement at least is carried out at zero order, under an angle of incidence θ2 and for a second azimuthal angle φ2, the polarization of the incident beam is modulated and the polarization of the reflected beam is analyzed for each measurement, theoretical polarimetric data is calculated for a model object of the real object, the model object including parameters adjustable using a formalism of electromagnetism. An iterative comparison of the measurements is conducted with the theoretical polarimetric data for different values of the adjustable parameters.
摘要翻译： 方法和平面物体的极化测量装置，其承载有规律地重复形成网格线的图案。 第一次测量是在零入射角度下进行的; 1，对于第一个方位角θ，第二次测量至少在入射角和角度下以零级进行; 2和 第二方位角＆phgr; 2，调制入射光束的偏振，并对每个测量分析反射光束的极化，为实物的模型对象计算理论极化数据，模型对象包括可调参数 电磁形式主义。 使用理论极化数据对可调参数的不同值进行测量的迭代比较。
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公开(公告)号：US20080304061A1
公开(公告)日：2008-12-11
申请号：US12158323
申请日：2007-01-19
CPC分类号： G01J3/44 , G01J3/02 , G01J3/0224 , G01N21/21 , G01N21/65 , G01N21/658 , G01N2021/4792
摘要： A Raman method and system for analysing a sample including an excitation source emitting an incident light beam, a sample holder for mounting the sample, elements for focusing the incident light beam onto the sample surface to generate a Raman scattered light having an intensity, elements for collecting the Raman scattered light to form a Raman scattered light beam, a detection system measuring intensity of the Raman scattered light beam as a function of time. The system includes at least a polarization state generator able to generate four independent polarization states or a polarization state analyzer able to analyze four independent polarization states to detect the intensity of the Raman scattered light beam and calculate a partial or complete Mueller-Stokes matrix of the sample.
摘要翻译： 一种用于分析包括发射入射光束的激发源的样本的拉曼方法和系统，用于安装样本的样本保持器，用于将入射光束聚焦到样本表面上的元件，以产生具有强度的拉曼散射光， 收集拉曼散射光以形成拉曼散射光束，测量拉曼散射光束的强度作为时间的函数的检测系统。 该系统至少包括能够产生四个独立极化状态的偏振状态发生器或能够分析四个独立极化状态以检测拉曼散射光束的强度的偏振状态分析器，并且计算部分或完整的米勒 - 斯托克斯矩阵 样品。
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27.发明申请Electronic Polarimetric Imaging System for a Colposcopy Device and an Adapter Housing 有权用于阴道镜装置和适配器壳体的电子偏光成像系统公开(公告)号：US20080200817A1
公开(公告)日：2008-08-21
申请号：US11994177
申请日：2006-06-27
CPC分类号： A61B1/303 , A61B1/042 , A61B1/0669 , A61B5/0084 , G01J4/04 , G01N21/21 , G01N21/211
摘要： The invention relates to an electronic polarimetric imaging system use in a colposcopy device for in vivo monitoring a cervix, which is provided with a light source for illuminating the observable cervix and at least visual means for monitoring said cervix, wherein the illumination optical path directed to the cervix and the image optical path coming back from the cervix are separated from each other on at least a portion of the paths thereof. The inventive system comprises a polarimetric adapter housing which is removable in the separated portion of the illumination and image optical paths and comprises a polarization state generator (PSG) positioned on the illumination optical path and a polarization analyser (PSA) positioned on the image optical path, wherein said polarization state generator (PSG) and polarization analyser (PSA) are designed in such a way that they are controllable. Said invention makes it possible to obtain several polarimetric characterisation levels. The adapter housing is also disclosed.
摘要翻译： 本发明涉及一种用于体内监测子宫颈的阴道镜装置中的电子偏振成像系统，该子宫颈设置有用于照射可观察到的子宫颈的光源和至少用于监测所述子宫颈的视觉装置，其中照明光路指向 子宫颈和从宫颈回来的图像光路在其至少一部分路径上彼此分离。 本发明的系统包括偏振适配器外壳，其可在照明和图像光路的分离部分中移除，并且包括位于照明光路上的偏振态发生器（PSG）和位于图像光路上的偏振分析器（PSA） ，其中所述偏振状态发生器（PSG）和偏振分析器（PSA）被设计成使得它们是可控的。 所述发明使得可以获得几种极化表征水平。 还公开了适配器壳体。
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公开(公告)号：US07298480B2
公开(公告)日：2007-11-20
申请号：US11315334
申请日：2005-12-23
IPC分类号： G01J4/00
CPC分类号： G01J4/04 , G01N21/211
摘要： A broadband ellipsometer/polarimeter system for analyzing a sample includes an illumination source emitting a polychromatic light beam, a polarization state generator (PSG) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a sample holder, a polarization state analyser (PSA) including a fixed linear polarizer and a substantially achromatic retarder mounted on a rotating holder, a primary detection system measuring the intensities at each wavelength of the light beam transmitted through the PSA, optics to collimate the beam into the PSG and into the PSA and to focus the beam into the sample surface and the detector. The linear polarizer and achromatic retarder in the PSA are identical to those of the PSG but mounted in a reverse order.
摘要翻译： 用于分析样本的宽带椭偏仪/偏振计系统包括发射多色光束的照明源，包括固定线性偏振器的偏振状态发生器（PSG）和安装在旋转保持器上的基本上消色差延迟器，样本保持器，偏振状态 分析器（PSA），其包括固定的线性偏振器和安装在旋转保持器上的基本上消色差的延迟器，初级检测系统测量透射穿过PSA的光束的每个波长处的强度，将光束准直到PSG中并进入 PSA并将光束聚焦到样品表面和检测器中。 PSA中的线性偏振器和消色差延迟器与PSG的线性偏振器和消色差延迟器相同，但是以相反的顺序安装。
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公开(公告)号：US06613434B1
公开(公告)日：2003-09-02
申请号：US09936223
申请日：2002-01-31
IPC分类号： B32B2736
CPC分类号： C23C16/0272 , C23C16/511 , Y10T428/31507
摘要： The invention concerns a method for treating a surface for the protection and functionalisation of polymers (4) by gas plasma deposit in a confined chamber (10) of one or several silicon alloy layers (43). The silicon alloy is selected among silicon and its oxides, nitrides, oxynitrides; the deposit is performed at a temperature less than the degradation temperature of the polymer, and a physico—chemical surface pre-treatment by plasma is performed in the same chamber before the silicon alloy is deposited; the pre-treatment consisting in a surface treatment comprising etching a surface zone of the polymer and step which consists in depositing a polymeric carbon compound.
摘要翻译： 本发明涉及一种用于通过在一个或几个硅合金层（43）的密闭室（10）中的气体等离子体沉积来处理表面以保护和官能化聚合物（4）的方法。 硅合金选自硅及其氧化物，氮化物，氮氧化物; 沉积物在低于聚合物的降解温度的温度下进行，并且在沉积硅合金之前，在相同的室内进行通过等离子体的物理化学表面预处理; 所述预处理组合在表面处理中，包括蚀刻所述聚合物的表面区域和包括沉积聚合物碳化合物的步骤。
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公开(公告)号：US06177995B1
公开(公告)日：2001-01-23
申请号：US09297202
申请日：1999-10-07
申请人： Eric Compain , Bernard Drevillon
发明人： Eric Compain , Bernard Drevillon
IPC分类号： G01J400
CPC分类号： G01J4/00
摘要： A polarimeter includes a prism (32) for separating the incident light beam (21) having a Stokes vector (S) into a reflected beam (22) and a transmitted beam (23), the prism not inducing any interferential effect and the transmitted beam being subjected to at least a reflection internal to the prism. The polarimeter also include two final separators (3, 4) for separating respectively each of the reflected beam and the transmitted beam into at least two final beams (25-28), detecting means (5-8) for measuring the intensity levels of the final beams and a processing unit (9) producing the Stokes vector of the light to be measured. Preferably, the reflections internal to the prism (32) are either total reflections, or reflections on a thick absorbing layer. The invention also includes a method for measuring light beam polarization states.
摘要翻译： 偏振计包括用于将具有斯托克斯矢量（S）的入射光束（21）分离成反射光束（22）和透射光束（23）的棱镜（32），棱镜不产生任何干涉效应，而透射光束 至少经受棱镜内部的反射。 偏振计还包括两个最终分离器（3,4），用于分别将每个反射光束和透射光束分离成至少两个最终光束（25-28）;检测装置（5-8），用于测量 最终光束和产生待测光的斯托克斯矢量的处理单元（9）。 优选地，棱镜（32）内部的反射是全反射或在厚吸收层上的反射。 本发明还包括一种测量光束偏振状态的方法。
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