公开(公告)号：US20100132467A1

公开(公告)日：2010-06-03

申请号：US12509360

申请日：2009-07-24

Applicant: Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

Inventor： Sang Choon Ko ,  Chi Hoon Jun ,  Byoung Gon Yu ,  Chang Auck Choi

IPC: G01P15/125 ,  H01L21/306

CPC classification number: G01P15/0802 ,  G01H11/06 ,  G01P1/023 ,  G01P15/125 ,  H04R19/005

Abstract: Provided is a high-sensitivity MEMS-type z-axis vibration sensor, which may sense z-axis vibration by differentially shifting an electric capacitance between a doped upper silicon layer and an upper electrode from positive to negative or vice versa when center mass of a doped polysilicon layer is moved due to z-axis vibration. Particularly, since a part of the doped upper silicon layer is additionally connected to the center mass of the doped polysilicon layer, and thus an error made by the center mass of the doped polysilicon layer is minimized, it may sensitively respond to weak vibration of low frequency such as seismic waves. Accordingly, since the high-sensitivity MEMS-type z-axis vibration sensor sensitively responds to a small amount of vibration in a low frequency band, it can be applied to a seismograph sensing seismic waves of low frequency which have a very small amount of vibration and a low vibration speed. Moreover, since the high-sensitivity MEMS-type z-axis vibration sensor has a higher vibration sensibility than MEMS-type z-axis vibration sensor of the same size, it can be useful in electronic devices which are gradually decreasing in size.

Abstract translation: 提供了一种高灵敏度的MEMS型z轴振动传感器，其可以通过将掺杂的上硅层和上电极之间的电容从正向或者反向偏移来感测z轴振动，当中心质量为 掺杂多晶硅层由于z轴振动而移动。 特别地，由于掺杂的上硅层的一部分另外连接到掺杂多晶硅层的中心质量块，因此由掺杂多晶硅层的中心质量造成的误差最小化，可以敏感地响应低的振动弱 频率如地震波。 因此，由于高灵敏度的MEMS型z轴振动传感器对低频带中的少量振动敏感地作出响应，因此可以应用于地震仪中，以便感测具有极小振动频率的低频地震波 和低振动速度。 此外，由于高灵敏度的MEMS型z轴振动传感器具有比相同尺寸的MEMS型z轴振动传感器更高的振动灵敏度，所以在逐渐减小的电子设备中是有用的。

公开(公告)号：US20080233752A1

公开(公告)日：2008-09-25

申请号：US11927810

申请日：2007-10-30

Applicant: Sang-Choon KO ,  Chi-Hoon JUN ,  Hyeon-Bong PYO ,  Seon-Hee PARK

Inventor： Sang-Choon KO ,  Chi-Hoon JUN ,  Hyeon-Bong PYO ,  Seon-Hee PARK

IPC: H01L21/306

CPC classification number: B81C1/00801 ,  B81C2201/0133 ,  B81C2201/0136

Abstract: Provided is a method for manufacturing a floating structure of a MEMS. The method for manufacturing a floating structure of a microelectromechanical system (MEMS), comprising the steps of: a) forming a sacrificial layer including a thin layer pattern doped with impurities on a substrate; b) forming a support layer on the sacrificial layer; c) forming a structure to be floated on the support layer by using a subsequent process; d) forming an etch hole exposing both side portions of the thin layer pattern; and e) removing the sacrificial layer through the etch hole to form an air gap between the support layer and the substrate.

Abstract translation: 提供了一种用于制造MEMS的浮动结构的方法。 一种用于制造微机电系统（MEMS）的浮动结构的方法，包括以下步骤：a）在衬底上形成包含掺杂有杂质的薄层图案的牺牲层; b）在牺牲层上形成支撑层; c）通过使用随后的方法形成浮在支撑层上的结构; d）形成暴露薄层图案的两侧部分的蚀刻孔; 以及e）通过所述蚀刻孔去除所述牺牲层，以在所述支撑层和所述基底之间形成气隙。

公开(公告)号：US08319397B2

公开(公告)日：2012-11-27

申请号：US12862577

申请日：2010-08-24

Applicant: Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

Inventor： Sang Choon Ko ,  Chang Han Je ,  Ho Jun Ryu ,  Sung Sik Lee ,  Chi Hoon Jun

IPC: H01L41/08

CPC classification number: H01L41/1138 ,  B60C23/0411 ,  H01L41/1136 ,  H02N2/186

Abstract: Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.

Abstract translation: 提供了一种应用于轮胎压力监测系统（TPMS）的无线传感器网络系统的小型压电发电机，用于监测轮胎的内部环境，例如轮胎中的空气压力的变化。 特别地，当安装在轮胎中的气压，温度和加速度传感器的系统在用于汽车的TPMS中运行时，用于TPMS的小压电发电机可以用作电源来代替 常规电池。 压电发电机包括具有用于向外部传输电力的电极的基板，形成在基板上的金属板，以及设置在金属板上并将由压电材料产生的电力传递到电极的压电体。

公开(公告)号：US08047074B2

公开(公告)日：2011-11-01

申请号：US12617701

申请日：2009-11-12

Applicant: Chi Hoon Jun ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

Inventor： Chi Hoon Jun ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

IPC: G01N27/12

CPC classification number: G01N27/121

Abstract: Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.

Abstract translation: 提供了一种湿度传感器及其制造方法。 湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。 此外，对于湿度传感器，湿度敏感层可以由各种材料形成。 湿度传感器可以大规模制造。 湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫 并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极 衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为 用作参考温度来控制加热器的加热温度。

公开(公告)号：US20100147070A1

公开(公告)日：2010-06-17

申请号：US12617701

申请日：2009-11-12

Applicant: Chi Hoon JUN ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

Inventor： Chi Hoon JUN ,  Sang Choon Ko ,  Chang Auck Choi ,  Byoung Gon Yu

IPC: G01N19/10 ,  B05D5/12 ,  B44C1/22

CPC classification number: G01N27/121

Abstract: Provided are a humidity sensor and a method of manufacturing the same. The humidity sensor has high sensitivity, quick response time, improved temperature characteristics, low hysteresis and excellent durability. Moreover, for the humidity sensor, a humidity sensitive layer may be formed of various materials. The humidity sensor may be manufactured in a small size on a large scale.The humidity sensor includes a substrate, an open cavity with an open upper portion formed to have a depth and a width in the substrate, a plurality of electrode pads formed on the substrate, a heater connected to one pad of the electrode pads at one end, and connected to another pad of the electrode pads at the other end to be suspended over the open cavity, a plurality of sensing electrodes formed on the same plane as the heater, and suspended over the open cavity to output a sensed signal to the electrode pads, a humidity sensitive layer formed on the heater and the sensing electrodes, suspended over the open cavity, and changed in characteristic according to the humidity, and an ambient temperature measurement part configured to measure the temperature around the humidity sensor, wherein the temperature is used as a reference temperature to control a heating temperature of the heater.

Abstract translation: 提供了一种湿度传感器及其制造方法。 湿度传感器灵敏度高，响应时间快，温度特性好，滞后小，耐久性好。 此外，对于湿度传感器，湿度敏感层可以由各种材料形成。 湿度传感器可以大规模制造。 湿度传感器包括基底，具有形成为在基底中具有深度和宽度的敞开上部的开口腔，形成在基底上的多个电极垫，一端连接到电极垫的一个垫 并且在另一端连接到电极焊盘的另一焊盘以悬挂在开放空腔上，多个感测电极形成在与加热器相同的平面上，并且悬挂在开放空腔上以将感测到的信号输出到电极 衬垫，形成在加热器上的湿度敏感层和悬挂在开放空腔上的感测电极，并且根据湿度改变特性;以及环境温度测量部件，被配置为测量湿度传感器周围的温度，其中温度为 用作参考温度来控制加热器的加热温度。

公开(公告)号：US20060055630A1

公开(公告)日：2006-03-16

申请号：US10941321

申请日：2004-09-15

Applicant: Tak Cheang ,  Fook Ng ,  Choon Ko ,  Choon Chew

Inventor： Tak Cheang ,  Fook Ng ,  Choon Ko ,  Choon Chew

IPC: G09G3/06

CPC classification number: H05B33/0872 ,  G01D7/005 ,  G01D11/28 ,  H05B33/0863 ,  H05B33/0869

Abstract: A display and method for displaying data are disclosed. The display includes a light source and a gauge that displays a quantity. The gauge is illuminated by the light source that has a color specified by a first control signal. A controller generates the first control signal based on the quantity such that the light source generates light of a first color if the quantity is within a first range and light of a second color if the quantity is in a second range. In one embodiment, the light source is characterized by an intensity specified by a second control signal, and the controller generates a second control signal based on the quantity such that the light intensity has a first intensity value when the quantity is in a third range and a second intensity value when the quantity is in a fourth range.

Abstract translation: 公开了一种用于显示数据的显示和方法。 显示器包括光源和显示数量的计量器。 仪表由具有由第一控制信号指定的颜色的光源照亮。 控制器基于该量产生第一控制信号，使得如果数量在第一范围内，则光源产生第一颜色的光，如果数量处于第二范围则产生第二颜色的光。 在一个实施例中，光源的特征在于由第二控制信号指定的强度，并且控制器基于该量产生第二控制信号，使得当光量处于第三范围内时，光强度具有第一强度值，并且 当量在第四范围内时的第二强度值。

公开(公告)号：US20050200315A1

公开(公告)日：2005-09-15

申请号：US10798130

申请日：2004-03-11

Applicant: Yin Kwong ,  Choon Ko ,  Chun Cheah

Inventor： Yin Kwong ,  Choon Ko ,  Chun Cheah

IPC: G02F1/13357 ,  G02B6/00 ,  G02F1/01 ,  G02F1/133 ,  G02F1/1335 ,  G05F1/00 ,  H01L33/00 ,  H05B37/02

CPC classification number: H05B33/0869 ,  Y02B20/341

Abstract: Light is mixed within a mixing cavity. Light is transported from the mixing cavity, through an optical cable, to a color sensor. The transported light is sampled by the color sensor. Light color within the mixing cavity is controlled based on information from the transported light sampled by the color sensor.

Abstract translation: 光在混合腔内混合。 光通过光缆从混合腔输送到颜色传感器。 运送的光线由彩色传感器采样。 基于由颜色传感器采样的传输光的信息来控制混合腔内的光色。

公开(公告)号：US07963147B2

公开(公告)日：2011-06-21

申请号：US11951986

申请日：2007-12-06

Applicant: Chi-Hoon Jun ,  Sang-Choon Ko ,  Hyeon-Bong Pyo ,  Seon-Hee Park

Inventor： Chi-Hoon Jun ,  Sang-Choon Ko ,  Hyeon-Bong Pyo ,  Seon-Hee Park

IPC: G01N7/00 ,  G01N27/12

CPC classification number: G01N27/128

Abstract: Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.

Abstract translation: 提供一种微气体传感器，用于测量构成为实现气敏感层的高加热和冷却速度的气体浓度，实现温度均匀性，并且实现耐热冲击和机械冲击的耐久性; 以及微气体传感器的制造方法。 微气体传感器包括：设置在基板中的真空腔; 覆盖真空腔的支撑层; 密封层，密封支撑层和真空腔; 设置在密封层上的微加热器; 设置在微加热器上的多个电极，与微加热器绝缘; 以及覆盖电极的气敏层。

公开(公告)号：US20090188110A1

公开(公告)日：2009-07-30

申请号：US12414595

申请日：2009-03-30

Applicant: Seok Hwan Moon ,  Ho Gyeong Yun ,  Sang Choon Ko ,  Gunn Hwang ,  Tae Goo Choy ,  Chi Hoon Jun ,  Youn Tae Kim

Inventor： Seok Hwan Moon ,  Ho Gyeong Yun ,  Sang Choon Ko ,  Gunn Hwang ,  Tae Goo Choy ,  Chi Hoon Jun ,  Youn Tae Kim

IPC: B21D53/02

CPC classification number: B23P15/26 ,  B21C23/085 ,  B21C37/151 ,  B21C37/155 ,  B23P2700/09 ,  F28D15/0233 ,  F28D2015/0225 ,  F28F1/022 ,  H01L23/427 ,  H01L2924/0002 ,  Y10T29/49353 ,  H01L2924/00

Abstract: A method for fabricating a metal micro heat pipe with a polygonal cross-section to allow working fluid to flow by capillary force generated at edges of the polygonal of the micro heat pipe. The polygonal cross-section is formed of a single metal layer via a single drawing process. The micro heat pipe is formed of a single metal plate.

Abstract translation: 一种用于制造具有多边形横截面的金属微热管的方法，以允许工作流体通过在微热管的多边形的边缘处产生的毛细管力流动。 多边形横截面通过单个拉丝工艺由单个金属层形成。 微热管由单个金属板形成。

公开(公告)号：US20050242742A1

公开(公告)日：2005-11-03

申请号：US10836469

申请日：2004-04-30

Applicant: Tak Cheang ,  Fook Ng ,  Choon Ko ,  Choon Chew

Inventor： Tak Cheang ,  Fook Ng ,  Choon Ko ,  Choon Chew

IPC: H05B33/08 ,  H05B37/02

CPC classification number: H05B33/086 ,  H05B33/0869 ,  H05B33/0872

Abstract: An LED-based light system includes a primary light source and at least one redundant light source. The primary light source is activated by itself and the performance of the light source is measured to determine whether nor not to drive the redundant light source. The redundant light source is activated when the performance measurements indicate that a performance characteristic is not being met by the primary light source alone. The first light system can be activated in combination with the redundant light source once the decision is made to activate the redundant light source.

Abstract translation: 基于LED的光系统包括主光源和至少一个冗余光源。 主光源本身被激活，并且测量光源的性能以确定是否驱动冗余光源。 当性能测量表明单独的主光源不能满足性能特性时，冗余光源被激活。 一旦决定激活冗余光源，第一个光系统可以与冗余光源组合激活。